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11. 发明专利

SG11202000114TA HYBRID INSPECTION SYSTEM FOR EFFICIENT PROCESS WINDOW DISCOVERY 未知
公开(公告)号：SG11202000114TA
公开(公告)日：2020-02-27
申请号：SG11202000114T
申请日：2018-07-24
申请人： KLA TENCOR CORP
发明人： DUFFY BRIAN
IPC分类号： H01L21/66
摘要： Title: HYBRID INSPECTION SYSTEM FOR EFFICIENT PROCESS WINDOW DISCOVERY 200 (57) : An inspection system includes a controller communicative- ly coupled to a physical inspection device (PID), a virtual inspection device (VID) configured to analyze stored PID data, and a defect verification device (DVD). The controller may receive a pattern layout of a sample including multiple patterns fabricated with selected lithography configurations defm- ing a process window, receive locations of PID-identified defects identified through analysis of the sample with the PID, wherein the PID-identified de- fects are verified by the DVD, remove one or more lithography configurations associated with the locations of the PID-identified defects from the process window, iteratively refine the process window by removing one or more lithography configurations associated with VID-identified defects identified through analysis of selected portions of stored PID data with the VID, and 206 provide, as an output, the process window when a selected end condition is met. 202- N RECEIVING A PAI I ERN LAYOUT OF A SAMPLE INCLUDING A PLURALITY OF PM] ERNS FABRICATED WITH SELECTED LITHOGRAPHY CONFIGURATIONS DEFINING A PROCESS WINDOW INSPECTING THE SAMPLE WITH A PHYSICAL INSPECTION DEVICE (PID) TO GENERATE PID-IDENTIFIED DEFECTS VERIFYING THE PID-IDENTIFIED DEFECTS WITH A DEFECT VERIFICATION DEVICE (DVD) REMOVING ONE OR MORE LITHOGRAPHY CONFIGURATIONS ASSOCIATED WITH LOCATIONS OF THE PID-IDENTIFIED DEFECTS FROM THE PROCESS WINDOW (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) vitivio VIII oviolo 111111111111ml I0I Imo Hs (19) World Intellectual Property Organization International Bureau (10) International Publication Number WO 2019/023152 Al (43) International Publication Date 31 January 2019 (31.01.2019) WIPO I PCT (51) International Patent Classification: HO1L 21/66 (2006.01) (21) International Application Number: PCT/US2018/043351 (22) International Filing Date: DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art 21(3)) 24 July 2018 (24.07.2018) English English (25) Filing Language: (26) Publication Language: (30) Priority Data: 62/536,893 25 July 2017 (25.07.2017) US 15/727,212 06 October 2017 (06.10.2017) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (72) Inventor: DUFFY, Brian; 1073 Crosswind Ct., San Jose, California 95120 (US). (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, in 2 , 1-1 o 212 O C ITERATIVELY REFINING THE PROCESS WINDOW PROVIDING THE PROCESS WINDOW WHEN A SELECTED END CONDITION IS MET FIG.2

12. 发明专利

SG10201912733SA VIRTUAL INSPECTION SYSTEMS WITH MULTIPLE MODES 未知
公开(公告)号：SG10201912733SA
公开(公告)日：2020-02-27
申请号：SG10201912733S
申请日：2015-07-22
申请人： KLA TENCOR CORP
发明人： DUFFY BRIAN , BANERJEE SAIBAL
摘要： Methods and systems for determining one or more characteristics for defects detected on a specimen are provided. One system includes one or more computer subsystems configured for identifying a first defect that was detected on a specimen by an inspection system with a first mode but was not detected with one or more other modes. The computer subsystem(s) are also configured for acquiring, from the storage medium, one or more images generated with the one or more other modes at a location on the specimen corresponding to the first defect. In addition, the computer subsystem(s) are configured for determining one or more characteristics of the acquired one or more images and determining one or more characteristics of the first defect based on the one or more characteristics of the acquired one or more images.

13. 发明专利

SG11201703581XA VIRTUAL INSPECTION SYSTEMS FOR PROCESS WINDOW CHARACTERIZATION 未知
公开(公告)号：SG11201703581XA
公开(公告)日：2017-06-29
申请号：SG11201703581X
申请日：2015-11-23
申请人： KLA TENCOR CORP
发明人： KARSENTI LAURENT , BHASKAR KRIS , WAGNER MARK , DUFFY BRIAN , RAMACHANDRAN VIJAYAKUMAR
IPC分类号： G01R31/26 , G01R31/01 , G01R31/28
摘要： The invention discloses a method and system for displaying electronic information for an Online Dating Service. Information is received through a variety of means including electronic analysis of photographs and communications as well as direct questions posed to an individual. Once the information is received a profile describing the interest, personality traits and what traits the individual looks for in a companion is created. To prevent priming based on physical appearance the word cloud is displayed to other individuals prior to a photograph. The photograph can be revealed to the other individuals if they take affirmative action to view the photograph or after an arbitrary period of time such that the other individuals can be primed based on the information in the word cloud without losing the emotional investment in finding a companion.

14. 发明专利

SG11201610823XA DETERMINING COORDINATES FOR AN AREA OF INTEREST ON A SPECIMEN 未知
公开(公告)号：SG11201610823XA
公开(公告)日：2017-02-27
申请号：SG11201610823X
申请日：2015-07-22
申请人： KLA TENCOR CORP
发明人： DUFFY BRIAN , LENNEK MICHAEL , LEE CHANGHO
IPC分类号： G06F17/50
摘要： Methods and systems for determining coordinates for an area of interest on a specimen are provided. One system includes one or more computer subsystems configured for, for an area of interest on a specimen being inspected, identifying one or more targets located closest to the area of interest. The computer subsystem(s) are also configured for aligning one or more images for the one or more targets to a reference for the specimen. The image(s) for the target(s) and an image for the area of interest are acquired by an inspection subsystem during inspection of the specimen. The computer subsystem(s) are further configured for determining an offset between the image(s) for the target(s) and the reference based on results of the aligning and determining modified coordinates of the area of interest based on the offset and coordinates of the area of interest reported by the inspection subsystem.

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