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    • 18. 发明授权
    • Exposure method, exposure apparatus, photomask and method for manufacturing photomask
    • 曝光方法,曝光装置,光掩模和制造光掩模的方法
    • US08654310B2
    • 2014-02-18
    • US12848748
    • 2010-08-02
    • Masaki Kato
    • Masaki Kato
    • G03B27/42
    • G03F7/70791G03F7/70216G03F7/70275
    • There is disclosed an exposure method is a method of projecting patterns (M1, M2) of a mask (M) onto a substrate to effect exposure thereof, through a plurality of projection optical units each having an enlargement magnification, and the exposure method comprises: placing the mask (M) having first pattern regions (M1) arranged discontinuously in a positional relation corresponding to the enlargement magnification, and second pattern regions (M2) provided at least in part between the first pattern regions (M1), on the object plane side of the projection optical units; projecting enlarged images of either of the first pattern regions (M1) and the second pattern regions (M2) onto the substrate disposed on the image plane side of the projection optical units to effect exposure thereof; and then projecting enlarged images of the other pattern regions onto the substrate to effect exposure thereof.
    • 公开了曝光方法是通过多个具有放大倍数的投影光学单元将掩模(M)的图案(M1,M2)投影到基板上以进行曝光的方法,并且曝光方法包括: 将具有第一图案区域(M1)的掩模(M)放置在与放大倍率对应的位置关系中,以及至少部分地设置在第一图案区域(M1)之间的物平面上的第二图案区域(M2) 投影光学单元的一侧; 将第一图案区域(M1)和第二图案区域(M2)中的任一个的放大图像投影到设置在投影光学单元的像面侧的基板上以进行曝光; 然后将其他图案区域的放大图像投影到基板上以进行曝光。
    • 20. 发明授权
    • Ink-jet head and ink-jet recording apparatus
    • 喷墨头和喷墨记录装置
    • US08602530B2
    • 2013-12-10
    • US13396830
    • 2012-02-15
    • Satoshi MizukamiMasaki KatoTakahiko KurodaYoshikazu AkiyamaKanshi Abe
    • Satoshi MizukamiMasaki KatoTakahiko KurodaYoshikazu AkiyamaKanshi Abe
    • B41J2/14
    • B41J2/14233B41J2002/14491B41J2202/08
    • An ink-jet head includes a nozzle plate having nozzles, a vibrating plate on the nozzle plate, liquid chambers formed of spaces partitioned by division walls, a piezoelectric element having a common electrode, a piezoelectric body and an individual electrode layered in this order on a surface of the vibrating plate, a first insulator film having a first opening and a second insulator film having a second opening layered in this order on the first surface, a first wire drawn from the individual electrode via the first opening and the second opening, a third insulator film having a third opening on the first wire; and a second wire drawn via the third opening, where the third insulator film is formed in a first region of the second insulator film and is not formed in a second region excluding a region including the first wire formed above the liquid chamber.
    • 喷墨头包括具有喷嘴的喷嘴板,喷嘴板上的振动板,由分隔壁隔开的空间形成的液体室,具有公共电极的压电元件,压电体和单独的电极,按此顺序分层 所述振动板的表面,具有第一开口的第一绝缘膜和在所述第一表面上依次层叠的第二开口的第二绝缘膜,经由所述第一开口和所述第二开口从所述单独电极拉出的第一电线, 第三绝缘膜,在第一导线上具有第三开口; 以及经由所述第三开口拉出的第二导线,其中所述第三绝缘体膜形成在所述第二绝缘膜的第一区域中,并且不形成在除了在所述液体室之上形成的所述第一线的区域之外的第二区域中。