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    • 14. 发明申请
    • TEST GAS LEAKAGE DETECTOR
    • 测试气体泄漏检测
    • WO1996024828A1
    • 1996-08-15
    • PCT/EP1995005079
    • 1995-12-21
    • LEYBOLD AKTIENGESELLSCHAFTBÖHM, ThomasWIDT, Rudi
    • LEYBOLD AKTIENGESELLSCHAFT
    • G01M03/20
    • G01M3/202
    • The invention concerns a test gas leakage detector (1) with an inlet (2), a detector (3) in the form of a mass spectrometer, a first friction pump stage (5) which is driven in counter-flow, a second friction pump stage (7), an intermediate connection (6) between the first and second friction pump stages, a pre-vacuum pump (8), a first connection line (13) which can be shut off between the leakage detector inlet (2) and the inlet side (9) of the pre-vacuum pump (8), and with a second line (15) which can be shut off between the leakage detector inlet (2) and the intermediate connection (6). In order to detect leaks without using oil, the pre-vacuum pump (8) is a diaphragm pump. In order to shorten the response time, it is advantageous if the conductance of the connection line (15) between the inlet (2) of the leakage detector (1) and the intermediate inlet (6) is adjustable.
    • 本发明涉及一种测试气体泄漏检测器(1)具有入口(2),具有设计为质谱仪检测器(3),具有在逆流第一摩擦泵级(5)操作时,与第二摩擦泵级(7),与中间端子( 6)(第一和第二摩擦泵级之间(与前级泵8)(与第一,可关闭的连接线13)的泄漏检测器的入口2)和所述入口侧(9)之间的前 - 真空泵(8)和具有第二, 泄漏检测器的入口(2)和所述中间连接之间可关闭线(15)(6); 使无油泄漏检测中,提出的是,预真空泵(8)是隔膜泵。 为了实现更短的响应时间,这是有利的,关于它的导电性的泄漏检测器(1)的入口(2)和中间入口(6)之间的连接线(15)是可控的。
    • 15. 发明申请
    • COUNTERFLOW SNIFTING LEAK INDICATOR
    • 逆流嗅吸测漏
    • WO1996019721A1
    • 1996-06-27
    • PCT/EP1995003554
    • 1995-09-09
    • LEYBOLD AKTIENGESELLSCHAFTBÖHM, Thomas
    • LEYBOLD AKTIENGESELLSCHAFT
    • G01M03/20
    • G01M3/205G01M3/207
    • The invention pertains to a counterflow snifting leak indicator (1) with a mass spectrometer (3) as detector, with a high vacuum pump (4, 13) or high vacuum pump stage (14) through which the test gas travels in counterflow, with a snifter hose (7) connected to the outlet side of the high vacuum pump or high vacuum pump stage, and with a throttle to maintain the pressure difference between the atmospheric pressure in the inlet region (8) of the snifter hose (7) and the pressure in its outlet region (9). To improve sensitivity and reaction time the invention proposes dimensioning at least a segment of the snifter hose (7), preferably the entire snifter hose (7), in such a way that the desired throttling is attained.
    • 本发明涉及一种逆流嗅探检漏器(1)用质谱仪(3)作为检测器,具有通过在逆流高真空泵,具有连接到高真空泵或高真空泵阶段嗅探器管的出口侧的输入测试气体(4,13)或在高真空泵级(14)流入 (7),并与在入口区域中的大气压力之间的压力差(8)的嗅探器管(7),并在其出口区域(9)保持反应器中的压力的​​; 以提高灵敏度和响应时间中提出,至少所述嗅探管(7)的一部分,最好是整个嗅探管(7)的尺寸,使得期望的节流来实现。
    • 16. 发明申请
    • VACUUMTIGHT CONNECTION
    • 真空密封连接
    • WO1995028596A1
    • 1995-10-26
    • PCT/EP1995000188
    • 1995-01-19
    • LEYBOLD AKTIENGESELLSCHAFTSCHULZ-HAUSMANN, FriedrichWALTER, WilhelmFISCHER, Hans-RudolfENGLÄNDER, Heinrich
    • LEYBOLD AKTIENGESELLSCHAFT
    • F16L41/08
    • F16L23/036F16L37/008F16L41/08
    • The invention relates to a vacuumtight connection between an (inner) channel (3) opening into the surface of the housing (2) of an appliance, pump or the like, the opening (4) of which is fitted with a sealing surface (5), and an (outer) line (6) having a flange (7) with a sealing surface (8) at the end to be connected to the channel (4); in order to make the connection compact and user-friendly, it is proposed that sealing surface (5) on the housing side and surrounding the opening (4) of the channel (3) be in the region of the housing surface and that, for the vacuumtight joint between the flange (7) of the outer line (6) and the housing surface, a securing plate be used which lies on the edge of the flange (7) away from the housing (2) once the connection has been made.
    • 本发明涉及一种(内部)信道之间的真空密封的连接(3)形成在所述壳体的所述表面(2)的设备中,泵等的通向和嘴(4)用的密封面(5)配备,和一个 (外)管(6),其在与所述通道(4)其被接合端部的凸缘(7)的密封表面(8); 连接到使紧凑且用户友好的,所以建议(3)围绕该密封面(5)是在所述壳体的表面的区域中,并且所述凸缘(7)的外管的真空密封的紧固通道的壳体侧,嘴(4) (6)用于当连接到所述壳体(2)(7)靠在从所述凸缘的边缘背对壳体表面的保持板(10)上。