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11. 发明授权

US07422724B1 Biological preconcentrator 有权
标题翻译：生物预浓缩器
公开(公告)号：US07422724B1
公开(公告)日：2008-09-09
申请号：US10214891
申请日：2002-08-07
申请人： Ronald P. Manginell , Bruce C. Bunker , Dale L. Huber
发明人： Ronald P. Manginell , Bruce C. Bunker , Dale L. Huber
IPC分类号： G01N30/96
CPC分类号： G01N1/405 , B01J20/3483 , C07K1/14 , Y10T436/25 , Y10T436/25375
摘要： A biological preconcentrator comprises a stimulus-responsive active film on a stimulus-producing microfabricated platform. The active film can comprise a thermally switchable polymer film that can be used to selectively absorb and desorb proteins from a protein mixture. The biological microfabricated platform can comprise a thin membrane suspended on a substrate with an integral resistive heater and/or thermoelectric cooler for thermal switching of the active polymer film disposed on the membrane. The active polymer film can comprise hydrogel-like polymers, such as poly(ethylene oxide) or poly(n-isopropylacrylamide), that are tethered to the membrane. The biological preconcentrator can be fabricated with semiconductor materials and technologies.
摘要翻译：生物预浓缩器包括在刺激产生微加工平台上的刺激响应活性膜。活性膜可以包括可热切换的聚合物膜，其可用于选择性地从蛋白质混合物中吸收和解吸蛋白质。生物微加工平台可以包括悬浮在基板上的薄膜，其具有用于热交换设置在膜上的活性聚合物膜的整体电阻加热器和/或热电冷却器。活性聚合物膜可以包含锚定于膜的水凝胶状聚合物，例如聚（环氧乙烷）或聚（正 - 异丙基丙烯酰胺）。生物预浓缩器可以用半导体材料和技术制造。

12. 发明授权

US06772513B1 Method for making electro-fluidic connections in microfluidic devices 有权
标题翻译：在微流体装置中制作电流连接的方法
公开(公告)号：US06772513B1
公开(公告)日：2004-08-10
申请号：US10184782
申请日：2002-06-27
申请人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
发明人： Gregory C. Frye-Mason , David Martinez , Ronald P. Manginell , Edwin J. Heller , Rajen Chanchani
IPC分类号： H25K334
CPC分类号： B01L3/502715 , B01J2219/0081 , B01L3/502707 , B01L3/565 , B01L2200/027 , B01L2200/028 , B01L2200/10 , B01L2300/044 , B01L2300/0645 , B01L2300/0816 , B01L2300/0867 , B01L2400/0415 , G01N30/6095 , Y10T29/49117 , Y10T29/4913 , Y10T29/49144 , Y10T137/87249
摘要： A method for forming electro-fluidic interconnections in microfluidic devices comprises forming an electrical connection between matching bond pads on a die containing an active electrical element and a microfluidic substrate and forming a fluidic seal ring that circumscribes the active electrical element and a fluidic feedthrough. Preferably, the electrical connection and the seal ring are formed in a single bonding step. The simple method is particularly useful for chemical microanalytical systems wherein a plurality of microanalytical components, such as a chemical preconcentrator, a gas chromatography column, and a surface acoustic wave detector, are fluidically interconnected on a hybrid microfluidic substrate having electrical connection to external support electronics.
摘要翻译：用于在微流体装置中形成电流互连的方法包括在包含有源电子元件和微流体基底的模具上的匹配接合焊盘之间形成电连接，并形成限定有源电元件和流体馈通的流体密封环。优选地，电连接和密封环在单个结合步骤中形成。简单的方法对于化学微量分析系统特别有用，其中多个微量分析组分例如化学预浓缩器，气相色谱柱和表面声波检测器在具有与外部支持电子器件电连接的混合微流体衬底上流体互连。

13. 发明授权

US06699392B1 Method to fabricate silicon chromatographic column comprising fluid ports 有权
标题翻译：制造包含流体端口的硅层析柱的方法
公开(公告)号：US06699392B1
公开(公告)日：2004-03-02
申请号：US10167238
申请日：2002-06-10
申请人： Ronald P. Manginell , Gregory C. Frye-Mason , Edwin J. Heller , Douglas R. Adkins
发明人： Ronald P. Manginell , Gregory C. Frye-Mason , Edwin J. Heller , Douglas R. Adkins
IPC分类号： B01D1508
CPC分类号： G01N30/6095
摘要： A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
摘要翻译：已经开发了一种用于制造包含贯穿基板流体端口的硅层析柱的新方法。这种新方法可以制造多层互连的硅层析柱。

14. 发明授权

US06527835B1 Chemical preconcentrator with integral thermal flow sensor 有权
标题翻译：带集成热流量传感器的化学预浓缩器
公开(公告)号：US06527835B1
公开(公告)日：2003-03-04
申请号：US10029341
申请日：2001-12-21
申请人： Ronald P. Manginell , Gregory C. Frye-Mason
发明人： Ronald P. Manginell , Gregory C. Frye-Mason
IPC分类号： B01D5304
CPC分类号： G01F1/6845 , G01F1/6847 , G01N30/12 , G01N30/6095 , G01N30/88 , G01N2030/121 , G01N2030/623
摘要： A chemical preconcentrator with integral thermal flow sensor can be used to accurately measure fluid flow rate in a microanalytical system. The thermal flow sensor can be operated in either constant temperature or constant power mode and variants thereof. The chemical preconcentrator with integral thermal flow sensor can be fabricated with the same MEMS technology as the rest of the microanlaytical system. Because of its low heat capacity, low-loss, and small size, the chemical preconcentrator with integral thermal flow sensor is fast and efficient enough to be used in battery-powered, portable microanalytical systems.
摘要翻译：具有集成热流量传感器的化学预浓缩器可用于精确测量微量分析系统中的流体流量。热流量传感器可以在恒定温度或恒定功率模式下工作，也可以变型。具有集成热流量传感器的化学预浓缩器可以使用与微结构系统的其余部分相同的MEMS技术来制造。由于其低热容量，低损耗和小尺寸，具有集成热流量传感器的化学预浓缩器快速高效地用于电池供电的便携式微分析系统。

15. 发明授权

US08486710B2 Method, sensor and system for measuring a lower heating value and a Wobbe Index of a gaseous fuel 有权
标题翻译：用于测量气体燃料的较低热值和沃泊指数的方法，传感器和系统
公开(公告)号：US08486710B2
公开(公告)日：2013-07-16
申请号：US11299588
申请日：2005-12-12
申请人： William Joseph Antel , Nirm Velumylum Nirmalan , Stephen Adam Solovitz , Nishant Vats , Subhrajit Dey , Robert Michael Orenstein , Matthew Moorman , Ronald P. Manginell
发明人： William Joseph Antel , Nirm Velumylum Nirmalan , Stephen Adam Solovitz , Nishant Vats , Subhrajit Dey , Robert Michael Orenstein , Matthew Moorman , Ronald P. Manginell
IPC分类号： G01N33/00
CPC分类号： G01N25/22 , Y10T436/218
摘要： A method for measuring a lower heating value of a gaseous fuel. The method includes mixing a gaseous fuel with air to provide a combustible air-fuel mixture. The air-fuel mixture is directed to flow across a flow surface of a first micro-hotplate maintained at a constant temperature. A change in power required to maintain a constant temperature of the first micro-hotplate flow surface due to a convective and conductive heat transfer from the first micro-hotplate flow surface to the air-fuel mixture is measured. The air-fuel mixture is directed to flow across a flow surface of a second micro-hotplate maintained at a constant temperature. The air-fuel mixture is combusted as the air-fuel mixture flows across the second micro-hotplate flow surface. A change in power required to maintain a constant temperature of the second micro-hotplate flow surface due to the combustion of the air-fuel mixture is measured.
摘要翻译：一种用于测量气体燃料的较低热值的方法。该方法包括将气态燃料与空气混合以提供可燃空气 - 燃料混合物。空气 - 燃料混合物被引导流过维持在恒定温度的第一微电热板的流动表面。测量由于从第一微型加热板流动表面到空气 - 燃料混合物的对流和导电的热传递来维持第一微型电热板流动表面的恒定温度所需的功率变化。空气 - 燃料混合物被引导流过维持在恒定温度的第二微电热板的流动表面。空气燃料混合物随着空气 - 燃料混合物流过第二微电镀板流动表面而燃烧。测量由于空气 - 燃料混合物的燃烧而保持第二微型加热板流动表面的恒定温度所需的功率变化。

16. 发明授权

US07105098B1 Method to control artifacts of microstructural fabrication 有权
标题翻译：控制微结构制作工艺的方法
公开(公告)号：US07105098B1
公开(公告)日：2006-09-12
申请号：US10165356
申请日：2002-06-06
申请人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
发明人： Randy J. Shul , Christi G. Willison , W. Kent Schubert , Ronald P. Manginell , Mary-Anne Mitchell , Paul C. Galambos
IPC分类号： B44C1/22
CPC分类号： H01L21/3085 , B81C1/00626
摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.
摘要翻译：已经开发了用于制造硅微结构的新方法。在这些方法中，沉积和图案化蚀刻延迟层，以便对被蚀刻到衬底材料中的特征的深度提供差分控制。蚀刻相关的结构伪影的补偿可以通过适当地使用这种蚀刻延迟层来实现。

17. 发明授权

US06666907B1 Temperature programmable microfabricated gas chromatography column 有权
标题翻译：温度可编程微生物气相色谱柱
公开(公告)号：US06666907B1
公开(公告)日：2003-12-23
申请号：US10061383
申请日：2002-01-31
申请人： Ronald P. Manginell , Gregory C. Frye-Mason
发明人： Ronald P. Manginell , Gregory C. Frye-Mason
IPC分类号： B01D1508
CPC分类号： G01N30/6095 , G01N30/6047 , G01N30/6086 , G01N2030/025 , G01N2030/3007 , G01N2030/3053
摘要： A temperature programmable microfabricated gas chromatography column enables more efficient chemical separation of chemical analytes in a gas mixture by the integration of a resistive heating element and temperature sensing on the microfabricated column. Additionally, means are provided to thermally isolate the heated column from their surroundings. The small heat capacity and thermal isolation of the microfabricated column improves the thermal time response and power consumption, both important factors for portable microanalytical systems.
摘要翻译：温度可编程微生物气相色谱柱通过将电阻加热元件和温度感测集成在微加工柱上，可以更有效地化学分离气体混合物中的化学分析物。此外，提供了将加热的塔与其周围环境隔离的装置。微加热柱的小热容量和热隔离提高了热时间响应和功耗，这两个重要因素都是便携式微量分析系统。

18. 发明授权

US5834627A Calorimetric gas sensor 失效
标题翻译：热量气体传感器
公开(公告)号：US5834627A
公开(公告)日：1998-11-10
申请号：US766142
申请日：1996-12-17
申请人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
发明人： Antonio J. Ricco , Robert C. Hughes , James H. Smith , Daniel J. Moreno , Ronald P. Manginell , Stephen D. Senturia , Robert J. Huber
IPC分类号： G01N27/16 , G01N7/00
CPC分类号： G01N27/16
摘要： A combustible gas sensor that uses a resistively heated, noble metal-coated, micromachined polycrystalline Si filament to calorimetrically detect the presence and concentration of combustible gases. The filaments tested to date are 2 .mu.m thick.times.10 .mu.m wide.times.100, 250, 500, or 1000 .mu.m-long polycrystalline Si; some are overcoated with a 0.25 .mu.m-thick protective CVD Si.sub.3 N.sub.4 layer. A thin catalytic Pt film was deposited by CVD from the precursor Pt(acac).sub.2 onto microfilaments resistively heated to approximately 500.degree. C.; Pt deposits only on the hot filament. Using a constant-resistance-mode feedback circuit, Pt-coated filaments operating at ca. 300.degree. C. (35 mW input power) respond linearly, in terms of the change in supply current required to maintain constant resistance (temperature), to H.sub.2 concentrations between 100 ppm and 1% in an 80/20 N.sub.2 /O.sub.2 mixture. Other catalytic materials can also be used.
摘要翻译：一种可燃气体传感器，其使用电阻加热的贵金属涂覆的微加工多晶硅丝来量热检测可燃气体的存在和浓度。到目前为止测试的长丝是2μm厚的10μm宽×100,250,500或1000μm长的多晶Si; 有些被外涂了0.25μm厚的保护性CVD Si 3 N 4层。通过CVD将Pt催化Pt薄膜从前体Pt（acac）2沉积到电阻加热至约500℃的微丝上; Pt仅在热丝上沉积。使用恒电阻模式反馈电路，Pt涂层长丝在约在80/20 N2 / O2混合物中，在保持恒定电阻（温度）所需的电源电流变化为100 ppm和1％之间，300°C（35 mW输入功率）线性响应。也可以使用其它催化剂。

19. 发明授权

US08736000B1 Capacitive chemical sensor 有权
标题翻译：电容化学传感器
公开(公告)号：US08736000B1
公开(公告)日：2014-05-27
申请号：US11583442
申请日：2006-10-19
申请人： Ronald P. Manginell , Matthew W. Moorman , David R. Wheeler
发明人： Ronald P. Manginell , Matthew W. Moorman , David R. Wheeler
IPC分类号： H01L29/78
CPC分类号： G01N27/221
摘要： A microfabricated capacitive chemical sensor can be used as an autonomous chemical sensor or as an analyte-sensitive chemical preconcentrator in a larger microanalytical system. The capacitive chemical sensor detects changes in sensing film dielectric properties, such as the dielectric constant, conductivity, or dimensionality. These changes result from the interaction of a target analyte with the sensing film. This capability provides a low-power, self-heating chemical sensor suitable for remote and unattended sensing applications. The capacitive chemical sensor also enables a smart, analyte-sensitive chemical preconcentrator. After sorption of the sample by the sensing film, the film can be rapidly heated to release the sample for further analysis. Therefore, the capacitive chemical sensor can optimize the sample collection time prior to release to enable the rapid and accurate analysis of analytes by a microanalytical system.
摘要翻译：微型电容化学传感器可用作较大的微量分析系统中的自主化学传感器或分析物敏感的化学预浓缩器。电容化学传感器检测传感膜介电性能的变化，例如介电常数，电导率或维度。这些变化是由目标分析物与传感膜的相互作用所致。该功能提供了一种适用于远程和无人值守感应应用的低功率自加热化学传感器。电容化学传感器还可以实现智能的分析物敏感化学预浓缩器。在通过感测膜吸附样品后，可以快速加热膜以释放样品用于进一步分析。因此，电容化学传感器可以在释放之前优化采样时间，以便通过微量分析系统快速准确地分析分析物。

20. 发明授权

US07399449B1 Microfabricated diffusion source 有权
标题翻译：微型扩散源
公开(公告)号：US07399449B1
公开(公告)日：2008-07-15
申请号：US10436595
申请日：2003-05-12
申请人： Michael C. Oborny , Gregory C. Frye-Mason , Ronald P. Manginell
发明人： Michael C. Oborny , Gregory C. Frye-Mason , Ronald P. Manginell
IPC分类号： B01L3/00
CPC分类号： G01N33/0006 , B01L3/5027
摘要： A microfabricated diffusion source to provide for a controlled diffusion rate of a vapor comprises a porous reservoir formed in a substrate that can be filled with a liquid, a headspace cavity for evaporation of the vapor therein, a diffusion channel to provide a controlled diffusion of the vapor, and an outlet to release the vapor into a gas stream. The microfabricated diffusion source can provide a calibration standard for a microanalytical system. The microanalytical system with an integral diffusion source can be fabricated with microelectromechanical systems technologies.
摘要翻译：提供蒸气受控扩散速率的微细加散扩散源包括形成在可填充有液体的基底中的多孔容器，用于蒸发蒸汽的顶空腔，扩散通道以提供受控的扩散蒸汽和出口以将蒸气释放到气流中。微加工扩散源可以为微量分析系统提供校准标准。具有整体扩散源的微分析系统可以用微机电系统技术制造。

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