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11. 发明申请

US20110290022A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 有权
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20110290022A1
公开(公告)日：2011-12-01
申请号：US13177485
申请日：2011-07-06
申请人： Jong Woon Kim , Won Kyu Jeung
发明人： Jong Woon Kim , Won Kyu Jeung
IPC分类号： G01P15/02 , C23F1/02
CPC分类号： B81C1/00158 , B81B3/0062 , B81B3/007 , B81B2201/0235 , B81B2203/053 , B81C1/00484 , B81C1/00531 , B81C1/00539 , B81C1/00571 , B81C2201/01 , B81C2201/0132 , B81C2201/0133 , B81C2201/014 , C09K13/00 , C09K13/08 , G01C19/56 , G01P15/0802 , G01P15/0922 , G01P15/18 , G01P2015/084 , G01P2015/0871
摘要： Disclosed herein an inertial sensor and a method of manufacturing the same. An inertial sensor 100 according to a preferred embodiment of the present invention is configured to include a plate-shaped membrane 110, a mass body 120 that includes an adhesive part 123 disposed under a central portion 113 of the membrane 110 and provided at the central portion thereof and a patterning part 125 provided at an outer side of the adhesive part 123 and patterned to vertically penetrate therethrough, and a first adhesive layer 130 that is formed between the membrane 110 and the adhesive part 123 and is provided at an inner side of the patterning part 125. An area of the first adhesive layer 130 is narrow by isotropic etching using the patterning part 125 as a mask, thereby making it possible to improve sensitivity of the inertial sensor 100.
摘要翻译：本文公开了一种惯性传感器及其制造方法。根据本发明的优选实施例的惯性传感器100被配置为包括板状膜110，质量体120，其包括设置在膜110的中心部分113下方并设置在中心部分处的粘合部123 以及设置在粘合部123的外侧并被图案化以垂直贯穿其中的图案形成部分125，以及形成在膜110和粘合部123之间的第一粘合层130，并且设置在第一粘合层130的内侧图形部分125.通过使用图案形成部分125作为掩模的各向同性蚀刻，第一粘合剂层130的区域变窄，从而可以提高惯性传感器100的灵敏度。

12. 发明申请

US20130081465A1 INERTIAL SENSOR AND ANGULAR VELOCITY DETECTION METHOD USING THE SAME 有权
标题翻译：惯性传感器和使用其的角速度检测方法
公开(公告)号：US20130081465A1
公开(公告)日：2013-04-04
申请号：US13591335
申请日：2012-08-22
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/574
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies supporting the driving masses so as to freely move in a state in which the driving masses float; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.
摘要翻译：这里公开了惯性传感器。惯性传感器包括：多个驱动质量块; 支撑驱动质量的支撑体，以便在驱动质量浮动的状态下自由移动; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

13. 发明申请

US20110146404A1 INERTIAL SENSOR AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：惯性传感器及其制造方法
公开(公告)号：US20110146404A1
公开(公告)日：2011-06-23
申请号：US12716140
申请日：2010-03-02
申请人： Won Kyu JEUNG , Jong Woon Kim
发明人： Won Kyu JEUNG , Jong Woon Kim
IPC分类号： G01P15/09 , H01L41/22
CPC分类号： G01P15/18 , G01C19/56 , G01C25/005 , G01P15/0922 , G01P2015/084 , H01L41/1132 , H01L41/1138 , Y10T29/42
摘要： Disclosed herein is an inertial sensor, which includes a diaphragm having a piezoelectric element or a piezoresistive element formed on one surface thereof, a mass element integrated with the center of the other surface of the diaphragm in which the distal end of the mass element has a larger width than the width of the proximal end in contact with the diaphragm, and a supporter formed along the edge of the other surface of the diaphragm, so that the use of the mass element having the above shape results in decreased spring constant and increased distance from the center of the diaphragm to the center of the mass element, thereby simultaneously realizing a reduction in the size of the inertial sensor and an increase in performance thereof. A method of manufacturing the inertial sensor is also provided.
摘要翻译：本文公开了一种惯性传感器，其包括具有在其一个表面上形成的压电元件或压阻元件的隔膜，质量元件与隔膜的另一表面的中心一体化，质量元件的远端具有比与隔膜接触的近端的宽度大的宽度以及沿着隔膜的另一个表面的边缘形成的支撑件，使得使用具有上述形状的质量元件导致弹簧常数降低和距离增加从隔膜的中心到质量元件的中心，从而同时实现惯性传感器的尺寸的减小和其性能的提高。还提供了制造惯性传感器的方法。

14. 发明授权

US09170270B2 Inertial sensor and method for measuring acceleration using the same 有权
标题翻译：惯性传感器及使用其测量加速度的方法
公开(公告)号：US09170270B2
公开(公告)日：2015-10-27
申请号：US13440809
申请日：2012-04-05
申请人： Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
发明人： Seung Heon Han , Jung Eun Noh , Jong Woon Kim , Sang Jin Kim , Yun Sung Kang , Won Kyu Jeung
IPC分类号： G01P15/09 , G01P15/14 , G01P15/18 , G01P15/08
CPC分类号： G01P15/0922 , G01P15/14 , G01P15/18 , G01P2015/084
摘要： Disclosed herein is an inertial sensor, including: a membrane; a mass body disposed under the membrane; a sensing unit formed on the membrane and including a piezoelectric body; and a spring constant control unit formed to be spaced apart from the sensing unit and including a piezoelectric body. According to the preferred embodiment of the present invention, the DC acceleration (in particular, gravity acceleration) can be measured by using the change in the spring constant without changing the structure of the inertial sensor including the piezoelectric material of the prior art.
摘要翻译：本文公开了一种惯性传感器，包括：膜; 设置在膜下方的质量体; 感测单元，形成在膜上并包括压电体; 以及弹簧恒定控制单元，其形成为与感测单元间隔开并且包括压电体。根据本发明的优选实施例，可以通过使用弹簧常数的变化来测量直流加速度（特别是重力加速度），而不改变包括现有技术的压电材料的惯性传感器的结构。

15. 发明授权

US08763460B2 Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US08763460B2
公开(公告)日：2014-07-01
申请号：US13303932
申请日：2011-11-23
申请人： Jong Woon Kim , Mao Minyao , Lin Liwei , Won Kyu Jeung
发明人： Jong Woon Kim , Mao Minyao , Lin Liwei , Won Kyu Jeung
IPC分类号： G01C19/56
CPC分类号： G01C19/5755
摘要： There is provided an angular velocity sensor, including: a flexible part connecting a fixing part to an oscillation unit; a driving unit formed on the flexible part or the oscillation unit to oscillate the oscillation unit; a sensing unit formed on the flexible part or the oscillation unit to sense a displacement of the oscillation unit according to an angular velocity input; a control piezoelectric element formed on the flexible part to control rigidity of a motion of the oscillation unit; and an impedance element electrically connected to the control piezoelectric element to apply impedance to the control piezoelectric element.
摘要翻译：提供了一种角速度传感器，包括：将固定部分连接到振荡单元的柔性部分; 驱动单元，形成在所述柔性部分或所述振荡单元上，以振荡所述振荡单元; 感测单元，形成在柔性部分或振荡单元上，以根据角速度输入感测振荡单元的位移; 控制压电元件，其形成在所述柔性部上，以控制所述振荡单元的运动的刚性; 以及与控制压电元件电连接以将阻抗施加到控制压电元件的阻抗元件。

16. 发明申请

US20120152020A1 INERTIAL SENSOR 失效
标题翻译：惯性传感器
公开(公告)号：US20120152020A1
公开(公告)日：2012-06-21
申请号：US13165436
申请日：2011-06-21
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
IPC分类号： G01P15/125 , G01P15/09 , G01P15/12 , G01P15/00
CPC分类号： G01P15/125 , G01P15/09 , G01P15/123 , G01P2015/0842
摘要： Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.
摘要翻译：这里公开了惯性传感器。设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

17. 发明授权

US08739628B2 Inertial sensor 失效
标题翻译：惯性传感器
公开(公告)号：US08739628B2
公开(公告)日：2014-06-03
申请号：US13165436
申请日：2011-06-21
申请人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
发明人： Jong Woon Kim , Liwei Lin , Minyao Mao , Heung Woo Park
IPC分类号： G01P15/08
CPC分类号： G01P15/125 , G01P15/09 , G01P15/123 , G01P2015/0842
摘要： An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.
摘要翻译：惯性传感器包括板状基材层，质量体，支撑框架，从支撑框架沿质量体的中心方向延伸的限位挡块，以及检测位移部的位移的检测单元。惯性传感器采用极限挡块限制质量体的向下位移，防止质量体的支撑部分损坏。

18. 发明申请

US20130081464A1 INERTIAL SENSOR 审中-公开
标题翻译：惯性传感器
公开(公告)号：US20130081464A1
公开(公告)日：2013-04-04
申请号：US13324879
申请日：2011-12-13
申请人： Heung Woo Park , Min Kyu Choi , Jong Woon Kim , Sung Jun Lee
发明人： Heung Woo Park , Min Kyu Choi , Jong Woon Kim , Sung Jun Lee
IPC分类号： G01C19/56
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2201/0235 , G01C19/5783 , G01P2015/0871
摘要： Disclosed herein is an inertial sensor. The inertial sensor includes a sensor part including a driving mass, a flexible substrate part displaceably supporting the driving mass, and a support part supporting the flexible substrate part so that the driving mass is freely movable in a state in which the driving mass is floated; a lower cap covering a lower portion of the driving mass and coupled with the support part and provided with a stopper part limiting a displacement of the driving mass; and a dry film resist coupling the sensor part with the cover and providing an interval between the driving mass and the stopper.
摘要翻译：这里公开了惯性传感器。惯性传感器包括传感器部件，其包括驱动质量块，可移动地支撑驱动质量块的柔性基板部分和支撑柔性基板部分的支撑部件，使得驱动质量块在驱动质量块浮起的状态下可自由移动; 下盖覆盖驱动质量块的下部并与支撑部分联接并设置有限制驱动质量块的位移的止动部分; 以及将传感器部分与盖接合并且提供驱动质量块和止动件之间的间隔的干膜。

19. 发明申请

US20130122189A1 METHOD OF MANUFACTURING INERTIAL SENSOR 有权
标题翻译：制造传感器的方法
公开(公告)号：US20130122189A1
公开(公告)日：2013-05-16
申请号：US13541279
申请日：2012-07-03
申请人： Jong Woon Kim , Jung Won Lee
发明人： Jong Woon Kim , Jung Won Lee
IPC分类号： B05D5/00
CPC分类号： G01C19/5769 , G01P15/0802
摘要： Disclosed herein is a method of manufacturing an inertial sensor. The method includes: (A) preparing a base substrate; (B) forming a depressed first concave part in one surface of the base substrate; (C) forming a mass body in the first concave part by filling a metal or a combination of a metal and a polymer (or a polymer matrix composite) therein; and (D) forming a depressed second concave part in one surface of the base substrate at an outer side of the mass body and forming a flexible part on an upper portion of the second concave part in the base substrate. The mass body formed of the metal or the combination of the metal and the polymer (or the polymer matrix composite) has high density, thereby making it possible to improve sensitivity of the inertial sensor.
摘要翻译：本文公开了一种制造惯性传感器的方法。该方法包括：（A）制备基底; （B）在基底基板的一个表面上形成凹陷的第一凹部; （C）通过在其中填充金属或金属和聚合物（或聚合物基质复合材料）的组合来在第一凹部中形成质量体; 和（D）在所述质量体的外侧形成在所述基底基板的一个表面中的凹陷的第二凹部，并且在所述基底基板的所述第二凹部的上部形成柔性部。由金属形成的质量体或金属和聚合物（或聚合物基质复合体）的组合具有高密度，从而可以提高惯性传感器的灵敏度。

20. 发明授权

US08213531B2 Apparatus for transmitting signal in semiconductor integrated circuit 失效
标题翻译：在半导体集成电路中传输信号的装置
公开(公告)号：US08213531B2
公开(公告)日：2012-07-03
申请号：US11966250
申请日：2007-12-28
申请人： Hyung Soo Kim , Kun Woo Park , Yong Ju Kim , Jong Woon Kim , Hee Woong Song , Ic Su Oh , Tae Jin Hwang
发明人： Hyung Soo Kim , Kun Woo Park , Yong Ju Kim , Jong Woon Kim , Hee Woong Song , Ic Su Oh , Tae Jin Hwang
IPC分类号： H04L25/34
CPC分类号： H04L25/4917
摘要： An apparatus for transmitting a signal in a semiconductor integrated circuit includes a multilevel transmission control block that outputs a plurality of bits of an input signal in serial or parallel according to whether a multilevel transmission operation is performed or not, and a signal processing block that selectively performs the multilevel transmission operation according to a form of the input signal, which are output in serial or parallel from the multilevel transmission control block.
摘要翻译：一种用于在半导体集成电路中发送信号的装置包括：多电平传输控制块，其根据是否执行多级传输操作来串行或并行输出输入信号的多个位;以及信号处理块，其选择性地根据从多级传输控制块串行或并行输出的输入信号的形式执行多级传输操作。

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