会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 14. 发明授权
    • Method for producing glass thin film
    • 制造玻璃薄膜的方法
    • US5660611A
    • 1997-08-26
    • US463866
    • 1995-06-05
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • Shinji IshikawaAkira UranoHaruhiko AikawaChizai HiroseHiroo KanamoriMasahide Saitoh
    • C03B19/14C03C17/00C03C17/02C23C14/10C23C16/44C23C16/453C03B37/07C03C25/02
    • C03B19/1453C03B19/14C03B19/1415C03C17/001C03C17/02C23C14/10C23C16/44C23C16/453C03B2207/90
    • A method for producing an oxide glass thin film is provided, in which volatilization of additives in a porous film from which the thin film is formed is effectively suppressed, and which the oxide glass film has a desired arrangement of refractive index with a low optical loss. According to this method, glass fine particles mainly containing SiO.sub.2 with a first additive are deposited on a substrate to form a porous thin film. A gas containing a second additive is supplied to a first chamber and heated to a first predetermined temperature profile to provide a heated gas containing an oxide. After disposing the substrate in a second chamber communicated with the first chamber, the substrate is heated to make the deposited porous glass into transparent glass while controlling a temperature in the second chamber according to a second temperature profile. A carrier gas is flowed from the first chamber to the second chamber to transfer the heated gas and oxide from the first chamber to the second chamber during heating. The temperature of the first predetermined temperature profile is maintained higher than the temperature of the second predetermined temperature profile at the same time. In addition, the heated gas contains a component that is also present in the first additive.
    • 提供了一种制造氧化物玻璃薄膜的方法,其中有效地抑制了形成薄膜的多孔膜中的添加剂的挥发,并且氧化物玻璃薄膜具有期望的折射率排列,光损耗低 。 根据该方法,将主要含有SiO 2的第一添加剂的玻璃微粒子沉积在基板上,形成多孔薄膜。 将含有第二添加剂的气体供应到第一室并加热至第一预定温度分布,以提供含有氧化物的加热气体。 在将基板设置在与第一室连通的第二室中之后,基板被加热以使沉积的多孔玻璃成为透明玻璃,同时根据第二温度曲线控制第二室中的温度。 载气从第一室流到第二室,以在加热期间将加热的气体和氧化物从第一室转移到第二室。 第一预定温度曲线的温度同时保持高于第二预定温度曲线的温度。 此外,加热气体含有也存在于第一添加剂中的成分。