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11. 发明授权

US5741560A Method for preparing a substrate for a magnetic disk 失效
公开(公告)号：US5741560A
公开(公告)日：1998-04-21
申请号：US740945
申请日：1996-11-05
申请人： Caroline A. Ross
发明人： Caroline A. Ross
IPC分类号： G11B5/66 , G11B5/64 , G11B5/73 , G11B5/738 , G11B5/84 , B05D3/00
CPC分类号： G11B5/7325 , G11B5/8404 , G11B5/8408
摘要： A method for manufacturing a magnetic disk comprises the step of depositing a metallic layer on a glass substrate and laser texturing the metallic layer. The magnetic disk is then completed by deposition of (a) an underlayer such as Cr or sputtered NiP, (b) a magnetic layer such as a Co or Fe alloy, and (c) a protective overcoat such as ZrO.sub.2, carbon or hydrogenated carbon. By providing the above-mentioned metallic layer, laser texturing can now be used in conjunction with glass substrates.

12. 发明授权

US08749871B2 On-chip miniature optical isolator 有权
标题翻译：片上微型光隔离器
公开(公告)号：US08749871B2
公开(公告)日：2014-06-10
申请号：US13414289
申请日：2012-03-07
申请人： Juan C. Montoya , Steven J. Spector , Reuel Swint , Caroline A. Ross
发明人： Juan C. Montoya , Steven J. Spector , Reuel Swint , Caroline A. Ross
IPC分类号： G02F1/09
CPC分类号： G02F1/093 , G02F1/0955 , G02F2203/15 , Y10T29/49826
摘要： An optical structure for generating nonreciprocal loss is provided that includes a first substrate layer and a magneto-optical layer positioned on the first substrate layer. The magneto-optical layer achieves nonreciprocity with application of an external magnetic field so as to produce resonantly enhanced nonreciprocal loss.
摘要翻译：提供了一种用于产生不可逆损耗的光学结构，其包括位于第一基底层上的第一基底层和磁光层。磁光层通过施加外部磁场实现不可逆性，从而产生共振增强的非互易损耗。

13. 发明授权

US08147914B2 Orientation-controlled self-assembled nanolithography using a block copolymer 有权
标题翻译：使用嵌段共聚物的取向控制的自组装纳米光刻技术
公开(公告)号：US08147914B2
公开(公告)日：2012-04-03
申请号：US12137016
申请日：2008-06-11
申请人： Yeon Sik Jung , Caroline A. Ross
发明人： Yeon Sik Jung , Caroline A. Ross
IPC分类号： B05D3/02
CPC分类号： B82Y30/00 , B82Y10/00 , B82Y40/00 , C08L53/00 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/31 , C08L2666/02
摘要： Disclosed is a structure made of a trench patterned substrate having a pre-determined trench period and a pre-determined mesa to trench width ratio, and a block copolymer on top of the trench patterned substrate. The block copolymer has at least an organic block and a silicon-containing block, wherein the block copolymer can have either perpendicular or parallel cylinders. The structure is annealed under a pre-determined vapor pressure for a predetermined annealing time period, wherein the pre-determined trench period, the pre-determined mesa to trench width ratio, the predetermined vapor pressure and the predetermined annealing time period are chosen such that cylinders formed in the block copolymer are either perpendicular or parallel with respect to the trench-patterned substrate. A method is also described to form the above-mentioned structure.
摘要翻译：公开了由沟槽图案化衬底制成的结构，其具有预定的沟槽周期和预定的台面与沟槽宽度比，以及在沟槽图案化衬底的顶部上的嵌段共聚物。嵌段共聚物至少具有有机嵌段和含硅嵌段，其中嵌段共聚物可以具有垂直或平行的圆柱体。该结构在预定的蒸汽压力下退火预定的退火时间段，其中预定沟槽周期，预定的台面与沟槽宽度比，预定的蒸汽压力和预定的退火时间间隔被选择为使得形成在嵌段共聚物中的圆柱体相对于沟槽图案化的衬底垂直或平行。还描述了形成上述结构的方法。

14. 发明申请

US20120009390A1 GUIDED SELF-ASSEMBLY OF BLOCK COPOLYMER LINE STRUCTURES FOR INTEGRATED CIRCUIT INTERCONNECTS 有权
标题翻译：用于集成电路互连的块状共聚物线结构的指导自组装
公开(公告)号：US20120009390A1
公开(公告)日：2012-01-12
申请号：US12885051
申请日：2010-09-17
申请人： Joel K. W. Yang , Karl K. Berggren , Yeon Sik Jung , Caroline A. Ross
发明人： Joel K. W. Yang , Karl K. Berggren , Yeon Sik Jung , Caroline A. Ross
IPC分类号： B32B5/00 , G03F7/20
CPC分类号： G03F7/40 , B81C1/00031 , B81C2201/0149 , B82Y10/00 , B82Y40/00 , G03F7/0002 , Y10T428/24669
摘要： Complex self-assembled patterns can be created using a sparse template and local changes to the shape or distribution of the posts of the template to direct pattern generation of block copolymer. The post spacing in the template is formed commensurate with the equilibrium periodicity of the block copolymer, which controls the orientation of the linear features. Further, the posts can be arranged such that the template occupies only a few percent of the area of the final self-assembled patterns. Local aperiodic features can be introduced by changing the period or motif of the lattice or by adding guiding posts. According to one embodiment, an array of carefully spaced and shaped posts, prepared by electron-beam patterning of an inorganic resist, can be used to template complex patterns in a cylindrical-morphology block copolymer. These complex self-assembled patterns can form a mask used in fabrication processes of arbitrary structures such as interconnect layouts.
摘要翻译：可以使用稀疏模板创建复杂的自组装图案，并且对模板的柱的形状或分布进行局部变化以引导嵌段共聚物的图案生成。模板中的柱间距与嵌段共聚物的平衡周期相一致，嵌段共聚物控制线性特征的取向。此外，柱可以被布置成使得模板仅占最终自组装图案的面积的百分之几。可以通过改变晶格的周期或图案或添加引导柱来引入局部非周期特征。根据一个实施例，可以使用通过无机抗蚀剂的电子束图案化制备的仔细间隔和形状的柱的阵列来模制圆柱形形态嵌段共聚物中的复杂图案。这些复杂的自组装图案可以形成用于诸如互连布局的任意结构的制造工艺中的掩模。

15. 发明授权

US5871621A Method of fabricating a textured magnetic storage disk 失效
标题翻译：制造纹理磁存储盘的方法
公开(公告)号：US5871621A
公开(公告)日：1999-02-16
申请号：US313704
申请日：1994-09-27
申请人： Caroline A. Ross
发明人： Caroline A. Ross
IPC分类号： G11B5/82 , G11B5/64 , G11B5/73 , G11B5/738 , G11B5/84 , C23C14/34 , B05D5/12
CPC分类号： G11B5/7325 , G11B5/8404
摘要： A magnetic disk storage medium (10) includes a smooth non-magnetic substrate (11) having surface roughened by sputter-depositing a continuous nonmagnetic rough thin film ("texture film") (14) over the substrate. The sputter conditions and composition of the texture film (14) are chosen to give a desired roughness and areal density of asperities. A sputtered adhesion layer (12) and/or a sputtered capping layer (15) are included to control the growth of the texture film and to improve its mechanical properties, respectively. A non-magnetic underlayer, a magnetic layer and a protective layer are then sputtered sequentially over the roughened substrate.
摘要翻译：磁盘存储介质（10）包括通过在衬底上溅射沉积连续的非磁性粗糙薄膜（“纹理膜”）（14）而具有粗糙表面的平滑非磁性衬底（11）。选择纹理膜（14）的溅射条件和组成以产生所需的粗糙度和粗糙度的面密度。包括溅射粘附层（12）和/或溅射覆盖层（15）以分别控制纹理膜的生长并提高其机械性能。然后将非磁性底层，磁性层和保护层依次溅射在粗糙化的基底上。

16. 发明申请

US20100239819A1 FORMATION OF CLOSE-PACKED SPHERE ARRAYS IN V-SHAPED GROOVES 有权
标题翻译：在V型格栅中形成紧密包装的球面阵列
公开(公告)号：US20100239819A1
公开(公告)日：2010-09-23
申请号：US12795318
申请日：2010-06-07
申请人： Peng-Wei Chuang , Caroline A. Ross
发明人： Peng-Wei Chuang , Caroline A. Ross
IPC分类号： B32B3/28 , B32B3/10
CPC分类号： B81C1/00031 , B81C2201/0149 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/2457 , Y10T428/2462
摘要： The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
摘要翻译：本发明涉及将球形形态嵌段共聚物自身组装成基材的V形槽。虽然球形形态嵌段共聚物通常以体积形成体心立方体系（bcc）球阵列，但是V形槽促进形成良好排列的面心立方体（fcc）球阵列。在一个实施例中，fcc球阵列的（111）面平行于V形槽的成角度的侧壁。 fcc球阵列的（100）平面平行于衬底的顶表面，并且可以在相邻球体之间显示正方形对称。该方形对称性与在球形畴的单层中看到的六边形对称不同，并且是用于光刻应用的有用几何形状，特别是在半导体应用中使用的那些。

17. 发明授权

US07790045B1 Formation of close-packed sphere arrays in V-shaped grooves 有权
标题翻译：在V形槽中形成紧密堆积的球形阵列
公开(公告)号：US07790045B1
公开(公告)日：2010-09-07
申请号：US11854872
申请日：2007-09-13
申请人： Peng-Wei Chuang , Caroline A. Ross
发明人： Peng-Wei Chuang , Caroline A. Ross
IPC分类号： B44C1/22 , B05D3/00
CPC分类号： B81C1/00031 , B81C2201/0149 , Y10S977/888 , Y10S977/895 , Y10S977/90 , Y10T428/2457 , Y10T428/2462
摘要： The present invention relates to the self-assembly of a spherical-morphology block copolymer into V-shaped grooves of a substrate. Although spherical morphology block copolymers typically form a body-centered cubic system (bcc) sphere array in bulk, the V-shaped grooves promote the formation of a face-centered cubic system (fcc) sphere array that is well ordered. In one embodiment, the (111) planes of the fcc sphere array are parallel to the angled side walls of the V-shaped groove. The (100) plane of the fcc sphere array is parallel to the top surface of the substrate, and may show a square symmetry among adjacent spheres. This square symmetry is unlike the hexagonal symmetry seen in monolayers of spherical domains and is a useful geometry for lithography applications, especially those used in semiconductor applications.
摘要翻译：本发明涉及将球形形态嵌段共聚物自身组装成基材的V形槽。虽然球形形态嵌段共聚物通常以体积形成体心立方体系（bcc）球阵列，但是V形槽促进形成良好排列的面心立方体（fcc）球阵列。在一个实施例中，fcc球阵列的（111）面平行于V形槽的成角度的侧壁。 fcc球阵列的（100）平面平行于衬底的顶表面，并且可以在相邻球体之间显示正方形对称。该方形对称性与在球形畴的单层中看到的六边形对称不同，并且是用于光刻应用的有用几何形状，特别是在半导体应用中使用的那些。

18. 发明申请

US20080074224A1 WHEATSTONE-BRIDGE MAGNETORESISTIVE DEVICE 有权
标题翻译： WHEATSTONE-BRIDGE磁性器件
公开(公告)号：US20080074224A1
公开(公告)日：2008-03-27
申请号：US11860737
申请日：2007-09-25
申请人： Fernando J. Castano , Caroline A. Ross
发明人： Fernando J. Castano , Caroline A. Ross
IPC分类号： H01F1/04 , H01F41/00 , H01F7/02
CPC分类号： G11C11/16 , Y10T29/49075
摘要： A magnetoresistive Wheatstone-bridge structure includes a magnetoresistive ring structure. The magnetoresistive ring structure includes a first magnetic layer comprising a ferromagnetic material. A second magnetic layer also includes a ferromagnetic material. A non-magnetic spacer is positioned between the first magnetic layer and the second magnetic layer. A vacant open region is positioned in the center region of the magnetoresistive ring structure. A plurality of magnetic states can exist in either the first magnetic layer or second magnetic layer. Furthermore, the magnetoresistive Wheatstone-bridge structure includes a plurality of voltage and current contacts arranged symmetrically upon the magnetoresistive ring structure. The magnetic state of the ring is detected by measuring its resistance.
摘要翻译：磁阻惠斯通电桥结构包括磁阻环结构。磁阻环结构包括包含铁磁材料的第一磁性层。第二磁性层还包括铁磁材料。非磁性间隔物位于第一磁性层和第二磁性层之间。空位开放区位于磁阻环结构的中心区域。多个磁状态可存在于第一磁性层或第二磁性层中。此外，磁阻惠斯通电桥结构包括对称地布置在磁阻环结构上的多个电压和电流触点。通过测量其阻力来检测环的磁状态。

19. 发明授权

US07303860B1 System and method for performing multi-resolution lithography 失效
标题翻译：用于执行多分辨率光刻的系统和方法
公开(公告)号：US07303860B1
公开(公告)日：2007-12-04
申请号：US10313309
申请日：2002-12-06
申请人： Bernhard Vogeli , Timothy A. Savas , Henry I. Smith , Caroline A. Ross
发明人： Bernhard Vogeli , Timothy A. Savas , Henry I. Smith , Caroline A. Ross
IPC分类号： G03F7/26
CPC分类号： G03F7/0035 , G03F7/203
摘要： A micro-fabricated structure and method of forming a micro-fabricated structure are disclosed. The method includes the steps of forming a first pattern in a first photo-resist, transferring the first pattern in the first photo-resist to a mask layer, forming a second pattern in a second photo-resist, and transferring the second pattern in the second photo-resist to the mask layer. In various embodiments, the method may further include the steps of forming a first pattern in a first photo-resist, forming a second pattern in a second photo-resist, and transferring the first and second patterns to a target layer.
摘要翻译：公开了一种形成微结构的微结构和方法。该方法包括以下步骤：在第一光致抗蚀剂中形成第一图案，将第一光刻胶中的第一图案转印到掩模层，在第二光刻胶中形成第二图案，并将第二图案转印在第二光刻胶到掩模层。在各种实施例中，该方法还可以包括以下步骤：在第一光致抗蚀剂中形成第一图案，在第二光致抗蚀剂中形成第二图案，并将第一图案和第二图案转印到目标层。

20. 发明授权

US6103404A Laser textured magnetic disk comprising NiNb 失效
标题翻译：包含NiNb的激光纹理磁盘
公开(公告)号：US6103404A
公开(公告)日：2000-08-15
申请号：US905292
申请日：1997-08-01
申请人： Caroline A. Ross , Martin P. Rosenblum , David Treves
发明人： Caroline A. Ross , Martin P. Rosenblum , David Treves
IPC分类号： G11B5/66 , G11B5/64 , G11B5/73 , G11B5/738 , G11B5/84 , B32B15/00
CPC分类号： G11B5/8404 , G11B5/7325 , G11B5/8408 , Y10T428/12944
摘要： A method for manufacturing a magnetic disk comprises the steps of depositing NiP (20) on a substrate (22); depositing NiNb (24) on the NiP; and laser texturing the NiNb. "Sombrero" shaped texture features are more easily formed on the substrate/NiP/NiNb structure than a substrate/NiP structure. The disk is completed by depositing an underlayer (e.g. sputtered Cr or NiP), a magnetic layer (e.g. a Co alloy) and a protective overcoat (e.g. by hydrogenated carbon).
摘要翻译：一种制造磁盘的方法包括以下步骤：在衬底（22）上沉积NiP（20）; 在NiP上沉积NiNb（24）; 和激光纹理NiNb。与基板/ NiP结构相比，在基板/ NiP / NiNb结构上更容易形成“Sombrero”形纹理特征。通过沉积底层（例如溅射的Cr或NiP），磁性层（例如Co合金）和保护性外涂层（例如通过氢化碳）来完成该盘。

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