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11. 发明授权

US5767971A Apparatus for measuring refractive index of medium using light, displacement measuring system using the same apparatus, and direction-of-polarization rotating unit 失效
$Apparatus for measuring refractive index of medium using light, displacement measuring system using the same apparatus, and direction-of-polarization rotating unit$
标题翻译：用于使用光的位移测量系统和使用相同装置的偏振旋转单元来测量介质的折射率的装置
公开(公告)号：US5767971A
公开(公告)日：1998-06-16
申请号：US574704
申请日：1995-12-19
申请人： Hitoshi Kawai , Jun Kawakami , Akira Ishida , Kouichi Tsukihara
发明人： Hitoshi Kawai , Jun Kawakami , Akira Ishida , Kouichi Tsukihara
IPC分类号： G01N21/45 , G01B9/02
CPC分类号： G01N21/45
摘要： A second harmonic generation (SHG) device is used for conversion of wavelength. The direction of polarization of light beams is suitably rotated by a direction-of-polarization rotating unit, for example by 45.degree., and thereafter these light beams are guided into the SHG device. This can minimize attenuation of intensity of light beam due to conversion of wavelength. Hence, using this direction-of-polarization rotating unit in the apparatus for measuring the medium, the intensity of light being incident upon the photodetector can be increased, whereby the refractive index of the medium can be measured more accurately than by the conventional apparatus.
摘要翻译：二次谐波发生（SHG）器件用于波长转换。光束的偏振方向通过偏振方向旋转单元适当地旋转，例如45度，然后将这些光束引导到SHG装置中。这可以最小化由于波长转换引起的光束强度的衰减。因此，在用于测量介质的装置中使用该偏振方向旋转单元，可以增加入射到光电检测器上的光的强度，从而可以比常规装置更精确地测量介质的折射率。

12. 发明授权

US5748315A Optical interference measuring apparatus and method for measuring displacement of an object having an optical path separating system 失效
标题翻译：光学干涉测量装置和用于测量具有光路分离系统的物体的位移的方法
公开(公告)号：US5748315A
公开(公告)日：1998-05-05
申请号：US621362
申请日：1996-03-25
申请人： Hitohsi Kawai , Jun Kawakami , Kouichi Tsukihara
发明人： Hitohsi Kawai , Jun Kawakami , Kouichi Tsukihara
IPC分类号： G01B9/02 , G01B11/00 , G03F7/20
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02018 , G03F7/70716
摘要： The present invention relates to an optical interference measuring apparatus and method for measuring displacement of an object. The apparatus and method reduces the displacement-measurement error caused by changes of the refractive index of the atmosphere or the like, in a measurement optical path and a reference optical path, by suppressing crosstalk caused by unfavorable mixing of reference light and measurement light with each other, thereby improving accuracy in the measurement. The apparatus produces interference between a measurement light beam and a reference light beam. The measurement light is propagated through a measurement optical path including a measurement reflector, which is at least movable along the measurement optical path. The reference light is propagated through a reference optical path including a reference reflector. The interference occurs in a predetermined interference system, whereby the displacement of the measurement reflector can be measured. The apparatus, especially, comprises a light path separating system for spatially separating from each other the optical path from the measurement reflector to the interference system, through which the measurement light is propagated, and the optical path from the reference reflector to the interference system, through which the reference light is propagated.
摘要翻译：本发明涉及一种用于测量物体的位移的光学干涉测量装置和方法。该装置和方法通过抑制由参考光和测量光的不利混合引起的串扰，降低测量光路和参考光路中大气等的折射率的变化引起的位移测量误差从而提高测量精度。该装置产生测量光束和参考光束之间的干涉。测量光通过包括测量反射器的测量光路传播，测量反射器至少可沿测量光路移动。参考光通过包括参考反射器的参考光路传播。干扰发生在预定的干涉系统中，由此可以测量测量反射体的位移。特别地，该装置包括光路分离系统，用于将测量反射器的光路与测量反射器的光路相互空间分离，测量光通过该干涉系统传播，以及从参考反射器到干涉系统的光路，参考光通过其传播。

13. 发明申请

US20120053374A1 PROCESS OF MAKING A CHLORINATED HYDROCARBON 有权
标题翻译：制造氯化氢的方法
公开(公告)号：US20120053374A1
公开(公告)日：2012-03-01
申请号：US13319912
申请日：2010-06-17
申请人： Tadahiro Fukuju , Kikuo Yamamoto , Masayuki Moriwaki , Yasutaka Komatsu , Akihiro Saito , Shunsuke Hosaka , Dai Tsunoda , Jun Kawakami
发明人： Tadahiro Fukuju , Kikuo Yamamoto , Masayuki Moriwaki , Yasutaka Komatsu , Akihiro Saito , Shunsuke Hosaka , Dai Tsunoda , Jun Kawakami
IPC分类号： C07C17/25
CPC分类号： C07C17/04 , C01B7/01 , C01B7/04 , C01B7/0706 , C07C17/25 , C07C17/275 , C07C17/278 , C07C19/01 , C07C21/04
摘要： A process of making a chlorinated hydrocarbon through a thermal dehydrochlorination step in which an unsaturated compound represented by the following general formula (2) is obtained by thermally decomposing a saturated compound represented by the following general formula (1). CCl3—CCl2-mHm—CCl3-nHn (1) CCl2═CCl2-mHm-1—CCl3-nHn (2) (in the above formulas, m is 1 or 2, and n is an integer of 0 to 3.)
摘要翻译：通过热分解通过热分解由以下通式（1）表示的饱和化合物获得由以下通式（2）表示的不饱和化合物的热脱氯化氢步骤制备氯代烃的方法。 CCl3-CCl2-mHm-CCl3-nHn（1）CCl2 = CCl2-mHm-1-CCl3-nHn（2）（在上式中，m为1或2，n为0〜3的整数。

14. 发明授权

US5757489A Interferometric apparatus for measuring a physical value 失效
标题翻译：用于测量物理值的干涉仪
公开(公告)号：US5757489A
公开(公告)日：1998-05-26
申请号：US703624
申请日：1996-08-23
申请人： Jun Kawakami
发明人： Jun Kawakami
IPC分类号： G01B9/02
CPC分类号： G01B9/02062 , G01B9/02003 , G01B2290/45 , G01B2290/70
摘要： The displacement of the stage of an exposure apparatus can be measured by obtaining the phase difference between a light beam reflected by a stationary mirror and a light beam reflected by a movable mirror placed on the stage. This apparatus calculates the position data of the stage at second time by using the position data of the stage at first time which is measured by using first and second frequencies, the position data of the stage at the first time which is measured by using a third frequency, and the position data of the stage at the second time which is measured by using the third frequency.
摘要翻译：可以通过获得由静止反射镜反射的光束和由放置在平台上的可移动反射镜反射的光束之间的相位差来测量曝光装置的台的位移。该装置通过使用通过使用第一和第二频率测量的第一时刻的级的位置数据来计算第二时刻的级的位置数据，该第一时刻的级的位置数据是通过使用第三频率以及通过使用第三频率测量的第二时间段的位置数据。

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