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    • 12. 发明授权
    • Tunable capacitor using electrowetting phenomenon
    • 可调电容器采用电润湿现象
    • US08045318B2
    • 2011-10-25
    • US12652948
    • 2010-01-06
    • Seung-tae ChoiJi-hyuk LimWoon-bae KimEun-seok ParkJeong-yub Lee
    • Seung-tae ChoiJi-hyuk LimWoon-bae KimEun-seok ParkJeong-yub Lee
    • H01G5/00
    • H01G5/0132
    • A tunable capacitor using an electrowetting phenomenon includes a first electrode; a second electrode which is spaced apart from the first electrode and faces the first electrode; a fluidic channel which is disposed between the first electrode and the second electrode; a first insulating layer which is disposed between the first electrode and the fluidic channel; and a conductive fluid which is disposed in the fluidic channel and moves along the fluidic channel when a direct current (DC) potential difference occurs between the first and second electrodes. Accordingly, it is possible to fabricate the tunable capacitor with the simplified fabrication process, good reliability and durability, and no restriction on the tuning range.
    • 使用电润湿现象的可调谐电容器包括第一电极; 第二电极,与第一电极间隔开并面向第一电极; 设置在第一电极和第二电极之间的流体通道; 布置在第一电极和流体通道之间的第一绝缘层; 以及当在第一和第二电极之间发生直流(DC)电位差时,布置在流体通道中并沿着流体通道移动的导电流体。 因此,可以以简化的制造工艺,良好的可靠性和耐久性制造可调电容器,并且对调谐范围没有限制。
    • 13. 发明授权
    • Cap wafer, semiconductor chip having the same, and fabrication method thereof
    • 盖晶片,具有相同的半导体芯片及其制造方法
    • US07626258B2
    • 2009-12-01
    • US11657056
    • 2007-01-24
    • Ji-hyuk LimJun-sik HwangWoon-bae Kim
    • Ji-hyuk LimJun-sik HwangWoon-bae Kim
    • H01L23/12H01L23/42
    • B81B7/007B81B2207/095
    • A cap wafer, fabrication method, and a semiconductor chip are provided. The cap wafer includes a cap wafer substrate; a penetrated electrode formed to penetrate the cap wafer substrate; and an electrode pad connected with a lower portion of the penetrated electrode on a lower surface of the cap wafer substrate, wherein the penetrated electrode has an oblique section which gradually widens from an upper surface to the lower surface of the cap wafer substrate. The fabrication method includes forming an oblique-via hole on a lower surface of a cap wafer substrate, the oblique-via hole having an oblique section which gradually narrows in a direction moving away from the lower surface of the cap wafer substrate; and forming a penetrated electrode in the oblique-via hole. The semiconductor chip includes a base wafer; a cap wafer; a cavity; a penetrated electrode; and a pad bonding layer.
    • 提供盖晶片,制造方法和半导体芯片。 盖晶片包括盖晶片基板; 形成为穿透盖晶片基板的穿透电极; 以及在所述盖片基板的下表面与所述被穿透电极的下部连接的电极焊盘,其中,所述被穿透电极具有从所述盖晶片基板的上表面向下表面逐渐变宽的倾斜部。 该制造方法包括在盖晶片基板的下表面上形成倾斜通孔,该倾斜通孔具有在从盖晶片基板的下表面移开的方向上逐渐变窄的倾斜截面; 并且在所述倾斜通孔中形成穿透电极。 半导体芯片包括基底晶片; 盖晶片; 一个空腔 穿透电极; 和焊垫接合层。
    • 18. 发明申请
    • Cap wafer, semiconductor chip having the same, and fabrication method thereof
    • 盖晶片,具有相同的半导体芯片及其制造方法
    • US20080067664A1
    • 2008-03-20
    • US11657056
    • 2007-01-24
    • Ji-hyuk LimJun-sik HwangWoon-bae Kim
    • Ji-hyuk LimJun-sik HwangWoon-bae Kim
    • H01L23/48
    • B81B7/007B81B2207/095
    • A cap wafer, fabrication method, and a semiconductor chip are provided. The cap wafer includes a cap wafer substrate; a penetrated electrode formed to penetrate the cap wafer substrate; and an electrode pad connected with a lower portion of the penetrated electrode on a lower surface of the cap wafer substrate, wherein the penetrated electrode has an oblique section which gradually widens from an upper surface to the lower surface of the cap wafer substrate. The fabrication method includes forming an oblique-via hole on a lower surface of a cap wafer substrate, the oblique-via hole having an oblique section which gradually narrows in a direction moving away from the lower surface of the cap wafer substrate; and forming a penetrated electrode in the oblique-via hole. The semiconductor chip includes a base wafer; a cap wafer; a cavity; a penetrated electrode; and a pad bonding layer.
    • 提供盖晶片,制造方法和半导体芯片。 盖晶片包括盖晶片基板; 形成为穿透盖晶片基板的穿透电极; 以及在所述盖片基板的下表面与所述被穿透电极的下部连接的电极焊盘,其中,所述被穿透电极具有从所述盖晶片基板的上表面向下表面逐渐变宽的倾斜部。 该制造方法包括在盖晶片基板的下表面上形成倾斜通孔,该倾斜通孔具有在从盖晶片基板的下表面移开的方向上逐渐变窄的倾斜截面; 并且在所述倾斜通孔中形成穿透电极。 半导体芯片包括基底晶片; 盖晶片; 一个空腔 穿透电极; 和焊盘接合层。