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    • 14. 发明申请
    • BULK ACOUSTIC RESONATOR STRUCTURE COMPRISING HYBRID ELECTRODES
    • 包含混合电极的大容量声学谐振器结构
    • US20110237204A1
    • 2011-09-29
    • US12748640
    • 2010-03-29
    • Tiberiu JamnealaRichard C. Ruby
    • Tiberiu JamnealaRichard C. Ruby
    • H04B1/38H03H9/205
    • H03H9/584H03H9/587H03H9/589
    • In accordance with a representative embodiment, a BAW resonator structure, comprises a first BAW resonator, comprising: a first lower electrode having a first electrical resistance; a first upper electrode having a second electrical resistance; and a first piezoelectric layer disposed between the first lower electrode and the first upper electrode. The BAW resonator structure also comprises a second BAW resonator, comprising: a second lower electrode having the second electrical resistance; a second upper electrode having the first electrical resistance; and a second piezoelectric layer disposed between the second lower electrode and the second upper electrode. The BAW resonator structure also comprises an acoustic coupling layer disposed between the first BAW resonator and the second BAW resonator. The first electrical resistance is less than the second electrical resistance. An communication device comprising a coupled resonator filter (CRF) is also disclosed.
    • 根据代表性实施例,BAW谐振器结构包括第一BAW谐振器,包括:具有第一电阻的第一下电极; 具有第二电阻的第一上电极; 以及设置在第一下电极和第一上电极之间的第一压电层。 BAW谐振器结构还包括第二BAW谐振器,包括:具有第二电阻的第二下电极; 具有第一电阻的第二上电极; 以及设置在第二下电极和第二上电极之间的第二压电层。 BAW谐振器结构还包括设置在第一BAW谐振器和第二BAW谐振器之间的声耦合层。 第一电阻小于第二电阻。 还公开了一种包括耦合谐振滤波器(CRF)的通信设备。
    • 18. 发明授权
    • Film acoustically-coupled transformer
    • 薄膜声耦合变压器
    • US07391285B2
    • 2008-06-24
    • US10965637
    • 2004-10-13
    • John D. Larson, IIIRichard C. RubyStephen L. Ellis
    • John D. Larson, IIIRichard C. RubyStephen L. Ellis
    • H03H9/54
    • H03H9/605H03H9/02102H03H9/132H03H9/175H03H9/584H03H9/587H03H9/589
    • One embodiment of the film acoustically-coupled transformer (FACT) includes a decoupled stacked bulk acoustic resonator (DSBAR) having a lower film bulk acoustic resonator (FBAR) an upper FBAR stacked on the lower FBAR, and, between the FBARs, an acoustic decoupler comprising a layer of acoustic decoupling material. Each FBAR has opposed planar electrodes with a piezoelectric element between them. The FACT additionally has first terminals electrically connected to the electrodes of one FBAR and second terminals electrically connected to the electrodes of the other FBAR. Another embodiment has decoupled stacked bulk acoustic resonators (DSBARs), each as described above, a first electrical circuit interconnecting the lower FBARs, and a second electrical circuit interconnecting the upper FBARs. The FACT provides impedance transformation, can linking single-ended circuitry with balanced circuitry or vice versa and electrically isolates primary and secondary. Some embodiments are additionally electrically balanced.
    • 薄膜声耦合变压器(FACT)的一个实施例包括具有下薄膜体声波谐振器(FBAR)的解耦堆叠体声波谐振器(DSBAR),堆叠在下FBAR上的上FBAR,以及在FBAR之间,声解耦器 包括声去耦材料层。 每个FBAR具有相对的平面电极,它们之间具有压电元件。 FACT还具有电连接到一个FBAR的电极的第一端子和电连接到另一个FBAR的电极的第二端子。 另一个实施例已经解耦了堆叠的体声波谐振器(DSBAR),每个如上所述,将第一电路互连到下FBAR,以及互连上FBAR的第二电路。 FACT提供阻抗变换,可以将单端电路与平衡电路相连,反之亦然,并将初级和次级电隔离。 一些实施例另外电平衡。