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    • 2. 发明授权
    • Optical interference measuring apparatus and method for measuring
displacement of an object having an optical path separating system
    • 光学干涉测量装置和用于测量具有光路分离系统的物体的位移的方法
    • US5748315A
    • 1998-05-05
    • US621362
    • 1996-03-25
    • Hitohsi KawaiJun KawakamiKouichi Tsukihara
    • Hitohsi KawaiJun KawakamiKouichi Tsukihara
    • G01B9/02G01B11/00G03F7/20
    • G01B9/02007G01B9/02003G01B9/02018G03F7/70716
    • The present invention relates to an optical interference measuring apparatus and method for measuring displacement of an object. The apparatus and method reduces the displacement-measurement error caused by changes of the refractive index of the atmosphere or the like, in a measurement optical path and a reference optical path, by suppressing crosstalk caused by unfavorable mixing of reference light and measurement light with each other, thereby improving accuracy in the measurement. The apparatus produces interference between a measurement light beam and a reference light beam. The measurement light is propagated through a measurement optical path including a measurement reflector, which is at least movable along the measurement optical path. The reference light is propagated through a reference optical path including a reference reflector. The interference occurs in a predetermined interference system, whereby the displacement of the measurement reflector can be measured. The apparatus, especially, comprises a light path separating system for spatially separating from each other the optical path from the measurement reflector to the interference system, through which the measurement light is propagated, and the optical path from the reference reflector to the interference system, through which the reference light is propagated.
    • 本发明涉及一种用于测量物体的位移的光学干涉测量装置和方法。 该装置和方法通过抑制由参考光和测量光的不利混合引起的串扰,降低测量光路和参考光路中大气等的折射率的变化引起的位移测量误差 从而提高测量精度。 该装置产生测量光束和参考光束之间的干涉。 测量光通过包括测量反射器的测量光路传播,测量反射器至少可沿测量光路移动。 参考光通过包括参考反射器的参考光路传播。 干扰发生在预定的干涉系统中,由此可以测量测量反射体的位移。 特别地,该装置包括光路分离系统,用于将测量反射器的光路与测量反射器的光路相互空间分离,测量光通过该干涉系统传播,以及从参考反射器到干涉系统的光路, 参考光通过其传播。