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    • 15. 发明申请
    • REDUCED MAINTENANCE SPUTTERING CHAMBERS
    • 减少维护喷雾器
    • WO2006076345A2
    • 2006-07-20
    • PCT/US2006/000795
    • 2006-01-11
    • CARDINAL CG COMPANYHARTIG, Klaus
    • HARTIG, Klaus
    • H01J37/34
    • H01J37/32871C23C14/352C23C14/564H01J37/32477H01J37/3405H01J37/3455
    • Improved sputtering chambers for sputtering thin coatings onto substrates. One sputtering chamber includes spall shields which are disposed inwardly and upwardly toward the chamber interior and toward the sputtering targets, and which can aid in the retention of overcoated sputtering material which may otherwise fall onto substrates to be coated. Another sputtering chamber includes targets having magnets which are turned inwardly relative to vertical and toward each other. The inward rotation of the magnets can serve to deposit more material toward the open bottom center of the chamber, and less toward the side walls of the chamber. Yet another sputtering chamber includes a third target disposed between and upward of the lower two targets so as to shield a portion of the sputtering chamber interior from material sputtered from the first and second targets. Some chambers have the three targets forming a triangle, for example, an isosceles or equilateral triangle, hi one chamber having such a triangular configuration of sputtering targets, the first and second targets form the base of an isosceles triangle and have their magnets oriented inwardly relative to vertical and towards each other. The sputtering chambers provided can either reduce the amount of overcoat sputtering material deposited onto the interior of the chamber and/or aid in retention of overcoat sputtering material which would otherwise fall onto substrates to be coated.
    • 改进的溅射室,用于将薄涂层溅射到基板上。 一个溅射室包括防护罩,其被设置成向内并向上朝向室内部并且朝向溅射靶,并且其可以有助于保留外涂的溅射材料,否则其可能落在待涂覆的基板上。 另一个溅射室包括具有相对于垂直和彼此向内转动的磁体的靶。 磁体的向内旋转可用于将更多的材料沉积到腔室的敞开的底部中心,并且朝向腔室的侧壁较少。 又一个溅射室包括设置在下两个靶之间和之上的第三靶,以便将溅射室内的一部分与第一和第二靶溅射的材料进行屏蔽。 一些室具有形成三角形的三个目标,例如等腰或等边三角形。在具有这种溅射靶的三角形构造的一个室中,第一和第二靶形成等腰三角形的基部并使其磁体向内相对 朝向彼此。 所提供的溅射室可以减少沉积在室内部的外涂层溅射材料的量和/或有助于保留外涂层溅射材料,否则这些溅射材料会落在待涂覆的基板上。
    • 16. 发明申请
    • COATER HAVING SUBSTRATE CLEANING DEVICE AND COATING DEPOSITION METHODS EMPLOYING SUCH COATER
    • 具有衬底清洁装置的涂层和使用这种涂层的涂布沉积方法
    • WO2004061151A1
    • 2004-07-22
    • PCT/US2003/041511
    • 2003-12-31
    • CARDINAL CG COMPANYHARTIG, Klaus
    • HARTIG, Klaus
    • C23C14/10
    • C23C14/562C03C17/002C03C23/0075C03C2218/31C23C14/022C23C14/568
    • A coater having a substrate cleaning device is disclosed. Also disclosed are methods of processing substrates in a coater equipped with a substrate cleaning device. The substrate cleaning device comprises an ion gun (i.e., an ion source) that is positioned beneath a path of substrate travel (e.g., beneath a substrate support) extending through the coater and that is adapted for treating a bottom major surface of a substrate. Certain embodiments involve an upward coating apparatus that is further along the path of substrate travel than the substrate cleaning device. In some embodiments of this nature, the upward coating apparatus is configured for depositing a photocatalytic coating upwardly onto the bottom major surface of the substrate. Certain embodiments of the invention involve a downward coating apparatus, wherein the substrate cleaning device is further along the path of substrate travel than the downward coating apparatus. Some embodiments of this nature also involve an upward coating apparatus that is further along the path of substrate travel than the substrate cleaning device.
    • 公开了一种具有基板清洁装置的涂布机。 还公开了在装有基板清洁装置的涂布机中处理基板的方法。 衬底清洁装置包括位于衬底行进路径(例如,衬底支撑件下方)下方的离子枪(即离子源),其延伸穿过涂布机,并适于处理衬底的底部主表面。 某些实施例涉及一种向上涂层装置,其进一步沿着衬底移动的路径而不是衬底清洗装置。 在这种性质的一些实施例中,向上涂覆装置被配置用于将光催化涂层向上沉积到基底的底部主表面上。 本发明的某些实施例涉及一种向下涂覆装置,其中基底清洗装置进一步沿着基底行程的路径而不是向下涂覆装置。 这种性质的一些实施方案还涉及向上涂覆装置,其进一步沿衬底移动的路径比衬底清洗装置。