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11. 发明申请

US20080296529A1 Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film 有权
标题翻译：压电薄膜，压电材料以及压电薄膜和压电材料的制造方法以及压电谐振器，致动器元件和使用压电薄膜的物理传感器
公开(公告)号：US20080296529A1
公开(公告)日：2008-12-04
申请号：US12155015
申请日：2008-05-29
申请人： Morito Akiyama , Toshihiro Kamohara , Naohiro Ueno , Kazuhiko Kano , Akihiko Teshigahara , Yukihiro Takeuchi , Nobuaki Kawahara
发明人： Morito Akiyama , Toshihiro Kamohara , Naohiro Ueno , Kazuhiko Kano , Akihiko Teshigahara , Yukihiro Takeuchi , Nobuaki Kawahara
IPC分类号： H01L41/187 , B05D5/12
CPC分类号： B81B3/0021 , B81B2201/0271 , B81B2201/032 , H01L41/0815 , H01L41/094 , H01L41/1136 , H01L41/187 , H01L41/316 , H03H9/02015 , H03H9/02574 , H03H9/173
摘要： A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.
摘要翻译：本发明的压电薄膜包括含有钪的氮化铝薄膜。假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。

12. 发明授权

US07201053B2 Capacitance type physical quantity sensor 有权
标题翻译：电容式物理量传感器
公开(公告)号：US07201053B2
公开(公告)日：2007-04-10
申请号：US10834183
申请日：2004-04-29
申请人： Tetsuo Yoshioka , Akihiko Teshigahara , Junji Ohara , Yukihiro Takeuchi , Toshimasa Yamamoto , Kazuhiko Kano
发明人： Tetsuo Yoshioka , Akihiko Teshigahara , Junji Ohara , Yukihiro Takeuchi , Toshimasa Yamamoto , Kazuhiko Kano
IPC分类号： G01P15/125 , G01P9/04
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0814
摘要： A capacitance type physical quantity sensor detects physical quantity. The sensor includes a movable portion including a movable electrode and a fixed portion including a fixed electrode. The fixed electrode includes a detection surface facing a detection surface of the movable electrode. The movable electrode is movable toward the fixed electrode in accordance with the physical quantity so that a distance between the detection surfaces is changeable. At least one of the movable and the fixed electrodes includes a groove. The groove is disposed on a top or a bottom of the one of the movable and the fixed electrodes, has a predetermined depth from the top or the bottom, and extends from the detection surface to an opposite surface.
摘要翻译：电容式物理量传感器检测物理量。传感器包括可移动部分，其包括可动电极和包括固定电极的固定部分。固定电极包括面向可动电极的检测面的检测面。可移动电极可以根据物理量朝向固定电极移动，使得检测表面之间的距离是可变的。可移动和固定电极中的至少一个包括凹槽。凹槽设置在可移动和固定电极中的一个的顶部或底部上，具有从顶部或底部的预定深度，并且从检测表面延伸到相对的表面。

13. 发明申请

US20120107557A1 MANUFACTURING METHOD OF PIEZOELECTRIC-BODY FILM, AND PIEZOELECTRIC-BODY FILM MANUFACTURED BY THE MANUFACTURING METHOD 有权
标题翻译：压电体膜的制造方法和制造方法制造的压电体膜
公开(公告)号：US20120107557A1
公开(公告)日：2012-05-03
申请号：US13380995
申请日：2010-06-30
申请人： Morito Akiyama , Kazuhiko Kano , Akihiko Teshigahara
发明人： Morito Akiyama , Kazuhiko Kano , Akihiko Teshigahara
IPC分类号： B32B3/00 , H01L41/18 , C23C14/34
CPC分类号： H03H3/02 , C23C14/0036 , C23C14/0617 , C23C14/0641 , H01L41/316 , Y10T428/24355
摘要： A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step.
摘要翻译：一种制造包括在基板上含有钪的氮化铝薄膜的压电薄膜的方法，所述方法包括：在至少含有氮气的气氛下溅射铝和钪的溅射步骤。在根据本发明的方法的溅射步骤中，当基板的温度在5℃至450℃的范围内时，钪含量率在0.5原子％至50原子的范围内在溅射步骤期间。

14. 发明授权

US06983653B2 Flow sensor having thin film portion and method for manufacturing the same 有权
标题翻译：具有薄膜部分的流量传感器及其制造方法
公开(公告)号：US06983653B2
公开(公告)日：2006-01-10
申请号：US10731094
申请日：2003-12-10
申请人： Takao Iwaki , Hiroyuki Wado , Toshimasa Yamamoto , Kiyokazu Isomura , Tomoyuki Mizutani , Akihiko Teshigahara , Ryuuichirou Abe
发明人： Takao Iwaki , Hiroyuki Wado , Toshimasa Yamamoto , Kiyokazu Isomura , Tomoyuki Mizutani , Akihiko Teshigahara , Ryuuichirou Abe
IPC分类号： G01F1/68
CPC分类号： G01F1/692
摘要： A flow sensor for detecting flow of fluid includes a thin film portion. The thin film portion has a heater and a detector for detecting temperature around the heater. The heater is made of semiconductor. This flow sensor has high sensor sensitivity with low energy consumption. Further, the sensor has high detection accuracy, and the thin film portion has high endurance. Furthermore, the flow sensor with a passivation film has appropriate thickness so as to improve strength of a thin film portion.
摘要翻译：用于检测流体流动的流量传感器包括薄膜部分。薄膜部分具有用于检测加热器周围温度的加热器和检测器。加热器由半导体制成。该流量传感器具有高传感器灵敏度，低能耗。此外，传感器具有高检测精度，薄膜部分具有高耐久性。此外，具有钝化膜的流量传感器具有适当的厚度，以便提高薄膜部分的强度。

15. 发明授权

US6150697A Semiconductor apparatus having high withstand voltage 有权
标题翻译：具有高耐压的半导体装置
公开(公告)号：US6150697A
公开(公告)日：2000-11-21
申请号：US301562
申请日：1999-04-29
申请人： Akihiko Teshigahara , Akiyoshi Asai , Kunihiro Onoda , Hiroyasu Itou , Ryuichirou Abe , Toshio Sakakibara
发明人： Akihiko Teshigahara , Akiyoshi Asai , Kunihiro Onoda , Hiroyasu Itou , Ryuichirou Abe , Toshio Sakakibara
IPC分类号： H01L21/336 , H01L21/762 , H01L21/84 , H01L27/12 , H01L29/06 , H01L29/78 , H01L27/01
CPC分类号： H01L29/66681 , H01L21/76264 , H01L21/84 , H01L27/1203 , H01L29/0696 , H01L29/66674 , H01L29/7824 , H01L21/76275 , H01L21/76281 , H01L21/76286 , H01L29/402
摘要： An island region surrounded by a trench is provided in an SOI substrate. The island region is further surrounded by a buffer region with a buffer region contact layer. In the island region, a source region is annularly provided around a drain region, and source and drain electrodes are respectively provided on the source and the drain regions. An annular auxiliary electrode is formed with the source electrode to extend over the trench. Accordingly, a voltage applied to the source electrode can be applied to the auxiliary electrode, so that electric field concentration between the buffer region and the source electrode is relaxed.
摘要翻译：在SOI衬底中设置由沟槽包围的岛状区域。岛区还被具有缓冲区接触层的缓冲区包围。在岛状区域，源极区域围绕漏极区域环状设置，源极和漏极电极分别设置在源极和漏极区域上。形成环形辅助电极，源电极在沟槽上延伸。因此，施加到源电极的电压可以施加到辅助电极，使得缓冲区域和源电极之间的电场浓度被放宽。

16. 发明授权

US07495747B2 Radar apparatus 有权
标题翻译：雷达装置
公开(公告)号：US07495747B2
公开(公告)日：2009-02-24
申请号：US11325553
申请日：2006-01-05
申请人： Takahiko Yoshida , Akihiko Teshigahara
发明人： Takahiko Yoshida , Akihiko Teshigahara
IPC分类号： G01C3/08
CPC分类号： G01S17/936 , G01S7/4813 , G01S2007/4977
摘要： In a radar apparatus, a radar device emits a transmission wave to a periphery of a vehicle and detects a reflected wave of the transmission wave through a window part. As a member for restricting or reducing adhesion of dirt and foreign materials to the window part, an air duct is provided to apply air toward the window part. An air outlet portion of the air duct is open at a periphery of the window part and has a passage area smaller than that of an air inlet portion, which opens to a vehicle forward direction. While the vehicle is running, air is blown from the air outlet portion to flow along the window part at high speed after its pressure is increased in the air duct. Thus, dirt and materials adhering or adhered to the window part is effectively blown off.
摘要翻译：在雷达装置中，雷达装置向车辆周边发射发送波，并通过窗口部分检测发射波的反射波。作为用于限制或减少灰尘和异物粘附到窗户部分的构件，设置有空气导管以向窗户部分施加空气。风道的出风部在窗部的周围开口，并且具有比通向车辆前方的空气入口部小的通路面积。当车辆行驶时，空气从空气出口部分吹出，在空气管道中的压力增加之后，高速地沿窗户部分流动。因此，粘附或粘附到窗户部分上的污物和材料被有效地吹走。

17. 发明申请

US20060152705A1 Radar apparatus 有权
公开(公告)号：US20060152705A1
公开(公告)日：2006-07-13
申请号：US11325553
申请日：2006-01-05
申请人： Takahiko Yoshida , Akihiko Teshigahara
发明人： Takahiko Yoshida , Akihiko Teshigahara
IPC分类号： G01C3/08 , G01P3/36 , G01S13/00
CPC分类号： G01S17/936 , G01S7/4813 , G01S2007/4977
摘要： In a radar apparatus, a radar device emits a transmission wave to a periphery of a vehicle and detects a reflected wave of the transmission wave through a window part. As a member for restricting or reducing adhesion of dirt and foreign materials to the window part, an air duct is provided to apply air toward the window part. An air outlet portion of the air duct is open at a periphery of the window part and has a passage area smaller than that of an air inlet portion, which opens to a vehicle forward direction. While the vehicle is running, air is blown from the air outlet portion to flow along the window part at high speed after its pressure is increased in the air duct. Thus, dirt and materials adhering or adhered to the window part is effectively blown off.

18. 发明申请

US20100186514A1 Surface acoustic wave pressure sensor 有权
标题翻译：表面声波压力传感器
公开(公告)号：US20100186514A1
公开(公告)日：2010-07-29
申请号：US12656209
申请日：2010-01-21
申请人： Akihiko Teshigahara , Hideaki Yamada
发明人： Akihiko Teshigahara , Hideaki Yamada
IPC分类号： G01L11/04
CPC分类号： G01L9/0025 , G01L9/008
摘要： A sensor chip has a substrate and a comb-teeth electrode arranged on the substrate. The sensor chip is fixed to a diaphragm structure to be distorted by receiving pressure, and is fixed to the diaphragm structure only through a predetermined fix area so as to detect the pressure. The fix area is defined on only a part of the sensor chip opposing to the diaphragm structure. The sensor chip is restrained by the diaphragm structure in a direction of transmitting surface acoustic wave. Flexibility of the sensor chip in a perpendicular direction approximately perpendicular to the wave transmitting direction is larger than that in the transmitting direction.
摘要翻译：传感器芯片具有布置在基板上的基板和梳齿电极。传感器芯片固定在膜片结构上，通过接受压力而变形，并且仅通过预定的固定区域固定到膜片结构，以便检测压力。固定区仅限于与隔膜结构相对的传感器芯片的一部分。传感器芯片在传播表面声波的方向上被隔膜结构约束。传感器芯片在大致垂直于波浪传播方向的垂直方向上的灵活性大于传送方向的灵敏度。

19. 发明授权

US08006563B2 Surface acoustic wave pressure sensor 有权
标题翻译：表面声波压力传感器
公开(公告)号：US08006563B2
公开(公告)日：2011-08-30
申请号：US12656209
申请日：2010-01-21
申请人： Akihiko Teshigahara , Hideaki Yamada
发明人： Akihiko Teshigahara , Hideaki Yamada
IPC分类号： G01L11/04
CPC分类号： G01L9/0025 , G01L9/008
摘要： A sensor chip has a substrate and a comb-teeth electrode arranged on the substrate. The sensor chip is fixed to a diaphragm structure to be distorted by receiving pressure, and is fixed to the diaphragm structure only through a predetermined fix area so as to detect the pressure. The fix area is defined on only a part of the sensor chip opposing to the diaphragm structure. The sensor chip is restrained by the diaphragm structure in a direction of transmitting surface acoustic wave. Flexibility of the sensor chip in a perpendicular direction approximately perpendicular to the wave transmitting direction is larger than that in the transmitting direction.
摘要翻译：传感器芯片具有布置在基板上的基板和梳齿电极。传感器芯片固定在膜片结构上，通过接受压力而变形，仅通过预定的固定区域固定在膜片结构上，以便检测压力。固定区仅限于与隔膜结构相对的传感器芯片的一部分。传感器芯片在传播表面声波的方向上被隔膜结构约束。传感器芯片在大致垂直于波浪传播方向的垂直方向上的灵活性大于传送方向的灵敏度。

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