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    • 13. 发明申请
    • Fluid feeding apparatus
    • 流体供给装置
    • US20050087135A1
    • 2005-04-28
    • US10958623
    • 2004-10-06
    • Akira HiokiSatoshi NakagawaAkimasa Yajima
    • Akira HiokiSatoshi NakagawaAkimasa Yajima
    • B01J4/00B08B9/02B08B9/08C23C16/18C23C16/44C23C16/455H01L21/205C23C16/00
    • B08B9/0321B08B9/08C23C16/18C23C16/4402Y10T137/4259
    • A fluid feeding apparatus capable of excluding the outer environmental influences in feeding a fluid susceptible to contamination, decomposition or denaturation on contact with the outer environment. The includes comprises at least one liquid source container, a cleaning and/or diluting liquid container, a waste liquid collection container, an inert gas feed pipe A, an inert gas feed pipe B, an evacuation pipe connecting to a vacuum source, and a fluid feed pipe for introducing the fluid to a process. The source container has two pipes. The first pipe has valves arranged therein at positions nearer to and farther from the source container, respectively. The second pipe has two valves arranged therein at positions nearer to and farther from the container, respectively. The path between the valves 1 and 4 and the path between the valves 2 and 5 are connected via a connecting pipe C having a valve 3.
    • 一种流体输送装置,其能够排除在与外部环境接触时容易受到污染,分解或变性的流体供给的外部环境影响。 包括至少一个液体源容器,清洁和/或稀释液体容器,废液收集容器,惰性气体供给管A,惰性气体供给管B,连接到真空源的抽空管,以及 用于将流体引入流程的流体供给管。 源容器有两个管道。 第一管子分别在靠近和远离源容器的位置处布置有阀。 第二管有两个阀分别设置在靠近和远离容器的位置。 阀1和4之间的路径以及阀2和5之间的路径经由具有阀3的连接管C连接。