专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明专利

JP2003315196A Manufacturing method of pressure sensor, and measuring device for use in the manufacturing method 审中-公开
标题翻译：压力传感器的制造方法和制造方法中使用的测量装置
公开(公告)号：JP2003315196A
公开(公告)日：2003-11-06
申请号：JP2002124317
申请日：2002-04-25
申请人： Denso Corp , 株式会社デンソー
发明人： HARA HIDEAKI , CHIKUAN KENJI
IPC分类号： G01L27/00 , G01L9/00 , H01L21/66 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a sensitivity measuring device for a pressure sensor that can measure sensitivity on a wafer basis. SOLUTION: The measuring device comprises a stage 20 mountable with a wafer 10 in which pressure detection parts for outputting an electrical signal corresponding to pressure are formed in chip units, a stage pressure control part 21, 40 and 51 for applying a controllable pressure to the wafer 10 from the side of the stage 20, a chamber pressure control part 52 and 110 capable of controlling the pressure in a pressure chamber 30, a stage drive part 60 and 70 capable of moving the stage 20 to a desirable position in the pressure chamber 30, and a probe 80 capable of detecting an electrical signal corresponding to the pressure in the pressure chamber 30 output from an individual pressure detection part in the wafer 10. The wafer 10 mounted on the stage 20 is fixed on the stage 20 by a pressure difference between the pressure from the side of the stage 20 and the pressure in the pressure chamber 30. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供一种可以在基于晶片的基础上测量灵敏度的压力传感器的灵敏度测量装置。解决方案：测量装置包括可安装在晶片10上的载物台20，其中用于输出对应于压力的电信号的压力检测部件以芯片单元形成;载物台压力控制部分21,40和51，用于施加可控制的从台架20的侧面向晶片10施加的压力，能够控制压力室30中的压力的室压力控制部52和110，能够将平台20移动到期望位置的平台驱动部分60和70 压力室30和能够检测与晶片10中的各个压力检测部输出的压力室30内的压力相对应的电信号的探针80.安装在载物台20上的晶片10固定在载物台20上通过来自阶段20侧的压力与压力室30中的压力之间的压力差。版权所有（C）2004，JPO

12. 发明专利

JP2004004004A Sensor device 有权
公开(公告)号：JP2004004004A
公开(公告)日：2004-01-08
申请号：JP2003082650
申请日：2003-03-25
申请人： Denso Corp , 株式会社デンソー
发明人： KURODA MICHITAKE , OTSUKA KIYOSHI , ONODA MASATOSHI , HARA HIDEAKI
IPC分类号： G01L19/14
摘要： PROBLEM TO BE SOLVED: To provide a method by which a sensor device constituted by forming a blocked-up detecting chamber by fixing two cases by caulking so that the internal pressure of the detecting chamber is affected, when caulking is performed can be manufactured by accurately setting the internal pressure of the detecting chamber to an aimed value.
SOLUTION: At caulking of the combined two cases, the caulking load is controlled by monitoring the output signal of a sensor element provided in the detecting chamber displayed on a pressure sensor S1 and by feeding back the monitored output signal to a caulking device 110.
COPYRIGHT: (C)2004,JPO

13. 发明专利

JPH11125574A LEAKAGE INSPECTION METHOD AND DEVICE THEREFOR 失效
公开(公告)号：JPH11125574A
公开(公告)日：1999-05-11
申请号：JP28894397
申请日：1997-10-21
申请人： DENSO CORP
发明人： HARA HIDEAKI , IRIYAMA SHIYOUJI
IPC分类号： G01F1/00 , G01M3/04 , G01M3/24
摘要： PROBLEM TO BE SOLVED: To make easily detectable the internal leakage of a fluid when a leakage channel bypassing a regular channel is generated by detecting the difference in the physical quantity of a pressure wave through the regular channel and the leakage channel, by adding a pressure wave to the regular channel. SOLUTION: When a drive pulse is sent to a solenoid valve 5 by a control part 13, the solenoid valve 5 is speedily switched and a pressure wave α is generated and is introduced from an entrance 1a of a measurement target 1 at the same speed as the sound speed. In this case, when there is an internal leak in the measurement target 1, one portion of the pressure wave α passes through a leakage part 1d via a leakage channel 1e, and bypasses on the way a regular channel 1c. The other parts of the pressure wave α passes through the regular channel 1c. If distance from the entrance 1a to the leakage part 1d is set to be H, a pressure wave through the leakage channel 1e comes out from an outlet 1b after time T1 that is obtained by multiplying a channel length 2H of the leakage channel 1e by the sound speed. Since the distance H is shorter than a distance L of the regular channel, a pressure wave β1 due to leakage reaches the outlet 1b before a pressure wave β2 of the regular channel, and is measured by a microphone 9 at a detection part 7.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式