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11. 发明申请

US20060035173A1 Patterning thin metal films by dry reactive ion etching 审中-公开
标题翻译：通过干式反应离子蚀刻来形成薄金属薄膜
公开(公告)号：US20060035173A1
公开(公告)日：2006-02-16
申请号：US10917511
申请日：2004-08-13
申请人： Mark Davidson , Jean Tokarz , Jonathan Gorrell
发明人： Mark Davidson , Jean Tokarz , Jonathan Gorrell
IPC分类号： G03F7/36
CPC分类号： H01L21/32136 , H01L21/32139
摘要： We describe a new method for etching patterns in silver, copper, or gold, or other plate metal thin films. A pattern of a hard mask is placed onto the surface of the thin film, followed by a step of reactive ion etching using a plasma formed using a gas feed of some combination of some amounts of methane (CH4) and hydrogen (H2), and some or no amount of Argon (Ar). The areas of silver, copper or gold not covered by the hard mask are etched while the hard mask protects those areas that will form the raised portions of thin film in the final structure.
摘要翻译：我们描述了一种蚀刻银，铜或金或其他板金属薄膜图案的新方法。将硬掩模的图案放置在薄膜的表面上，然后使用使用一些组合的一些量的甲烷（CH 3 SO 4）的气体进料形成的等离子体进行反应离子蚀刻的步骤）和氢（H 2 H 2），以及一些或不含氩量（Ar）。蚀刻没有被硬掩模覆盖的银，铜或金的区域，而硬掩模保护在最终结构中将形成薄膜的凸起部分的那些区域。

12. 发明授权

US07436177B2 SEM test apparatus 有权
标题翻译： SEM试验装置
公开(公告)号：US07436177B2
公开(公告)日：2008-10-14
申请号：US11418081
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
IPC分类号： H01J25/50
CPC分类号： G01N23/225 , H01J25/00 , H01J2237/2813
摘要： Test apparatus for examining the operation and functioning of ultra-small resonant structures, and specifically using an SEM as the testing device and its electron beam as an exciting source of charged particles to cause the ultra-small resonant structures to resonate and produce EMR.
摘要翻译：用于检查超小谐振结构的操作和功能的测试装置，并且具体使用SEM作为测试装置，并且其电子束作为带电粒子的激发源，以使超小谐振结构共振并产生EMR。

13. 发明申请

US20070258690A1 Integration of electromagnetic detector on integrated chip 有权
标题翻译：电磁检测器集成在集成芯片上
公开(公告)号：US20070258690A1
公开(公告)日：2007-11-08
申请号：US11418244
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
IPC分类号： G02B6/10
CPC分类号： G02B6/1226 , B82Y20/00 , G02B6/4202
摘要： A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.
摘要翻译：一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。至少装置的超小型谐振结构部分被真空包装。超小型谐振结构包括具有传输线的等离子体检测器。检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电将沿着金属传输线行进的等离子体波耦合到微电路。检测器机构可以电连接到底层IC。

14. 发明申请

US20070257620A1 Coupled nano-resonating energy emitting structures 失效
标题翻译：耦合纳米共振能量发射结构
公开(公告)号：US20070257620A1
公开(公告)日：2007-11-08
申请号：US11418123
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
IPC分类号： H01J25/10
CPC分类号： H01J25/78 , B82Y20/00 , B82Y30/00
摘要： A nano-resonating structure constructed and adapted to couple energy from a beam of charged particles into said nano-resonating structure and to transmit coupled energy outside the nano-resonating structure. A plurality of the nano-resonant substructures may be formed adjacent one another in a stacked array, and each may have various shapes, including segmented portions of shaped structures, circular, semi-circular, oval, square, rectangular, semi-rectangular, C-shaped, U-shaped and other shapes as well as designs having a segmented outer surface or area, and arranged in a vertically stacked array comprised of one or more ultra-small resonant structures. The vertically stacked arrays may be symmetric or asymmetric, tilted, and/or staggered.
摘要翻译：纳米谐振结构构造并适于将来自带电粒子束的能量耦合到所述纳米谐振结构中并在纳米谐振结构外部传输耦合能量。多个纳米谐振子结构可以以堆叠的阵列形式彼此相邻地形成，并且每个可以具有各种形状，包括成形结构的分段部分，圆形，半圆形，椭圆形，正方形，矩形，半矩形，C U形和其他形状以及具有分段外表面或区域的设计，并且布置在由一个或多个超小型谐振结构构成的垂直堆叠阵列中。垂直堆叠的阵列可以是对称的或不对称的，倾斜的和/或交错的。

15. 发明授权

US07728397B2 Coupled nano-resonating energy emitting structures 失效
标题翻译：耦合纳米共振能量发射结构
公开(公告)号：US07728397B2
公开(公告)日：2010-06-01
申请号：US11418123
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz
IPC分类号： G09G3/06
CPC分类号： H01J25/78 , B82Y20/00 , B82Y30/00
摘要： A nano-resonating structure constructed and adapted to couple energy from a beam of charged particles into said nano-resonating structure and to transmit coupled energy outside the nano-resonating structure. A plurality of the nano-resonant substructures may be formed adjacent one another in a stacked array, and each may have various shapes, including segmented portions of shaped structures, circular, semi-circular, oval, square, rectangular, semi-rectangular, C-shaped, U-shaped and other shapes as well as designs having a segmented outer surface or area, and arranged in a vertically stacked array comprised of one or more ultra-small resonant structures. The vertically stacked arrays may be symmetric or asymmetric, tilted, and/or staggered.
摘要翻译：纳米谐振结构构造并适于将来自带电粒子束的能量耦合到所述纳米谐振结构中并在纳米谐振结构外部传输耦合能量。多个纳米谐振子结构可以以堆叠的阵列形式彼此相邻地形成，并且每个可以具有各种形状，包括成形结构的分段部分，圆形，半圆形，椭圆形，正方形，矩形，半矩形，C U形和其他形状以及具有分段外表面或区域的设计，并且布置在由一个或多个超小型谐振结构构成的垂直堆叠阵列中。垂直堆叠的阵列可以是对称的或不对称的，倾斜的和/或交错的。

16. 发明授权

US07558490B2 Resonant detector for optical signals 有权
标题翻译：光信号共振检波器
公开(公告)号：US07558490B2
公开(公告)日：2009-07-07
申请号：US11400280
申请日：2006-04-10
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
IPC分类号： H04B10/06 , H04B10/02
CPC分类号： G21K1/087 , H01J25/00
摘要： An electronic receiver for decoding data encoded into light is described. The light is received at an ultra-small resonant structure. The resonant structure generates an electric field in response to the incident light. An electron beam passing near the resonant structure is altered on at least one characteristic as a result of the electric field. Data is encoded into the light by a characteristic that is seen in the electric field during resonance and therefore in the electron beam as it passes the electric field. Alterations in the electron beam are thus correlated to data values encoded into the light.
摘要翻译：描述了用于解码编码为光的数据的电子接收器。光以超小的谐振结构被接收。谐振结构响应于入射光而产生电场。通过谐振结构附近的电子束由于电场而在至少一个特性上改变。数据通过在谐振期间在电场中看到的特性并因此在电子束通过电场时在电子束中被编码成光。因此，电子束中的变化与编码为光的数据值相关。

17. 发明授权

US07554083B2 Integration of electromagnetic detector on integrated chip 有权
标题翻译：电磁检测器集成在集成芯片上
公开(公告)号：US07554083B2
公开(公告)日：2009-06-30
申请号：US11418244
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
IPC分类号： H01J3/26 , H04B10/06
CPC分类号： G02B6/1226 , B82Y20/00 , G02B6/4202
摘要： A device includes an integrated circuit (IC) and at least one ultra-small resonant structure and a detection mechanism are formed on said IC. At least the ultra-small resonant structure portion of the device is vacuum packaged. The ultra-small resonant structure includes a plasmon detector having a transmission line. The detector mechanism includes a generator mechanism constructed and adapted to generate a beam of charged particles along a path adjacent to the transmission line; and a detector microcircuit disposed along said path, at a location after said beam has gone past said line, wherein the generator mechanism and the detector microcircuit are disposed adjacent transmission line and wherein a beam of charged particles from the generator mechanism to the detector microcircuit electrically couples a plasmon wave traveling along the metal transmission line to the microcircuit. The detector mechanism may be electrically connected to the underlying IC.
摘要翻译：一种器件包括集成电路（IC），并且至少一个超小型谐振结构和检测机构形成在所述IC上。至少装置的超小型谐振结构部分被真空包装。超小型谐振结构包括具有传输线的等离子体检测器。检测器机构包括一个发生器机构，其被构造和适于沿着与传输线相邻的路径产生带电粒子束; 以及沿着所述路径设置在所述光束已经经过所述线之后的位置处的检测器微电路，其中所述发生器机构和所述检测器微电路邻近传输线设置，并且其中从发生器机构到所述检测器微电路的带电粒子束电将沿着金属传输线行进的等离子体波耦合到微电路。检测器机构可以电连接到底层IC。

18. 发明申请

US20070272876A1 Receiver array using shared electron beam 失效
标题翻译：接收器阵列使用共享电子束
公开(公告)号：US20070272876A1
公开(公告)日：2007-11-29
申请号：US11441219
申请日：2006-05-26
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Lev Gasparov
IPC分类号： G01K1/08
CPC分类号： G01D5/34 , H01J25/00
摘要： A multi-frequency receiver for receiving plural frequencies of electromagnetic radiation (e.g., light) using a beam of charged particles shared between plural resonant structures. The direction of the beam of charged particles is selectively controlled by at least one deflector. The beam of charged particles passing near the resonant structure is altered on at least one characteristic as a result the presence of the electric field induced on the corresponding resonant structure. Alterations in the beam of charged particles are thus correlated to data values encoded by the electromagnetic radiation.
摘要翻译：一种多频接收器，用于使用在多个谐振结构之间共享的带电粒子束来接收多个电磁辐射频率（例如光）。带电粒子束的方向由至少一个偏转器选择性地控制。通过谐振结构附近的带电粒子束在至少一个特性上被改变，结果是在相应的谐振结构上感应出的电场的存在。因此，带电粒子束中的变化与由电磁辐射编码的数据值相关。

19. 发明申请

US20070200646A1 Method for coupling out of a magnetic device 审中-公开
标题翻译：耦合出磁性装置的方法
公开(公告)号：US20070200646A1
公开(公告)日：2007-08-30
申请号：US11418086
申请日：2006-05-05
申请人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Michael Maines , Henry Davis
发明人： Jonathan Gorrell , Mark Davidson , Jean Tokarz , Michael Maines , Henry Davis
IPC分类号： H01P5/18
CPC分类号： G01R33/12 , B82Y25/00 , G01R33/093 , G01R33/1269 , H01J25/00
摘要： A device for determining the state of a magnetic element includes an emitter constructed and adapted to emit a charged particle beam; a bi-state magnetic cell disposed on a path of the particle beam, whereby the particle beam is deflected along a first deflection path when the cell is in a first magnetic state, and the particle beam is deflected along a second deflection path, distinct from the first deflection path, when the cell is in a second magnetic state. At least one ultra-small resonant structure positioned on the deflection paths.
摘要翻译：用于确定磁性元件的状态的装置包括构造并适于发射带电粒子束的发射器; 设置在粒子束的路径上的双态磁细胞，由此当细胞处于第一磁状态时，粒子束沿着第一偏转路径偏转，并且粒子束沿着第二偏转路径偏转，不同于第一偏转路径，当电池处于第二磁状态时。位于偏转路径上的至少一个超小型谐振结构。

20. 发明申请

US20070257621A1 Plated multi-faceted reflector 有权
标题翻译：镀多面反射板
公开(公告)号：US20070257621A1
公开(公告)日：2007-11-08
申请号：US11418264
申请日：2006-05-05
申请人： Jonathan Gorrell , Andres Trucco
发明人： Jonathan Gorrell , Andres Trucco
IPC分类号： H01J25/10
CPC分类号： H01J25/78
摘要： A nano-resonating structure constructed and adapted to include additional ultra-small structures that can be formed with reflective surfaces. By positioning such ultra-small structures adjacent ultra-small resonant structures the light or other EMR being produced by the ultra-small resonant structures when excited can be reflected in multiple directions. This permits the light or EMR out put to be viewed and used in multiple directions.
摘要翻译：纳米谐振结构构造并适于包括可以形成有反射表面的附加超小结构。通过将这种超小型结构定位在超小型共振结构附近，当被激发时由超小谐振结构产生的光或其他EMR可以在多个方向上反射。这允许光或EMR输出在多个方向被看到和使用。

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