专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明申请

WO0181891A3 SAMPLER FOR ELIMINATING PARTICLE-RELATED ARTIFACTS FOR FLUE GAS MEASUREMENT 审中-公开
标题翻译：用于消除用于气体气体测量的颗粒相关文献的采样者
公开(公告)号：WO0181891A3
公开(公告)日：2002-03-21
申请号：PCT/US0113377
申请日：2001-04-25
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , ROBERTS DARYL L , MARPLE VIRGIL A , ROMAY FRANCISCO J
IPC分类号： G01N1/22 , G01N1/24 , B01D45/04 , B07B7/04
CPC分类号： G01N1/2208 , G01N1/2258 , G01N1/24 , G01N2001/227 , G01N2001/242
摘要： A sampler (10) for removing a sample of gas from a flue or stack (12) utilizes virtual impactor principles, together with a gas jet ejector (100, 105) to insure that the surfaces are kept free of particles. The gas that is discharged from the sampler (10) for analysis thus is not changed in character by contact with particles that may adhere to surfaces of the sampler.
摘要翻译：用于从烟道或烟囱（12）去除气体样本的采样器（10）利用虚拟冲击器原理与气体喷射喷射器（100,105）一起确保表面保持没有颗粒。因此，从采样器（10）排出的用于分析的气体的性质通过与可能附着在取样器的表面上的颗粒的接触而变化。

12. 发明专利

JP2007057532A Measurement of aerosol by dilution and particle count 审中-公开
标题翻译：通过稀释和颗粒计数测定气溶胶
公开(公告)号：JP2007057532A
公开(公告)日：2007-03-08
申请号：JP2006225983
申请日：2006-08-23
申请人： Msp Corp , エムエスピーコーポレーション
发明人： LIU BENJAMIN Y H
IPC分类号： G01N15/14 , G01N15/06
CPC分类号： G01N15/065 , G01N1/2252 , G01N2001/2223 , G01N2001/2264
摘要： PROBLEM TO BE SOLVED: To provide a condensed particle counter capable of being used for accurately counting single particles for the high-level measurement of aerosol. SOLUTION: The condensed particle counter is a device for measuring aerosol having a high concentration of particles and provided with both a diluter for forming a stream of aerosol diluted by diluting the concentration of particulate substance in a stream of sample aerosol and a sensor for detecting particles in the stream of diluted aerosol by steam condensation, droplet growth, and optical detection. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于精确计数单个颗粒以用于气溶胶的高水平测量的冷凝颗粒计数器。冷凝颗粒计数器是用于测量具有高浓度颗粒的气溶胶的装置，并且具有稀释剂，用于形成通过稀释样品气溶胶和传感器流中的颗粒物质的浓度而稀释的气溶胶用于通过蒸汽冷凝，液滴生长和光学检测来检测稀释气溶胶流中的颗粒。版权所有（C）2007，JPO＆INPIT

13. 发明公开

KR20150126584A 증기 및 가스 여과를 위한 방법 및 장치 审中-公开
标题翻译：用于蒸汽和气体过滤的方法和装置
公开(公告)号：KR20150126584A
公开(公告)日：2015-11-12
申请号：KR20150150463
申请日：2015-10-28
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： B01D39/20 , B01D39/14 , B01D46/00 , B01D46/24 , B01D46/42
CPC分类号： B01D39/2044 , B01D46/0021 , B01D46/2403 , C23C16/448
摘要： 가스여과장치및 방법은가스가들어오기위한입구및 가스가나가기위한출구를갖는하우징을포함한다. 하우징은가스로부터침전된입자들을제거하기위하여가스가통과하는활성여과영역을갖는소결금속섬유들로구성되는필터를포함한다. 필터는실질적으로두께및 활성여과영역을통한다공성이균일하다. 필터여재는하우징내의금속구조체에밀봉되고금속구조체는가스가통과하는것을허용하기위하여개구부를갖는다. 증기/가스혼합물을만드는방법은증기/가스혼합물이통과하는소결금속섬유들로구성되는필터를포함하는하우징내의개구부를통하여빠져나가는증기/가스혼합물을형성하기위하여가스로증기를생산하는단계를포함한다.
摘要翻译：用于蒸气和气体过滤的方法和装置包括具有气体流入的入口的壳体和气体流出的出口。壳体包括由具有气体进入的有源过滤区域的烧结金属纤维构成的过滤器，用于除去从气体沉积的颗粒。过滤器通过活性过滤区域具有基本均匀的厚度和孔隙率。过滤介质被密封在壳体中的金属结构中，并且金属结构具有允许气体通过的开口。制造蒸汽/气体混合物的方法包括用气体生成蒸汽的步骤，用于形成通过壳体中的开口排出的蒸汽/气体混合物，其包括形成有气/气混合物通过的烧结金属纤维的过滤器。

14. 发明专利

JP2002355584A APPARATUS FOR DEPOSITING PARTICLES ON SURFACE 审中-公开
公开(公告)号：JP2002355584A
公开(公告)日：2002-12-10
申请号：JP2002021269
申请日：2002-01-30
申请人： MSP CORP
发明人： SUN JAMES J , LIU BENJAMIN Y H
IPC分类号： B05B7/30 , B05B7/00 , G01N15/02
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for depositing particles uniformly onto a substrate, particularly on a semiconductor wafer. SOLUTION: The deposition apparatus 10 is used to deposit the particles onto the substrate such as the wafer in a deposition chamber 15. The particles are carried in an aerosol generated by an atomizer 20 provided with an impaction plate 22 for removing large sized particles before the aerosol is discharged and the atomizer 20 has output for supplying the particles to the deposition chamber 15 through a particle classifier. The aerosol having the classified particles inside is mixed with a clean dry gas before being discharged to the deposition chamber 15 and various branched pipes of a flow pipe are used to turn the aerosol toward the deposition chamber 15 selectively without classifying the particles. The pipe carrying the aerosol is connected to a vacuum source 16 at first and the vacuum source 16 sucks the aerosol adjacent to the deposition chamber rapidly to avoid the delay of the deposition cycle.

15. 发明专利

JP2002253996A SUSPENSION HOUSING VESSEL FOR SPRAYER 审中-公开
公开(公告)号：JP2002253996A
公开(公告)日：2002-09-10
申请号：JP2002021029
申请日：2002-01-30
申请人： MSP CORP
发明人： SUN JAMES J , LIU BENJAMIN Y H , ROSEN MICHAEL J
IPC分类号： B05B5/025 , B05B17/06 , B05D3/12 , H01L21/00
摘要： PROBLEM TO BE SOLVED: To provide a suspension housing vessel for sprayer, which is constituted so that a high voltage connection part provided in a piezoelectric converter provided at the bottom of the vessel to vibrate a suspension in the vessel is surely insulated from users. SOLUTION: The high voltage connection part 32 connected to the piezoelectric converter 22 is mounted in an insulating block in a recessed part formed by a bottom skirt 25 of the vessel 10. A cup-shaped insulating sleeve 41 is engaged with the periphery of the skirt 25 and the high voltage connection part is insulated from the outside.

16. 发明专利

JP2014145789A Electrical ionizer for aerosol charge adjustment and measurement 审中-公开
标题翻译：用于航空器充电调节和测量的电离离子
公开(公告)号：JP2014145789A
公开(公告)日：2014-08-14
申请号：JP2014106673
申请日：2014-05-23
申请人： Msp Corp , エムエスピーコーポレーション
发明人： DICK WILLIAM , ROMAY FRANCISCO J , LIU BENJAMIN Y H
IPC分类号： G01N15/02 , G01N27/60 , G01N27/62
CPC分类号： B03C3/38
摘要： PROBLEM TO BE SOLVED: To provide an electrical ionizer capable of generating a charge distribution similar to a Boltzmann distribution generated by a radioactive ionizer, in order to perform accurate aerosol measurement by DMS.SOLUTION: An apparatus for exposing particles in a gas to ions in order to cause the charge on the particles to change comprises: a chamber which has an inlet for the gas to enter and an outlet for the gas to exit and is surrounded by an enclosure having a conductive wall which is held at a ground potential; and an electrode which has an exposed tip being in contact with the gas in the chamber and is held at a potential different from the ground potential in a state where the exposed tip is arranged adjacently to one section of the conductive wall. The inlet and outlet define a gas flow path from the inlet to the outlet, and the electrode is connected to a source of a voltage sufficient to cause a corona discharge to bring about formation of ions in the chamber.
摘要翻译：要解决的问题：提供能够产生类似于由放射性电离器产生的玻尔兹曼分布的电荷分布的电离器，以便通过DMS进行精确的气溶胶测量。解决方案：一种用于将气体中的颗粒暴露于离子的装置导致颗粒上的电荷改变包括：具有用于气体进入的入口和用于气体出口的出口的腔室，并且被具有保持在地电位的导电壁的外壳包围; 以及电极，其具有与所述室中的气体接触的暴露尖端，并且在所述暴露尖端与所述导电壁的一个部分相邻地布置的状态下保持在与所述接地电位不同的电位。入口和出口限定从入口到出口的气体流动路径，并且电极连接到足以引起电晕放电以在室中形成离子的电压源。

17. 发明专利

JP2013253312A METHOD AND APPARATUS FOR VAPOR CONDENSATION AND RECOVERY 审中-公开
公开(公告)号：JP2013253312A
公开(公告)日：2013-12-19
申请号：JP2012260791
申请日：2012-11-29
申请人： MSP CORP
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： C23C16/44 , B01D5/00 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process.SOLUTION: A gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces 160, 170 in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation. The housing is maintained at a temperature sufficient for the precursor vapor to condense and form the precursor liquid.

18. 发明专利

JP2013210095A Liquid flow control for film deposition 有权
标题翻译：用于膜沉积的液体流量控制
公开(公告)号：JP2013210095A
公开(公告)日：2013-10-10
申请号：JP2013048065
申请日：2013-03-11
申请人： Msp Corp , エムエスピーコーポレーション
发明人： LIU BENJAMIN Y H , DINH THUC M , MA YAMIN
IPC分类号： F16K7/14 , F16K7/17 , F16K23/00 , F16K31/02 , F16K31/122 , G01F1/00 , G01F1/68 , G01F1/84
CPC分类号： H01L21/02104 , F16K7/14 , F16K31/007 , F16K31/1221 , Y10T137/0357 , Y10T137/7722 , Y10T137/7759
摘要： PROBLEM TO BE SOLVED: To provide a control valve intended to improve controllability and to reduce a dead volume, in a flow control valve used in a process of manufacturing a semiconductor the like.SOLUTION: In an apparatus for controlling a liquid flow, controlled fluid guided from an inlet flow path 240 is made variable by control by a piezoelectric transducer 310 of a distance between a lower surface 222 of a diaphragm 220 and an orifice inlet 245, and a gas outlet 300 is provided on an outer circumference of an outlet 255 of an orifice 250. A jet flow of gas shears and eliminates the drop-shaped controlled fluid accumulated in the orifice outlet 255 by a capillary phenomenon, so that a control amount of the diaphragm 220 can be surely reflected on a controlled fluid amount.
摘要翻译：要解决的问题：提供一种用于在制造半导体等的过程中使用的流量控制阀中提高可控制性和减少死体积的控制阀。解决方案：在用于控制液体流量的装置中，受控流体由入口流路240引导的压力变换器310由隔膜220的下表面222和孔入口245之间的距离的压电换能器310进行控制，并且气体出口300设置在出口255的外周上气流剪切机的喷射流，并且通过毛细管现象消除了积聚在孔口出口255中的液滴状受控流体，从而能够可靠地以受控流体量反映膜片220的控制量。

19. 发明专利

JP2011185939A Electrical ionizer for aerosol charge conditioning and measurement 有权
标题翻译：用于航空器充电调节和测量的电离离子
公开(公告)号：JP2011185939A
公开(公告)日：2011-09-22
申请号：JP2011052188
申请日：2011-03-09
申请人： Msp Corp , エムエスピーコーポレーション
发明人： DICK WILLIAM , ROMAY FRANCISCO J , LIU BENJAMIN Y H
IPC分类号： G01N15/02
CPC分类号： B03C3/38
摘要： PROBLEM TO BE SOLVED: To provide an electrical ionizer that generates a charge distribution similar to Boltzmann distribution generated by a radioactive ionizer for an accurate measurement of aerosol by DMS.
SOLUTION: The electrical ionizer exposes particles in a gas to an ion in order to cause the charge on the particles to change, and comprises a chamber with an inlet for the gas to enter and an outlet for the gas to exit. The electrical ionizer includes: the chamber surrounded by an enclosure with a conductive wall, wherein the wall is held at a ground potential; and an electrode with an exposed tip coming into contact with the gas in the chamber, wherein the electrode is held at a different potential from the conductive wall, while the exposed tip is disposed adjacent to one region of the conductive wall. The inlet and outlet define a gas flow path from the inlet to the outlet. The electrode is connected to a source of voltage sufficient to cause a corona discharge to occur forming ions in the chamber.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种电离器，其产生类似于由放射性电离器产生的玻尔兹曼分布的电荷分布，以便通过DMS精确测量气溶胶。解决方案：电离器将气体中的颗粒暴露于离子，以使颗粒上的电荷改变，并且包括具有用于气体进入的入口和用于气体排出的出口的室。电离器包括：由具有导电壁的外壳围绕的腔室，其中该壁保持在地电位; 以及具有暴露尖端的电极与腔室中的气体接触，其中电极被保持在与导电壁不同的电位，而暴露尖端邻近导电壁的一个区域设置。入口和出口限定从入口到出口的气体流动路径。电极连接到足以引起在腔室中形成离子的电晕放电的电压源。版权所有（C）2011，JPO＆INPIT

20. 发明专利

JP2004301689A Wide-range particle counter 有权
公开(公告)号：JP2004301689A
公开(公告)日：2004-10-28
申请号：JP2003095423
申请日：2003-03-31
申请人： Msp Corp , エムエスピー・コーポレーション
发明人： LIU BENJAMIN Y H
IPC分类号： G01N15/02 , G01N15/14
摘要： PROBLEM TO BE SOLVED: To measure aerosol with high accuracy and with high reliability over a wide particle size range.
SOLUTION: This wide-range particle counter 10 has partitions for separately detecting bulky particles and minute particles in the aerosol. Bulky particles are counted by an optical particle counter to determine their sizes. Minute particles are classified by a differential mobility analyzer to determine their sizes, then passed through an evaporator and a condenser, and counted. The use of the different partitions makes it possible to count and measure the wide ranging particle sizes with high accuracy and with high reliability in a single device.
COPYRIGHT: (C)2005,JPO&NCIPI

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式