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11. 发明授权

US07282084B2 Liquid media containing Lewis basic reactive compounds for storage and delivery of Lewis acidic gases 有权
标题翻译：含有路易斯碱性反应性化合物的液体介质用于储存和输送路易斯酸性气体
公开(公告)号：US07282084B2
公开(公告)日：2007-10-16
申请号：US10966803
申请日：2004-10-15
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein
IPC分类号： F17C11/00 , B01D19/00
CPC分类号： F17C11/00 , F17C2223/0123
摘要： This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis acidity, particularly hazardous specialty gases such as BF3 and diborane, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis basicity capable of effecting a reversible reaction between a gas having Lewis acidity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
摘要翻译：本发明涉及用于电子工业中的具有路易斯酸性的气体的低压储存和输送系统的改进，特别是危险特种气体如BF 3和乙硼烷。改进在于将气体储存在结合有能够在具有路易斯酸度的气体之间实现可逆反应的路易斯碱性的反应性化合物的液体中。反应性化合物包括溶解，悬浮，分散或以其它方式与非挥发性液体混合的反应性物质。

12. 发明授权

US07264013B2 Enhanced purge effect in gas conduit 有权
标题翻译：在气体管道中增强吹扫效果
公开(公告)号：US07264013B2
公开(公告)日：2007-09-04
申请号：US11128515
申请日：2005-05-13
申请人： Joseph Raymond Barker , Alexandre De Almeida Botelho , John Timothy Collins , Andrew Joseph Toth , Ronald Martin Pearlstein
发明人： Joseph Raymond Barker , Alexandre De Almeida Botelho , John Timothy Collins , Andrew Joseph Toth , Ronald Martin Pearlstein
IPC分类号： G05D7/00
CPC分类号： F17C13/04 , F17C2221/05 , F17C2223/0123 , F17C2223/035 , F17C2227/044 , F17C2227/045 , F17C2250/0452 , F17C2260/044 , F17C2270/0518 , Y02E60/321 , Y10T137/0419 , Y10T137/4259
摘要： The present invention provides a gas transfer apparatus designed for enhanced purging of a pigtail conduit and a process for effecting such purging. The apparatus comprises a surge chamber having a first end, a body and a second end, the first end in communication with the pigtail conduit. A body section of the surge chamber has a cross-section larger than the cross-section of the pigtail conduit. The second end is in communication with a vessel containing a gas source. The apparatus includes a purge gas source for delivery of a purge gas to the pigtail conduit whereby during an alternating cycle of pressurization of the pigtail conduit with the purge gas and depressurization, impurities can be removed from within the pigtail conduit.
摘要翻译：本发明提供一种气体输送装置，其设计用于增强猪尾管的清洗和进行这种净化的方法。该装置包括具有第一端，主体和第二端的缓冲室，第一端与尾纤管道连通。缓冲室的主体部分的横截面大于尾纤导管的横截面。第二端与含有气源的容器连通。该设备包括用于将净化气体输送到尾纤管道的净化气体源，由此在猪尾管道与净化气体的加压交替循环和减压期间，杂质可以从猪尾管内被去除。

13. 发明申请

US20090272938A1 Ionic Liquid Based Mixtures For Gas Storage and Delivery 有权
标题翻译：用于气体储存和输送的离子液体混合物
公开(公告)号：US20090272938A1
公开(公告)日：2009-11-05
申请号：US12493751
申请日：2009-06-29
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Diwakar Garg
IPC分类号： H01J7/18
CPC分类号： C01B3/001 , C01B9/08 , C01B13/0285 , C01B25/06 , C01B32/80 , F17C11/00 , F17C11/005 , F17C11/007 , Y02E60/321 , Y02E60/324
摘要： A mixture and method for the storage and delivery of a gas are disclosed herein. In one aspect, there is provided a mixture comprising: an ionic liquid comprising an anion and a cation, at least a portion of the gas that is disposed within and reversibly chemically reacted with the ionic liquid, and optionally an unreacted gas. In another aspect, there is provided a method for delivering a gas from a mixture comprising an ionic liquid and one or more gases comprising: reacting at least a portion of the gas with the ionic liquid to provide the mixture comprising a chemically reacted gas and an ionic liquid and separating the chemically reacted gas from the mixture wherein the chemically reacted gas after the separating step has substantially the same chemical identity as the chemically reacted gas prior to the reacting step.
摘要翻译：本文公开了用于储存和输送气体的混合物和方法。在一个方面，提供了一种混合物，其包含：包含阴离子和阳离子的离子液体，所述气体的至少一部分设置在离子液体内并可逆地与离子液体化学反应，以及任选的未反应气体。在另一方面，提供了一种从包含离子液体和一种或多种气体的混合物输送气体的方法，包括：使至少一部分气体与离子液体反应，以提供包含化学反应气体和离子液体并且从混合物中分离化学反应的气体，其中分离步骤之后的化学反应气体在反应步骤之前具有与化学反应气体基本上相同的化学同一性。

14. 发明授权

US07303607B2 Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases 有权
标题翻译：含有路易斯酸性反应性化合物的液体介质用于储存和输送路易斯碱性气体
公开(公告)号：US07303607B2
公开(公告)日：2007-12-04
申请号：US10867068
申请日：2004-06-14
申请人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Thomas Richard Gaffney
发明人： Daniel Joseph Tempel , Philip Bruce Henderson , Jeffrey Richard Brzozowski , Ronald Martin Pearlstein , Thomas Richard Gaffney
IPC分类号： F17C11/00 , B01D19/00
CPC分类号： F17C11/00 , F17C2223/0153 , F17C2270/0518
摘要： This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
摘要翻译：本发明涉及在电子工业中使用的具有路易斯碱性的气体的低压储存和输送系统的改进，特别是危险的特殊气体如磷化氢和胂。改进之处在于将气体储存在具有能够在具有路易斯碱性的气体之间产生可逆反应的路易斯酸度的反应性化合物的液体中。反应性化合物包括溶解，悬浮，分散或以其它方式与非挥发性液体混合的反应性物质。

15. 发明申请

US20050276733A1 Liquid media containing Lewis acidic reactive compounds for storage and delivery of Lewis basic gases 有权
标题翻译：含有路易斯酸性反应性化合物的液体介质用于储存和输送路易斯碱性气体
公开(公告)号：US20050276733A1
公开(公告)日：2005-12-15
申请号：US10867068
申请日：2004-06-14
申请人： Daniel Joseph Tempel , Philip Henderson , Jeffrey Brzozowski , Ronald Martin Pearlstein , Thomas Richard Gaffney
发明人： Daniel Joseph Tempel , Philip Henderson , Jeffrey Brzozowski , Ronald Martin Pearlstein , Thomas Richard Gaffney
IPC分类号： F17C11/00 , B01J8/02
CPC分类号： F17C11/00 , F17C2223/0153 , F17C2270/0518
摘要： This invention relates to an improvement in a low-pressure storage and delivery system for gases having Lewis basicity, particularly hazardous specialty gases such as phosphine and arsine, which are utilized in the electronics industry. The improvement resides in storing the gases in a liquid incorporating a reactive compound having Lewis acidity capable of effecting a reversible reaction between a gas having Lewis basicity. The reactive compound comprises a reactive species that is dissolved, suspended, dispersed, or otherwise mixed with a nonvolatile liquid.
摘要翻译：本发明涉及在电子工业中使用的具有路易斯碱性的气体的低压储存和输送系统的改进，特别是危险的特殊气体如磷化氢和胂。改进之处在于将气体储存在具有能够在具有路易斯碱性的气体之间产生可逆反应的路易斯酸度的反应性化合物的液体中。反应性化合物包括溶解，悬浮，分散或以其它方式与非挥发性液体混合的反应性物质。

16. 发明授权

US06814092B2 Systems and methods for conditioning ultra high purity gas bulk containers 有权
标题翻译：用于调节超高纯度气体散装容器的系统和方法
公开(公告)号：US06814092B2
公开(公告)日：2004-11-09
申请号：US10607897
申请日：2003-06-27
申请人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
发明人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
IPC分类号： B08B908
CPC分类号： B08B7/0064 , B08B3/00 , B08B9/08
摘要： A process and system for conditioning a bulk container for ultra-high purity liquefied gas. Vapor is generated in the container from a conditioning quantity of the ultra-high purity liquefied gas by imposing a temperature difference on the container so that the vapor condenses when a temperature difference is achieved. The resulting liquid reflux, e.g., the condensed liquid drips or flows back to the conditioning quantity of the liquified gas, washes or removes contaminants, e.g., particles, metal and moisture, from the interior surface of the container. A portion of the vapor is vented from the container for reclamation. The used conditioning liquid may also be reclaimed.

17. 发明授权

US06616769B2 Systems and methods for conditioning ultra high purity gas bulk containers 有权
标题翻译：用于调节超高纯度气体散装容器的系统和方法
公开(公告)号：US06616769B2
公开(公告)日：2003-09-09
申请号：US09966195
申请日：2001-09-28
申请人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
发明人： Anthony J. Lachawiec, Jr. , Vladimir Yliy Gershtein , Ronald Martin Pearlstein , Robert William Ford
IPC分类号： B08B908
CPC分类号： B08B7/0064 , B08B3/00 , B08B9/08
摘要： A process and system for conditioning a bulk container for ultra-high purity liquefied gas. Vapor is generated in the container from a conditioning quantity of the ultra-high purity liquefied gas by imposing a temperature difference on the container so that the vapor condenses when a temperature difference is achieved. The resulting liquid reflux, e.g., the condensed liquid drips or flows back to the conditioning quantity of the liquified gas, washes or removes contaminants, e.g., particles, metal and moisture, from the interior surface of the container. A portion of the vapor is vented from the container for reclamation. The used conditioning liquid may also be reclaimed.
摘要翻译：用于调节超高纯液化气体散装容器的方法和系统。通过在容器上施加温度差使超高纯度液化气体的调节量在容器中产生蒸汽，使得当达到温差时蒸汽冷凝。所产生的液体回流，例如冷凝的液体滴落或流回到液化气体的调节量，从容器的内表面洗涤或去除污染物，例如颗粒，金属和水分。蒸气的一部分从容器中排出用于回收。所使用的调理液也可以回收。

18. 发明授权

US06557591B2 Bulk gas built-in purifier with dual valve bulk container 有权
标题翻译：散装气体内置净化器，带双阀散装容器
公开(公告)号：US06557591B2
公开(公告)日：2003-05-06
申请号：US09906987
申请日：2001-07-17
申请人： Ronald Martin Pearlstein , Benjamin Lee Hertzler , Lawrence Paul Jarrett
发明人： Ronald Martin Pearlstein , Benjamin Lee Hertzler , Lawrence Paul Jarrett
IPC分类号： B65B120
CPC分类号： F17C13/005 , F17C9/00 , F17C2201/0109 , F17C2201/035 , F17C2203/0617 , F17C2205/0326 , F17C2205/0335 , F17C2205/0341 , F17C2223/0115 , F17C2223/0123 , F17C2223/0153 , F17C2223/045 , F17C2250/0636 , F17C2265/012 , F17C2270/0518
摘要： An apparatus for delivering a gaseous product includes a horizontal container having inlet and outlet ports, an elongated hollow tube inside the container, a purifying medium inside the tube, inlet and outlet control means adapted to control delivery of the fluid to the inlet port and to control delivery of a gaseous product from the outlet port. The tube has a first opening, a second opening spaced apart from the first opening, and an internal axis between the first and second openings. The first opening is in fluid communication with the outlet port and the second opening is in fluid communication with a vapor space in the container. A portion of the internal axis adjacent the second opening is at an angle greater than zero degrees relative to the horizontal longitudinal axis of the container. Each of the inlet and outlet control means preferably are single ported valves.
摘要翻译：用于输送气体产品的装置包括具有入口和出口的水平容器，容器内部的细长中空管，管内的净化介质，适于控制流体输送到入口的入口和出口控制装置，以及控制来自出口的气体产物的输送。管具有第一开口，与第一开口间隔开的第二开口以及第一和第二开口之间的内部轴线。第一开口与出口流体连通，第二开口与容器中的蒸汽空间流体连通。与第二开口相邻的内部轴线的一部分相对于容器的水平纵向轴线成大于零度的角度。入口和出口控制装置中的每一个优选地是单入口阀。

19. 发明授权

US07736420B2 Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom 有权
标题翻译：用于形成路易斯气体/液体体系的接触方法和从其中回收路易斯气体
公开(公告)号：US07736420B2
公开(公告)日：2010-06-15
申请号：US11437326
申请日：2006-05-19
申请人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
发明人： Wayne Thomas McDermott , Philip Bruce Henderson , Daniel Joseph Tempel , Ronald Martin Pearlstein , James Joseph Hart , Rosaleen Patricia Morris-Oskanian , Diwakar Garg
IPC分类号： B01D53/14
CPC分类号： B01D53/1493 , B01D53/1456 , B01D2258/0216 , C01B7/0706 , C01B7/093 , C01B7/135 , C01B7/191 , C01B9/00 , C01B17/16 , C01B19/04 , C01C1/003 , C01C3/06 , F17C11/00
摘要： The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.
摘要翻译：本发明涉及在相反特征的反应性液体中形成路易斯酸性或路易斯碱性气体的复合物的装置和方法的改进，以及所述络合物与从其中回收的路易斯气体相关的破碎（碎裂）。改进在于形成精细分离的反应液体的液滴并控制相反特性的所述Lewis气体的温度，压力和浓度以提供（a）在所述气体和反应性液体之间形成所述络合物，或（b）说复合物和反应液体的雾化液滴的回收。

20. 发明授权

US06508948B2 Cyanuric fluoride and related compounds for anisotropic etching 失效
标题翻译：氰化氟和相关化合物用于各向异性蚀刻
公开(公告)号：US06508948B2
公开(公告)日：2003-01-21
申请号：US09880157
申请日：2001-06-13
申请人： Brian Scott Felker , Ronald Martin Pearlstein
发明人： Brian Scott Felker , Ronald Martin Pearlstein
IPC分类号： H01L21302
CPC分类号： H01L21/3065 , H01L21/30621
摘要： A method for etching features into a substrate by removing substrate material from selected areas while leaving the substrate substantially unaffected in other areas is provided including the steps of providing the substrate to be etched into a process chamber, providing a patterned mask on the substrate as a guide for selective removal of the substrate, the substrate having a mask area and mask-free area, introducing a chemical species of halogenated heterocylic hydrocarbons into the process chamber, applying excitation energy to the process chamber to cause the chemical species to dissociate and form reactive ions and neutral species, and maintaining an electric potential gradient in an area adjacent the substrate to impose directionality and anisotropy to the etch.
摘要翻译：提供了一种通过从选定区域去除衬底材料而将衬底基本上不受其它区域影响而将特征蚀刻到衬底中的方法，包括以下步骤：将要蚀刻的衬底提供到处理室中，在衬底上提供图案化掩模作为用于选择性去除衬底的指导，衬底具有掩模区域和无掩模区域，将卤化杂环烃的化学物质引入到处理室中，向处理室施加激发能以使化学物质解离并形成反应性离子和中性物质，并且在邻近衬底的区域中保持电势梯度，以对蚀刻施加方向性和各向异性。

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