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    • 16. 发明授权
    • System and method for self-calibrating measurement
    • US06612737B1
    • 2003-09-02
    • US09475209
    • 1999-12-29
    • Peter E. Lobban
    • Peter E. Lobban
    • G01K718
    • G01K1/026G01K15/00
    • The present invention provides systems and methods for self-calibrated measurements, for example temperature sensing. The system includes a controller, a multiplexer of low on-resistance, at least two calibration reference resistors, and a current-to-frequency converter that performs self-calibrated temperature sensing with temperature sensing devices such as resistance temperature detectors (RTDs). In general, the system provides a self-calibrated temperature sensing by the current-to-frequency converter providing a constant voltage sequentially to at least two calibration resistors and one or more RTDs using switches of low on-resistance in the multiplexer, which is controlled by the controller. The value of one of the reference resistors provided is correlate to the resistive value of the RTD at the minimum temperature of the operating temperature range for the processing equipment to be monitored, the value of another reference resistor provided is correlate to the resistive value of the RTD at the maximum temperature of the operating temperature range for the processing equipment, and the values of the remaining reference resistors, if provided, may correlate to the resistive values of the RTD at selected intermediate temperatures within the temperature range for the processing equipment. The frequency output by the current-to-frequency converter varies directly with current variation and thus inversely with the resistance of the individual calibration resistor or RTD. The controller determines-composite resistance for the calibration resistors and RTDs inclusive of the other component connecting the calibration resistors and RTDs to the current-to-frequency converter, from the frequencies output by the current-to-frequency converter. A calculation is performed using these resistances to determine an accurate self-calibrated temperature for the RTDs and the equipment to which it is associated. Further, the present invention provides the measurement system may be constructed so as to provide self-calibrated temperature measurements of one or more locations in a processing chamber which may operate within different temperature ranges or to provide self-calibrated temperature measurements of one or more a processing chambers. The present invention may also provide even more accurate self-calibrated temperature measurements by utilizing multiple reference resistors so as to provide piecewise linear calibration within the temperature operating range of the processing equipment.