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11. 发明申请

US20050279285A1 Phosphor sheet manufacturing apparatus 审中-公开
标题翻译：磷光片制造装置
公开(公告)号：US20050279285A1
公开(公告)日：2005-12-22
申请号：US11149424
申请日：2005-06-10
申请人： Makoto Kashiwaya , Junji Nakada , Yukihisa Noguchi
发明人： Makoto Kashiwaya , Junji Nakada , Yukihisa Noguchi
IPC分类号： C23C14/06 , C23C14/24 , C23C14/50 , C23C14/54 , C23C16/00
CPC分类号： C23C14/50 , C23C14/0694 , C23C14/24 , C23C14/546
摘要： There is provided a stimulable phosphor sheet manufacturing apparatus which forms a stimulable phosphor layer through vacuum evaporation in a vacuum chamber. A substrate is conveyed linearly, evaporation sources are arranged in a direction perpendicular to a direction in which the substrate is conveyed, and/or the apparatus includes the evaporation sources relying on resistance heating and a gas introducing nozzle for introducing an inert gas into a vacuum chamber during film formation. A phosphor layer of highly uniform film thickness distribution can be formed.
摘要翻译：提供了一种可激发的荧光体片材制造装置，其通过真空室中的真空蒸发形成可刺激的荧光体层。基板被线性输送，蒸发源沿着与基板输送方向垂直的方向排列，和/或设备包括依靠电阻加热的蒸发源和用于将惰性气体引入真空的气体引入喷嘴室成膜期间。可以形成均匀的膜厚分布的荧光体层。

12. 发明授权

US5935335A Film-forming apparatus and film-forming method 失效
标题翻译：成膜装置及成膜方法
公开(公告)号：US5935335A
公开(公告)日：1999-08-10
申请号：US815053
申请日：1997-03-11
申请人： Makoto Kashiwaya , Junji Nakada
发明人： Makoto Kashiwaya , Junji Nakada
IPC分类号： C08J7/00 , C08J7/06 , C23C16/27 , C23C16/44 , C23C16/50 , C23C16/511 , C23C16/54 , H01J37/32 , H05H1/46 , H05H1/00
CPC分类号： H01J37/32192 , C23C16/511 , C23C16/545 , H01J37/32678 , H05H1/46
摘要： A film-forming apparatus for making it possible to form a thin film on a web-like high-molecular film substrate, comprising: a vacuum chamber provided with an evacuator; a gas introducing member for introducing a thin-film-forming gas into the vacuum chamber; a plasma generating member for generating plasma in the vacuum chamber; a substrate carrying member for carrying the substrate to the neighborhood of the plasma generated by the plasma generating member; and a bias voltage applying member for applying a desired bias voltage to the substrate. The plasma generating member is constituted by a microwave ECR plasma generating member including a microwave generating member for generating microwave, a microwave introducing and propagating member for coaxially introducing the generated microwave into the vacuum chamber and radially propagating the microwave in the vacuum chamber, and permanent magnets provided in the vacuum chamber for forming a magnetic field to cause electron cyclotron resonance with the introduced and propagated microwave.
摘要翻译：一种能够在网状高分子膜基板上形成薄膜的成膜装置，其特征在于，包括：真空室，设有排气管; 用于将薄膜形成气体引入真空室的气体导入部件; 用于在真空室中产生等离子体的等离子体产生部件; 用于将衬底运送到由等离子体产生元件产生的等离子体附近的衬底承载构件; 以及偏置电压施加部件，用于向基板施加期望的偏置电压。等离子体产生部件由微波ECR等离子体产生部件构成，微波ECR等离子体产生部件包括用于产生微波的微波产生部件，微波引入和传播部件，用于将产生的微波同时引入真空室并在真空室中径向传播微波，并且永久性地设置在真空室中的磁体，用于形成磁场，以引入与传播的微波的电子回旋共振。

13. 发明授权

US5595792A Method and apparatus for producing magnetic recording medium 失效
标题翻译：制造磁记录介质的方法和装置
公开(公告)号：US5595792A
公开(公告)日：1997-01-21
申请号：US518177
申请日：1995-08-23
申请人： Makoto Kashiwaya , Junji Nakada
发明人： Makoto Kashiwaya , Junji Nakada
IPC分类号： C23C16/50 , C23C16/26 , C23C16/44 , C23C16/509 , C23C16/54 , G11B5/84 , G11B5/85 , G11B5/851 , H05H1/02
CPC分类号： C23C16/509 , C23C16/26 , C23C16/4401 , C23C16/545 , G11B5/8408 , G11B5/85 , G11B5/851
摘要： A method and apparatus for producing a magnetic recording medium in which production of flakes in a film-forming process and the occurrence of arc discharge in the film-forming surface of a substrate are prevented to thereby attain improvement in the quality of the resulting film and in producing efficiency. A web-like substrate is made to run in a vacuum chamber while the substrate is arranged opposite to a sheet-shaped plasma stream. At the same time, a reactive gas is supplied to the plasma stream while an electric field is generated in a direction crossing the plasma stream and the substrate, which are arranged opposite to each other to thereby form a thin film on the plasma stream side surface of the substrate. Accordingly, the production of flakes is prevented, so that the occurrence of arc discharge in the film-forming surface of the substrate is prevented.
摘要翻译：一种用于制造磁性记录介质的方法和装置，其中防止了成膜过程中的薄片的生成和基板的成膜表面中的电弧放电的发生，从而获得了所得膜的质量的提高，在生产效率。使网状基板在真空室中运行，同时基板布置成与片状等离子体流相对。同时，在与等离子体流和基板交叉的方向上产生电场的同时向等离子体流供给反应性气体，该等离子体流和基板彼此相对设置，从而在等离子体流侧表面上形成薄膜的基底。因此，防止了薄片的生产，从而防止了在基板的成膜表面中产生电弧放电。

14. 发明授权

US07202007B2 Method of forming patterned films 有权
标题翻译：形成图案化膜的方法
公开(公告)号：US07202007B2
公开(公告)日：2007-04-10
申请号：US10456472
申请日：2003-06-09
申请人： Norio Shibata , Junji Nakada , Jun Fujinawa
发明人： Norio Shibata , Junji Nakada , Jun Fujinawa
IPC分类号： G03C5/58 , G03C11/12 , B41M3/12 , C23C16/00 , B05D3/00
CPC分类号： H01L21/76838 , C23C14/0005 , C23C14/086 , H01L21/28506 , H01L27/3211 , H01L51/0004 , H01L51/0013 , H01L51/005 , H01L51/0051 , H01L51/0059 , H01L51/0078 , H01L51/0081 , H01L51/0084 , H01L51/0097 , H01L51/56
摘要： This method forms a patterned film. The method prepares a transfer member having a transfer surface on which asperities are formed in accordance with a film pattern to be formed, performs stripping treatment on surfaces of at least ridges formed on the transfer surface of the transfer member, thereafter forms a thin film formed by a technology of vacuum film formation on the surfaces of the at least ridges formed on the transfer surface of the transfer member and transfers the thin film formed on the surfaces of at least ridges of the transfer member onto a substrate, thereby forming the patterned film on the substrate.
摘要翻译：该方法形成图案化膜。该方法制备具有根据要形成的膜图案形成有凹凸的转印面的转印部件，对形成在转印部件的转印面上的至少脊的表面进行剥离处理，然后形成薄膜通过在形成在转印部件的转印表面上的至少脊的表面上形成真空膜的技术，将形成在转印部件的至少脊的表面上的薄膜转印到基板上，从而形成图案化膜在基板上。

15. 发明授权

US07462927B2 Pattern film forming method and pattern film forming apparatus 失效
标题翻译：图案成膜方法和图案成膜装置
公开(公告)号：US07462927B2
公开(公告)日：2008-12-09
申请号：US11034805
申请日：2005-01-14
申请人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
发明人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
IPC分类号： H01L23/02 , H01L21/00 , H01L21/20
CPC分类号： C03C17/42 , B44C1/1733 , C03C17/3405 , H01L51/0013 , H01L51/56
摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.
摘要翻译：图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。图案成膜装置包括片材供应装置，按压装置和基板输送装置。可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

16. 发明申请

US20050150865A1 Pattern film forming method and pattern film forming apparatus 失效
标题翻译：图案成膜方法和图案成膜装置
公开(公告)号：US20050150865A1
公开(公告)日：2005-07-14
申请号：US11034805
申请日：2005-01-14
申请人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
发明人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
IPC分类号： B41M5/00 , B44C1/17 , C03C17/34 , C03C17/42 , H01L51/40 , H01L51/50 , H01L51/56 , H05B33/10 , C23F1/00 , B44C1/22 , C03C15/00 , H01L21/469
CPC分类号： C03C17/42 , B44C1/1733 , C03C17/3405 , H01L51/0013 , H01L51/56
摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.
摘要翻译：图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。图案成膜装置包括片材供应装置，按压装置和基板输送装置。可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

17. 发明授权

US08039373B2 Pattern film forming method and pattern film forming apparatus 有权
标题翻译：图案成膜方法和图案成膜装置
公开(公告)号：US08039373B2
公开(公告)日：2011-10-18
申请号：US11798708
申请日：2007-05-16
申请人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
发明人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
IPC分类号： H01L21/20 , H01L21/40
CPC分类号： C03C17/42 , B44C1/1733 , C03C17/3405 , H01L51/0013 , H01L51/56
摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.
摘要翻译：图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。图案成膜装置包括片材供应装置，按压装置和基板输送装置。可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

18. 发明申请

US20070224812A1 Pattern film forming method and pattern film forming apparatus 有权
标题翻译：图案成膜方法和图案成膜装置
公开(公告)号：US20070224812A1
公开(公告)日：2007-09-27
申请号：US11798708
申请日：2007-05-16
申请人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
发明人： Jun Fujinawa , Junji Nakada , Norio Shibata , Takashi Kataoka
IPC分类号： H01L21/44
CPC分类号： C03C17/42 , B44C1/1733 , C03C17/3405 , H01L51/0013 , H01L51/56
摘要： A pattern film forming method includes a step of producing a transfer sheet in which a thin film is formed on a surface of a sheet-shaped material and a step of pressing the thin film against a pattern film formation surface of the substrate with a pressing member having convex portions corresponding to the pattern film from a reverse surface of the transfer sheet opposite to the thin film or a reverse surface of the substrate opposite to the pattern film formation surface to transfer the thin film to the substrate. A pattern film forming apparatus includes a sheet supply device, a pressing device and a substrate transport device. A high-definition pattern film having a desired pattern and a sharp edge can be formed with high productivity.
摘要翻译：图案膜形成方法包括在片状材料的表面上形成薄膜的转印片材的制造工序以及利用加压部件将薄膜压在基板的图案成膜面上的工序具有与转印纸的与薄膜相反的反面的图案膜的凸部或与图案膜形成面相反的基板的反面，将薄膜转印到基板。图案成膜装置包括片材供应装置，按压装置和基板输送装置。可以高生产率形成具有期望图案和锋利边缘的高分辨率图案薄膜。

19. 发明申请

US20100247975A1 Method for producing double-sided evaporation film, double-sided evaporation film intermediate, double-sided evaporation film and magnetic recording medium support 审中-公开
标题翻译：双面蒸发膜生产方法，双面蒸发膜中间体，双面蒸发膜和磁记录介质支持体
公开(公告)号：US20100247975A1
公开(公告)日：2010-09-30
申请号：US12659362
申请日：2010-03-05
申请人： Hideaki Takeuchi , Junji Nakada
发明人： Hideaki Takeuchi , Junji Nakada
IPC分类号： G11B5/73 , C23C16/44
CPC分类号： G11B5/85 , B05D1/60 , B05D3/067 , B05D3/068 , B05D2502/00 , B05D2505/00 , C23C14/20 , C23C14/562
摘要： A method for producing a double-sided evaporation film by forming metal-containing evaporation films on both surfaces of a non-magnetic plastic substrate film by an evaporation system with an evaporation drum, includes, in the following order: forming a metal-containing evaporation film on a first surface of the substrate film; forming an organic substance film on the metal-containing evaporation film; and forming a metal-containing evaporation film on a second surface of the substrate film, the second surface being opposite to the first surface.
摘要翻译：通过具有蒸发鼓的蒸发系统在非磁性塑料基材膜的两面上形成含金属蒸镀膜的双面蒸发膜的制造方法按照以下顺序包括：形成含金属的蒸发在所述基材膜的第一表面上的膜; 在含金属蒸发膜上形成有机物膜; 以及在所述基板膜的第二表面上形成含金属蒸镀膜，所述第二表面与所述第一表面相对。

20. 发明申请

US20100242842A1 Evaporation system 审中-公开
标题翻译：蒸发系统
公开(公告)号：US20100242842A1
公开(公告)日：2010-09-30
申请号：US12656886
申请日：2010-02-18
申请人： Hideaki Takeuchi , Junji Nakada
发明人： Hideaki Takeuchi , Junji Nakada
IPC分类号： C23C16/00 , C23C14/34
CPC分类号： C23C14/562
摘要： An evaporation system for forming evaporation films on a substrate film, includes: a first drive portion which is driven to rotate to thereby feed out the substrate film; a second drive portion which is driven to rotate to thereby take up the substrate film conveyed to the second drive portion; film-forming rollers which are provided on a conveyance path of the substrate film conveyed between the first drive portion and the second drive portion and which support one surface of the substrate film onto circumferential surfaces of the film-forming rollers; evaporation portions which form the evaporation films on a surface of the substrate film opposite to the surface supported by the film-forming rollers; and a third drive portion as defined herein.
摘要翻译：一种用于在基底膜上形成蒸发膜的蒸发系统，包括：第一驱动部分，被驱动旋转从而送出基底膜; 第二驱动部，被驱动旋转，从而卷取输送到第二驱动部的基板; 成膜辊设置在在第一驱动部和第二驱动部之间输送的基板膜的输送路径上，并且将基板膜的一个表面支撑在成膜辊的圆周面上; 在与由成膜辊支撑的表面相反的基板膜的表面上形成蒸发膜的蒸发部分; 以及如本文所定义的第三驱动部分。

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