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11. 发明授权

US07110172B2 Microscope and sample observation method 有权
标题翻译：显微镜和样品观察法
公开(公告)号：US07110172B2
公开(公告)日：2006-09-19
申请号：US10880100
申请日：2004-06-30
申请人： Hirotoshi Terada , Ikuo Arata , Masaharu Tokiwa , Hiroshi Tanabe , Shigeru Sakamoto
发明人： Hirotoshi Terada , Ikuo Arata , Masaharu Tokiwa , Hiroshi Tanabe , Shigeru Sakamoto
IPC分类号： G02B21/00
CPC分类号： G02B21/0016 , G02B21/33 , Y10S359/90
摘要： For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index no and a thickness to of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index no and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.
摘要翻译：对于作为检查对象的半导体装置S，提供了图像获取部分1，包括物镜20的光学系统2和在包括来自半导体的光轴的插入位置之间可移动的固体浸没透镜（SIL）3 装置S到物镜20和离开光轴的待机位置。然后在两个控制模式中进行观察，该两种控制模式包括SIL 3位于待机位置的第一模式，并且基于第一模式的基板的折射率no和厚度对其执行聚焦和像差校正半导体器件S和第二模式，其中SIL 3位于插入位置，并且基于衬底的折射率no和厚度t 0 0进行聚焦和像差校正，和折射率n 1 1，厚度d 1，以及SIL 3的曲率半径R 1 1。这提供了能够容易地观察对半导体器件的微细结构等的分析所需的样品的显微镜和样品观察方法。

12. 发明申请

US20050094293A1 Solid immersion lens holder 有权
标题翻译：固体浸没镜头支架
公开(公告)号：US20050094293A1
公开(公告)日：2005-05-05
申请号：US10878527
申请日：2004-06-29
申请人： Hiroshi Tanabe , Ikuo Arata , Hirotoshi Terada
发明人： Hiroshi Tanabe , Ikuo Arata , Hirotoshi Terada
IPC分类号： G02B7/14 , G02B21/33 , G02B7/02
CPC分类号： G02B7/14 , G02B21/33
摘要： An arrangement, equipped with a holder 9, which supports a solid immersion lens 3 in the gravity direction with the bottom surface of solid immersion lens 3 being protruded downward through an opening 9b, is provided. With this arrangement, when solid immersion lens 3 is set on an observed object, solid immersion lens 3 is put in a state in which it is raised by the observed object and is made free with respect to holder 9. Also in this state, an excessive pressure will not be applied to the observed object and yet solid immersion lens 3 is put in close contact in conformance with the observed object and temperature drifts at the holder 9 side or the observed object side are cut off from the counterpart side and thus the influences of such temperature drifts are eliminated. A solid immersion lens holder, with which the damaging of the observed object can be eliminated and which enables high-precision observation, is thus provided.
摘要翻译：提供了一种装置，其具有保持器9，其在固体浸没透镜3的底面通过开口部分9b向下突出而在重力方向上支撑固体浸没透镜3。通过这种布置，当固体浸没透镜3设置在观察对象上时，固体浸没透镜3被置于被观察物体升高的状态，并相对于保持器9而自由。同样在这种状态下，不会对观察到的物体施加过大的压力，并且固体浸没透镜3与观察到的物体保持紧密接触，并且保持器9侧的温度漂移或被观察物体侧被切断相应的一方，因此消除了这种温度漂移的影响。因此提供了可以消除观察对象的损坏并且能够进行高精度观察的固体浸没透镜保持器。

13. 发明申请

US20130088714A1 SUCTION APPARATUS, SEMICONDUCTOR DEVICE OBSERVATION DEVICE, AND SEMICONDUCTOR DEVICE OBSERVATION METHOD 有权
标题翻译：吸收装置，半导体装置观测装置和半导体装置观测方法
公开(公告)号：US20130088714A1
公开(公告)日：2013-04-11
申请号：US13701035
申请日：2011-06-21
申请人： Hirotoshi Terada , Hiroyuki Matsuura
发明人： Hirotoshi Terada , Hiroyuki Matsuura
IPC分类号： G01N21/95 , G01N21/01
CPC分类号： G01N21/9501 , G01N21/01 , H01L21/6838 , H01L21/68757 , H01L21/68785 , H01L22/12
摘要： A suction unit 10 includes a main body portion having a first surface 13 on which a semiconductor wafer W is arranged and a second surface 14 opposite to the first surface 13, and in which a through-hole 15 that penetrates through the first surface 13 and the second surface 14 is formed and a light transmitting portion having a light incident surface 16 and a light emitting surface 17, and which is fitted to the through-hole 15. Further, in the first surface 13, a first suction groove 13a for vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surface 16 is formed, and in the second surface 14, a second suction groove 14a for vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surface 17 is formed.
摘要翻译：抽吸单元10包括主体部分，其具有布置半导体晶片W的第一表面13和与第一表面13相对的第二表面14，并且其中穿过第一表面13的通孔15和形成第二表面14和具有光入射表面16和发光表面17并且安装到通孔15的透光部分。此外，在第一表面13中，具有用于真空的第一吸入槽13a 吸收半导体晶片W以将半导体器件D固定到光入射表面16，并且在第二表面14中，用于真空吸附固体浸没透镜S以将固体浸没透镜S固定到光的第二吸入槽14a 形成发光面17。

14. 发明申请

US20120113534A1 IMMERSION LENS HOLDING DEVICE 有权
标题翻译：倾斜镜头保持装置
公开(公告)号：US20120113534A1
公开(公告)日：2012-05-10
申请号：US13375496
申请日：2010-05-28
申请人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
发明人： Ikuo Arata , Hirotoshi Terada , Toshimichi Ishizuka
IPC分类号： G02B7/02 , G02B7/04
CPC分类号： G02B21/33 , G02B7/16 , G02B21/248 , G02B27/32
摘要： A solid immersion lens supporting device includes a lens holder 30 that holds a solid immersion lens 20 in a free state in which a lens bottom surface 22 protrudes downward through a lower opening 32 so as not to fix the solid immersion lens, and a lens cover 40 which is provided to an upper opening 31 of the lens holder 30, and in which a cover bottom surface 42 on the solid immersion lens 20 side is on a plane perpendicular to an optical axis, the lens cover coming into one-point contact with a spherical lens top surface 21 of the solid immersion lens 20. Further, the lens cover 40 is provided with a positioning portion which is capable of carrying out positioning of the solid immersion lens 20 with respect to the objective lens with reference to an image of the lens cover 40 observed via the objective lens. Thereby, the immersion lens supporting device which is capable of efficiently carrying out movement, installation, and positioning of the immersion lens onto a sample is realized.
摘要翻译：固体浸没透镜支撑装置包括：透镜保持器30，其保持固体浸没透镜20处于自由状态，透镜底面22通过下开口32向下突出，以便不固定固体浸没透镜;以及透镜盖 40，其被提供到透镜保持器30的上开口31，并且固体浸没透镜20侧的盖底面42位于与光轴垂直的平面上，透镜盖与固体浸没透镜20的球面透镜顶表面21.此外，透镜盖40设置有能够相对于物镜执行固体浸没透镜20相对于物镜的定位的定位部分通过物镜观察透镜盖40。由此，可以实现能够有效地进行浸渍透镜的移动，安装和定位的浸没透镜支撑装置。

15. 发明授权

US07865012B2 Semiconductor failure analysis apparatus which acquires a failure observed image, failure analysis method, and failure analysis program 有权
标题翻译：获取故障观察图像，故障分析方法和故障分析程序的半导体故障分析装置
公开(公告)号：US07865012B2
公开(公告)日：2011-01-04
申请号：US11586721
申请日：2006-10-26
申请人： Toshiyuki Majima , Akira Shimase , Hirotoshi Terada , Kazuhiro Hotta
发明人： Toshiyuki Majima , Akira Shimase , Hirotoshi Terada , Kazuhiro Hotta
IPC分类号： G06K9/00
CPC分类号： G01N21/95607 , G01N2021/95615
摘要： A failure analysis apparatus 10 is composed of an inspection information acquirer 11 for acquiring a failure observed image P2 of a semiconductor device, a layout information acquirer 12 for acquiring layout information, and a failure analyzer 13 for analyzing a failure. The failure analyzer 13 extracts as a candidate interconnection for a failure, an interconnection passing an analysis region, out of a plurality of interconnections, using interconnection information to describe a configuration of interconnections in the semiconductor device by a pattern data group of interconnection patterns in respective layers, and, for extracting the candidate interconnection, it performs an equipotential trace of the interconnection patterns using the pattern data group, thereby extracting the candidate interconnection. This substantializes a semiconductor failure analysis apparatus, failure analysis method, and failure analysis program capable of securely and efficiently performing the analysis of the failure of the semiconductor device using the failure observed image.
摘要翻译：故障分析装置10由用于获取半导体装置的故障观察图像P2的检查信息获取部11，用于获取布局信息的布局信息获取部12以及用于分析故障的故障分析部13构成。故障分析器13通过互连信息提取出故障的候选互连，通过分析区域的互连，使用互连信息，以通过相应的互连模式的图案数据组来描述半导体器件中的互连的配置并且为了提取候选互连，它使用模式数据组来执行互连模式的等势线，从而提取候选互连。这实现了半导体故障分析装置，故障分析方法和故障分析程序，其能够安全有效地执行使用故障观察图像的半导体器件的故障的分析。

16. 发明授权

US07453567B2 Fluorescence lifetime distribution image measuring system and its measuring method 有权
标题翻译：荧光寿命分布图像测量系统及其测量方法
公开(公告)号：US07453567B2
公开(公告)日：2008-11-18
申请号：US10516076
申请日：2003-05-28
申请人： Haruhisa Saitoh , Hirotoshi Terada
发明人： Haruhisa Saitoh , Hirotoshi Terada
IPC分类号： G01J3/30 , G01J3/28
CPC分类号： G01N21/6408
摘要： Pulse excitation light, emitted from a laser light source 10, is scanned in a first direction by a first scanning means 100, scanned in a second direction, perpendicular to the first direction, by a second scanning means 120, converged by an objective optical system 140, and illuminated onto sample 50. Fluorescences, emitted from sample 50, are output from objective optical system 140 to second scanning means 120, scanned in the second direction, perpendicular to the first direction, and output to a light separation means 110 by second scanning means 120, output from light separation means 110 to a streak camera, and recorded as variations of time of the fluorescence intensities by streak camera 30. Fluorescence lifetimes are calculated based on these variations with time of the fluorescence intensities and a fluorescence lifetime distribution image is prepared.
摘要翻译：由激光光源10发射的脉冲激发光由第一扫描装置100沿第一方向扫描，第一扫描装置100通过第二扫描装置120沿第二方向垂直于第一方向扫描，由物镜光学系统 140，并照射到样品50上。从样品50发射的荧光从物镜光学系统140输出到与第一方向垂直扫描的第二扫描装置120，并通过第二扫描装置120输出到光分离装置110，从光分离意味着110到条纹相机，并且被条纹相机30的荧光强度的时间变化记录下来。基于荧光强度随时间的变化计算荧光寿命并制备荧光寿命分布图像。

17. 发明申请

US20050063046A1 Sample observation method, microscope, and solid immersion lens, optical contact liquid used in the method 失效
标题翻译：样品观察方法，显微镜和固体浸没透镜，该方法中使用的光学接触液体
公开(公告)号：US20050063046A1
公开(公告)日：2005-03-24
申请号：US10876776
申请日：2004-06-28
申请人： Ikuo Arata , Shigeru Sakamoto , Hirotoshi Terada
发明人： Ikuo Arata , Shigeru Sakamoto , Hirotoshi Terada
IPC分类号： G01N21/03 , G01N21/88 , G01N21/95 , G02B21/33 , G02B21/00 , G02B21/26
CPC分类号： G02B21/33 , G01N21/8806 , G01N21/9501 , G01N2021/0342
摘要： Optical contact liquid containing an amphipathic molecule is dripped onto a semiconductor device which is a sample as an inspection object (S104), and a solid immersion lens is set thereon (S105). The inserted position of the solid immersion lens is then adjusted (S106). The optical contact liquid is then dried (S108), and thereby the solid immersion lens is brought into optically-close contact with the semiconductor device. As a result, a sample observation method and a microscope or the like can be realized, in which the solid immersion lens can be easily aligned to a desired position on the sample, and the solid immersion lens can be securely brought into optically-close contact with the sample.
摘要翻译：将含有两亲性分子的光学接触液滴在作为检查对象的样品的半导体器件上（S104），在其上设置固体浸没透镜（S105）。然后调整固体浸没透镜的插入位置（S106）。然后干燥光学接触液体（S108），从而将固体浸没透镜与半导体器件进行光学 - 紧密接触。结果，可以实现样品观察方法和显微镜等，其中固体浸没透镜可以容易地对准样品上的期望位置，并且固体浸没透镜可以牢固地进行光学紧密接触与样品。

18. 发明申请

US20130120563A1 IMAGE GENERATION DEVICE 审中-公开
标题翻译：图像生成装置
公开(公告)号：US20130120563A1
公开(公告)日：2013-05-16
申请号：US13806486
申请日：2011-06-17
申请人： Hirotoshi Terada , Yoshitake Iwaki , Tomonori Nakamura , Teruo Takahashi
发明人： Hirotoshi Terada , Yoshitake Iwaki , Tomonori Nakamura , Teruo Takahashi
IPC分类号： G01B11/02
CPC分类号： G01B11/022 , G02B5/001 , G02B21/0016 , G02B21/002
摘要： An image generation device 1 comprises a laser light source 3, a laser output control unit 11, a laser scanner 5, a modulation pattern control unit 15 for such control as to irradiate the object with illumination light having a plurality of spatial modulation patterns, an electric signal detector 7 for detecting an electric signal issued from the object A, an electric signal imaging unit 17 for generating a two-dimensional characteristic image including characteristic distribution information associating illumination position information with characteristic information, and an image data operation unit 19 for generating a pattern image of the object A according to a plurality of characteristic images generated so as to correspond to the plurality of spatial modulation patterns.
摘要翻译：图像生成装置1包括激光光源3，激光输出控制部11，激光扫描器5，调制图案控制部15，用于对具有多个空间调制图案的照明光照射物体的控制，用于检测从对象A发出的电信号的电信号检测器7，用于产生包括将照明位置信息与特征信息相关联的特征分布信息的二维特征图像的电信号成像单元17和用于产生根据生成的与多个空间调制图案对应的多个特征图像，对象A的图案图像。

19. 发明申请

US20070146871A1 Microscope and sample observation method 审中-公开
标题翻译：显微镜和样品观察法
公开(公告)号：US20070146871A1
公开(公告)日：2007-06-28
申请号：US11711638
申请日：2007-02-28
申请人： Hirotoshi Terada , Ikuo Arata
发明人： Hirotoshi Terada , Ikuo Arata
IPC分类号： G02B21/00
CPC分类号： G01N21/1717 , G01N21/8806 , G01N21/9501 , G01N2021/0342 , G02B21/02 , G02B21/365
摘要： For a semiconductor device S as a sample of an observed object, there are provided an image acquisition part 1 for carrying out observation of the semiconductor device S, and an optical system 2 comprising an objective lens 20. A solid immersion lens (SIL) 3 for magnifying an image of the semiconductor device S is arranged movable between an insertion position where the solid immersion lens includes an optical axis from the semiconductor device S to the objective lens 20 and is in close contact with a surface of the semiconductor device S, and a standby position off the optical axis. Then an image containing reflected light from SIL 3 is acquired with the SIL 3 at the insertion position, and the insertion position of SIL 3 is adjusted by SIL driver 30, with reference to the image. This realizes a semiconductor inspection apparatus (microscope) capable of readily performing observation of the sample necessary for an analysis of microstructure of a semiconductor device or the like, and a semiconductor inspection method (sample observation method) therewith.
摘要翻译：对于作为观察对象的样本的半导体器件S，设置有用于执行半导体器件S的观察的图像获取部分1和包括物镜20的光学系统2.固体浸没透镜（SIL）3 用于放大半导体器件S的图像的布置可以在固体浸没透镜包括从半导体器件S到物镜20的光轴并且与半导体器件S的表面紧密接触的插入位置之间移动，以及离开光轴的待机位置。然后，通过SIL 3在插入位置获取包含来自SIL 3的反射光的图像，并且参考图像，通过SIL驱动器30调整SIL 3的插入位置。这实现了能够容易地观察对半导体装置等的微结构进行分析所需的样品的半导体检查装置（显微镜）以及半导体检查方法（样本观察方法）。

20. 发明申请

US20050157292A1 Fluorescence lifetime distribution image measuring system and its measuring method 有权
标题翻译：荧光寿命分布图像测量系统及其测量方法
公开(公告)号：US20050157292A1
公开(公告)日：2005-07-21
申请号：US10516076
申请日：2003-05-28
申请人： Haruhisa Saitoh , Hirotoshi Terada
发明人： Haruhisa Saitoh , Hirotoshi Terada
IPC分类号： G01N21/64
CPC分类号： G01N21/6408
摘要： Pulse excitation light, emitted from a laser light source 10, is scanned in a first direction by a first scanning means 100, scanned in a second direction, perpendicular to the first direction, by a second scanning means 120, converged by an objective optical system 140, and illuminated onto sample 50. Fluorescences, emitted from sample 50, are output from objective optical system 140 to second scanning means 120, scanned in the second direction, perpendicular to the first direction, and output to a light separation means 110 by second scanning means 120, output from light separation means 110 to a streak camera, and recorded as variations of time of the fluorescence intensities by streak camera 30. Fluorescence lifetimes are calculated based on these variations with time of the fluorescence intensities and a fluorescence lifetime distribution image is prepared.
摘要翻译：由激光光源10发射的脉冲激发光由第一扫描装置100沿第一方向扫描，第一扫描装置100通过第二扫描装置120沿第二方向垂直于第一方向扫描，由物镜光学系统 140，并照射到样品50上。从样品50发射的荧光从物镜光学系统140输出到与第一方向垂直扫描的第二扫描装置120，并通过第二扫描装置120输出到光分离装置110，从光分离意味着110到条纹相机，并且被条纹相机30的荧光强度的时间变化记录下来。基于荧光强度随时间的变化计算荧光寿命并制备荧光寿命分布图像。

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