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11. 发明申请

US20120297878A1 Micromechanical Angular Acceleration Sensor and Method for Measuring an Angular Acceleration 有权
标题翻译：微机械角加速度传感器和测量角加速度的方法
公开(公告)号：US20120297878A1
公开(公告)日：2012-11-29
申请号：US13479746
申请日：2012-05-24
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/097
CPC分类号： G01P15/0922 , H01L41/1132
摘要： A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
摘要翻译：公开了一种用于测量角加速度的微机械角加速度传感器。传感器包括基板，抗震块，至少一个悬架，其以可偏转的方式将地震质量固定到基板，以及用于测量角加速度的至少一个压阻和/或压电元件。压阻和/或压电元件布置在地震块的切口中。还公开了传感器的相应方法和用途。

12. 发明授权

US09164123B2 Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration 有权
标题翻译：微机械式旋转加速度传感器及旋转加速度检测方法
公开(公告)号：US09164123B2
公开(公告)日：2015-10-20
申请号：US13453425
申请日：2012-04-23
申请人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
发明人： Reinhard Neul , Torsten Ohms , Mirko Hattass , Daniel Christoph Meisel
IPC分类号： G01P15/00 , G01P15/097
CPC分类号： G01P15/097
摘要： The disclosure relates to a micromechanical rotary acceleration sensor including a substrate with at least one anchoring device and at least two flywheel masses. At least one of the flywheel masses is connected to at least one anchoring device by means of a coupling element. The at least one anchoring device is designed in such a manner that the at least two flywheel masses are elastically deflectable from a respective rest position about at least one axis of rotation. The at least two flywheel masses is designed in such a manner that they have different natural frequencies.
摘要翻译：本公开涉及一种微机械式旋转加速度传感器，其包括具有至少一个锚定装置和至少两个飞轮块的基板。至少一个飞轮质量通过联接元件连接到至少一个锚定装置。所述至少一个锚定装置被设计成使得所述至少两个飞轮块可以围绕至少一个旋转轴线从相应的静止位置弹性偏转。至少两个飞轮质量被设计成使得它们具有不同的固有频率。

13. 发明授权

US08875575B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08875575B2
公开(公告)日：2014-11-04
申请号：US13134024
申请日：2011-05-25
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56 , G01C19/5755
CPC分类号： G01C19/5755
摘要： A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.
摘要翻译：横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从科里奥利元件至少一个转子。

14. 发明授权

US08997566B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08997566B2
公开(公告)日：2015-04-07
申请号：US13116821
申请日：2011-05-26
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw rate sensor is described which includes a drive device, at least one Coriolis element, and a detection device having at least two detection elements which are coupled to one another with the aid of a coupling device, the drive device being connected to the Coriolis element for driving a vibration of the Coriolis element, and an additional coupling device which is connected to the detection device and to the Coriolis element for coupling a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration.
摘要翻译：描述了一种横摆速度传感器，其包括驱动装置，至少一个科里奥利元件和具有至少两个检测元件的检测装置，该至少两个检测元件借助耦合装置相互耦合，驱动装置连接到科里奥利用于驱动科里奥利元件的振动的元件，以及连接到检测装置和科里奥利斯元件的附加耦合装置，用于将Coriolis元件的振动平面中的偏转与检测装置沿垂直于振动。

15. 发明授权

US08943891B2 Yaw-rate sensor 有权
标题翻译：偏光率传感器
公开(公告)号：US08943891B2
公开(公告)日：2015-02-03
申请号：US13365740
申请日：2012-02-03
申请人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
发明人： Torsten Ohms , Burkhard Kuhlmann , Robert Sattler , Rolf Scheben , Daniel Christoph Meisel
IPC分类号： G01C19/56 , G01C19/5747
CPC分类号： G01C19/5747
摘要： A yaw-rate sensor and a method for operating a yaw-rate sensor having a first Coriolis element and a second Coriolis element are proposed, the yaw-rate sensor having a substrate having a main plane of extension, the yaw-rate sensor having a first drive element for driving the first Coriolis element in parallel to a second axis, the yaw-rate sensor having a second drive element for driving the second Coriolis element in parallel to the second axis, the yaw-rate sensor having detection means for detecting deflections of the first Coriolis element and of the second Coriolis element in parallel to a first axis due to a Coriolis force, the second axis being situated perpendicularly to the first axis, the first and second axis being situated in parallel to the main plane of extension, the first and second drive elements being mechanically coupled to each other via a drive coupling element.
摘要翻译：提出了一种摆动速率传感器和用于操作具有第一科里奥利元件和第二科里奥利元件的偏航率传感器的方法，所述偏航速率传感器具有具有主平面延伸的基板，偏航速率传感器具有用于与第二轴平行地驱动第一科里奥利元件的第一驱动元件，所述偏航速率传感器具有用于平行于所述第二轴驱动所述第二科里奥利元件的第二驱动元件，所述偏航率传感器具有用于检测偏转的检测装置的第一科里奥利元件和由于科里奥利力而与第一轴平行的第二科里奥利元件，第二轴线垂直于第一轴线定位，第一和第二轴线平行于主平面延伸，所述第一和第二驱动元件经由驱动联接元件彼此机械耦合。

16. 发明申请

US20110132087A1 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US20110132087A1
公开(公告)日：2011-06-09
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可由第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

17. 发明申请

US20110296913A1 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US20110296913A1
公开(公告)日：2011-12-08
申请号：US13134024
申请日：2011-05-25
申请人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
发明人： Torsten Ohms , Burkhard Kuhlmann , Daniel Christoph Meisel , Rolf Scheben
IPC分类号： G01C19/56
CPC分类号： G01C19/5755
摘要： A yaw rate sensor includes: at least one Coriolis element; a drive device connected to the Coriolis element and configured to drive a vibration of the Coriolis element; a detection device having at least one rotor; and a coupling device connected to the detection device and to the Coriolis element. The coupling device is configured to couple a deflection in the plane of vibration of the Coriolis element to the detection device in a direction orthogonal to the vibration, so that when the Coriolis element is deflected a torque for driving the at least one rotor is transmitted from the Coriolis element to the at least one rotor.
摘要翻译：横摆率传感器包括：至少一个科里奥利元件; 连接到科里奥利元件并被配置为驱动科里奥利元件的振动的驱动装置; 具有至少一个转子的检测装置; 以及连接到检测装置和科里奥利元件的耦合装置。联接装置被配置成将Coriolis元件的振动平面中的偏转与垂直于振动的方向耦合到检测装置，使得当科里奥利元件偏转时，用于驱动至少一个转子的转矩从科里奥利元件至少一个转子。

18. 发明授权

US08443668B2 Yaw rate sensor 有权
标题翻译：偏航率传感器
公开(公告)号：US08443668B2
公开(公告)日：2013-05-21
申请号：US12925750
申请日：2010-10-27
申请人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
发明人： Torsten Ohms , Burkhard Kuhlmann , Markus Heitz , Robert Sattler , Daniel Christoph Meisel , Thorsten Balslink
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： A yaw rate sensor having a substrate, a first Coriolis element and a second Coriolis element is described, the first Coriolis element being excitable to a first vibration by first excitation means, and the second Coriolis element being excitable to a second vibration by second excitation means, and the first and second Coriolis elements being connected to one another by a spring structure, and the spring structure also including at least one rocker structure, the rocker structure being anchored on the substrate by at least one spring element.
摘要翻译：描述了具有基板，第一科里奥利元件和第二科里奥利元件的偏航率传感器，第一科里奥利元件可由第一激励装置激发到第一振动，第二科里奥利元件可被第二激励装置激发到第二振动并且所述第一和第二科里奥利元件通过弹簧结构彼此连接，并且所述弹簧结构还包括至少一个摇臂结构，所述摇臂结构通过至少一个弹簧元件锚固在所述基板上。

19. 发明授权

US08683863B2 Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes 有权
标题翻译：具有两个敏感轴和耦合检测模式的微机械偏航率传感器
公开(公告)号：US08683863B2
公开(公告)日：2014-04-01
申请号：US12987732
申请日：2011-01-10
申请人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
发明人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
摘要翻译：在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构，第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

20. 发明申请

US20110185813A1 MICROMECHANICAL YAW RATE SENSOR HAVING TWO SENSITIVE AXES AND COUPLED DETECTION MODES 有权
标题翻译：具有两个敏感轴和耦合检测模式的微生物速率传感器
公开(公告)号：US20110185813A1
公开(公告)日：2011-08-04
申请号：US12987732
申请日：2011-01-10
申请人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
发明人： Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
IPC分类号： G01C19/56
CPC分类号： G01C19/5747
摘要： In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
摘要翻译：在具有主范围平面并具有平行于主范围平面布置的第一和第二部分结构的基板的偏航率传感器中，第一部分结构包括第一驱动结构，第二部分结构包括第二驱动结构，第一和第二部分结构可被驱动装置通过第一和第二驱动结构激发成与平行于主范围平面的第一轴平行的振荡，第一部分结构具有第一科里奥利元件，第二部分结构具有第二科里奥利元件，所述横摆率传感器的特征在于，所述第一和第二科里奥利元件可通过平行于垂直于所述第一轴线的第二轴线的科里奥利力移动，并且平行于垂直于所述第一轴线的第三轴线第一和第二轴，第二轴平行于主范围平面延伸，第一科里奥利元件连接到t 他通过耦合元件第二个科里奥利元件。

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