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    • 12. 发明申请
    • Non-volatile RAM cell and array using nanotube switch position for information state
    • 非易失性RAM单元和阵列使用纳米管开关位置进行信息状态
    • US20050041466A1
    • 2005-02-24
    • US10810963
    • 2004-03-26
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • G11C13/02G11C23/00G11C11/34
    • G11C23/00B82Y10/00G11C13/025
    • Non-Volatile RAM Cell and Array using Nanotube Switch Position for Information State. A non-volatile memory array includes a plurality of memory cells, each cell receiving a bit line, word line, and release line. Each memory cell includes a cell selection transistor with first, second and third nodes. The first and second nodes are in respective electrical communication with the bit line and the word line. Each cell further includes an electromechanically deflectable switch, having a first, second and third node. The first node is in electrical communication with the release line, and a third node is in electrical communication with the third node of the cell selection transistor. The electromechanically deflectable switch includes a nanotube switching element physically positioned between the first and third nodes of the switch and in electrical communication with the second node of the switch. The second node of the switch is in communication with a reference signal. Each nanotube switching element is deflectable into contact with the third node of the switch in response to signals at the first and second node of the cell selection transistor and is releasable from such contact in response to a signal at the release line. In preferred embodiments, the cell selection transistor is a FET and the second node of the transistor is a gate of the FET.
    • 非易失性RAM单元和阵列使用纳米管切换位置信息状态。 非易失性存储器阵列包括多个存储器单元,每个单元接收位线,字线和释放线。 每个存储单元包括具有第一,第二和第三节点的单元选择晶体管。 第一和第二节点与位线和字线分别电气通信。 每个单元还包括具有第一,第二和第三节点的机电偏转开关。 第一节点与释放线电连通,第三节点与小区选择晶体管的第三节点电通信。 机电可偏转开关包括物理地位于开关的第一和第三节点之间并与开关的第二节点电通信的纳米管开关元件。 交换机的第二个节点与参考信号通信。 每个纳米管开关元件响应于电池选择晶体管的第一和第二节点处的信号而偏转成与开关的第三节点接触,并且响应于释放线处的信号而可从该接触件释放。 在优选实施例中,电池选择晶体管是FET,晶体管的第二节点是FET的栅极。
    • 16. 发明申请
    • Nanotube-on-gate fet structures and applications
    • 纳米管对门结构和应用
    • US20050056877A1
    • 2005-03-17
    • US10811373
    • 2004-03-26
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • Thomas RueckesBrent SegalBernhard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • G11C13/02G11C16/04G11C23/00H01L27/108H01L29/06H01L29/423H01L29/76H01L29/94H01L31/119H01L51/00
    • H01L51/055B82Y10/00G11C13/025G11C16/0416G11C23/00G11C2213/17H01L29/0665H01L29/0673H01L29/42324H01L51/0048H01L51/0052
    • Nanotube on gate FET structures and applications of such, including n2 crossbars requiring only 2n control lines. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and a channel region of a second semiconductor type of material disposed between the source and drain region. A gate structure is made of at least one of semiconductive or conductive material and is disposed over an insulator over the channel region. A control gate is made of at least one of semiconductive or conductive material. An electromechanically-deflectable nanotube switching element is in fixed contact with one of the gate structure and the control gate structure and is not in fixed contact with the other of the gate structure and the control gate structure. The device has a network of inherent capacitances, including an inherent capacitance of an undeflected nanotube switching element in relation to the gate structure. The network is such that the nanotube switching element is deflectable into contact with the other of the gate structure and the control gate structure in response to signals being applied to the control gate and one of the source region and drain region. Certain embodiments of the device have an area of about 4 F2. Other embodiments include a release line is positioned in spaced relation to the nanotube switching element, and having a horizontal orientation that is parallel to the orientation of the source and drain diffusions. Other embodiments provide an n2 crossbar array having n2 non-volatile transistor devices, but require only 2n control lines.
    • 纳米管栅极FET结构及其应用,包括仅需要2n条控制线的n <2条交叉点。 非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域以及设置在源极和漏极区域之间的第二半导体类型的材料的沟道区域。 栅极结构由半导体或导电材料中的至少一种制成,并且设置在沟道区域上方的绝缘体上。 控制门由半导体或导电材料中的至少一种制成。 机电偏转型纳米管开关元件与栅极结构和控制栅极结构中的一个固定接触,并且不与栅极结构和控制栅极结构中的另一个固定接触。 该器件具有固有电容的网络,包括相对于栅极结构的未折射的纳米管开关元件的固有电容。 网络使得纳米管开关元件响应于施加到控制栅极和源极区域和漏极区域之一的信号而偏转成与栅极结构和控制栅极结构中的另一个接触。 该装置的某些实施例具有约4F 2的面积。 其他实施例包括释放线与纳米管开关元件间隔开定位,并且具有平行于源极和漏极扩散的取向的水平取向。 其他实施例提供了具有n 2个非易失性晶体管器件的n <2>交叉开关阵列,但是仅需要2n个控制线。
    • 17. 发明申请
    • Four terminal non-volatile transistor device
    • 四端子非易失性晶体管器件
    • US20050047244A1
    • 2005-03-03
    • US10811191
    • 2004-03-26
    • Thomas RueckesBrent SegalBernard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • Thomas RueckesBrent SegalBernard VogeliDarren BrockVenkatachalam JaiprakashClaude Bertin
    • G11C13/02G11C16/04G11C23/00H01L27/115H01L29/788G11C7/00
    • G11C23/00B82Y10/00G11C13/025G11C16/0416G11C2213/17H01L27/115H01L29/7881Y10S977/708Y10S977/932
    • A four terminal non-volatile transistor device. A non-volatile transistor device includes a source region and a drain region of a first semiconductor type of material and each in electrical communication with a respective terminal. A channel region of a second semiconductor type of material is disposed between the source and drain region. A floating gate structure is made of at least one of semiconductive or conductive material and is disposed over the channel region. A control gate is made of at least one of semiconductive or conductive material and is in electrical communication with a respective terminal. An electromechanically-deflectable nanotube switching element is in electrical communication with one of the floating gate structure and the control gate structure, and is positioned to be electromechanically deflectable into contact with the other of the floating gate structure and the control gate structure. When the nanotube switching element is in communication with both the control gate and the floating gate, the control gate may be used to modulate the conductivity of the channel region. The nanotube switching element may be formed from a porous fabric of a monolayer of single-walled carbon nanotubes. Under certain embodiments, the nanotube article is suspended vertically in relation to the horizontal substrate. Under certain embodiments, a release gate and release node are positioned in spaced relation to the nanotube switching element, and, in response to a signal on the release node, the release gate electromechanically deflects the nanotube switching element out of contact with the one of the control gate and floating gate. Under certain embodiments, the contact between the nanotube switching element and the one of the control gate and floating gate is a non-volatile state. Under certain embodiments, the device occupies an area of 8F2.
    • 四端非易失性晶体管器件。 非挥发性晶体管器件包括第一半导体类型的材料的源极区域和漏极区域,并且各自与相应的端子电连通。 第二半导体类型的材料的沟道区域设置在源区和漏区之间。 浮栅结构由半导体或导电材料中的至少一种制成,并且设置在沟道区域上。 控制门由半导体或导电材料中的至少一种制成,并与相应的端子电连通。 机电可偏转的纳米管开关元件与浮动栅极结构和控制栅极结构中的一个电连通,并且被定位成机电可偏转地与浮动栅极结构和控制栅极结构中的另一个接触。 当纳米管开关元件与控制栅极和浮置栅极两者连通时,控制栅极可用于调制沟道区的导电性。 纳米管切换元件可以由单壁碳纳米管单层的多孔织物形成。 在某些实施例中,纳米管制品相对于水平基底垂直悬挂。 在某些实施例中,释放栅极和释放节点以与纳米管开关元件隔开的关系定位,并且响应于释放节点上的信号,释放门电磁机械地使纳米管开关元件偏转与 控制门和浮动门。 在某些实施例中,纳米管开关元件与控制栅极和浮置栅极之间的接触是非易失性状态。 在某些实施例中,该装置占据8F 2的面积。
    • 18. 发明申请
    • Nanotube device structure and methods of fabrication
    • 纳米管器件结构及其制造方法
    • US20050037547A1
    • 2005-02-17
    • US10918181
    • 2004-08-13
    • Claude BertinThomas RueckesBrent Segal
    • Claude BertinThomas RueckesBrent Segal
    • G11C13/02H01H1/027H01H59/00H01L21/00H01L27/28H01L29/06H01L29/73H01L29/78H01L51/30
    • H01L29/0665B82Y10/00G11C13/025G11C23/00H01H1/0094H01H1/027H01H2001/0005H01L27/28H01L29/0673H01L29/73H01L29/78H01L51/0048H01L51/0508Y10S977/725Y10S977/733Y10S977/755Y10S977/938Y10T29/49105
    • Nanotube device structures and methods of fabrication. Under one embodiment, a method of forming a nanotube switching element includes forming a first structure having at least one output electrode, forming a conductive article having at least one nanotube, and forming a second structure having at least one output electrode and positioning said second structure in relation to the first structure and the conductive article such that the output electrode of the first structure is opposite the output electrode of the second structure and such that a portion of the conductive article is positioned therebetween. At least one signal electrode is provided in electrical communication with the conductive article having at least one nanotube, and at least one control electrode is provided in relation to the conductive article such that the conductive electrode may control the conductive article to form a channel between the sginal electrode and at least one of the output electrodes. The first and second structures each include a respective second output electrode and wherein the second electrodes are positioned opposite each other with the conductive article positioned therebetween. The control electrode and the second control electrode includes an insulator layer on a surface facing the conductive article.
    • 纳米管器件结构和制造方法。 在一个实施例中,形成纳米管切换元件的方法包括形成具有至少一个输出电极的第一结构,形成具有至少一个纳米管的导电制品,并形成具有至少一个输出电极的第二结构,并且将所述第二结构 相对于第一结构和导电制品,使得第一结构的输出电极与第二结构的输出电极相对,并且导电制品的一部分位于它们之间。 提供至少一个信号电极与具有至少一个纳米管的导电制品电连通,并且相对于导电制品提供至少一个控制电极,使得导电电极可以控制导电制品以在导电制品之间形成通道 电极和至少一个输出电极。 第一和第二结构各自包括相应的第二输出电极,并且其中第二电极彼此相对定位,导电制品位于它们之间。 控制电极和第二控制电极在面向导电物品的表面上包括绝缘体层。