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11. 发明申请

US20150137727A1 MOTOR CONTROL APPARATUS 有权
标题翻译：电动机控制装置
公开(公告)号：US20150137727A1
公开(公告)日：2015-05-21
申请号：US14368688
申请日：2012-01-16
申请人： Shinichi Furutani , Kazuaki Ando , Akira Tanabe
发明人： Shinichi Furutani , Kazuaki Ando , Akira Tanabe
IPC分类号： G05D17/02 , G05D3/12
CPC分类号： G05D17/02 , G05D3/12 , H02P21/0089 , H02P27/06
摘要： A motor control apparatus includes a torque-limit output unit configured to output a torque limit with which power consumption of a motor is equal to or smaller than a predetermined motor power limit value and voltage amplitude required for driving the motor is equal to or smaller than a predetermined voltage limit, a position-command generating unit configured to generate a position command to a reference position according to the torque limit value, and a power/voltage limiting unit configured to perform processing for correcting a motor torque current on the basis of an excess of the motor power consumption with respect to a motor power consumption limit value and processing for correcting a motor excitation current on the basis of an excess of a motor torque divided voltage with respect to a motor torque divided voltage limit value.
摘要翻译：电动机控制装置包括扭矩限制输出单元，其被配置为输出电动机的功率消耗等于或小于预定的电动机功率限制值的转矩限制，并且用于驱动电动机所需的电压幅度等于或小于预定电压限制，位置指令生成单元，被配置为根据所述转矩极限值生成对基准位置的位置指令;以及电力/电压限制单元，被配置为执行基于基于相对于电动机转矩分压电压极限值的电动机转矩分压的过剩来校正电动机励磁电流的处理，电动机功率消耗限制值的电动机功率消耗过多。

12. 发明授权

US08310316B2 Oscillator circuit 失效
标题翻译：振荡电路
公开(公告)号：US08310316B2
公开(公告)日：2012-11-13
申请号：US12680504
申请日：2008-09-09
申请人： Akira Tanabe , Naoya Inoue
发明人： Akira Tanabe , Naoya Inoue
IPC分类号： H03B5/12
CPC分类号： H01L23/64 , H01F17/0013 , H01F2017/0086 , H01L23/645 , H01L2924/0002 , H01L2924/19104 , H01L2924/3011 , H03B5/1215 , H03B5/1228 , H03B5/1243 , H03B5/1287 , H03B5/1293 , H03J3/20 , H01L2924/00
摘要： A first wiring layer and a plurality of second wiring layers having a thickness smaller than the first wiring layer are stacked on the semiconductor substrate. An oscillator circuit has an inductor formed by the plurality of second wiring layers. The inductor oscillates at a frequency at which the inductor and a parasitic capacitance of an inverter circuit resonate. A drain of an n-type MISFET and a drain of a p-type MISFET of the inverter circuit are connected to each other, and an output of the inductor is connected to a connection point of those drains.
摘要翻译：第一布线层和具有小于第一布线层的厚度的多个第二布线层堆叠在半导体基板上。振荡器电路具有由多个第二布线层形成的电感器。电感器以电感器和反相器电路的寄生电容谐振的频率振荡。逆变器电路的n型MISFET的漏极和p型MISFET的漏极彼此连接，并且电感器的输出端连接到那些漏极的连接点。

13. 发明授权

US08305151B2 Resonance type oscillation circuit and semiconductor device 有权
标题翻译：共振型振荡电路和半导体器件
公开(公告)号：US08305151B2
公开(公告)日：2012-11-06
申请号：US12926129
申请日：2010-10-27
申请人： Akira Tanabe
发明人： Akira Tanabe
IPC分类号： H03B5/12
CPC分类号： H03B5/1228 , H03B5/1212 , H03B5/124 , H03B5/1265 , H03B5/1268
摘要： A resonance type oscillation circuit includes an inductance element which is connected between a first terminal and a second terminal, an amplifier circuit which is connected in parallel with the inductance element between the first terminal and the second terminal, and a first capacitance element which is connected between the first terminal and the second terminal. The oscillation circuit further includes a pair of lead-out regions which are provided on the way of one end and the other end of the inductance element, a switch element which is connected between the pair of lead-out regions and provides short-circuit between the pair of lead-out regions when the switch element is on, and a second capacitance element which is connected between the pair of lead-out regions in parallel with the switch element.
摘要翻译：谐振型振荡电路包括连接在第一端子和第二端子之间的电感元件，与第一端子和第二端子之间的电感元件并联连接的放大器电路，以及连接在第一端子和第二端子之间的第一电容元件在第一端子和第二端子之间。振荡电路还包括一对引出区域，其设置在电感元件的一端和另一端的路径上，开关元件连接在该对引出区域之间，并且提供短路所述一对引出区域，以及与所述开关元件并联连接在所述一对引出区域之间的第二电容元件。

14. 发明申请

US20120214313A1 PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS 有权
标题翻译：等离子体处理方法和等离子体处理装置
公开(公告)号：US20120214313A1
公开(公告)日：2012-08-23
申请号：US13214372
申请日：2011-08-22
申请人： Yoshinobu Ooya , Akira Tanabe , Yoshinori Yasuta
发明人： Yoshinobu Ooya , Akira Tanabe , Yoshinori Yasuta
IPC分类号： H01L21/3065 , H01L21/02
CPC分类号： H01J37/02 , H01J37/32091 , H01J37/32165 , H01J2237/3348
摘要： There is provided a plasma processing apparatus capable of optimizing a plasma process in response to various requirements of a micro processing by effectively controlling a RF bias function. In this plasma processing apparatus, a high frequency power RFH suitable for generating plasma of a capacitively coupling type is applied to an upper electrode 48 (or lower electrode 16) from a third high frequency power supply 66, and two high frequency powers RFL1 (0.8 MHz) and RFL2 (13 MHz) suitable for attracting ions are applied to the susceptor 16 from first and second high frequency power supplies 36 and 38, respectively, in order to control energy of ions incident onto a semiconductor wafer W from the plasma. A control unit 88 controls a total power and a power ratio of the first and second high frequency powers RFL1 and RFL2 depending on specifications, conditions or recipes of an etching process.
摘要翻译：提供了一种能够通过有效地控制RF偏置功能来响应于微处理的各种要求来优化等离子体处理的等离子体处理装置。在该等离子体处理装置中，适用于产生电容耦合型等离子体的高频功率RFH从第三高频电源66施加到上电极48（或下电极16），并且将两个高频功率RFL1（0.8 MHz）和适合于吸引离子的RFL2（13MHz）分别从第一和第二高频电源36和38施加到基座16，以便控制从等离子体入射到半导体晶片W上的离子的能量。控制单元88根据蚀刻处理的规格，条件或配方来控制第一和第二高频功率RFL1和RFL2的总功率和功率比。

15. 发明授权

US08143986B2 Inductor 有权
标题翻译：电感器
公开(公告)号：US08143986B2
公开(公告)日：2012-03-27
申请号：US12523578
申请日：2008-01-21
申请人： Akira Tanabe
发明人： Akira Tanabe
IPC分类号： H01F5/00 , H01F27/28
CPC分类号： H01L23/5227 , H01L2924/0002 , H01L2924/00
摘要： Parasitic capacitance between upper and lower adjacent wirings of an inductor using a multilayer wiring layer in an insulating film formed on a base substrate is reduced. An inductor is characterized by having one go-around of go-around wiring (A-B or B-C) formed in each of at least two of adjacent wiring layers of a plurality of wiring layers 18 placed in an insulating film 17 on a base substrate 16, and in that one end (B) of the one go-around of go-around wiring (A-B and B-C) formed in each of the at least two of wiring layers is connected to each other at a via 2 and the one go-around of go-around wiring (A-B and B-C) formed in each of the at least two of wiring layers is placed at substantially the same position in a surface of the base substrate when viewed from an upper side of the base substrate.
摘要翻译：使用在基底基板上形成的绝缘膜中的多层布线层的电感器的上下相邻布线之间的寄生电容减小。电感器的特征在于，在布置在基底基板16上的绝缘膜17中的多个布线层18的至少两个相邻布线层中的每一个中形成一个复绕布线（AB或BC）并且在所述至少两个布线层中的每一个中形成的复绕布线（AB和BC）的一个复原的一端（B）在通孔2处彼此连接，并且一个复原形成在所述至少两个所述布线层中的每一个中的复位布线（AB和BC）被放置在从所述基底的上侧观察时在所述基底基板的表面中基本相同的位置。

16. 发明申请

US20110109396A1 Resonance type oscillation circuit and semiconductor device 有权
标题翻译：共振型振荡电路和半导体器件
公开(公告)号：US20110109396A1
公开(公告)日：2011-05-12
申请号：US12926129
申请日：2010-10-27
申请人： Akira Tanabe
发明人： Akira Tanabe
IPC分类号： H03B5/12
CPC分类号： H03B5/1228 , H03B5/1212 , H03B5/124 , H03B5/1265 , H03B5/1268
摘要： A resonance type oscillation circuit includes an inductance element which is connected between a first terminal and a second terminal, an amplifier circuit which is connected in parallel with the inductance element between the first terminal and the second terminal, and a first capacitance element which is connected between the first terminal and the second terminal. The oscillation circuit further includes a pair of lead-out regions which are provided on the way of one end and the other end of the inductance element, a switch element which is connected between the pair of lead-out regions and provides short-circuit between the pair of lead-out regions when the switch element is on, and a second capacitance element which is connected between the pair of lead-out regions in parallel with the switch element.
摘要翻译：谐振型振荡电路包括连接在第一端子和第二端子之间的电感元件，与第一端子和第二端子之间的电感元件并联连接的放大器电路和连接到第一端子和第二端子的第一电容元件在第一端子和第二端子之间。振荡电路还包括一对引出区域，其设置在电感元件的一端和另一端的路径上，开关元件连接在该对引出区域之间，并且提供短路所述一对引出区域，以及与所述开关元件并联连接在所述一对引出区域之间的第二电容元件。

17. 发明申请

US20100244972A1 OSCILLATOR CIRCUIT 失效
标题翻译：振荡器电路
公开(公告)号：US20100244972A1
公开(公告)日：2010-09-30
申请号：US12680504
申请日：2008-09-09
申请人： Akira Tanabe , Naoya Inoue
发明人： Akira Tanabe , Naoya Inoue
IPC分类号： H03B5/12 , H01L27/04
CPC分类号： H01L23/64 , H01F17/0013 , H01F2017/0086 , H01L23/645 , H01L2924/0002 , H01L2924/19104 , H01L2924/3011 , H03B5/1215 , H03B5/1228 , H03B5/1243 , H03B5/1287 , H03B5/1293 , H03J3/20 , H01L2924/00
摘要： A first wiring layer and a plurality of second wiring layers having a thickness smaller than the first wiring layer are stacked on the semiconductor substrate. An oscillator circuit has an inductor formed by the plurality of second wiring layers. The inductor oscillates at a frequency at which the inductor and a parasitic capacitance of an inverter circuit resonate. A drain of an n-type MISFET and a drain of a p-type MISFET of the inverter circuit are connected to each other, and an output of the inductor is connected to a connection point of those drains.
摘要翻译：第一布线层和具有小于第一布线层的厚度的多个第二布线层堆叠在半导体基板上。振荡器电路具有由多个第二布线层形成的电感器。电感器以电感器和反相器电路的寄生电容谐振的频率振荡。逆变器电路的n型MISFET的漏极和p型MISFET的漏极彼此连接，并且电感器的输出端连接到那些漏极的连接点。

18. 发明申请

US20150233964A1 SEMICONDUCTOR DEVICE 有权
标题翻译：半导体器件
公开(公告)号：US20150233964A1
公开(公告)日：2015-08-20
申请号：US14427438
申请日：2012-09-12
申请人： Akira Tanabe , Yasutaka Nakashiba
发明人： Akira Tanabe , Yasutaka Nakashiba
IPC分类号： G01P15/00
CPC分类号： G01P15/008 , G01P15/0897
摘要： In a semiconductor device, a heater is formed on a surface of a cap chip, and a first temperature sensor and a second temperature sensor are formed on a surface of a base chip. The cap chip and the base chip are laminated through a connection member such that the surfaces oppose to each other. The position of the heater is different from the positions of the temperature sensors in a direction of the lamination. The heater in the cap chip contacts bumps directly.
摘要翻译：在半导体装置中，在盖片的表面上形成加热器，在基片的表面上形成第一温度传感器和第二温度传感器。盖片和基片通过连接构件层叠，使得表面彼此相对。加热器的位置不同于温度传感器在层叠方向上的位置。盖芯片中的加热器直接接触凸块。

19. 发明授权

US08866356B2 Motor 有权
标题翻译：发动机
公开(公告)号：US08866356B2
公开(公告)日：2014-10-21
申请号：US13505186
申请日：2011-09-30
申请人： Yuki Kohara , Kazuyuki Enomoto , Qiangsong Shao , Kazuaki Ando , Akira Tanabe
发明人： Yuki Kohara , Kazuyuki Enomoto , Qiangsong Shao , Kazuaki Ando , Akira Tanabe
IPC分类号： H02K5/22 , H02K11/00
CPC分类号： H02K5/225 , H02K11/33
摘要： A motor includes a motor section and an amplifier section. The motor section and the amplifier section are electrically and mechanically connected with each other via a wire connection base using a screw. A pitch diameter for a plurality of electrical connection parts of the wire connection base with the motor section disposed on a circumference whose center is at a shaft center of the rotating shaft is set to be smaller than a pitch diameter for a plurality of electrical and mechanical connection parts with the amplifier section. The amplifier section includes a plurality of circuit substrates disposed in a layered form in a direction perpendicular to the rotating shaft, and the plurality of circuit substrates are electrically and mechanically screw-fastened to the plurality of electrical and mechanical connection parts of the wire connection base with the amplifier section via a conductive spacer.
摘要翻译：电动机包括电动机部分和放大器部分。电动机部分和放大器部分通过使用螺钉的电线连接基座彼此电连接和机械连接。电线连接基座的多个电气连接部分的节距直径设置成比设置在旋转轴的轴心中心的圆周上的电动机部分小于多个机电的节距直径连接部分与放大器部分。放大器部分包括多个电路基板，其以与旋转轴垂直的方向以分层的形式设置，并且多个电路基板被电气和机械地螺纹紧固到导线连接基座的多个电气和机械连接部分与放大器部分通过导电间隔器。

20. 发明授权

US08779712B2 Motor control device 有权
标题翻译：电机控制装置
公开(公告)号：US08779712B2
公开(公告)日：2014-07-15
申请号：US13695738
申请日：2011-04-28
申请人： Akira Tanabe , Hiroyuki Sekiguchi , Hidetoshi Ikeda
发明人： Akira Tanabe , Hiroyuki Sekiguchi , Hidetoshi Ikeda
IPC分类号： H02P7/00
CPC分类号： H02P23/30
摘要： A motor control device including: a following control unit that calculates a pre-correction torque command based on a difference between an operation command signal for commanding an operation of a motor and a detection signal resulting from detecting an operation of the motor; an adder that outputs a post-correction torque command by adding the pre-correction torque command to a correction torque command; and an electric-current control unit that outputs a drive current driving the motor based on the post-correction torque command, wherein the motor control device executes control so that the detection signal matches the operation command signal, and further including: a reference-periodic-signal computation unit; an amplitude/phase estimation unit; and a correction-torque computation unit, so that the correction torque command is updated such that a difference between the correction torque command and the post-correction torque command becomes smaller.
摘要翻译：一种电动机控制装置，包括：跟随控制单元，其基于用于指示电动机的操作的操作命令信号与由检测到电动机的操作而产生的检测信号之间的差计算预校正转矩指令; 加法器，通过将预校正转矩指令与校正转矩指令相加来输出校正后转矩指令; 以及电流控制单元，其基于所述校正后转矩指令输出驱动所述电动机的驱动电流，其中所述电动机控制装置执行所述检测信号与所述运转指令信号一致的控制，并且还包括：基准周期信号计算单元; 幅度/相位估计单元; 以及校正转矩计算单元，使得校正转矩指令被更新为使得校正转矩指令和校正后转矩指令之间的差变小。

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