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11. 发明专利

JPH02148836A VACUUM PROCESSOR 失效
公开(公告)号：JPH02148836A
公开(公告)日：1990-06-07
申请号：JP30270188
申请日：1988-11-30
申请人： TOKYO ELECTRON LTD
发明人： SAEGUSA HIDEHITO
IPC分类号： H01L21/302 , B01J3/02 , C23F1/08 , H01L21/3065
摘要： PURPOSE:To prevent fatigue and deterioration of the diaphragm, etc. of a pressure sensor by releasing the opening/closing valve of the detection tube of a main switch when gas pressure in a processing chamber becomes a higher predetermined intermediate set value than the finally set value. CONSTITUTION:When a vacuum pump 51 is operated, discharge gas in a processing chamber flows into a discharge gas tube 49, is discharged from the pump 51 to the exterior, and the pressure in the chamber is reduced. In this case, while the gas pressure in the chamber is higher than 50Torr, opening/ closing valve 55 is closed by a pump auxiliary switch 58. When the gas pressure in the chamber becomes a set value such as 50Torr, the valve 55 is opened by the switch 58, and when the pressure in the chamber becomes 1.0X10 Torr, the pump 51 is stopped by a pump main switch 57. Accordingly, fatigue and deterioration of the diaphragm, etc. of a pressure sensor contained in the switch 57 are prevented, and the detected value of the switch 57 is not deviated from 1.0X10 Torr.

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