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    • 12. 发明申请
    • SUBSTRATE INSPECTION DEVICE AND SUBSTRATE INSPECTION METHOD
    • 基板检查装置和基板检查方法
    • US20100060889A1
    • 2010-03-11
    • US12540825
    • 2009-08-13
    • Susumu IwaiNoboru Kato
    • Susumu IwaiNoboru Kato
    • G01N21/88
    • G01N21/896
    • A substrate inspection method includes the following steps. Substrates are sequentially moved while an optical system including a light-projecting system and a light-receiving system are moved in a direction orthogonal to the moving direction of each substrate, so as to change the scanned area of each substrate which is scanned with an inspection light having a specific width in the direction orthogonal to the moving direction of the substrate from the light-projecting system; data of the inspected defects of the substrates in the scanned areas are stored for each scanned area; and the stored data of the defects of the substrates in the scanned areas are updated with newly inspected data of the defects of the substrates in the same scanned areas for each substrate, and defect data of one substrate are produced based on the data of the defects of the substrates in a plurality of scanned areas.
    • 基板检查方法包括以下步骤。 基板依次移动,同时包括投光系统和光接收系统的光学系统在与每个基板的移动方向正交的方向上移动,以便通过检查来改变扫描的每个基板的扫描区域 光从与投影系统的基板的移动方向正交的方向上具有特定宽度的光; 对于每个扫描区域存储扫描区域中的基板的检查缺陷的数据; 并且利用对每个基板的相同扫描区域中的基板的缺陷的新检查数据更新存储的扫描区域中的基板的缺陷数据,并且基于缺陷的数据产生一个基板的缺陷数据 的多个扫描区域中的基板。
    • 13. 发明授权
    • Substrate inspection device and substrate inspection method
    • 基板检查装置和基板检查方法
    • US07830502B2
    • 2010-11-09
    • US12540825
    • 2009-08-13
    • Susumu IwaiNoboru Kato
    • Susumu IwaiNoboru Kato
    • G01N21/88
    • G01N21/896
    • A substrate inspection method includes the following steps. Substrates are sequentially moved while an optical system including a light-projecting system and a light-receiving system are moved in a direction orthogonal to the moving direction of each substrate, so as to change the scanned area of each substrate which is scanned with an inspection light having a specific width in the direction orthogonal to the moving direction of the substrate from the light-projecting system; data of the inspected defects of the substrates in the scanned areas are stored for each scanned area; and the stored data of the defects of the substrates in the scanned areas are updated with newly inspected data of the defects of the substrates in the same scanned areas for each substrate, and defect data of one substrate are produced based on the data of the defects of the substrates in a plurality of scanned areas.
    • 基板检查方法包括以下步骤。 基板依次移动,同时包括投光系统和光接收系统的光学系统在与每个基板的移动方向正交的方向上移动,以便通过检查来改变扫描的每个基板的扫描区域 光从与投影系统的基板的移动方向正交的方向上具有特定宽度的光; 对于每个扫描区域存储扫描区域中的基板的检查缺陷的数据; 并且利用对每个基板的相同扫描区域中的基板的缺陷的新检查数据更新存储的扫描区域中的基板的缺陷数据,并且基于缺陷的数据产生一个基板的缺陷数据 的多个扫描区域中的基板。