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11. 发明授权

US5981941A Optical encorder for detection having a moving reference point 失效
标题翻译：具有移动参考点的用于检测的光学记录仪
公开(公告)号：US5981941A
公开(公告)日：1999-11-09
申请号：US859321
申请日：1997-05-20
申请人： Kazumasa Takata , Kanji Nishii , Kenji Takamoto , Masami Ito , Atsushi Fukui , Tomohisa Kishi
发明人： Kazumasa Takata , Kanji Nishii , Kenji Takamoto , Masami Ito , Atsushi Fukui , Tomohisa Kishi
IPC分类号： G01D5/38 , G01D5/34
CPC分类号： G01D5/38
摘要： The present invention provides an optical encoder capable of using the recesses and convexes of a movable plate and a fixed plate to accurately generate a Z phase signal in synchronism with an A/B phase signal. Phase type diffraction gratings on the moving and fixed plates including a plurality of tracks with different grating pitches cause parallel coherent beams to interfere with one another, and a light receiving part detects the intensity of light to obtain a plurality of synchronous signals with different periods. On the other hand, the light receiving part detects light spots formed by condensing elements on the movable plate to generates a single pulse per rotation as a reference position. One of the plurality of synchronous signals that has the shortest period is selected as an A/B phase signal that depends on the movement of the movable plate. The conjunction of the reference position signal and the plurality of synchronous signals is determined as a Z phase signal indicating the origin of the movable plate, thereby obtaining a Z phase signal in synchronism with one pulse of the A/B phase signal.
摘要翻译：本发明提供一种能够使用可移动板和固定板的凹凸的光学编码器，以与A / B相位信号同步地精确地生成Z相信号。包括具有不同光栅间距的多个轨道的移动和固定板上的相位衍射光栅使平行的相干光束彼此干涉，并且光接收部分检测光的强度以获得具有不同周期的多个同步信号。另一方面，光接收部检测由可动板上的聚光元件形成的光斑，以产生每旋转一脉冲作为基准位置。选择具有最短周期的多个同步信号中的一个作为取决于可动板的移动的A / B相位信号。基准位置信号和多个同步信号的结合被确定为指示可移动板的原点的Z相信号，从而获得与A / B相位信号的一个脉冲同步的Z相信号。

12. 发明授权

US5694218A Optical encoder including a plurality of phase adjusting gratings 失效
标题翻译：光学编码器包括多个相位调整光栅
公开(公告)号：US5694218A
公开(公告)日：1997-12-02
申请号：US643433
申请日：1996-05-08
申请人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito , Kazumasa Takata
发明人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito , Kazumasa Takata
IPC分类号： G01D5/38 , G02B5/18 , G02B5/30 , G01B9/02
CPC分类号： G01D5/38
摘要： An optical encoder has a light source and a diffracted light interference device including at least first and second diffraction gratings confronting each other, producing diffracted light beams in specific orders by passing light emitted from the light source through the first and second diffraction gratings, and making the diffracted light beams in the specific orders, which have passed through the diffraction gratings, interfere with each other to produce on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and off-axis interference light beams in which the sum of the orders of the diffraction is not zero. A phase device is adjusting the phases of the on-axis interference light beams and the off-axis interference light beams emitted from plural portions of the diffracted light interference device. A plurality of light sensors receive and detect the on-axis interference light beams and the off-axis interference light beams device. In this structure, since the on-axis interference light beams in which the sum of the orders of the diffraction at the diffraction gratings is zero and the off-axis interference light beams in which the sum of the orders of the diffraction is not zero are produced and the phases of the on-axis interference light beams and the phases of the off-axis interference light beams are made equal to each other, unwanted negation of signals is avoided, whereby the light utilization efficiency is increased.
摘要翻译：光学编码器具有光源和衍射光干涉装置，其至少包括彼此面对的第一和第二衍射光栅，通过使从光源发射的光通过第一和第二衍射光栅，以特定的顺序产生衍射光束，并且已经通过衍射光栅的特定次数的衍射光束彼此干涉以产生在衍射光栅处的衍射级之和为零和离轴干扰之和的轴上干涉光束其中衍射级数之和不为零的光束。相位装置调节从衍射光干涉装置的多个部分发射的轴上干涉光束和离轴干涉光束的相位。多个光传感器接收并检测轴上干涉光束和离轴干涉光束装置。在这种结构中，由于衍射光栅的衍射级之和为零的衍射的次数和衍射级之和不为零的离轴干涉光束的轴上干涉光束为使轴上干涉光束的相位和离轴干涉光束的相位彼此相等，避免信号的不希望的反转，从而提高光的利用效率。

13. 发明授权

US5532823A Method of measuring optical characteristics of liquid crystal cells, measurement equipment therefor and method for manufacturing liquid crystal devices 失效
标题翻译：测量液晶单元的光学特性的方法，其测量设备及其制造方法
公开(公告)号：US5532823A
公开(公告)日：1996-07-02
申请号：US361546
申请日：1994-12-22
申请人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito
发明人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito
IPC分类号： G01N21/23 , G02F1/13 , G01J4/00
CPC分类号： G01N21/23 , G02F1/1309
摘要： There is disclosed a method for measuring retardation .DELTA.nd of a liquid crystal cell in which a linearly polarized light beam is impinged upon a liquid crystal cell, the liquid crystal cell is rotated in a plane perpendicular to an optical axis of a measuring optical system so that the transmission through the liquid crystal cell for the light beam having a polarization parallel to that of the incident light beam becomes maximal, the wavelength of the incident light beam is varied to detect at least one wavelength .lambda..sub.s at which the transmission has an extreme and, finally, .DELTA.nd is calculated from .DELTA.nd=.lambda..sub.s .sqroot.m.sup.2 -(1/4) for the case of m-th minimal transmission or from .DELTA.nd=.lambda..sub.s .sqroot.m.sup.2 +m for the case of m-th maximal transmission.
摘要翻译：公开了一种用于测量液晶单元的延迟DELTA nd的方法，其中线偏振光束照射在液晶单元上，液晶单元在与测量光学系统的光轴垂直的平面中旋转，因此通过用于具有与入射光束平行的偏振的光束的液晶单元的透射变得最大，入射光束的波长变化，以检测透射具有极端的至少一个波长λs 并且最后，对于第m个最小传输的情况，从DELTA nd =λs 2ROOT m2-（1/4）计算DELTA nd，或者对于第m个最大传输的情况，从DELTA nd =λs 2ROOT m2 + m计算传输。

14. 发明授权

US6068382A Panel-form illuminating system 有权
标题翻译：面板式照明系统
公开(公告)号：US6068382A
公开(公告)日：2000-05-30
申请号：US348855
申请日：1999-07-07
申请人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito , Kazumasa Takata , Ken Tatsuta , Koki Nakabayashi , Hiroshi Watanabe
发明人： Atsushi Fukui , Kanji Nishii , Kenji Takamoto , Masami Ito , Kazumasa Takata , Ken Tatsuta , Koki Nakabayashi , Hiroshi Watanabe
IPC分类号： F21V8/00 , G02B6/00 , F21V7/04
CPC分类号： G02B6/0038 , G02B6/0036 , G02B6/0061 , G02B6/0078 , G02B6/0046 , G02B6/0055 , G02B6/0056 , G02B6/0068
摘要： A highly efficient, luminous and energy-saving panel-form illuminating system suitable for mass-production, comprising at least a photoconductor, a linear light source at one side of the photoconductor, and a reflector; wherein grooves or protrusions are formed on the bottom surface of the photoconductor.
摘要翻译：一种适用于批量生产的高效，发光和节能的面板式照明系统，包括至少一个光电导体，在感光体一侧的线性光源和反射器; 其中在感光体的底表面上形成有凹槽或凸起。

15. 发明授权

US5999249A Position detecting element and range sensor 失效
标题翻译：位置检测元件和量程传感器
公开(公告)号：US5999249A
公开(公告)日：1999-12-07
申请号：US950282
申请日：1997-10-14
申请人： Masami Ito , Kanji Nishii , Kenji Takamoto , Atsushi Fukui , Kazumasa Takata
发明人： Masami Ito , Kanji Nishii , Kenji Takamoto , Atsushi Fukui , Kazumasa Takata
IPC分类号： G01B11/00 , G01B11/02 , G01C3/06 , G01C3/08 , G01C3/00 , G01N21/86 , G02B7/04
CPC分类号： G01C3/085 , G01B11/026
摘要： A position detecting element that enables a position to be detected at high speed and high precision, and a range sensor using the same. The position detecting element is provided with a PIN photodiode array 1 having n segments and a parallel arithmetic processing portion 2 that calculates the segment having maximum intensity by comparing n outputs from the segments of the PIN photodiode array 1. The range sensor includes a light source by which the object to be measured is irradiated by optical beam, a lens that gathers rays of the reflected light from the surface of the object to be measured and the position detecting element mentioned above that detects the position of the light gathered by the lens.
摘要翻译：能够高速高精度地检测位置的位置检测元件和使用该位置检测元件的距离传感器。位置检测元件设置有具有n个段的PIN光电二极管阵列1和并行算术处理部分2，其通过比较PIN光电二极管阵列1的各个部分的n个输出来计算具有最大强度的段。范围传感器包括光源被测量对象被光束照射，从被检测体的表面收集反射光的光线的透镜和上述检测由透镜收集的光的位置的位置检测元件。

16. 发明授权

US5717485A Foreign substance inspection apparatus 失效
标题翻译：异物检验仪器
公开(公告)号：US5717485A
公开(公告)日：1998-02-10
申请号：US637230
申请日：1996-04-24
申请人： Masami Ito , Kenji Takamoto , Kanji Nishii , Tatsuo Nagasaki , Ken Shimono
发明人： Masami Ito , Kenji Takamoto , Kanji Nishii , Tatsuo Nagasaki , Ken Shimono
IPC分类号： G01B11/30 , G01N21/88 , G01N21/94 , G01N21/956 , G06T1/00 , H01L21/66 , G01N21/00
CPC分类号： G01N21/94
摘要： A foreign substance inspection apparatus having a good signal to noise ratio with optical detection accuracy capable of detecting infinitesimal foreign substances, comprising a lighting portion to irradiate with an S polarized laser light beam and having the optical axis parallel to the substrate to be inspected, a detecting portion having an optical axis located in a position set by rotating the optical axis of the lighting portion by 120.degree. to 160.degree. with the point of intersection of the optical axis of the lighting portion and the surface to be inspected as the center of rotation so as to have an angle made with the surface to be inspected of 45.degree. or smaller to detect the area irradiated from the lighting portion by detecting the S polarized component in the scattered component from the foreign substances existing on the surface to be inspected and converting the S polarized component photoelectrically to a signal, and a signal processing portion to detect a foreign substance based on the signal outputted from the detecting portion.
摘要翻译：具有能够检测无限小杂质的具有良好的信噪比与检测精度的异物检查装置，包括用S偏振激光束照射并使光轴平行于要检查的基板的照明部，检测部分，其光轴位于通过将照明部分的光轴与要检查的表面的相交点作为旋转中心的位置使照明部分的光轴旋转120度至160度所设定的位置以使被检查面的角度为45°以下，通过检测来自存在于被检测面上的异物的散射成分中的S偏振成分来检测照明部照射的面积，并进行转印光信号的S偏振光分量和检测异物ba的信号处理部关于从检测部分输出的信号。

17. 发明授权

US5748305A Method and apparatus for particle inspection 失效
标题翻译：颗粒检查方法和装置
公开(公告)号：US5748305A
公开(公告)日：1998-05-05
申请号：US670851
申请日：1996-06-28
申请人： Ken Shimono , Tatsuo Nagasaki , Kenji Takamoto , Masami Ito , Kanji Nishii
发明人： Ken Shimono , Tatsuo Nagasaki , Kenji Takamoto , Masami Ito , Kanji Nishii
IPC分类号： G01B11/30 , G01N21/88 , G01N21/94 , G01N21/956 , H01L21/66 , H05K3/00 , G01N21/00
CPC分类号： G01N21/94
摘要： A method for foreign particles inspection includes illuminating an inspection surface of an inspection object with a beam which is, one of s-polarized and p-polarized relative to the inspection surface of the inspection object. The illumination utilizes an optical axis which is generally parallel to the inspection surface or which intersects the inspection surface at an angle that is greater than or equal to 1.degree. and less than 5.degree.. Reflected and scattered light is detected utilizing an optical axis which makes an acute angle with the inspection surface and which makes a differential angle of 30.degree. or less with the optical axis of the illumination beam. The detection of foreign particles is accomplished by detecting the component of the reflected and scattered light which is the other of s-polarized and p-polarized relative to the inspection surface.
摘要翻译：外来粒子检查方法包括用相对于检查对象的检查面的s偏振和p偏振光束照射检查对象的检查面。照明使用大致平行于检查表面的光轴，或者以大于或等于1度且小于5度的角度与检查表面相交的光轴。使用与检查面成锐角的光轴来检测反射散射光，并且与照明光束的光轴成30°以下的差角。通过检测相对于检查表面的s偏振和p偏振中的另一个的反射和散射光的分量来实现异物的检测。

18. 发明授权

US5866904A Scanning electron microscope and method for dimension measuring by using the same 失效
公开(公告)号：US5866904A
公开(公告)日：1999-02-02
申请号：US970201
申请日：1997-11-14
申请人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
发明人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
IPC分类号： G01Q30/02 , G01B15/00 , G01B15/04 , G01Q30/04 , H01J37/26
CPC分类号： G01B15/00 , G01B15/04 , H01J2237/2448 , H01J2237/24495 , H01J2237/281
摘要： An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

19. 发明授权

US5969357A Scanning electron microscope and method for dimension measuring by using the same 失效
公开(公告)号：US5969357A
公开(公告)日：1999-10-19
申请号：US979327
申请日：1997-11-26
申请人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
发明人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
IPC分类号： G01Q30/02 , G01B15/00 , G01B15/04 , G01Q30/04 , H01J37/26
CPC分类号： G01B15/00 , G01B15/04 , H01J2237/2448 , H01J2237/24495 , H01J2237/281
摘要： An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.

20. 发明授权

US6114695A Scanning electron microscope and method for dimension measuring by using the same 失效
标题翻译：扫描电子显微镜及其使用的尺寸测量方法
公开(公告)号：US6114695A
公开(公告)日：2000-09-05
申请号：US307789
申请日：1999-05-10
申请人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
发明人： Hideo Todokoro , Kenji Takamoto , Tadashi Otaka , Fumio Mizuno , Satoru Yamada , Sadao Terakado , Katsuhiro Kuroda , Ken Ninomiya , Tokuo Kure
IPC分类号： G01Q30/02 , G01B15/00 , G01B15/04 , G01Q30/04 , H01J37/26
CPC分类号： G01B15/00 , G01B15/04 , H01J2237/2448 , H01J2237/24495 , H01J2237/281
摘要： An electron beam which can transmit through part of a specimen and can reach a portion not exposing to the electron beam is irradiated and a scanning image is obtained on the basis of a signal secondarily generated from a portion irradiated with the electron beam. Dimension-measuring start and end points are set on the scanning image and a dimension therebetween is measured. A cubic model is assumed, the cubic model is modified so as to match the scanning image, and dimension measurement is carried out on the basis of a modified cubic model.
摘要翻译：照射可以透过部分试样并且可以到达不暴露于电子束的部分的电子束，并且基于从照射电子束的部分二次产生的信号获得扫描图像。在扫描图像上设置尺寸测量开始点和终点，并测量它们之间的尺寸。假设立方模型，修改立方体模型以匹配扫描图像，并且基于修改的立方体模型进行尺寸测量。

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