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11. 发明授权

US08686380B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08686380B2
公开(公告)日：2014-04-01
申请号：US12453986
申请日：2009-05-28
申请人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
发明人： Souichi Katagiri , Takashi Ohshima , Sho Takami , Makoto Ezumi , Takashi Doi , Yuji Kasai
IPC分类号： G21G5/00
CPC分类号： H01J37/18 , H01J2237/06341 , H01J2237/182 , H01J2237/188
摘要： The present invention provides a charged particle beam apparatus that keeps the degree of vacuum in the vicinity of the electron source to ultra-high vacuum such as 10−8 to 10−9 Pa even in the state where electron beams are emitted using a non-evaporable getter pump and is not affected by dropout foreign particles.The present invention includes a vacuum vessel in which a charged particle source (electron source, ion source, etc.) is disposed and a non-evaporable getter pump disposed at a position that does not directly face electron beams and includes a structure that makes the non-evaporable getter pump upward with respect to a horizontal direction to drop out foreign particles into a bottom in a groove, so that the foreign particles dropped out from the non-evaporable getter pump do not face an electron optical system. Or, the present invention includes a structure that is covered by a shield means, or a means that is disposed immediately on a surface of the non-evaporable getter pump but at a position where the electron beams are not seen and has a concave structure capable of trapping the dropout foreign particles on a lower portion of the non-evaporable getter pump.
摘要翻译：本发明提供了一种带电粒子束装置，其将电子源附近的真空度保持为10-8至10-9Pa的超高真空度，即使在使用非电子束发射电子束的状态下，可蒸发吸气泵，不受脱落异物的影响。本发明包括设置有带电粒子源（电子源，离子源等）的真空容器和设置在不直接面向电子束的位置的非蒸发性吸气泵，并且包括使不可蒸发的吸气剂相对于水平方向向上泵送以将异物排出到槽中的底部，使得从非蒸发性吸气泵排出的异物不面向电子光学系统。或者，本发明包括被屏蔽装置覆盖的结构，或者立即设置在不可蒸发的吸气泵的表面上，但是在不能看到电子束的位置处并具有凹形结构的装置在非蒸发性吸气泵的下部捕获脱落的异物。

12. 发明授权

US07274238B2 Digital circuit having delay circuit for adjustment of clock signal timing 有权
标题翻译：具有用于调整时钟信号定时的延迟电路的数字电路
公开(公告)号：US07274238B2
公开(公告)日：2007-09-25
申请号：US10520429
申请日：2003-07-08
申请人： Eiichi Takahashi , Yuji Kasai , Tetsuya Higuchi
发明人： Eiichi Takahashi , Yuji Kasai , Tetsuya Higuchi
IPC分类号： H03H11/26
CPC分类号： H03L7/07 , H03K5/133 , H03K2005/00026 , H03L7/0805 , H03L7/0812
摘要： A digital circuit according to the present invention includes a pulse delay circuit where a driving current of an inverter is variable, for causing timing of a clock signal to be variable; and the pulse delay circuit has a stabilizing circuit for an amount of a pulse delay by a delay synchronizing loop, and a generating circuit for a pulse delay amount setting voltage with nonlinear characteristics. The present invention makes it possible to realize a timing delay circuit with high resolution, which is not influenced by an operating environment and requires only a small area for the circuit.
摘要翻译：根据本发明的数字电路包括脉冲延迟电路，其中逆变器的驱动电流是可变的，用于使时钟信号的定时可变; 并且脉冲延迟电路具有用于通过延迟同步环路的脉冲延迟量的稳定电路，以及具有非线性特性的脉冲延迟量设定电压的发生电路。本发明使得可以实现不受操作环境影响的高分辨率的定时延迟电路，并且仅需要较小的电路面积。

13. 发明授权

US07098455B2 Method of inspecting a circuit pattern and inspecting instrument 有权
公开(公告)号：US07098455B2
公开(公告)日：2006-08-29
申请号：US10404451
申请日：2003-04-02
申请人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
发明人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
IPC分类号： H01J37/28
CPC分类号： G01N23/225 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： A circuit pattern inspecting instrument includes an electron-optical system for irradiating an electron beam on a sample, an electron beam deflector, a detector for detecting secondary charged particles from the sample, and a mode setting unit for switching between a first mode and a second mode. An electron beam current is larger in the first mode than in the second mode, and an electron beam scanning speed is higher in the first mode than in the second mode. The circuit pattern inspecting instrument is configured so that first the sample is observed in the first mode, then a particular position on the sample is selected based on image data produced by an output of the detector in the first mode, and then the particular position on the sample is observed in the second mode.

14. 发明申请

US20130089120A1 SPECTRUM SPREAD COMMUNICATION SYSTEM 有权
标题翻译：光谱传播通信系统
公开(公告)号：US20130089120A1
公开(公告)日：2013-04-11
申请号：US13704087
申请日：2011-06-06
申请人： Yuji Kasai , Masahiro Murakawa , Tetsuya Higuchi
发明人： Yuji Kasai , Masahiro Murakawa , Tetsuya Higuchi
IPC分类号： H04B1/7075
CPC分类号： H04B1/7075 , H04B1/707 , H04B1/7073 , H04B1/70735 , H04B3/542 , H04B2203/5416 , H04J13/16
摘要： Disclosed is a spectrum spread communication system which is hardly influenced by noises, and in which a frame structure can be identified at a receiving side without use of a frame synchronization signal. A spread code generator switches spread codes (“Scai” and “Scbi”) in each frame, and outputs it to a spread modulation unit. The spread modulation unit performs spread modulation of transmission data, and transmits it to a direct current power line. A reference code generator generates reference codes (“Scai” and “Scbi”) in the same code phase. Spread demodulation units performs spread demodulation of the received signal with use of the reference codes (“Scai” and “Scbi”), and output it to a selection unit. A frame synchronization detection unit identifies a frame structure on the basis of switching of a synchronization state of a code phase in a code phase synchronization detection unit. The selection unit outputs reception data by selecting spread demodulated data from the spread demodulation unit which is in a phase-synchronized state.
摘要翻译：公开了几乎不受噪声影响的频谱扩展通信系统，其中可以在接收侧识别帧结构而不使用帧同步信号。扩频码发生器在每帧中切换扩频码（Scai和Scbi），并将其输出到扩展调制单元。扩展调制单元执行发送数据的扩展调制，并将其发送到直流电力线。参考代码生成器在相同的代码阶段生成参考代码（Scai和Scbi）。扩展解调单元使用参考码（Scai和Scbi）对接收信号进行扩展解调，并将其输出到选择单元。帧同步检测单元基于码相位同步检测单元中的码相位的同步状态的切换来识别帧结构。选择单元通过从相位同步状态的扩展解调单元中选择扩展解调数据来输出接收数据。

15. 发明申请

US20110142066A1 SERIAL BUS TRANSMISSION SYSTEM 有权
标题翻译：串行总线传输系统
公开(公告)号：US20110142066A1
公开(公告)日：2011-06-16
申请号：US12988939
申请日：2009-04-20
申请人： Yuji Kasai , Eiichi Takahashi , Masahiro Murakawa , Tetsuya Higuchi
发明人： Yuji Kasai , Eiichi Takahashi , Masahiro Murakawa , Tetsuya Higuchi
IPC分类号： H04B7/212
CPC分类号： H04L12/4035
摘要： A master node (12) sends an identification signal for designating a communication channel in an identification signal time slot. When the own node matches the node in which the communication channel designated by the identification signal sent from the master node (12) is set in the identification signal time slot, the master node (12) and slave nodes (131 to 13n) each perform data transmission via the communication channel, based on the set contents of the communication channel, in the data transmission time slot corresponding to the identification signal time slot in which the identification signal has been sent.
摘要翻译：主节点（12）在识别信号时隙中发送用于指定通信信道的识别信号。当自身节点与在主节点（12）发送的识别信号指定的通信信道被设置在识别信号时隙中的节点匹配时，主节点（12）和从节点（131至13n）各自执行在与发送识别信号的识别信号时隙对应的数据传输时隙中，基于通信信道的设定内容，经由通信信道的数据传输。

16. 发明授权

US07447289B2 Signal timing adjustment device, signal timing adjustment system, signal timing adjustment amount setting program, and storage medium storing the program 失效
标题翻译：信号定时调整装置，信号定时调整系统，信号定时调整量设定程序以及存储该程序的存储介质
公开(公告)号：US07447289B2
公开(公告)日：2008-11-04
申请号：US10809374
申请日：2004-03-26
申请人： Munehiro Uratani , Eiichi Takahashi , Yuji Kasai , Tetsuya Higuchi , Masahiro Murakawa
发明人： Munehiro Uratani , Eiichi Takahashi , Yuji Kasai , Tetsuya Higuchi , Masahiro Murakawa
IPC分类号： H04L7/00
CPC分类号： H04L7/0337 , H03L7/087
摘要： Delay time between an input of data to a circuit block and an output of the data from the data block is measured in accordance with a timing at which the data from the circuit block is acquired by a measurement register and a timing at which the data from the circuit block is acquired by a data latch. An LSI tester sets well voltage adjustment values so that delay time of each circuit block is averaged. From voltages generated by the adjustment voltage generating circuit, a selector selects voltages that are in accordance with the well voltage adjustment values. The voltages selected are applied to a well of a CMOS transistor of each clock timing adjustment circuit. Delay time between timings of inputted clocks is thus adjusted.
摘要翻译：根据来自电路块的数据通过测量寄存器获取的定时和来自数据块的数据的定时，测量数据到电路块的数据输入与来自数据块的数据的输出之间的延迟时间电路块由数据锁存器获取。 LSI测试仪设置好的电压调整值，使得每个电路块的延迟时间被平均。根据由调整电压产生电路产生的电压，选择器选择与电压调节值相一致的电压。所选择的电压被施加到每个时钟定时调整电路的CMOS晶体管的阱。因此调整输入时钟的定时之间的延迟时间。

17. 发明授权

US07248095B2 Bus driver with well voltage control section 失效
标题翻译：总线驱动器与井电压控制部分
公开(公告)号：US07248095B2
公开(公告)日：2007-07-24
申请号：US11213779
申请日：2005-08-30
申请人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
发明人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
IPC分类号： G05F1/10
CPC分类号： H03K19/0005 , H03K19/018557
摘要： A bus driving device is provided with a driver circuit for driving a bus line thereof. The driver circuit includes an MOS transistor whose well is separated from other circuits. Further, the bus driving device is provided with a voltage control section for adjusting a well voltage, in accordance with a level of a signal in the bus line. With this bus driving device, a threshold voltage of the MOS transistor is set at a predetermined target value.
摘要翻译：总线驱动装置设有用于驱动总线的驱动电路。驱动电路包括一个与其他电路分离的MOS晶体管。此外，总线驱动装置设置有用于根据总线中的信号的电平来调节阱电压的电压控制部。利用该总线驱动装置，将MOS晶体管的阈值电压设定为规定的目标值。

18. 发明申请

US20060243908A1 Method of inspecting a circuit pattern and inspecting instrument 失效
标题翻译：检查电路图案和检查仪器的方法
公开(公告)号：US20060243908A1
公开(公告)日：2006-11-02
申请号：US11452989
申请日：2006-06-15
申请人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
发明人： Hiroyuki Shinada , Atsuko Takafuji , Takanori Ninomiya , Yuko Sasaki , Mari Nozoe , Hisaya Murakoshi , Taku Ninomiya , Yuji Kasai , Hiroshi Makino , Yutaka Kaneko , Kenji Tanimoto
IPC分类号： G21K7/00
CPC分类号： G01N23/225 , G01R31/307 , H01J37/28 , H01J2237/2817
摘要： An apparatus for inspecting a sample using a scanning electron microscope includes a sample stage, a first electron-optical system to scan an electron beam of a first beam current on the sample, a second electron-optical system to scan an electron beam of a second beam current smaller than the first beam current on the sample, a mechanism to move the sample stage, a detector provided in each of the first and second electron-optical systems to detect a secondary electron. The first electron-optical system is operable in a first mode and the second electron-optical system is operable in a second mode with higher resolution than that of the first mode. In the first mode, the sample is observed while the sample stage is moved continuously, and in the second mode, the sample is observed by detecting a secondary electron using the detector while the sample stage is held stationary.
摘要翻译：使用扫描电子显微镜检查样品的装置包括样品台，用于扫描样品上的第一束电流的电子束的第一电子 - 光学系统，用于扫描第二电子束的电子束的第二电子 - 光学系统光束电流小于样品上的第一光束电流，移动样品台的机构，设置在每个第一和第二电子光学系统中的检测二次电子的检测器。第一电子 - 光学系统可在第一模式中操作，并且第二电子 - 光学系统可以以比第一模式更高的分辨率在第二模式中操作。在第一模式中，在样品台连续移动时观察样品，在第二模式中，通过在样品台保持静止时使用检测器检测二次电子来观察样品。

19. 发明申请

US20060046668A1 Power consumption controlling apparatus for high frequency amplifier 失效
公开(公告)号：US20060046668A1
公开(公告)日：2006-03-02
申请号：US11213778
申请日：2005-08-30
申请人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
发明人： Munehiro Uratani , Yuji Kasai , Tetsuya Higuchi , Eiichi Takahashi
IPC分类号： H01Q11/12 , H04B1/16 , H04B1/38
CPC分类号： H03F1/0211 , H03F1/02 , H03F1/0205 , H03F1/0261 , H03F3/189 , H03F3/24 , H03F2200/294 , H03F2200/372 , H03F2200/465 , H04B2001/045
摘要： A power consumption controlling apparatus controls power consumption of a high frequency amplifier to reduce the power consumption by adjusting a power supply voltage and a bias voltage of the high frequency amplifier which amplifies a high frequency transmitting signal. The power consumption controlling apparatus includes: a receiving circuit for receiving the high frequency transmitting signal amplified by the high frequency amplifier; an evaluating section for evaluating whether or not a receiving signal obtained from the receiving circuit satisfies a predetermined quality; and an adjusting section for adjusting the power supply voltage and the bias voltage in a range in which the receiving signal evaluated by the evaluating section satisfies the predetermined quality.

20. 发明授权

US06861848B2 Capacitance position sensor and position controller equipped with the sensor 失效
标题翻译：电容位置传感器和位置控制器配有传感器
公开(公告)号：US06861848B2
公开(公告)日：2005-03-01
申请号：US10279846
申请日：2002-10-25
申请人： Yuji Kasai , Hirokazu Nosato , Masahiro Murakawa , Taro Itatani , Tetsuya Higuchi
发明人： Yuji Kasai , Hirokazu Nosato , Masahiro Murakawa , Taro Itatani , Tetsuya Higuchi
IPC分类号： G01D5/24 , G01D5/241 , H01S3/086 , H01S3/105 , H01S3/139 , G01R27/26
CPC分类号： G01D5/24 , G01D5/2417 , H01S3/105
摘要： A capacitance position sensor includes a pair of opposed tabular electrodes, an LC oscillator circuit having a toroidal core winding and whose oscillating frequency varies with change in capacitance between the pair of electrodes, and an arithmetic processing unit for calculating an absolute value of a distance between the electrodes from the oscillating frequency of the oscillator circuit. A position controller includes a stationary member formed with one electrode of the pair of electrodes of the position sensor, a movable member on which the other electrode of the pair of electrodes is formed, and moving device for moving the movable member relative to the stationary member.
摘要翻译：电容位置传感器包括一对相对的平板电极，具有环形铁芯绕组的振荡频率随着一对电极之间的电容变化而变化的LC振荡器电路，以及运算处理单元，用于计算在一对电极之间的距离的绝对值电极从振荡电路的振荡频率。位置控制器包括：固定构件，其形成有位置传感器的一对电极的一个电极，形成有该对电极的另一个电极的可动构件;以及用于使可动构件相对于固定构件移动的移动装置。

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