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    • 11. 发明申请
    • High frequency plasma generator and high frequency plasma generating method
    • 高频等离子体发生器和高频等离子体发生方法
    • US20050241768A1
    • 2005-11-03
    • US10519553
    • 2003-10-01
    • Keisuke KawamuraAkira YamadaHiroshi MashimaYoshiaki Takeuchi
    • Keisuke KawamuraAkira YamadaHiroshi MashimaYoshiaki Takeuchi
    • H05H1/46C23C16/509C23F1/00H01J37/32H01L21/205H01L21/3065
    • H01J37/32155H01J37/32091
    • An object is to provide a high-frequency plasma generating apparatus and process which can further advance uniformity of the thickness of a film on a substrate with a large area in comparison with conventional apparatuses. In a reaction chamber (1), a ground electrode (3) is disposed, and a discharge electrode (2) is disposed opposite to the ground electrode (3). A substrate (4) as a processing object is placed in close contact with the ground electrode (3). A high-frequency voltage is applied to the discharge electrode (2) so as to generate plasma between the ground electrode and the discharge electrode. An RF electric power supply (15) generates a first high-frequency voltage, and outputs the generated voltage on feeding points (9) disposed on a lateral portion of the discharge electrode (2). An RF electric power supply (16) generates a second high-frequency voltage, and outputs the generated voltage on feeding points (9) disposed on another lateral portion of the discharge electrode (2). Here, the second high-frequency voltage has the same frequency as that of the first high-frequency voltage and has a phase which varies with a low-frequency signal, which is modulated by a predetermined modulation signal.
    • 本发明的目的是提供一种高频等离子体发生装置和方法,与现有的装置相比,能够进一步提高基板上膜厚度的均匀性。 在反应室(1)中设置接地电极(3),放电电极(2)与接地电极(3)相对设置。 作为处理对象的基板(4)与接地电极(3)紧密接触。 向放电电极(2)施加高频电压,以在接地电极和放电电极之间产生等离子体。 RF电源(15)产生第一高频电压,并且在放电电极(2)的侧面部分上的馈电点(9)上输出产生的电压。 RF电源(16)产生第二高频电压,并且在放电电极(2)的另一侧面部分上的馈电点(9)上输出产生的电压。 这里,第二高频电压具有与第一高频电压相同的频率,并且具有随着由预定调制信号调制的低频信号而变化的相位。
    • 14. 发明申请
    • Vehicle storage box locking device
    • 车载箱锁定装置
    • US20100077807A1
    • 2010-04-01
    • US12585550
    • 2009-09-17
    • Yoshiaki TakeuchiKatsuhisa YamadaTsuguhito IchirikiHiroshi Nishijima
    • Yoshiaki TakeuchiKatsuhisa YamadaTsuguhito IchirikiHiroshi Nishijima
    • B65D55/14
    • B62J9/001B60R11/00B60R2011/0075B60R2011/0096B62K19/46E05B81/06E05B81/08E05B83/32Y10T70/554
    • A locking device for a storage box in a vehicle includes a lock configured to place the storage box in a closed state or an open state, and an actuator configured to drive the lock. The locking device further includes a button configured to place the storage box in the open state. The locking device is configured to perform an authentication of a portable key when the button is operated and the storage box is closed. When the portable key is authenticated when the button is operated, the lock is configured to place the storage box in the open state. When the portable key is not authenticated when the button is operated, the storage box is configured to be held in the closed state without the lock being driven. When the portable key is authenticated when the storage box is closed, the lock is configured to be driven to place the storage box in the closed state. When the portable key is not authenticated when the storage box is closed, the storage box is configured to be held in the open state without the lock being driven.
    • 用于车辆中的存储箱的锁定装置包括锁定构造以将存储箱置于关闭状态或打开状态,以及构造成驱动锁定的致动器。 锁定装置还包括被配置为将存储盒放置在打开状态的按钮。 锁定装置被配置为当按钮被操作并且存储箱关闭时执行便携式钥匙的认证。 当按钮被操作时便携钥匙被认证时,锁被配置成将存储盒置于打开状态。 当按钮被操作时便携式钥匙不被认证时,存储盒被配置成保持在关闭状态而不锁定被驱动。 当便携式密钥在存储盒关闭时被认证时,锁被配置为被驱动以将存储盒放置在关闭状态。 当存储盒关闭时便携式密钥未被认证的情况下,存储盒被配置为保持打开状态而不锁定被驱动。
    • 17. 发明申请
    • In-line optical isolator
    • 在线光隔离器
    • US20060268405A1
    • 2006-11-30
    • US10558924
    • 2004-06-23
    • Yoshiaki TakeuchiMasaru WatanabeIkuo Fukuzaki
    • Yoshiaki TakeuchiMasaru WatanabeIkuo Fukuzaki
    • G02B5/30G02B27/28
    • G02B6/2746G02F1/093
    • In conventional optical isolators, an optical signal is dispersed by polarization or the characteristics are varied by heat generation in a garnet crystal. According to the invention, the crystal optical axis (3c) of rutile crystal (3) is oriented so that the separation directions of the ordinary ray (O) and the extraordinary ray (E) are perpendicular to the plane including the optical axes of optical fibers (10, 11). Furthermore, the focusing central optical axis (6c) of a focusing rod lens (6) is arranged parallel with optical axes of the optical fibers (10, 11) and at a substantially equal distance from the four rays, i.e. the ordinary ray (O) and the extraordinary ray (E) propagating along the optical axis of the optical fiber (10) and the ordinary ray (O) and the extraordinary ray (E) propagating along the optical axis of the optical fiber (11). An air gap (7) of about 200 [μm] is provided, as a heat insulating means, between the focusing rod lens (6) and a magnetized garnet crystal (8).
    • 在传统的光隔离器中,通过极化分散光信号,或者通过石榴石晶体中的发热来改变特性。 根据本发明,金红石晶体(3)的晶体光轴(3c)被定向成使得普通光线(O)和非寻常光线(E)的分离方向垂直于包括光轴 光纤(10,11)。 此外,聚焦棒透镜(6)的聚焦中心光轴(6c)与光纤(10,11)的光轴平行并且与四条光线基本相等的距离(即普通光线 O)和沿着光纤(10)的光轴传播的异常射线(E)和沿光纤(11)的光轴传播的普通射线(O)和异常射线(E)。 在聚焦棒透镜(6)和被磁化的石榴石晶体(8)之间提供约200μm的气隙(7)作为隔热装置。
    • 19. 发明授权
    • Asynchronous pseudo SRAM and access method therefor
    • 异步伪SRAM及其访问方法
    • US07002871B2
    • 2006-02-21
    • US10762459
    • 2004-01-23
    • Yoshiaki TakeuchiKohei Oikawa
    • Yoshiaki TakeuchiKohei Oikawa
    • G11C8/00
    • G11C11/22
    • A semiconductor integrated circuit device includes an address buffer which receives an address signal that indicates an address of a memory cell array, a latch circuit which latches the data, and an address transition detection circuit which detects transition of the address. During the access operation of the memory cell array, an address at the operation start time is latched by the latch circuit. After the end of the operation of the memory cell array, an address that is currently input to the address buffer is latched by the latch circuit. If the received address signal is data different from the latch data, a control signal that controls the cycle operation of the memory cell array for a predetermined period is generated on the basis of the detection result from the address transition detection circuit.
    • 半导体集成电路装置包括地址缓冲器,其接收指示存储单元阵列的地址的地址信号,锁存数据的锁存电路以及检测地址的转换的地址转换检测电路。 在存储单元阵列的访问操作期间,操作开始时刻的地址被锁存电路锁存。 在存储单元阵列的操作结束之后,当前输入到地址缓冲器的地址被锁存电路锁存。 如果接收到的地址信号是与锁存数据不同的数据,则根据来自地址转换检测电路的检测结果生成控制存储单元阵列的周期操作达预定周期的控制信号。