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    • 15. 发明授权
    • Wafer based optical interconnect
    • 基于晶圆的光互连
    • US07720337B2
    • 2010-05-18
    • US12004541
    • 2007-12-20
    • Daoqiang LuHenning Braunisch
    • Daoqiang LuHenning Braunisch
    • G02B6/36
    • G02B6/4231
    • In general, in one aspect, a method includes forming conductive layers on a wafer. A through cavity is formed in alignment with the conductive layers. The through cavity is to permit an optical signal from an optical waveguide within an optical connector to pass therethrough. Alignment holes are formed on each side of the through cavity to receive alignment pins. The wafer having the conductive layers, the through cavity in alignment with the conductive layers, and the alignment holes on each side of the through cavity forms an optical-electrical (O/E) interface. An O/E converter is mounted to the metal layers in alignment with the through cavity. The alignment pins and the alignment holes are used to passively align the optical waveguide and the O/E converter.
    • 通常,一方面,一种方法包括在晶片上形成导电层。 形成与导电层对准的通孔。 通孔是允许光连接器内的光波导的光信号通过。 对准孔形成在通孔的每一侧以接收对准销。 具有导电层的晶片,与导电层对准的通孔和通孔的每一侧上的对准孔形成光电(O / E)界面。 O / E转换器安装到与通孔对准的金属层上。 对准引脚和对准孔用于被动对准光波导和O / E转换器。