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11. 发明授权

US06621033B2 Electrical discharge machining apparatus 有权
标题翻译：放电加工机
公开(公告)号：US06621033B2
公开(公告)日：2003-09-16
申请号：US09773559
申请日：2001-02-02
申请人： Tatsushi Sato , Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
发明人： Tatsushi Sato , Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
IPC分类号： B23H104
CPC分类号： B23H1/06 , B23H1/04 , Y10T29/4921 , Y10T428/1216
摘要： A layered anisotropically conductive element, a resistant element, and a feed element constitute an electrode for discharge machining. The layered anisotropically conductive element includes high conductivity layers and low conductivity layers alternately laminated on each other, the high conductivity layers and the low conductivity layers being made of thin metallic plates coated with an insulating film. The layered anisotropically conductive element has an anisotropic conductivity, in which the conductivity in a direction parallel to the low conductivity layers is much higher than that in a direction perpendicular to the low conductivity layers. The resistant element is connected to one of end surfaces of the layered anisotropically conductive element perpendicular to the layers. The feed element is connected to the resistant element.
摘要翻译：层状各向异性导电元件，电阻元件和馈电元件构成用于放电加工的电极。层状各向异性导电元件包括彼此交替层叠的高导电性层和低电导率层，高导电性层和低电导率层由涂覆有绝缘膜的薄金属板制成。层状各向异性导电元件具有各向异性导电性，其中平行于低电导率层的方向上的导电率远高于垂直于低电导率层的方向上的导电率。电阻元件连接到垂直于层的层状各向异性导电元件的端面之一。馈电元件连接到电阻元件。

12. 发明授权

US09950379B2 Wire electric discharge machining apparatus 有权
公开(公告)号：US09950379B2
公开(公告)日：2018-04-24
申请号：US13498013
申请日：2010-06-23
申请人： Hidetaka Miyake , Tatsushi Sato , Kazuhiko Fukushima
发明人： Hidetaka Miyake , Tatsushi Sato , Kazuhiko Fukushima
IPC分类号： B23H7/10 , B23H1/02 , B23H7/02 , B23H9/00 , B23H11/00
CPC分类号： B23H1/028 , B23H7/02 , B23H7/101 , B23H7/107 , B23H9/00 , B23H11/006
摘要： A wire electric discharge machining apparatus is constructed in such a manner as to include: a wire electrode having a plurality of cutting wire portions that are separated from one another in parallel and are opposed to a workpiece; a machining power supply that generates a pulsed machining voltage; a plurality of power feed contact units that are electrically connected to the cutting wire portions and apply the machining voltage between the cutting wire portions and the workpiece; and a nozzle that ejects machining liquid from an ejection opening toward an electrode gap along the cutting wire portions.

13. 发明授权

US09387548B2 Wire-cut electrical discharge machining apparatus and semiconductor wafer manufacturing method 有权
标题翻译：线切割放电加工装置及半导体晶片的制造方法
公开(公告)号：US09387548B2
公开(公告)日：2016-07-12
申请号：US13988676
申请日：2011-05-18
申请人： Hidetaka Miyake , Tatsushi Sato , Kazuhiko Fukushima
发明人： Hidetaka Miyake , Tatsushi Sato , Kazuhiko Fukushima
IPC分类号： B23H7/10 , B23H1/02 , B23H7/06 , B28D5/04 , B23H7/02
CPC分类号： B23H7/10 , B23H1/028 , B23H7/02 , B23H7/065 , B23H7/105 , B28D5/045
摘要： In wire-cut electrical discharge machining apparatuses that simultaneously perform a plurality of cutting processes by engaging a wire between main guide rollers at a plurality of times, a wire-cut electrical discharge machining apparatus is provided that suppresses vibrations at cutting wire sections, to enable the cutting processes under steady-state accuracy. In addition to the main guide rollers, vibration-damping driven guide rollers or vibration-damping guides are included which form a plurality of cutting wire sections where the vibrations are suppressed by guiding the wire into place, and the positions of the cutting wire sections are thereby defined with respect to nozzles.
摘要翻译：在多次通过在主引导辊之间接合线同时进行多次切割处理的线切割放电加工装置中，提供了一种线切割放电加工装置，其抑制切割线部分的振动，从而能够切割过程在稳态精度下。除了主导辊外，还包括形成多个切割线部分的减振驱动的导向辊或减振导轨，其中通过将导线引导到位而抑制振动，切割线部分的位置为从而相对于喷嘴限定。

14. 发明申请

US20140332503A1 WIRE ELECTRIC-DISCHARGE MACHINING DEVICE, WIRE ELECTRIC-DISCHARGE MACHINING METHOD, THIN-PLATE MANUFACTURING METHOD, AND SEMICONDUCTOR WAFER MANUFACTURING METHOD 有权
标题翻译：电线放电加工装置，电力放电加工方法，薄板制造方法和半导体制造方法
公开(公告)号：US20140332503A1
公开(公告)日：2014-11-13
申请号：US14364188
申请日：2012-12-17
申请人： Atsushi Itokazu , Hidetaka Miyake
发明人： Atsushi Itokazu , Hidetaka Miyake
IPC分类号： B23H7/06 , B23H7/10
CPC分类号： B23H7/06 , B23H1/028 , B23H7/02 , B23H7/10
摘要： A wire electric-discharge machining device includes a control unit that selects a cutting wire to which a pulse voltage is applied by a pulse-voltage generation unit on a basis of an angle formed between an end face of a workpiece and a plane including a plurality of cutting wires, which are not parallel to the end face, an interval between parallel cutting wires, and a relative distance between the cutting wires and the workpiece. A drive unit drives a workpiece in a direction not vertical to the plane including the cutting wires, and the workpiece is cut by electric-discharge machining by applying a pulse voltage.
摘要翻译：线放电加工装置包括：控制单元，其基于在工件的端面和包括多个的工件的平面之间形成的角度来选择由脉冲电压产生单元施加脉冲电压的切割线切割线不平行于端面，平行切割线之间的间隔以及切割线和工件之间的相对距离。驱动单元在不垂直于包括切割线的平面的方向上驱动工件，并且通过施加脉冲电压通过放电加工来切割工件。

15. 发明申请

US20130043217A1 WORKPIECE RETAINER, WIRE ELECTRIC DISCHARGE MACHINING DEVICE, THIN-PLATE MANUFACTURING METHOD, AND SEMICONDUCTOR-WAFER MANUFACTURING METHOD 有权
标题翻译：工作保持器，电线放电加工装置，薄板制造方法和半导体制造方法
公开(公告)号：US20130043217A1
公开(公告)日：2013-02-21
申请号：US13695716
申请日：2011-03-23
申请人： Takashi Yuzawa , Hidetaka Miyake , Tatsushi Sato , Atsushi Itokazu
发明人： Takashi Yuzawa , Hidetaka Miyake , Tatsushi Sato , Atsushi Itokazu
IPC分类号： B23H1/00
CPC分类号： B23H11/003 , B23H7/02 , B23H9/00
摘要： A workpiece retainer retains a workpiece at a time of a cutting process by a wire electric discharge machining device that cuts a workpiece by electric discharge from wire electrodes that are spaced from each other and are arranged in parallel. The workpiece retainer is formed with a fitting portion, into which the workpiece is fitted substantially without any gap, and has an external shape such that at a time of cutting the workpiece retainer together with the workpiece fitted in the fitting portion, a length along the wire electrodes of a portion where the workpiece retainer and the workpiece face the wire electrodes becomes substantially constant during the cutting process of the workpiece.
摘要翻译：工件保持器通过线电火花加工装置在切割加工时保持工件，该线材放电加工装置通过从彼此间隔开并且平行布置的线电极放电而切割工件。工件保持器形成有嵌合部，工件基本上没有任何间隙地装配在该嵌合部中，并且具有外部形状，使得在与被安装在装配部中的工件一起切割工件保持器时，沿着工件保持器和工件面对线电极的部分的线电极在工件的切割过程中变得基本恒定。

16. 发明申请

US20110092053A1 WIRE DISCHARGE-MACHINING APPARATUS AND WIRE DISCHARGE-MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING APPARATUS AND SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR-CELL WAFER MANUFACTURING APPARATUS AND SOLAR-CELL WAFER MANUFACTURING METHOD 有权
标题翻译：电线放电加工装置和线放电加工方法，半导体制造装置和半导体制造方法以及太阳能电池制造装置和太阳能电池制造方法
公开(公告)号：US20110092053A1
公开(公告)日：2011-04-21
申请号：US12999106
申请日：2009-06-16
申请人： Hidetaka Miyake , Tatsushi Sato
发明人： Hidetaka Miyake , Tatsushi Sato
IPC分类号： H01L21/78 , B23H7/02
CPC分类号： B23H7/02 , B23H1/028 , B23H7/08 , B23H7/10 , B23H7/107 , B23H9/00 , B23H11/006 , B28D5/045
摘要： A wire machining method includes: a wire electrode set as cutting wires provided in parallel with a distance between the cutting wires of which a predetermined regional part faces a workpiece; a machining power source that generates a pulse-shaped machining voltage; and plural feeder units that are electrically connected to the plural cutting wires respectively of the wire electrode and supply the machining voltage between the cutting wires and the workpiece respectively. The feeder units are arranged such that a direction of a current passed to at least a part of the cutting wires becomes a direction different from a direction of a current passed to other cutting wires.
摘要翻译：线加工方法包括：线电极，其设置为与预定区域部分面对工件的切割线之间的距离平行设置的切割线; 产生脉冲状加工电压的加工电源; 以及多个馈电单元，其分别电连接到线电极的多个切割线，并分别在切割线和工件之间提供加工电压。馈送单元被布置成使得通过至少一部分切割线的电流的方向成为不同于传递到其它切割线的电流的方向的方向。

17. 发明授权

US06788019B2 Electric discharge machining device and electric discharge machining method 有权
标题翻译：放电加工装置和放电加工方法
公开(公告)号：US06788019B2
公开(公告)日：2004-09-07
申请号：US10130472
申请日：2002-05-20
申请人： Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
发明人： Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
IPC分类号： G05B1925
CPC分类号： B23H7/32 , B23H7/26 , B23H7/28 , B23H7/30 , B23H2400/10
摘要： An electric discharge machining apparatus is provided with an electrode mounting section which mounts a tool electrode, and an electrode driving section which has a radial driving section which supports and drives the electrode mounting section in a non-contact manner in a radial direction and a thrust driving section which supports and drives the electrode mounting section in a non-contact manner in a thrust direction, and a machining state is controlled by adjusting a position of the tool electrode by the electrode driving section. Because of such a structure, a mass increase of a section which should be driven together with the electrode is restricted, and high response in X-axis, Y-axis and Z-axis directions are achieved, whereby an electric discharge machining apparatus capable of improving a machining speed and a machining accuracy is achieved.
摘要翻译：放电加工装置设置有安装工具电极的电极安装部和电极驱动部，该电极驱动部具有径向驱动部，该径向驱动部以径向非接触的方式支撑并驱动电极安装部，推力驱动部，其在推力方向上以非接触方式支撑并驱动电极安装部，并且通过由电极驱动部调节工具电极的位置来控制加工状态。由于这样的结构，与电极一起驱动的部分的质量增加受到限制，并且实现了在X轴，Y轴和Z轴方向上的高响应性，从而可以实现能够提高加工速度和加工精度。

18. 发明授权

US06614234B1 Electric discharge machine 失效
标题翻译：放电机
公开(公告)号：US06614234B1
公开(公告)日：2003-09-02
申请号：US09653345
申请日：2000-08-31
申请人： Yoshihito Imai , Hidetaka Miyake , Takuji Magara , Akihiro Goto
发明人： Yoshihito Imai , Hidetaka Miyake , Takuji Magara , Akihiro Goto
IPC分类号： G01N2760
CPC分类号： B23H7/18
摘要： An electric discharge machine for machining a workpiece by an electric discharge by supplying a machining fluid to a gap between an electrode and the workpiece and supplying pulses to the workpiece while providing the electrode with a jump motion, the jump motion being a periodic motion of the electrode relative to the workpiece; wherein the electric discharge machine detects a state quantity caused in a main body of the electric discharge machine by a reactive force produced by a machining operation in the gap between the electrode and the workpiece and changes machining conditions of the workpiece in accordance with a detected value of the state quantity.
摘要翻译：一种放电机，用于通过向电极和工件之间的间隙提供加工流体，通过放电来加工工件，并且在向电极提供跳跃运动的同时向工件提供脉冲，跳跃运动是周期性运动电极相对于工件; 其特征在于，所述放电加工机通过在所述电极和所述工件之间的间隙中的加工操作产生的反作用力来检测在所述放电加工机的主体中产生的状态量，并根据检测值改变所述工件的加工条件的国家数量。

19. 发明授权

US5919380A Three-dimensional electrical discharge machining method and apparatus utilizing NC control 失效
标题翻译：采用NC控制的三维放电加工方法和装置
公开(公告)号：US5919380A
公开(公告)日：1999-07-06
申请号：US606978
申请日：1996-02-26
申请人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
发明人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
IPC分类号： B23H1/04 , B23H7/06 , B23H7/20 , B23H7/26 , B23H7/30 , B23H1/00 , B23H7/28
CPC分类号： B23H7/065 , B23H7/20 , B23H7/30 , B23H2400/10
摘要： To obtain high machining speed and machining accuracy in three-dimensional machining by using of an electrode of simple shape. Applying voltage between an electrode of simple shape and a workpiece, performing three-dimensional control by an NC control while synthesizing a feed of a Z-axis direction for correcting longitudinal consumed amount of an electrode with an X-Y plane feed, storing amount equivalent to an X-Y moving distance in an X-Y plane corresponding to correcting moving amount of the Z-axis direction in an electrical discharge machining method for machining a desired three-dimensional shape and performing a feed of correcting moving amount in the Z-axis direction each time a moving distance in the X-Y plane on a moving locus during machining reaches the above stored amount.
摘要翻译：通过使用简单形状的电极在三维加工中获得高加工速度和加工精度。在简单形状的电极和工件之间施加电压，在通过XY平面进给合成用于校正电极的纵向消耗量的Z轴方向的进给的同时，通过NC控制进行三维控制，相当于在用于加工所需三维形状的放电加工方法中对应于校正Z轴方向的移动量的XY平面中的XY移动距离，并且每次移动时执行Z轴方向上的校正移动量的馈送加工过程中移动轨迹上的XY平面上的距离达到上述存储量。

20. 发明授权

US5837957A Electric discharge machining apparatus 失效
标题翻译：放电加工机
公开(公告)号：US5837957A
公开(公告)日：1998-11-17
申请号：US807866
申请日：1997-02-26
申请人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
发明人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
IPC分类号： B23H1/04 , B23H1/06 , C04B35/52
CPC分类号： B23H1/04 , B23H1/06
摘要： An electric discharge machining apparatus in which at least either of a tool electrode or a workpiece is made of an anisotropic conductive material, includes, on a good conductive surface 20b of the anisotropic conductive material 2, a portion for connecting an isotropic conductive member 22. Electric discharge is generated on the good conductive surface 20b of the anisotropic conductive material 2. A conductive adhesive agent 23 is employed to bond the anisotropic conductive material 2 and the isotropic conductive member 22 to each other. The anisotropic conductive material is a pyrocarbon material. The pyrocarbon heat resolved carbon material is employed as a tool electrode material. Incombustible dielectric fluid, such as pure water, is employed as dielectric fluid. Moreover, there are provided apparatus for measuring voltage during electric discharge, apparatus for setting a threshold value for use to determine whether the electric discharge is normal electric discharge or abnormal electric discharge and apparatus for interrupting supply of a discharge current in a case where the measured discharge voltage is higher than the threshold value.
摘要翻译：一种放电加工装置，其中工具电极或工件中的至少一个由各向异性导电材料制成，在各向异性导电材料2的良导电表面20b上包括用于连接各向同性导电部件22的部分。在各向异性导电材料2的良好导电表面20b上产生放电。使用导电粘合剂23将各向异性导电材料2和各向同性导电构件22彼此接合。各向异性导电材料是热解碳材料。热解碳碳材料用作工具电极材料。不可燃介质流体，例如纯水，被用作介电流体。此外，还提供了用于在放电期间测量电压的装置，用于设定用于确定放电是正常放电还是异常放电的阈值的装置以及在所测量的情况下中断放电电流的供应的装置放电电压高于阈值。

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