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    • 14. 发明申请
    • Method for Patterning Using Phase-Change Material
    • 使用相变材料进行图案化的方法
    • US20120169820A1
    • 2012-07-05
    • US13419351
    • 2012-03-13
    • Scott LimbUma Srinivasan
    • Scott LimbUma Srinivasan
    • B41J2/00
    • H01L21/0331
    • A patterned layer over a wafer is produced by depositing a print-patterned mask structure. Energized particles of a target material are deposited over the wafer and the print-patterned mask such that particles of said target material incident on the mask structure enter the mask structure body and minimally accumulate, if at all, on the surface of the mask structure, and otherwise the particles of target material accumulate as a generally uniform layer over the wafer. The print-patterned mask structure, including particles of target material therein, is removed leaving the generally uniform layer of target material as a patterned layer over the wafer.
    • 通过沉积印刷图案化的掩模结构来生产晶片上的图案层。 目标材料的通电颗粒沉积在晶片和印刷图案化掩模上,使得入射到掩模结构上的所述靶材料的颗粒进入掩模结构体并且最小程度地累积在掩模结构的表面上, 否则靶材料的颗粒在晶片上聚集成大致均匀的层。 去除其中包括目标材料颗粒的印刷图案掩模结构,留下大致均匀的靶材料层作为晶片上的图案化层。
    • 16. 发明授权
    • Tuning optical cavities
    • 调谐光腔
    • US07633629B2
    • 2009-12-15
    • US11702321
    • 2007-02-05
    • Peter KieselOliver SchmidtMichael BasslerUma Srinivasan
    • Peter KieselOliver SchmidtMichael BasslerUma Srinivasan
    • G01B9/02
    • G01J3/26G01N21/45G01N2021/451G02B26/001
    • A tunable optical cavity can be tuned by relative movement between two reflection surfaces, such as by deforming elastomer spacers connected between mirrors or other light-reflective components that include the reflection surfaces. The optical cavity structure includes an analyte region in its light-transmissive region, and presence of analyte in the analyte region affects output light when the optical cavity is tuned to a set of positions. Electrodes that cause deformation of the spacers can also be used to capacitively sense the distance between them. Control circuitry that provides tuning signals can cause continuous movement across a range of positions, allowing continuous photosensing of analyte-affected output light by a detector.
    • 可调光学腔可以通过两个反射表面之间的相对运动进行调节,例如通过变形连接在反射镜之间的弹性体隔离物或包括反射表面的其它光反射部件。 光腔结构包括其透光区域中的分析物区域,并且当光学腔被调谐到一组位置时,分析物区域中的分析物的存在影响输出光。 导致间隔物变形的电极也可用于电容地感测它们之间的距离。 提供调谐信号的控制电路可以在一定范围的位置上引起连续的运动,从而允许由检测器对被分析物影响的输出光进行连续光敏。
    • 19. 发明申请
    • Method and system for patterning a mask layer
    • 图案化掩模层的方法和系统
    • US20080241712A1
    • 2008-10-02
    • US11731689
    • 2007-03-30
    • Scott Jong Ho LimbEric J. ShraderUma Srinivasan
    • Scott Jong Ho LimbEric J. ShraderUma Srinivasan
    • G03F1/00
    • G03F7/2018H05K3/0023H05K3/0082H05K3/28H05K2203/0551
    • The presently described embodiments use a printing process, e.g. a wax printing technique, to pattern a mask layer (such as a soldermask layer) of, for example, a printed circuit. Substantially all other conventional processes in developing soldermask and exposure processes can be maintained. According to the presently described embodiments, each printed circuit will have a unique pattern that matches uniform and non-uniform runout. In one form, the pattern is comprised of wax single drops having a specified gap to make the process transparent to the current industry practice. Furthermore, the single drops can be used for both large and small areas without any development time differences. In at least one form, the wax pattern and the soldermask in the gap are removed during development.
    • 目前描述的实施例使用打印过程,例如。 蜡印刷技术,用于对例如印刷电路的掩模层(例如焊接掩模层)进行图案化。 可以维持开发焊接掩模和曝光工艺中的所有其他常规工艺。 根据目前描述的实施例,每个印刷电路将具有匹配均匀和非均匀跳动的独特图案。 在一种形式中,图案由具有特定间隙的蜡单滴组成,以使得该过程对于当前行业实践是透明的。 此外,单滴可以用于大小区域而没有任何显影时间差。 在至少一种形式中,间隙中的蜡图案和焊接掩模在显影期间被去除。
    • 20. 发明申请
    • Tuning optical cavities
    • 调谐光腔
    • US20080186508A1
    • 2008-08-07
    • US11702321
    • 2007-02-05
    • Peter KieselOliver SchmidtMichael BasslerUma Srinivasan
    • Peter KieselOliver SchmidtMichael BasslerUma Srinivasan
    • G01B9/02
    • G01J3/26G01N21/45G01N2021/451G02B26/001
    • A tunable optical cavity can be tuned by relative movement between two reflection surfaces, such as by deforming elastomer spacers connected between mirrors or other light-reflective components that include the reflection surfaces. The optical cavity structure includes an analyte region in its light-transmissive region, and presence of analyte in the analyte region affects output light when the optical cavity is tuned to a set of positions. Electrodes that cause deformation of the spacers can also be used to capacitively sense the distance between them. Control circuitry that provides tuning signals can cause continuous movement across a range of positions, allowing continuous photosensing of analyte-affected output light by a detector.
    • 可调光学腔可以通过两个反射表面之间的相对运动进行调节,例如通过变形连接在反射镜之间的弹性体隔离物或包括反射表面的其它光反射部件。 光腔结构包括其透光区域中的分析物区域,并且当光学腔被调谐到一组位置时,分析物区域中的分析物的存在影响输出光。 导致间隔物变形的电极也可用于电容地感测它们之间的距离。 提供调谐信号的控制电路可以在一定范围的位置上引起连续的运动,从而允许由检测器对被分析物影响的输出光进行持续的光敏。