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    • 11. 发明授权
    • Resist composition and method for producing resist pattern
    • 抗蚀剂组合物和抗蚀剂图案的制造方法
    • US09291893B2
    • 2016-03-22
    • US13281145
    • 2011-10-25
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • Tatsuro MasuyamaSatoshi YamamotoKoji Ichikawa
    • G03F7/004G03F7/039G03F7/20
    • G03F7/0046G03F7/0045G03F7/0397G03F7/2041
    • A resist composition contains; a resin having a structural unit represented by the formula (aa) and a structural unit represented by the formula (ab); and an acid generator, wherein Raa1 represents a hydrogen atom and a methyl group; Aaa1 represents an optionally substituted C1 to C6 alkanediyl group etc.; Raa2 represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; Rab1 represents a hydrogen atom and a methyl group; Aab1 represents a single bond, an optionally substituted C1 to C6 alkanediyl group etc.; W1 represents an optionally substituted C4 to C24 alicyclic hydrocarbon group; n represents 1 or 2; Aab2 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; Rab2 in each occurrence independently represents a C1 to C12 fluorinated alkyl group.
    • 抗蚀剂组合物含有 具有由式(aa)表示的结构单元的树脂和由式(ab)表示的结构单元; 和酸产生剂,其中Raa1表示氢原子和甲基; Aaa1表示可以具有取代基的C1〜C6烷二基等。 Raa2表示任选取代的C1至C18脂族烃基; Rab1表示氢原子和甲基; Aab1表示单键,任选取代的C 1至C 6烷二基等; W1表示任选取代的C4至C24脂环族烃基; n表示1或2; Aab2各自独立地表示任选取代的C 1至C 6脂族烃基; Rab2各自独立地表示C1〜C12氟化烷基。
    • 12. 发明授权
    • Resist composition and method for producing resist pattern
    • 抗蚀剂组合物和抗蚀剂图案的制造方法
    • US09229320B2
    • 2016-01-05
    • US13196446
    • 2011-08-02
    • Koji IchikawaSatoshi Yamamoto
    • Koji IchikawaSatoshi Yamamoto
    • G03F7/004G03F7/039G03F7/20
    • G03F7/0045G03F7/0046G03F7/0397G03F7/2041G03F7/2059
    • A resist composition contains; a resin having a structural unit derived from a compound represented by the formula (a); and an acid generator represented by the formula (B1). wherein R1 represents a hydrogen atom or a methyl group; A10 represents a single bond, an optionally substituted C1 to C6 alkanediyl group or a group represented by formula (a-1) defined in the specification; W1 represents an optionally substituted C4 to C36 alicyclic hydrocarbon group; A20 in each occurrence independently represents an optionally substituted C1 to C6 aliphatic hydrocarbon group; R2 in each occurrence independently represents a C1 to C12 perfluoroalkyl group; n represents 1 or 2; Q1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; Lb1 represents an optionally substituted C1 to C17 divalent aliphatic hydrocarbon group; Y represents an optionally substituted C1 to C18 aliphatic hydrocarbon group; and Z+ represents an organic cation.
    • 抗蚀剂组合物含有 具有衍生自由式(a)表示的化合物的结构单元的树脂; 和由式(B1)表示的酸发生剂。 其中R1表示氢原子或甲基; A10表示单键,可以具有取代基的C1〜C6烷二基或由说明书中定义的式(a-1)表示的基团; W1表示任选取代的C4至C36脂环族烃基; A20每次独立地表示任选取代的C 1至C 6脂族烃基; R2各自独立地表示C1〜C12全氟烷基; n表示1或2; Q1和Q2独立地表示氟原子或C1〜C6全氟烷基; Lb1表示任选取代的C 1至C 17二价脂族烃基; Y表示任选取代的C 1至C 18脂族烃基; Z +表示有机阳离子。
    • 16. 发明授权
    • Laminated coil
    • 层压线圈
    • US08896406B2
    • 2014-11-25
    • US13611940
    • 2012-09-12
    • Satoshi Yamamoto
    • Satoshi Yamamoto
    • H01F27/30H01F5/00H01F27/28H01F27/32
    • H01F5/00H01F27/2847H01F27/303H01F27/323
    • A laminated coil includes a plurality of circular conductive plates in the form of a flat plate, each of the circular conductive plates being laminated via an insulating material in an axis direction. The plurality of circular conductive plates each include a plurality of concentric circular arc parts having different inner diameter and outer diameter from each other, and a connection part interconnecting the plurality of circular arc parts. The plurality of circular conductive plates are arranged such that the connection parts thereof face each other and the circular arc parts thereof are juxtaposed to each other in a radial direction.
    • 层叠线圈包括平板形状的多个圆形导电板,每个圆形导电板通过绝缘材料沿轴向层压。 多个圆形导电板各自包括彼此具有不同内径和外径的多个同心圆弧部分和将多个圆弧部分互连的连接部分。 多个圆形导电板被布置成使得其连接部分彼此面对,并且其圆弧部分在径向方向上彼此并置。