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    • 14. 发明授权
    • Imprint apparatus and method of manufacturing article
    • 印刷装置及其制造方法
    • US08703035B2
    • 2014-04-22
    • US13101614
    • 2011-05-05
    • Hiroshi Sato
    • Hiroshi Sato
    • B28B11/08
    • G03F9/7042B82Y10/00B82Y40/00G03F7/0002G03F9/7049G03F9/7076
    • An imprint apparatus includes a detector and an adjusting device. A second mark formed on a substrate includes a grating pattern having grating pitches in first and second directions which are respectively parallel to first and second axes which are parallel to a pattern surface of a mold and orthogonal to each other. A first mark formed on the mold includes a grating pattern having a grating pitch in the first direction. The first and second marks have different grating pitches in the first direction. The detector includes an image sensor, and an optical system which forms a moire fringe on an image sensing surface of the image sensor. The adjusting device adjusts, in a plane including the second axis and a third axis that is perpendicular to the first and second axes, an angle between the optical axis of the detector and the third axis.
    • 压印装置包括检测器和调节装置。 形成在基板上的第二标记包括在第一和第二方向上具有光栅间距的光栅图案,它们分别平行于与模具的图案表面平行并且彼此正交的第一和第二轴。 形成在模具上的第一标记包括在第一方向上具有光栅间距的光栅图案。 第一和第二标记在第一方向具有不同的光栅间距。 检测器包括图像传感器和在图像传感器的图像感测表面上形成莫尔条纹的光学系统。 调整装置在包括第二轴和垂直于第一和第二轴的第三轴的平面中调整检测器的光轴与第三轴之间的角度。