专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US5122251A High density plasma deposition and etching apparatus 失效
标题翻译：高密度等离子体沉积和蚀刻装置
公开(公告)号：US5122251A
公开(公告)日：1992-06-16
申请号：US650788
申请日：1991-02-04
申请人： Gregor A. Campbell , Robert W. Conn , David C. Pearson , Alexis P. deChambrier , Tatsuo Shoji
发明人： Gregor A. Campbell , Robert W. Conn , David C. Pearson , Alexis P. deChambrier , Tatsuo Shoji
IPC分类号： C23C14/34 , C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H05H1/46
CPC分类号： H01J37/3222 , H01J37/321 , H01J37/3211 , H01J37/3266 , H01J37/32688 , H05H1/46
摘要： A high density ionized plasma is generated in a source chamber using a single loop disposed in a plane that intercepts the central axis of the source chamber perpendicularly or at a lesser angle and spaced from the closed end of the chamber. With a longitudinal magnetic field and an inert or reactive gas injected into the source chamber, excitation of the antenna with RF energy in the 5 to 30 MHz establishes the M=0 excitation mode or components of both the M=0 and M=1 modes. Low frequency whistler waves are created which generate a uniform and high density plasma and high plasma current. The plasma source thus defined is used in combination with process chamber configurations in which static shaped or time modulated magnetic fields enhance the distribution and uniformity of the plasma at a substrate to be etched, deposited or sputtered.
摘要翻译：在源室中产生高密度离子化等离子体，其中使用单个环设置在垂直或以较小角度拦截源室的中心轴线并与室的封闭端间隔开的平面中。利用纵向磁场和注入到源室中的惰性或无功气体，以5至30MHz的RF能量激发天线，建立M = 0激励模式或M = 0和M = 1模式的分量。产生产生均匀和高密度等离子体和高等离子体电流的低频吹口哨波。这样定义的等离子体源与处理室配置结合使用，其中静态或时间调制的磁场增强要蚀刻，沉积或溅射的衬底上的等离子体的分布和均匀性。

12. 发明申请

US20100304046A1 PLASMA GENERATOR, PLASMA CONTROL METHOD AND METHOD OF PRODUCING SUBSTRATE 有权
标题翻译：等离子体发生器，等离子体控制方法和生产基材的方法
公开(公告)号：US20100304046A1
公开(公告)日：2010-12-02
申请号：US12836161
申请日：2010-07-14
申请人： Shoji Miyake , Akinori Ebe , Tatsuo Shoji , Yuichi Setsuhara
发明人： Shoji Miyake , Akinori Ebe , Tatsuo Shoji , Yuichi Setsuhara
IPC分类号： C23C16/52 , C23C16/00 , C23C16/505
CPC分类号： H01J37/321 , H05H1/46 , H05H2001/4667
摘要： The present invention aims to provide a plasma generator capable of creating a spatially uniform distribution of high-density plasma. This object is achieved by the following construction. Multiple antennas are located on the sidewall of a vacuum chamber, and a RF power source is connected to three or four antennas in parallel via a plate-shaped conductor. The length of the conductor of each antenna is shorter than the quarter wavelength of the induction electromagnetic wave generated within the vacuum chamber. Setting the length of the conductor of the antenna in such a manner prevents the occurrence of a standing wave and thereby maintains the uniformity of the plasma within the vacuum chamber. In addition, the plate-shaped conductor improves the heat-releasing efficiency, which also contributes to the suppression of the impedance.
摘要翻译：本发明的目的在于提供能够产生高密度等离子体的空间均匀分布的等离子体发生器。该目的通过以下结构实现。多个天线位于真空室的侧壁上，RF电源经由板状导体并联连接到三个或四个天线。每个天线的导体长度比真空室内产生的感应电磁波的四分之一波长短。以这种方式设置天线的导体的长度防止驻波的发生，从而保持等离子体在真空室内的均匀性。此外，板状导体提高了散热效率，这也有助于抑制阻抗。

13. 发明授权

US5072557A Device for fixing floor panels 失效
标题翻译：用于固定地板的装置
公开(公告)号：US5072557A
公开(公告)日：1991-12-17
申请号：US601658
申请日：1990-10-25
申请人： Hiromasa Naka , Norio Nakamura , Takehiko Okushima , Takao Okumura , Tatsuo Shoji , Tetsuo Tobikawa
发明人： Hiromasa Naka , Norio Nakamura , Takehiko Okushima , Takao Okumura , Tatsuo Shoji , Tetsuo Tobikawa
IPC分类号： E04F15/024
CPC分类号： E04F15/02476 , E04F15/02452
摘要： A device for fixing floor panels mounted on a surface of a base floor by means of support legs which permit vertical adjustment of the floor panels is provided. The fixing device comprises a retainer plate fixed to the base floor for receiving the support legs therein; a support member extending vertically from the retainer plate and having an internally threaded portion; a panel holder; and a bearing member for the panel holder. The bearing member includes one end thereof threaded into the internally threaded portion of the support member for rotatable movement of the bearing member relative to the retainer plate. The bearing member is adapted to be accessible through the floor panels for operation thereof. The panel holder is adapted to be engageable with the bearing member in order to fix the floor panels.

14. 发明授权

US4996804A Device and structure for supporting floor panels 失效
标题翻译：用于支撑地板的装置和结构
公开(公告)号：US4996804A
公开(公告)日：1991-03-05
申请号：US518545
申请日：1990-05-03
申请人： Hiromasa Naka , Takehiko Okushima , Takao Okumura , Tatsuo Shoji , Tetsuo Tobikawa
发明人： Hiromasa Naka , Takehiko Okushima , Takao Okumura , Tatsuo Shoji , Tetsuo Tobikawa
IPC分类号： E04F15/024
CPC分类号： E04F15/02482 , E04F15/02452
摘要： The present invention is a device for supporting floor panels in which when the floor panels are clamped by a single-operation type panel retainer, a retaining member of a vertically swingable panel retainer support on a stud bolt is urged downwardly by the resilient force of a compression spring washer interposed between the upper surface of the retainer member and the lower surface of the head portion of the stud bolt for tightly securing the floor panels to the panel pedestal.The present invention further provides a structure for supporting floor panels in which a supporting post is swingably raised on the pedestal base plate, side walls of corners of the floor panels placed on the panel pedestal being matchingly engaged with a guide wall of the panel pedestal support and mating projections of said panel pedestal being closely fitted into mating holes formed by embedding resin holders in said floor panels, whereby the floor panels are tightly secured by a panel retainer to the panel pedester.

15. 发明授权

US4990229A High density plasma deposition and etching apparatus 失效
标题翻译：高密度等离子体沉积和蚀刻装置
公开(公告)号：US4990229A
公开(公告)日：1991-02-05
申请号：US365533
申请日：1989-06-13
申请人： Gregor Campbell , Robert W. Conn , Tatsuo Shoji
发明人： Gregor Campbell , Robert W. Conn , Tatsuo Shoji
IPC分类号： C23C14/35 , C23C16/50 , C23F4/00 , H01J37/32 , H01L21/205 , H01L21/302 , H05H1/46
CPC分类号： H01J37/3211 , H01J37/321 , H01J37/3266 , H01J37/32688
摘要： The high density RF plasma generator of this invention uses special antenna configurations (15) to launch RF waves at low frequency such as 13.56 MHz along a magnetic field supplied by an external magnetic field generator (16.17) in a discharge space (14) where the working gas is introduced and which is used alone or in conjunction with a process chamber (18) where specimen substrates (20) are located to either deposit or etch films from a substrate or to sputter deposit films to a substrate. The plasma etching, deposition and/or sputtering system comprises the high density RF plasma generator, the external magnetic field, the gas injection and control system, the antenna system (15) and associated power supplies (48), the process chamber (18), and the means to couple plasma from the generator to substrates or targets, including magnetic means (36) to enhance plasma uniformity at the substrates (20) or targets (92).

16. 发明授权

US4922670A Free access floor and method of constructing the same 失效
标题翻译：免费通道楼及其构造方法
公开(公告)号：US4922670A
公开(公告)日：1990-05-08
申请号：US302319
申请日：1989-01-27
申请人： Hiromasa Naka , Norio Nakamura , Takehiko Okushima , Takao Okumura , Tatsuo Shoji
发明人： Hiromasa Naka , Norio Nakamura , Takehiko Okushima , Takao Okumura , Tatsuo Shoji
IPC分类号： E04F15/024
CPC分类号： E04F15/02452 , E04F15/02405 , E04F15/02458
摘要： The present invention relates to a double flooring structure which may be used to constitute the floor of a computer room or the like in a building. The double flooring structure has excellent constructibility, high earthquake resistance, a wide underfloor space and excellent resistant to deformation under load. The double flooring structure of the present invention comprises bases secured to a floor surface, columnar leg members pivotally standing on the bases, respectively, stringers each stretched between a pair of adjacent columnar leg members, floor panels supported on the stringers, and fastening means for securing the floor panels to the columnar leg members. The pivot point of each columnar leg member is disposed near the floor surface. When the floor panels are secured to the columnar leg members by the fastening means, the columnar leg members, the stringers and the floor panels constitute in combination one rigid body. Accordingly, a load which is applied to each floor panel is dispersed effectively and efficiently. If a lateral load is applied to the double flooring structure of the present invention, the columnar leg members are urged to pivot. However, since the pivot point of each columnar leg member is disposed near the floor surface, it is possible to minimize the bending moment that acts on that portion of each base which is bonded to the floor surface.
摘要翻译：本发明涉及一种双层地板结构，其可用于构建建筑物中的计算机房等的地板。双层地板结构具有优良的施工能力，抗震性能好，地板下空间大，耐荷变形性能优良。本发明的双层地板结构包括固定到地板表面的底座，分别枢转地竖立在基座上的柱形腿构件，各自延伸在一对相邻的柱状腿构件之间的桁条，支撑在桁条上的地板镶板，以及用于将地板固定到柱状腿部件上。每个柱状腿构件的枢转点设置在地板表面附近。当通过紧固装置将地板镶板固定到柱状腿构件时，柱状腿部构件，桁条和地板镶板组合有一个刚体。因此，能够有效且高效地分散施加于各层板的负荷。如果对本发明的双层地板结构施加横向载荷，则促使柱状腿构件枢转。然而，由于每个柱状腿构件的枢转点设置在地板表面附近，所以可以最小化作用在结合到地板表面的每个基座的该部分上的弯矩。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式