专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US06462392B1 Micromechanical cap structure and the respective manufacturing method 有权
标题翻译：微机械盖结构及各自的制造方法
公开(公告)号：US06462392B1
公开(公告)日：2002-10-08
申请号：US09776839
申请日：2001-02-05
申请人： Stefan Pinter , Harald Emmerich , Hans-Peter Trah , Helmut Baumann
发明人： Stefan Pinter , Harald Emmerich , Hans-Peter Trah , Helmut Baumann
IPC分类号： H01L2982
CPC分类号： G01P15/0802 , B81B3/007 , B81C2203/0163 , G01P1/023
摘要： A micromechanical cap structure and a corresponding manufacturing method are described, the cap structure having a substrate, in particular in the form of a wafer, having a cavity made therein. The cavity includes a bottom surface and two pairs of opposite parallel side wall sections. The cavity has at least one stabilizing wall section, which connects two side wall sections. This considerably increases the stability of the cap structure.
摘要翻译：描述了微机械帽结构和相应的制造方法，帽结构具有特别是晶片形式的衬底，其中形成有腔。空腔包括底面和两对相对平行的侧壁部分。空腔具有连接两个侧壁部分的至少一个稳定壁部分。这大大增加了盖结构的稳定性。

12. 发明授权

US09195054B2 Cascaded micromechanical actuator structure 有权
标题翻译：级联微机械致动器结构
公开(公告)号：US09195054B2
公开(公告)日：2015-11-24
申请号：US13124468
申请日：2009-08-24
申请人： Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Tjalf Pirk , Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
IPC分类号： H02N1/06 , G02B26/08 , B81B3/00 , H02N1/00
CPC分类号： G02B26/0833 , B81B3/004 , B81B2201/033 , B81B2203/058 , G02B26/0841 , H02N1/006
摘要： A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.
摘要翻译：描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。

13. 发明授权

US08699115B2 Production method for a micromechanical component, and a micromechanical component 有权
标题翻译：微机械部件的制造方法和微机械部件
公开(公告)号：US08699115B2
公开(公告)日：2014-04-15
申请号：US12506231
申请日：2009-07-20
申请人： Stefan Pinter , Christoph Friese
发明人： Stefan Pinter , Christoph Friese
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/085 , B81B7/0067 , B81B2201/042 , G02B26/0833 , H01L2224/48091 , H01L2224/48247 , Y10T29/49789 , H01L2924/00014
摘要： A production method for a micromechanical component and a micromechanical component apparatus are provided encompassing the steps of: forming a housing having an incident light window, forming a multitude of optically active surfaces on a wafer, subdividing the wafer into a multitude of chips having at least one optically active surface in each case, which surface is designed in such a way that, at least in a deactivated operating mode of the chip, the optically active surface is situated in an initial position with respect to the chip, and affixing at least one of the chips inside the housing, the optically active surface of the chip in its initial position being aligned at an angle of inclination that is not equal to 0° and not equal to 180° with respect to the incident light window.
摘要翻译：提供了一种用于微机械部件和微机械部件装置的制造方法，其包括以下步骤：形成具有入射光窗的外壳，在晶片上形成多个光学活性表面，将晶片细分成至少具有至少在每种情况下的一个光学活性表面，该表面被设计成使得至少在芯片的去活化操作模式中，光学活性表面位于相对于芯片的初始位置，并且固定至少一个芯片内的芯片的初始位置的光学活动表面以相对于入射光窗口不等于0°而不等于180°的倾斜角对准。

14. 发明申请

US20110292529A1 Micromechanical component and manufacturing method for a micromechanical component 有权
标题翻译：微机械部件的微机械部件和制造方法
公开(公告)号：US20110292529A1
公开(公告)日：2011-12-01
申请号：US13134021
申请日：2011-05-25
申请人： Steffi Lindenkreuz , Gerhard Kiesewetter , Stefan Pinter , Joerg Muchow
发明人： Steffi Lindenkreuz , Gerhard Kiesewetter , Stefan Pinter , Joerg Muchow
IPC分类号： G02B7/182 , B23P11/00
CPC分类号： G02B26/0841 , B81B3/0086 , B81B2201/042 , B81B2203/0109 , B81B2207/07 , Y10T29/49826
摘要： A micromechanical component has a holding device and an adjustable component, which is adjustable with respect to the holding device at least from a first position into a second position, and which is connected via at least one spring to the holding device. The micromechanical component also includes at least one silicide-containing line segment situated on the at least one spring.
摘要翻译：微机械部件具有保持装置和可调部件，其可相对于保持装置至少从第一位置调整到第二位置，并且经由至少一个弹簧连接到保持装置。微机械部件还包括位于至少一个弹簧上的至少一个含硅化物的线段。

15. 发明申请

US20100014147A1 PRODUCTION METHOD FOR A MICROMECHNICAL COMPONENT, AND A MICROMECHANICAL COMPONENT 有权
标题翻译：微生物组分的生产方法和微生物组分
公开(公告)号：US20100014147A1
公开(公告)日：2010-01-21
申请号：US12506231
申请日：2009-07-20
申请人： Stefan Pinter , Christoph Friese
发明人： Stefan Pinter , Christoph Friese
IPC分类号： G02B26/00 , B81C3/00
CPC分类号： G02B26/085 , B81B7/0067 , B81B2201/042 , G02B26/0833 , H01L2224/48091 , H01L2224/48247 , Y10T29/49789 , H01L2924/00014
摘要： A production method for a micromechanical component and a micromechanical component apparatus are provided encompassing the steps of: forming a housing having an incident light window, forming a multitude of optically active surfaces on a wafer, subdividing the wafer into a multitude of chips having at least one optically active surface in each case, which surface is designed in such a way that, at least in a deactivated operating mode of the chip, the optically active surface is situated in an initial position with respect to the chip, and affixing at least one of the chips inside the housing, the optically active surface of the chip in its initial position being aligned at an angle of inclination that is not equal to 0° and not equal to 180° with respect to the incident light window.
摘要翻译：提供了一种用于微机械部件和微机械部件装置的制造方法，其包括以下步骤：形成具有入射光窗的外壳，在晶片上形成多个光学活性表面，将晶片细分成至少具有至少在每种情况下的一个光学活性表面，该表面被设计成使得至少在芯片的去活化操作模式中，光学活性表面位于相对于芯片的初始位置，并且固定至少一个芯片内的芯片的初始位置的光学活动表面以相对于入射光窗口不等于0°而不等于180°的倾斜角对准。

16. 发明申请

US20050178195A1 Integrated flow sensor for measuring a fluid flow and method for manufacturing a flow sensor 失效
标题翻译：用于测量流体流量的集成流量传感器和用于制造流量传感器的方法
公开(公告)号：US20050178195A1
公开(公告)日：2005-08-18
申请号：US11020720
申请日：2004-12-23
申请人： Stefan Pinter , Tjalf Pirk
发明人： Stefan Pinter , Tjalf Pirk
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： An integrated flow sensor for determining a fluid flow is described. It has a first function layer and a second function layer which is applied to the first function layer and is electrically connected thereto, a fluid channel being situated in the function layers to conduct a fluid flow, at least one heating region and at least one measuring region being provided adjacent to the fluid channel, the first function layer being either not covered by the second function layer in the heating region and in the measuring region or being insulated from the above-situated second function layer, the first function layer or the second function layer having an increased resistance at least in the heating region, the flow sensor being connectable in such a way that it conducts a heating current through the first or second function region of the heating region, and/or measures a resistance value of the first or second function layer in the measuring region, and the fluid flow being determinable as a function of the measured resistance value at a constant heat output or as a function of the required heat output at a predefined resistance value.
摘要翻译：描述了用于确定流体流动的集成流量传感器。其具有第一功能层和第二功能层，其被施加到第一功能层并与其电连接，流体通道位于功能层中以进行流体流动，至少一个加热区域和至少一个测量所述第一功能层在加热区域和测量区域中未被第二功能层覆盖，或者与上述位置的第二功能层绝缘，所述第一功能层或第二功能层功能层至少在加热区域中具有增加的电阻，流量传感器可以以这样的方式连接，使得其传导通过加热区域的第一或第二功能区域的加热电流，和/或测量第一或第二功能层，并且流体流量可以在恒定热输出时作为测量的电阻值的函数来确定或者作为在预定电阻值下所需的热输出的函数。

17. 发明授权

US08736934B2 Assembly having a displaceable part and method for operating an assembly having a displaceable part 有权
标题翻译：具有可移动部件的组件和用于操作具有可移位部件的组件的方法
公开(公告)号：US08736934B2
公开(公告)日：2014-05-27
申请号：US13435507
申请日：2012-03-30
申请人： Stefan Pinter
发明人： Stefan Pinter
IPC分类号： G02B26/08 , H01L41/00
CPC分类号： G02B26/0833 , B81B3/0043 , B81B2201/042
摘要： A component having a mounting support, a displaceable part, which is joined to the mounting support by at least one flexible joining component, and an actuator device. The actuator device is configured to set at least one subunit of the displaceable part and/or of the at least one flexible joining component into a first oscillatory motion along a first axis in such a manner, that the displaceable part may be set into an angular oscillatory motion about a first rotational axis. The actuator device is additionally configured to set the same and/or another subunit into a second oscillatory motion having a motion component along a second axis at an inclination to the first axis, in such a manner, that, in addition to the angular oscillatory motion, the displaceable part is displaceable about a second rotational axis.
摘要翻译：具有安装支撑件的部件，可移动部件，其通过至少一个挠性连接部件连接到安装支撑件以及致动器装置。致动器装置被配置成将可移动部分和/或至少一个柔性接合部件的至少一个子单元沿着第一轴线以这样一种方式设置成第一振荡运动，即可移动部件可以被设置成角度关于第一旋转轴线的振荡运动。致动器装置另外配置成将相同和/或另一个子单元设置成具有沿第二轴线的运动分量的第二振荡运动，该运动分量以与第一轴线倾斜的倾斜度，即除了角度振荡运动可移动部分可绕第二旋转轴线移动。

18. 发明授权

US08550639B2 Cover device for a micro-optomechanical component, and manufacturing method for such a cover device 有权
标题翻译：微机电部件用盖装置及其制造方法
公开(公告)号：US08550639B2
公开(公告)日：2013-10-08
申请号：US13297908
申请日：2011-11-16
申请人： Stefan Pinter
发明人： Stefan Pinter
IPC分类号： G02B23/16 , H01L23/02
CPC分类号： B81B7/0067 , B81B2201/042 , G02B26/0833 , Y10T29/49826 , Y10T428/24331
摘要： A cover device is described for a micro-optomechanical component having a substrate which has a maximum surface whose surface area is equal to or greater than a single surface area of any other surface of the substrate, and having at least one window, made of a light-transmitting material, which is inclined with respect to the maximum surface of the substrate, the at least one window being situated within at least one continuous opening provided in the substrate. A manufacturing method for a cover device for a micro-optomechanical component is also described. Furthermore, a micro-optomechanical component and a manufacturing method for a micro-optomechanical component are described.
摘要翻译：描述了一种用于具有基底的微光学机械部件的覆盖装置，所述基底具有表面积等于或大于基底的任何其它表面的单个表面积的最大表面，并且具有至少一个窗口，该窗口由相对于基板的最大表面倾斜的透光材料，所述至少一个窗口位于设置在基板中的至少一个连续开口内。还描述了用于微光机电部件的覆盖装置的制造方法。此外，还描述了微光机电组件和用于微光机电组件的制造方法。

19. 发明申请

US20120140306A1 COVER DEVICE FOR A MICRO-OPTOMECHANICAL COMPONENT, AND MANUFACTURING METHOD FOR SUCH A COVER DEVICE 有权
标题翻译：用于微机电组件的封装装置和用于这种封装装置的制造方法
公开(公告)号：US20120140306A1
公开(公告)日：2012-06-07
申请号：US13297908
申请日：2011-11-16
申请人： Stefan Pinter
发明人： Stefan Pinter
IPC分类号： G02F1/01 , B23P11/00 , B32B3/10
CPC分类号： B81B7/0067 , B81B2201/042 , G02B26/0833 , Y10T29/49826 , Y10T428/24331
摘要： A cover device is described for a micro-optomechanical component having a substrate which has a maximum surface whose surface area is equal to or greater than a single surface area of any other surface of the substrate, and having at least one window, made of a light-transmitting material, which is inclined with respect to the maximum surface of the substrate, the at least one window being situated within at least one continuous opening provided in the substrate. A manufacturing method for a cover device for a micro-optomechanical component is also described. Furthermore, a micro-optomechanical component and a manufacturing method for a micro-optomechanical component are described.
摘要翻译：描述了一种用于具有基底的微光学机械部件的覆盖装置，所述基底具有表面积等于或大于基底的任何其它表面的单个表面积的最大表面，并且具有至少一个窗口，该窗口由相对于基板的最大表面倾斜的透光材料，所述至少一个窗口位于设置在基板中的至少一个连续开口内。还描述了用于微光机电部件的覆盖装置的制造方法。此外，还描述了微光机电组件和用于微光机电组件的制造方法。

20. 发明申请

US20110261428A1 MICROMECHANICAL COMPONENT AND A METHOD FOR OPERATING A MICROMECHANICAL COMPONENT 有权
标题翻译：微机电组件和操作微机电组件的方法
公开(公告)号：US20110261428A1
公开(公告)日：2011-10-27
申请号：US12998538
申请日：2009-09-16
申请人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
发明人： Stefan Pinter , Joerg Muchow , Joachim Fritz , Christoph Friese
IPC分类号： G02B26/10 , G01J1/42
CPC分类号： G02B26/0833 , G02B27/01 , Y10S359/90
摘要： A micromechanical component has a light window; a mirror element adjustable with respect to the light window from a first position into at least one second position about at least one axis of rotation, an optical sensor having a detection surface designed to ascertain a light intensity on the detection surface and to provide a corresponding sensor signal. The light window, the mirror element in the first position and the detection surface are situated in relation to one another in such a way that a portion of a light beam reflected on the light window strikes the detection surface at least partially; and an evaluation unit designed to define, on the basis of the sensor signal, information regarding an instantaneous position of the mirror element and/or an instantaneous intensity of the deflected light beam.
摘要翻译：微机械部件具有光窗口; 相对于所述光窗可从第一位置调节到关于至少一个旋转轴线的至少一个第二位置的反射镜元件;光学传感器，具有被设计成确定所述检测表面上的光强度的检测表面，并且提供对应的传感器信号。光窗，第一位置的反射镜元件和检测表面彼此相对设置，使得在光窗上反射的光束的一部分至少部分地撞击检测表面; 以及评估单元，其被设计为基于传感器信号来定义关于镜元件的瞬时位置和/或偏转光束的瞬时强度的信息。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式