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11. 发明授权

US5200800A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5200800A
公开(公告)日：1993-04-06
申请号：US892732
申请日：1992-05-29
申请人： Shigeyuki Suda , Kenji Saitoh , Minoru Yoshii , Noriyuki Nose
发明人： Shigeyuki Suda , Kenji Saitoh , Minoru Yoshii , Noriyuki Nose
IPC分类号： G03F9/00
CPC分类号： G03F9/7076
摘要： A method of detecting a position of a substrate having an alignment mark includes the steps of projecting a radiation beam from an optical head to the alignment mark such that the alignment mark produces a signal beam on the basis of which the position of the substrate is detected, forming a reference mark on the substrate at a position different from that of the alignment mark, projecting a radiation beam from the optical head to the reference mark, such that the reference mark produces a reference beam, detecting the relative positional deviation of the optical head relative to the reference mark on the basis of the produced reference beam, and adjusting the relative position of the optical head and the alignment mark on the basis of the detected relative positional deviation and, after the adjustment, detecting the position of the substrate on the basis of the produced signal beam.
摘要翻译：检测具有对准标记的基板的位置的方法包括以下步骤：将来自光学头的辐射束投射到对准标记，使得对准标记产生信号光束，基于该信号光束检测基板的位置在与所述对准标记不同的位置的基板上形成参考标记，将来自所述光学头的辐射束投射到所述基准标记，使得所述基准标记产生参考光束，检测所述光学器件的相对位置偏差基于所生成的参考光束相对于参考标记的头部，并且基于检测到的相对位置偏差来调整光学头和对准标记的相对位置，并且在调整之后，检测基板的位置产生信号光束的基础。

12. 发明授权

US4887897A Eye examining apparatus 失效
标题翻译：眼睛检查装置
公开(公告)号：US4887897A
公开(公告)日：1989-12-19
申请号：US306225
申请日：1989-02-03
申请人： Noriyuki Nose , Yukichi Niwa
发明人： Noriyuki Nose , Yukichi Niwa
IPC分类号： A61B3/02 , A61B3/103
CPC分类号： A61B3/103
摘要： An eye examining apparatus has an eye examining lens of an elastic material opposed to an eye to be examined, and control means for causing the marginal portion of the eye examining lens to protrude or sink to thereby change the lens surface of the eye examining lens.
摘要翻译：眼睛检查装置具有与要检查的眼睛相对的弹性材料的眼睛检查透镜，以及用于使眼睛检查透镜的边缘部分突出或下沉从而改变眼睛检查透镜的透镜表面的控制装置。

13. 发明授权

US5033856A Three-dimensional shape measuring apparatus 失效
标题翻译：三维形状测量仪
公开(公告)号：US5033856A
公开(公告)日：1991-07-23
申请号：US517514
申请日：1990-04-30
申请人： Noriyuki Nose , Yukichi Niwa
发明人： Noriyuki Nose , Yukichi Niwa
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： A three-dimensional shape measuring apparatus having a high performance and a reduced drive energy is disclosed. At least a portion of an in-focus state detection optical system having an internal light source is movable while maintaining a light path near an object lens of the optical system. A distance of movement of the movable portion which is moved with auto-focusing operation for an object is measured and the three-dimensional shape is measured precisely with a high stroke. An inclination angle measuring optical system which shares the light path near the object lens with the in-focus state detection optical system and has an internal light source is provided in a common casing. Thus, the distance of movement of the movable part of the in-focus state detection optical system and an inclination angle are simultaneously measured so that the three-dimensional shape can be more precisely measured.
摘要翻译：公开了具有高性能和降低的驱动能量的三维形状测量装置。具有内部光源的聚焦状态检测光学系统的至少一部分可移动，同时保持靠近光学系统的物镜的光路。测量用于物体的自动聚焦操作移动的可移动部分的移动距离，并且以高冲程精确地测量三维形状。在共同的壳体内设置倾斜角度测量光学系统，该倾斜角度测量光学系统与聚焦状态检测光学系统共享物镜附近的光路并具有内部光源。因此，可以同时测量对焦状态检测光学系统的可动部分的移动距离和倾斜角度，从而可以更精确地测量三维形状。

14. 发明授权

US5116369A Composition for intraocular lens 失效
标题翻译：内镜镜片组成
公开(公告)号：US5116369A
公开(公告)日：1992-05-26
申请号：US582117
申请日：1990-09-14
申请人： Nobuo Kushibiki , Noriyuki Nose , Yukichi Niwa , Norio Kaneko
发明人： Nobuo Kushibiki , Noriyuki Nose , Yukichi Niwa , Norio Kaneko
IPC分类号： A61L27/00 , A61L27/26 , C08L83/04
CPC分类号： A61L27/14 , A61F2/16 , A61L27/26 , C08L83/04 , A61L2430/16 , C08G77/12 , C08G77/20
摘要： A composition for an intraocular lens comprising, an organopolysiloxane (A) having a viscosity of 10,000 cp or below and comprising at least one unsaturated aliphatic group, an organopolysiloxane (B) comprising at least three hydrogenated silyl units and a platinum compound; wherein the platinum compound based on its platinum content constitutes 10-200 ppm by weight of the composition. The composition provides a homogeneous intraocular lens even when it is injected into a crystalline capsule through a slender tube such as an injection needle.

15. 发明授权

US4842408A Phase shift measuring apparatus utilizing optical meterodyne techniques 失效
标题翻译：使用光学测距技术的相移测量装置
公开(公告)号：US4842408A
公开(公告)日：1989-06-27
申请号：US47258
申请日：1987-05-08
申请人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Yoshimichi Okada
发明人： Minoru Yoshii , Noriyuki Nose , Yukichi Niwa , Yoshimichi Okada
IPC分类号： G01J9/04 , G01N21/45
CPC分类号： G01J9/04 , G01N21/45
摘要： A phase shift measuring apparatus for detecting a phase shift of a light wave passing through an object to be measured, including:supplying device for supplying first and second light waves having different frequencies;optical device for directing the first light wave toward the object and combining the first light wave passing through the object and the second light wave to obtain a composite light wave;detecting device for receiving the composite light wave and detecting a measured beat signal; andmeasuring device for comprising the measured beat signal with a predetermined reference beat signal to measure a phase shift of the first light wave.A gradient index, a thickness distribution, and the like of an object can be obtained from the measured phase shift.
摘要翻译：一种用于检测通过被测量物体的光波的相移的相移测量装置，包括：用于提供具有不同频率的第一和第二光波的供应装置; 光学装置，用于将第一光波引导到物体并组合通过物体的第一光波和第二光波，以获得复合光波; 用于接收所述复合光波并检测测量的拍频信号的检测装置; 以及测量装置，用于包括具有预定参考节拍信号的所测量的节拍信号，以测量第一光波的相移。可以从所测量的相移中获得物体的梯度指数，厚度分布等。

16. 发明授权

US5028797A An alignment system for align first and second objects using alignment marks 失效
标题翻译：对准系统，用于使用对准标记对准第一和第二对象
公开(公告)号：US5028797A
公开(公告)日：1991-07-02
申请号：US413739
申请日：1989-09-28
申请人： Naoto Abe , Shigeyuki Suda , Koji Uda , Hirohisa Ohta , Noriyuki Nose
发明人： Naoto Abe , Shigeyuki Suda , Koji Uda , Hirohisa Ohta , Noriyuki Nose
IPC分类号： G01B11/00 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/7096 , G03F9/7049
摘要： An alignment system for aligning a mask and a wafer into a predetermined positional relationship uses alignment marks provided on the mask and the water. In this system, light from a light source is directed to the alignment marks of the mask and the wafer and, then, the light from these alignment marks is detected by an accumulation type photoelectric converting device, for alignment of the mask and the wafer. The accumulation time of the photoelectric converting device is controlled to be sufficiently longer than or to be equal to a multiple, by an integral number, of the period of relative and natural vibration of the mask and the wafer. This makes it possible to reduce the effect of the relative vibration of the mask and the wafer upon the alignment result and, therefore, makes it possible to enhance the alignment precision.

17. 发明授权

US5182615A Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US5182615A
公开(公告)日：1993-01-26
申请号：US563420
申请日：1990-08-07
申请人： Hiroshi Kurosawa , Koji Uda , Kunitaka Ozawa , Shunichi Uzawa , Nobutoshi Mizusawa , Shigeyuki Suda , Noriyuki Nose , Takao Kariya
发明人： Hiroshi Kurosawa , Koji Uda , Kunitaka Ozawa , Shunichi Uzawa , Nobutoshi Mizusawa , Shigeyuki Suda , Noriyuki Nose , Takao Kariya
IPC分类号： G03F7/20 , G03F9/00
CPC分类号： G03F7/70691 , G03F9/7049
摘要： An exposure apparatus for printing a pattern of a mask to a wafer includes a mask moving mechanism for moving the mask; a wafer moving mechanism or moving the wafer along a predetermined movement coordinate; a measuring system for measuring an error with respect to the movement coordinate, resulting from the movement of the mask by the mask moving mechanism; and a memorizing device for memorizing a data table prepared on the basis of the error measured by the measuring system; wherein the wafer moving mechanism uses the data in the data table when it moves the wafer for positioning of the wafer with respect to the mask.

18. 发明授权

US4802746A Variable-focus optical element and focus detecting device utilizing the same 失效
标题翻译：可变焦光学元件和利用其的焦点检测装置
公开(公告)号：US4802746A
公开(公告)日：1989-02-07
申请号：US832649
申请日：1986-02-25
申请人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
发明人： Takeshi Baba , Shigeyuki Suda , Noriyuki Nose , Eigo Kawakami , Toshiyuki Nakajima , Nobuo Kushibiki
IPC分类号： G02B3/14 , G02B7/36
CPC分类号： G02B7/36 , G02B3/14
摘要： A variable focus optical element comprises plural elastic members superposed in the axial direction and a deforming member having an aperture to cause the elastic member to protrude therefrom or descend therein thereby deforming the surface of the elastic members, and the modulus of elasticity of an elastic member at the protruding side is selected larger than that of another elastic member adjacent to first-mentioned elastic member at the protruding side. A focus detecting device comprises an imaging optical system having a variable-focus optical element, an image sensor provided at a determined image plane of the imaging optical system or an optically equivalent position, a sharpness detecting device for detecting the sharpness of the image from image signals obtained from the image sensor, and a device for varying the refractive power of the variable-focus optical element, and the focus state of the image on the image sensor is detected by comparing the sharpnesses detected by the sharpness detecting device at plural refractive powers of the variable-focus optical element.
摘要翻译：可变焦距光学元件包括沿轴向重叠的多个弹性构件和具有孔的变形构件，以使弹性构件从其突出或下降，从而使弹性构件的表面变形，并且弹性构件的弹性模量在突出侧的突出侧被选择为大于在突出侧与第一弹性构件相邻的另一个弹性构件的突出侧。焦点检测装置包括具有可变焦点光学元件的成像光学系统，设置在成像光学系统的确定的图像平面上的图像传感器或光学等效位置，用于从图像中检测图像的清晰度的锐度检测装置通过将由锐度检测装置检测的锐度与多个折射力进行比较来检测从图像传感器获得的信号和用于改变可变焦点光学元件的折射力的装置和图像在图像传感器上的聚焦状态的可变焦光学元件。

19. 发明授权

US5148037A Position detecting method and apparatus 失效
标题翻译：位置检测方法和装置
公开(公告)号：US5148037A
公开(公告)日：1992-09-15
申请号：US675059
申请日：1991-03-26
申请人： Shigeyuki Suda , Sakae Houryu , Noriyuki Nose
发明人： Shigeyuki Suda , Sakae Houryu , Noriyuki Nose
IPC分类号： G01B11/00 , G01B11/14 , G03F9/00 , H01L21/027 , H01L21/30
CPC分类号： G03F9/7049
摘要： A method and apparatus for detecting a positional relationship between first and second objects is disclosed, which includes a light source for projecting light to the first and second objects, a photodetecting system for detecting light from one of the first and second objects irradiated with the light from the light source, the detecting system being operable to detect first light whose position of incidence upon a predetermined plane is dependent upon the positional relationship of the first and second objects in a direction along the interval therebetween and in a direction perpendicular to the interval, second light whose position of incidence upon the predetermined plane is dependent upon the positional relationship of the first and second objects in the direction of the interval therebetween, and third light whose position of incidence upon the predetermined plane is independent of the positional relationship of the first and second objects in both the direction of the interval and the direction perpendicular to the interval, and a positional relationship detecting system for detecting the positional relationship of the first and second objects in the direction of the interval and the direction perpendicular to the interval, on the basis of the detection by the photodetecting system.

20. 发明授权

US5585923A Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means 失效
标题翻译：在通过误差检测装置的误差检测的基础上校正误差的同时测量位置偏差的方法和装置
公开(公告)号：US5585923A
公开(公告)日：1996-12-17
申请号：US314444
申请日：1994-09-28
申请人： Noriyuki Nose , Takeshi Miyachi , Kenji Saitoh , Koichi Sentoku , Takahiro Matsumoto
发明人： Noriyuki Nose , Takeshi Miyachi , Kenji Saitoh , Koichi Sentoku , Takahiro Matsumoto
IPC分类号： G03F7/20 , G03F9/00 , G01B9/02
CPC分类号： G03F7/70633 , G03F9/70
摘要： A method and apparatus for measuring the relative positional deviation between first and second diffraction gratings formed on an object includes determining the relative positional deviation of the first and second diffraction gratings while detecting and correcting an error produced in relation to detection of the positional deviation of the first and second diffraction gratings.
摘要翻译：用于测量形成在物体上的第一和第二衍射光栅之间的相对位置偏差的方法和装置包括确定第一和第二衍射光栅的相对位置偏差，同时检测和校正相对于检测到的位置偏差的检测产生的误差第一和第二衍射光栅。

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