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11. 发明专利

JP2004247029A Cutting device and cutting method for photoresist master disk, method for manufacturing stamper, and method for manufacturing optical recording medium 审中-公开
标题翻译：照相机主盘的切割装置和切割方法，制造印章的方法和制造光记录介质的方法
公开(公告)号：JP2004247029A
公开(公告)日：2004-09-02
申请号：JP2003413572
申请日：2003-12-11
申请人： Tdk Corp , Tdk株式会社
发明人： TAKAHATA HIROAKI , KOYAKE HISASHI , KAWAGUCHI YUICHI
IPC分类号： G03F7/20 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To suppress a sudden fluctuation in an exposure state which occurs when cutting is performed at a high recording line speed.
SOLUTION: The device is provided with: a driving section 110 which rotates a photoresist master disk 200; a head section 120 which includes an objective lens 123 and irradiates the photoresist master disk 200 with a laser beam; and a wind barrier 103 which prevents the vibration of the head section 120 by shielding the side wind W and turbulence W' generated by rotation of the photoresist master disk 200. Even if the photoresist master disk 200 rotates at a high speed, the vibration of the head section 120 itself by the thus generated side wind W and turbulence W' hardly occurs. Consequently, the sudden change of the exposure state by the vibration of the head section 120 due to such wind is substantially prevented.
COPYRIGHT: (C)2004,JPO&NCIPI
摘要翻译：要解决的问题：抑制当以高记录线速度进行切割时发生的曝光状态的突然波动。解决方案：该装置设置有：旋转光致抗蚀剂母盘200的驱动部110; 头部120，其包括物镜123并且用激光束照射光致抗蚀剂母盘200; 以及防风罩103，其通过屏蔽侧风W和通过光致抗蚀剂母盘200的旋转产生的湍流W'来防止头部120的振动。即使光致抗蚀剂母盘200高速旋转，由此产生的侧风W和湍流W'的头部120本身几乎不发生。因此，基本上防止了由于这种风引起的头部120的振动引起的曝光状态的突然变化。版权所有（C）2004，JPO＆NCIPI

12. 发明专利

JP2004234776A Cutting method of photoresist original disk, and cutting device 审中-公开
公开(公告)号：JP2004234776A
公开(公告)日：2004-08-19
申请号：JP2003023579
申请日：2003-01-31
申请人： Tdk Corp , Tdk株式会社
发明人： TAKAHATA HIROAKI , KOYAKE HISASHI , KAWAGUCHI YUICHI
IPC分类号： G03F7/20 , G03F7/207 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To focus a laser beam for exposing correctly on a photosensitive material layer even when variation of focal position and deviation of optical parts are caused.
SOLUTION: This method is provided with a step in which a photoresist original disk 200 is irradiated with a laser beam La1 for exposing and a laser beam Lb1 for focussing, a step in which a focus state of the laser beam Lb1 for focussing is fixed in a state in which the laser beam La1 for exposing is focused on the photoresist original disk, and a step in which focussing variation of the laser beam La1 for exposing for the photoresist original disk 200 is detected and this variation is corrected automatically. Thereby, fine and manual focussing adjustment is not required during cutting so that a burden of a worker is reduced remarkably while work efficiency can be improved greately.
COPYRIGHT: (C)2004,JPO&NCIPI

13. 发明专利

JP2003272249A Manufacturing method of stamper for manufacturing information medium, stamper and photoresist master disk 审中-公开
标题翻译：用于制造信息中心，冲压器和光电主机的打印机的制造方法
公开(公告)号：JP2003272249A
公开(公告)日：2003-09-26
申请号：JP2003001517
申请日：2003-01-07
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI , YONEYAMA KENJI , KAWAGUCHI YUICHI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To obtain a stamper on which a sharp rugged pattern is formed and to manufacture an information medium of high precision by using the stamper.
SOLUTION: A light absorbing layer 103 having film thickness T of T>180 nm and a photoresist layer 104 are formed on a substrate 102 in this order, a latent image is formed in the photoresist layer 104 and then is developed to form the rugged pattern 106. Thus a photoresist master disk 100 is manufactured and further a Ni thin film 108 is formed on the rugged pattern 106 in the photoresist master disk 100 by electroless plating, a Ni film 110 is formed on the Ni thin film 108 by electroforming and then the Ni thin film 108 and the Ni film 110 are exfoliated from the photoresist master disk 100 to manufacture the stamper 120.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：为了获得形成有尖锐的凹凸图案的压模，并且通过使用压模来制造高精度的信息介质。解决方案：在衬底102上依次形成具有T> 180nm的膜厚度T和光致抗蚀剂层104的光吸收层103，在光致抗蚀剂层104中形成潜像，然后显影形成凹凸图案106.因此，制造光致抗蚀剂母盘100，并且还通过化学镀在光致抗蚀剂母盘100中的凹凸图案106上形成Ni薄膜108，通过在Ni薄膜108上形成Ni薄膜110 然后电铸，然后Ni薄膜108和Ni薄膜110从光致抗蚀剂母盘100剥离以制造压模120.版权所有（C）2003，JPO

14. 发明专利

JP2007141424A Manufacturing method and manufacturing device of optical recording medium 有权
标题翻译：光学记录介质的制造方法和制造装置
公开(公告)号：JP2007141424A
公开(公告)日：2007-06-07
申请号：JP2006135074
申请日：2006-05-15
申请人： Tdk Corp , Tdk株式会社
发明人： SATO YUZO , KOZU TSUTOMU , YOKOGAWA MINORU , HARANO MITSUYOSHI , USHITA TOMOKI , USAMI MAMORU , TAKAHATA HIROAKI
IPC分类号： G11B7/26 , G11B7/24
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of optical recording media which forms cover layers of excellent form while keeping a cost low and is high in reliability, and also provide a manufacturing device thereof. SOLUTION: A disk-shaped substrate 12 having a center pore 12A is nearly horizontally placed, and a circular film 18, whose external diameter is larger than the diameter of the center pore 12A of the substrate 12 and smaller than the inner diameter of a recording area Ar, is concentrically placed on the substrate 12 so that the center pore 12A may be blockaded. In addition, the circular film 18 is held by sucking at its under surface, through the center pore 12A of the substrate 12, with a sucking device 16 having many sucking pores on its nearly flat upper surface part 16A, and a radiation setting type resin material 22 is supplied, with its flowing state, onto the circular film 18, and the substrate 12 and the circular film 18 are rotated to make the resin material 22 flow toward the outer side in the radial direction by a centrifugal force to consequently spread the resin material 22 on the substrate 12. Then, the circular film 18 is exfoliated from the substrate 12, and the substrate 12 is irradiated with a radiation to harden the resin material 22. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种光学记录介质的制造方法，其形成具有优异形式的盖层，同时保持低成本且高可靠性，并且还提供其制造装置。解决方案：具有中心孔12A的盘状基板12几乎水平放置，并且外径大于基板12的中心孔12A的直径并小于内径的圆形膜18 记录区域Ar同心地放置在基板12上，使得中心孔12A可能被封闭。此外，通过在基板12的中心孔12A的下表面上吸附圆形膜18，在其近似平坦的上表面部16A上具有吸引装置16，吸附装置16具有许多吸气孔，并且辐射定型树脂将材料22以其流动状态供给到圆形膜18上，并且基板12和圆形膜18旋转以使树脂材料22通过离心力沿径向向外侧流动，从而将然后，从基板12剥离圆形薄膜18，照射基板12以使树脂材料22硬化。（C）2007，JPO＆INPIT

15. 发明专利

JP2006024245A Rom type optical recording medium and stamper for manufacturing rom type optical recording medium 审中-公开
标题翻译： ROM型光学记录介质和制造ROM型光学记录介质的冲压器
公开(公告)号：JP2006024245A
公开(公告)日：2006-01-26
申请号：JP2004199192
申请日：2004-07-06
申请人： Tdk Corp , Tdk株式会社
发明人： KOYAKE HISASHI , TAKAHATA HIROAKI
IPC分类号： G11B7/24 , G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a ROM type optical recording medium capable of desirably forming pits in the surface of a substrate and obtaining a reproducing signal having satisfactory signal characteristics. SOLUTION: The ROM type optical recording medium provided with a substrate 2 having a plurality of recessed pits 2a spirally formed from one side of an inner peripheral side and an outer peripheral side toward the other side in the surface thereof and a light transmission layer 4 formed on the substrate 2 and irradiated with a laser beam via the light transmission layer 4 for reproducing data is characterized in that an inclined angle θ1 of a side surface of the recessed pit 2a positioned on the outer peripheral side is made smaller than an inclined angle θ2 of a side surface of the recessed pit 2a positioned on the inner peripheral side. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够期望地在衬底的表面中形成凹坑并获得具有令人满意的信号特性的再现信号的ROM型光学记录介质。解决方案：ROM型光学记录介质设置有基板2，该基板2具有从表面的内周侧的一侧和外周侧朝向另一侧螺旋地形成的多个凹坑2a，以及透光性形成在基板2上并通过用于再现数据的光透射层4照射激光束的层4的特征在于使位于外周侧的凹坑2a的侧表面的倾斜角θ1小于位于内周侧的凹坑2a的侧面的倾斜角度θ2。版权所有（C）2006，JPO＆NCIPI

16. 发明专利

JP2009123318A Imprinting method, method of manufacturing information recording medium, and imprinting system 有权
标题翻译：印刷方法，制造信息记录介质的方法和印刷系统
公开(公告)号：JP2009123318A
公开(公告)日：2009-06-04
申请号：JP2008190975
申请日：2008-07-24
申请人： Tdk Corp , Tdk株式会社
发明人： FUJITA MINORU , ISHIYAMA SHIGEKI , KUROKAWA SATOSHI , TAKAHATA HIROAKI
IPC分类号： G11B5/84 , B29C59/02 , B29L17/00 , G11B5/855
摘要： PROBLEM TO BE SOLVED: To provide an imprinting method which is capable of forming desired irregular patterns on opposite surfaces of a substrate with high accuracy while making it possible to easily peel both stampers off the substrate after completion of a pressing process. SOLUTION: When one stamper A formed with one irregular pattern A and the other stamper B formed with the other irregular pattern B are pressed against one and the other surfaces of a substrate 70 to form an irregular pattern C reverse to the irregular pattern A and an irregular pattern D reverse to the irregular pattern B in concave/convex positional relationship on both surfaces of the substrate 70, stampers 50A1a and 50B1a which have similar shapes in plan view and plane areas larger than that of the substrate 70 are used as the stampers A and B and pressed against both surfaces of the substrate 70, such that at least a part of an outer periphery of the stamper 50B1a does not overlap the stamper 50A1a in a direction of a thickness of the substrate 70. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够以高精度在基板的相对表面上形成期望的不规则图案的压印方法，同时使得可以在完成压制工艺之后容易地将两个印模从所述基板剥离。解决方案：当形成有一个不规则图案A的一个压模A和形成有另一个不规则图案B的另一个压模B被压在基板70的一个和另一个表面上以形成与该不规则图案相反的不规则图案 A和与基板70的两个表面上的凹凸位置关系中的不规则图案B相反的不规则图案D，在平面图中具有类似形状的平台和具有比基板70的尺寸大的平面面积的冲压机50A1a和50B1a被用作压模A和B并压靠在基板70的两个表面上，使得压模50B1a的外周的至少一部分在基板70的厚度方向上不与压模50A1a重叠。（C）2009，JPO＆INPIT

17. 发明专利

JP2007073124A Method and device for manufacturing optical recording medium 审中-公开
标题翻译：用于制造光学记录介质的方法和装置
公开(公告)号：JP2007073124A
公开(公告)日：2007-03-22
申请号：JP2005258338
申请日：2005-09-06
申请人： Tdk Corp , Tdk株式会社
发明人： SATO YUZO , KOZU TSUTOMU , HARANO MITSUYOSHI , USAMI MAMORU , USHITA TOMOKI , TAKAHATA HIROAKI
IPC分类号： G11B7/26
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing an optical recording medium capable of forming a cover layer with a uniform thickness so as to prevent the generation of burrs or peeling.
SOLUTION: A radiation curable resin material 18 is supplied annularly around a center hole 12 on a substrate 14 in a flowing state, a translucent circular covering member 20 having a center hole 22A, formed into a circular plate shape, and having an outer diameter smaller than the inner diameter of a recording area Ar is moved and mounted onto the resin material 18, the substrate 14 and the circular covering member 20 are rotated to make the resin material 18 flow outside in the radial direction by a centrifugal force to spread on the substrate 14, and a radiation ray is irradiated to the substrate 14 to harden the resin material 18, and then the circular covering member 20 is peeled off.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决的问题：提供一种能够形成均匀厚度的覆盖层的光学记录介质的制造方法和装置，以防止产生毛刺或剥离。解决方案：辐射固化树脂材料18以流动状态环绕在基板14上的中心孔12周围，具有形成为圆板形状的中心孔22A的半透明圆形覆盖部件20，并且具有将小于记录区域Ar的内径的外径移动并安装在树脂材料18上，使基板14和圆形覆盖部件20转动，使树脂材料18通过离心力向径向外侧流动扩散在基板14上，并且将辐射线照射到基板14以使树脂材料18硬化，然后将圆形覆盖部件20剥离。版权所有（C）2007，JPO＆INPIT

18. 发明专利

JP2004264380A Method for forming resist pattern and resist pattern forming apparatus 审中-公开
公开(公告)号：JP2004264380A
公开(公告)日：2004-09-24
申请号：JP2003052401
申请日：2003-02-28
申请人： Tdk Corp , Tdk株式会社
发明人： KAWAGUCHI YUICHI , TAKAHATA HIROAKI , KOYAKE HISASHI
IPC分类号： G03F7/11 , G03F7/00 , G03F7/095 , G03F7/20 , G03F7/30 , G11B7/26
CPC分类号： G03F7/095 , G03F7/0015 , G03F7/11 , G11B7/261
摘要： PROBLEM TO BE SOLVED: To provide a method for forming a resist pattern by which a recessed part in a resist pattern can be formed to a desired depth by using an exposure beam at a short wavelength.
SOLUTION: The method for forming a resist pattern is carried out by forming a resin layer 22 containing a benzophenone-based compound on the surface of a glass substrate 21, forming a photoresist layer 23 on the surface of the resin layer 22, irradiating the photoresist layer 23 with a laser beam at a wavelength of ≥100 nm and ≤300 nm to form a latent image, developing the photoresist layer 23 having the latent image formed to form a resist pattern with projections and recesses in the photoresist layer 23.
COPYRIGHT: (C)2004,JPO&NCIPI

19. 发明申请

WO02069336A3 METHOD FOR PRODUCING PHOTORESIST MASTER FOR OPTICAL INFORMATION MEDIUM, AND METHOD FOR PRODUCING STAMPER FOR OPTICAL INFORMATION MEDIUM 审中-公开
标题翻译：用于生产用于光学信息介质的光电主机的方法和用于生产用于光信息介质的冲压器的方法
公开(公告)号：WO02069336A3
公开(公告)日：2003-04-03
申请号：PCT/JP0201720
申请日：2002-02-26
申请人： TDK CORP
发明人： OYAKE HISAJI , TAKAHATA HIROAKI
IPC分类号： G11B7/26
CPC分类号： G11B7/261
摘要： A method for producing a photoresist master adapted for use in the manufacture of an optical information medium is provided. This method has enabled formation of a fine pattern having a minimum width which is about half of the wavelength used for the exposure, and in this method, decrease in the pattern height has been suppressed and tapering of the pattern profile has been improved. In this method comprising the steps of applying a photoresist layer on a substrate, exposing the photoresist laxer to a laser beam to form a latent image to form a protrusion/depression pattern to thereby produce the photoresist master, and in this method; a light absorbing layer is formed between the substrate and the photoresist layer and in contact with the photoresist layer exhibits light absorption at the wavelength of said laser beam.
摘要翻译：提供了一种适用于制造光学信息介质的光致抗蚀剂母版的制造方法。该方法能够形成具有用于曝光的波长的约一半的最小宽度的精细图案，并且在该方法中，已经抑制了图案高度的减小并且图案轮廓的逐渐变细。在该方法中，包括以下步骤：在衬底上施加光致抗蚀剂层，将光致抗蚀剂放大器暴露于激光束以形成潜像以形成突起/凹陷图案从而产生光致抗蚀剂母版，并且在该方法中; 在基板和光致抗蚀剂层之间形成光吸收层，并且与光致抗蚀剂层接触的光吸收层在所述激光束的波长处表现出光吸收。

20. 发明专利

DE60208943D1 未知
公开(公告)号：DE60208943D1
公开(公告)日：2006-04-13
申请号：DE60208943
申请日：2002-03-25
申请人： TDK CORP
发明人： KAWAGUCHI YUUICHI , YAMAGA KENJI , TAKAHATA HIROAKI , OYAKE HISAJI , SAKAI YOSHIMI
IPC分类号： B29C45/26
摘要： A stamper(208) for forming a data recording region on a recording medium substrate(12) by means of a transfer surface(212) thereof. The transfer surface (212) transfers a predetermined set of data to the recording medium substrate(12). The stamper(208) is fitted on at least one of metal molds(204), (206) that are arranged opposite one another for forming the recording medium substrate(12). The stamper(208) includes a stepped portion(214) formed as bends in the material of the stamper(208). The stepped portion(214) is configured to project from the transfer surface (212) toward the recording medium substrate(12).

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