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    • 16. 发明申请
    • MEMS device package and method for manufacturing the same
    • MEMS器件封装及其制造方法
    • US20060141650A1
    • 2006-06-29
    • US11270482
    • 2005-11-10
    • Jong-seok KimYun-kwon ParkKuang-woo NamSeok-chul YunIn-sang Song
    • Jong-seok KimYun-kwon ParkKuang-woo NamSeok-chul YunIn-sang Song
    • H01L21/00
    • B81C1/00269
    • A micro electromechanical system (MEMS) device package and a method of manufacturing the same are provided. The inventive MEMS device package includes: a device substrate with a MEMS active device being formed on the top surface thereof; internal electrode pads, each of which is positioned on the opposite side of the MEMS active device to provide a space where the MEMS active device is positioned and an electrical path for the MEMS active device, each of the internal electrode pads, and comprises first and second pads arranged opposite to one another with a clearance therebetween; sealing pads positioned outside of the internal electrode pads; a closure substrate joined to the device substrate through the sealing pads, the closure substrate having via holes formed at the areas where the internal electrode pads are positioned; connection members each formed on the inner surfaces of the via holes to be in contact with the internal electrode pads at one ends thereof; and external electrode pads formed on the top surface of the closure substrate in such a way that the external electrode pads are in contact with the other ends of the connection members.
    • 提供了微机电系统(MEMS)装置封装及其制造方法。 本发明的MEMS器件封装包括:在其顶表面上形成有MEMS有源器件的器件衬底; 内部电极焊盘,每个内部电极焊盘位于MEMS有源器件的相对侧,以提供MEMS有源器件所在的空间,以及用于MEMS有源器件的电气路径,每个内部电极焊盘,并且包括第一和 第二垫彼此相对布置,其间具有间隙; 位于内部电极焊盘外部的密封垫; 通过所述密封垫连接到所述装置基板的封闭基板,所述封闭基板具有形成在所述内部电极焊盘定位的区域处的通孔; 每个所述连接部件形成在所述通孔的内表面上,以在其一端与所述内部电极焊盘接触; 以及形成在封闭基板的​​顶表面上的外部电极焊盘,使得外部电极焊盘与连接构件的另一端接触。
    • 17. 发明授权
    • MEMS device package and method for manufacturing the same
    • MEMS器件封装及其制造方法
    • US07772026B2
    • 2010-08-10
    • US11270482
    • 2005-11-10
    • Jong-seok KimYun-kwon ParkKuang-woo NamSeok-chul YunIn-sang Song
    • Jong-seok KimYun-kwon ParkKuang-woo NamSeok-chul YunIn-sang Song
    • H01L21/00H01L21/30H01L21/461
    • B81C1/00269
    • A micro electro-mechanical system (MEMS) device package and a method of manufacturing the same are provided. The inventive MEMS device package includes: a device substrate with a MEMS active device being formed on the top surface thereof; internal electrode pads, each of which is positioned on the opposite side of the MEMS active device to provide a space where the MEMS active device is positioned and an electrical path for the MEMS active device, each of the internal electrode pads, and comprises first and second pads arranged opposite to one another with a clearance therebetween; sealing pads positioned outside of the internal electrode pads; a closure substrate joined to the device substrate through the sealing pads, the closure substrate having via holes formed at the areas where the internal electrode pads are positioned; connection members each formed on the inner surfaces of the via holes to be in contact with the internal electrode pads at one ends thereof; and external electrode pads formed on the top surface of the closure substrate in such a way that the external electrode pads are in contact with the other ends of the connection members.
    • 提供了一种微机电系统(MEMS)器件封装及其制造方法。 本发明的MEMS器件封装包括:在其顶表面上形成有MEMS有源器件的器件衬底; 内部电极焊盘,每个内部电极焊盘位于MEMS有源器件的相对侧,以提供MEMS有源器件所在的空间,以及用于MEMS有源器件的电气路径,每个内部电极焊盘,并且包括第一和 第二垫彼此相对布置,其间具有间隙; 位于内部电极焊盘外部的密封垫; 通过所述密封垫连接到所述装置基板的封闭基板,所述封闭基板具有形成在所述内部电极焊盘定位的区域处的通孔; 每个所述连接部件形成在所述通孔的内表面上,以在其一端与所述内部电极焊盘接触; 以及形成在封闭基板的​​顶表面上的外部电极焊盘,使得外部电极焊盘与连接构件的另一端接触。
    • 19. 发明授权
    • Band pass filter and duplexer having the same
    • 带通滤波器和双工器具有相同的功能
    • US07535319B2
    • 2009-05-19
    • US11637768
    • 2006-12-13
    • Yun-kwon ParkIn-sang SongSeok-chul YunKuang-woo Nam
    • Yun-kwon ParkIn-sang SongSeok-chul YunKuang-woo Nam
    • H03H9/70H03H9/54
    • H03H9/706
    • A band pass filter for improving filtering, realizing high integration, and reducing manufacturing costs, and a duplexer having the band pass filter. The band pass filter comprises a first resonant circuit in which n first resonators are connected in series, where n is a natural number greater than 1; a second resonator circuit which faces the first resonant circuit and has m second resonators connected in series, where m is a natural number greater than 1; and a third resonant circuit in which k third resonators are connected in parallel on branching lines linking the first and second resonant circuits, where k is a natural number greater than 1. By arranging the resonators of the respective resonant circuits in the bridge structure, the filtering characteristics can be improved, the number of inductors used to adjust the resonant frequency characteristics of the resonators can be reduced, high integration can be realized and manufacture cost can be reduced.
    • 用于改进滤波,实现高集成度和降低制造成本的带通滤波器,以及具有带通滤波器的双工器。 带通滤波器包括第一谐振电路,其中n个第一谐振器串联连接,其中n是大于1的自然数; 面向第一谐振电路并具有串联连接的m个第二谐振器的第二谐振器电路,其中m是大于1的自然数; 以及第三谐振电路,其中k个第三谐振器并联在连接第一和第二谐振电路的分支线上,其中k是大于1的自然数。通过将各个谐振电路的谐振器布置在桥结构中, 可以提高滤波特性,可以减少用于调节谐振器的谐振频率特性的电感器的数量,可以实现高集成度并且可以降低制造成本。
    • 20. 发明授权
    • Balun
    • 巴伦
    • US07471167B2
    • 2008-12-30
    • US11638507
    • 2006-12-14
    • Chul-soo KimDal AhnKwi-soo KimIn-sang SongYun-kwon ParkSeok-chul YunKuang-woo Nam
    • Chul-soo KimDal AhnKwi-soo KimIn-sang SongYun-kwon ParkSeok-chul YunKuang-woo Nam
    • H01P5/10H03H7/42H01P3/08
    • H01P5/10
    • A balun capable of a reduced whole size. The balun includes an input line receiving an unbalanced signal, an output line receiving the unbalanced signal from the input line and outputting a balanced signal, and a ground part. The input and output lines are formed on a layer, and the ground part is formed on a different layer from the layer. The ground part includes an opening and is electrically connected to the input line, and a portion of the ground part is removed to form the opening so that a potential difference occurs between first and second output lines. Thus, although a length of the output line is less than ¼ of an input wavelength λ, a difference between phases of first and second output signals can be about 180°. As a result, the whole size of the balun can be reduced.
    • 平衡 - 不平衡转换器能够减小整体尺寸。 平衡 - 不平衡转换器包括接收不平衡信号的输入线,输入线接收来自输入线的不平衡信号并输出​​平衡信号的输出线和接地部分。 输入和输出线形成在层上,并且接地部分形成在与该层不同的层上。 接地部分包括开口并且电连接到输入线,并且去除接地部分的一部分以形成开口,使得在第一和第二输出线之间产生电位差。 因此,尽管输出线的长度小于输入波长λ的1/4,但是第一和第二输出信号的相位差可以是大约180°。 结果,平衡不平衡变换器的整体尺寸可以减小。