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    • 11. 发明申请
    • Nitride semiconductor device
    • 氮化物半导体器件
    • US20060226416A1
    • 2006-10-12
    • US11332688
    • 2006-01-13
    • Kyu LeeJe KimDong Kim
    • Kyu LeeJe KimDong Kim
    • H01L31/00
    • H01L33/32B82Y10/00B82Y20/00H01L33/06H01S5/2004H01S5/3095H01S5/3412H01S5/34333
    • The invention relates to a nitride semiconductor device having electron-emitting. In the device, an n-type nitride semiconductor layer is formed over a substrate, and an active layer is formed over the n-type nitride semiconductor layer. Also, a p-type nitride semiconductor layer is formed on the active layer. The active layer is formed between the p-type nitride semiconductor layer and the n-type nitride semiconductor layer and includes a quantum well layer and a quantum barrier layer. Further, an electron-emitting layer is formed between the n-type nitride semiconductor layer and the active layer. The electron-emitting layer includes a nitride semiconductor quantum dot layer formed on the n-type nitride semiconductor layer and having a composition expressed by AlXInyGa1-X-y)N, where 0≦x≦1 and 0≦y≦1, and a resonance tunnel layer formed on the nitride semiconductor quantum dot layer and having energy band gap bigger than that of adjacent quantum dot layer.
    • 本发明涉及具有电子发射的氮化物半导体器件。 在器件中,在衬底上形成n型氮化物半导体层,并且在n型氮化物半导体层上形成有源层。 此外,在有源层上形成p型氮化物半导体层。 有源层形成在p型氮化物半导体层和n型氮化物半导体层之间,包括量子阱层和量子势垒层。 此外,在n型氮化物半导体层和有源层之间形成电子发射层。 电子发射层包括形成在n型氮化物半导体层上的氮化物半导体量子点层,并且具有由Al x In 1 Y 1 Ga -Xy)N,其中0 <= x <= 1且0 <= y <= 1,以及形成在氮化物半导体量子点层上并具有大于相邻量子能带隙的能带隙的谐振隧道层 点层。