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    • 13. 发明授权
    • Method for fabricating micromachined members coupled for relative rotation
    • 用于制造耦合用于相对旋转的微加工构件的方法
    • US06426013B1
    • 2002-07-30
    • US09428946
    • 1999-10-28
    • Armand P. NeukermansTimothy G. Slater
    • Armand P. NeukermansTimothy G. Slater
    • G02B2600
    • G02B26/101G01C19/5719G02B26/0841G02B26/085
    • A method for fabricating an integrated, micromachined structure, such as a torsional scanner, that includes a reference member, such as a frame, a pair of torsion hinges, and a dynamic member that is coupled to the reference member by the torsion hinges. The method includes providing a wafer that has been formed from silicon material, and that has both a frontside and a backside. A membrane is formed in the wafer by etching a cavity in the silicon material from the backside of the wafer. The method also includes establishing a pattern that defines the mirror surface and the torsion hinges on the frontside of the wafer at the membrane formed therein. The frontside of the wafer is processed to form therein the dynamic member and the torsion hinges that support the dynamic member for rotation about the axis.
    • 一种用于制造集成的微加工结构的方法,例如扭转扫描器,其包括诸如框架的参考构件,一对扭转铰链和通过扭转铰链联接到参考构件的动态构件。 该方法包括提供由硅材料形成并且具有前侧和后侧的晶片。 通过从晶片的背面蚀刻硅材料中的空腔而在晶片中形成膜。 该方法还包括在其中形成的膜上建立限定晶片表面和扭转铰链的图案。 处理晶片的前侧以在其中形成动态构件和支撑动态构件的扭转铰链以围绕轴线旋转。
    • 14. 发明授权
    • Compact document scanner or printer engine
    • 小型文件扫描仪或打印机引擎
    • US5841553A
    • 1998-11-24
    • US773097
    • 1996-12-24
    • Armand P. Neukermans
    • Armand P. Neukermans
    • G02B26/08G02B26/10H04N1/00H04N1/113H04N1/12H04N1/193H04N1/04G01J1/00
    • H04N1/1135G02B26/0833G02B26/0841G02B26/085G02B26/105H04N1/00204H04N1/00236H04N1/00238H04N1/0283H04N1/12H04N1/193H04N2201/0063
    • A compact medium scanner (100) scans a surface (132) of a medium (134) with a beam of light (106). A medium transport mechanism (202, 206) advances the surface along a medium transport path through a scanning station. A light source (104) produces a collimated beam of light (106) that impinges upon a mirror plate (112) of a micromachined torsional scanner (108). A pair of coaxially aligned torsion bars (304) support the mirror plate (112) within the torsional scanner (108). A mirror-surface drive means (306, 312) rotates the mirror plate (112) about the torsion bars (304). A single reciprocation of the mirror plate (112) by the drive means (306, 312) deflects the beam of light (106) over a fan-shaped region having a virtually fixed vertex (128) on the mirror plate (112). Scanner optics (116, 122) direct the fan-shaped region beam of light (106) onto the surface (132) of the medium (134) then present in the scanning station to thereby scan across the medium (134) with the beam of light (106).
    • 紧凑介质扫描器(100)用光束(106)扫描介质(134)的表面(132)。 中间传送机构(202,206)使表面沿着介质输送路径前进通过扫描台。 光源(104)产生撞击微加工扭转扫描器(108)的镜板(112)的准直光束(106)。 一对同轴对准的扭杆(304)支撑在扭转扫描器(108)内的镜板(112)。 镜面驱动装置(306,312)围绕扭杆(304)旋转镜板(112)。 通过驱动装置(306,312),镜板(112)的单次往复运动将光束(106)偏转在具有实际上固定的顶点(128)的扇形区域上,在镜板(112)上。 扫描仪光学器件(116,122)将扇形区域光束(106)引导到介质(134)的表面(132)上,然后存在于扫描站中,从而用介质(134)的横梁扫描 光(106)。
    • 16. 发明授权
    • Electron beam window
    • 电子束窗
    • US4494036A
    • 1985-01-15
    • US590934
    • 1984-03-19
    • Armand P. Neukermans
    • Armand P. Neukermans
    • H01J5/18H01J9/24H01J31/06H01J33/04
    • H01J5/18H01J31/065H01J9/244
    • A method of making an electron permeable window is provided which entails depositing a thin film of an inert, high strength material or compound having a low atomic number onto a substrate by chemical vapor deposition (CVD). Following that deposition, a window pattern and window support perimeter are photolithographically defined and the substrate is etched to leave the desired window structure. For a particular class of materials including SiC, BN, B.sub.4 C, Si.sub.3 N.sub.4, and Al.sub.4 C.sub.3, films are provided which are exceedingly tough and pinhole free, and which exhibit nearly zero internal stress. Furthermore, due to their extreme strength, these materials allow fabrication of extremely thin windows. In addition, because of their low atomic number and density, they have excellent electron penetration characteristics at low beam voltages (15 to 30kV), so that most conventional CRT deflection schemes can be used to direct the beam. Also, such films are remarkably resilient and chemically inert even when very thin and can easily withstand large pressure differences.
    • 提供一种制造电子透视窗的方法,其需要通过化学气相沉积(CVD)将具有低原子序数的惰性高强度材料或化合物的薄膜沉积到基底上。 在沉积之后,窗光图案和窗口支撑周边被光刻定义,并且蚀刻衬底以留下所需的窗口结构。 对于包括SiC,BN,B4C,Si3N4和Al4C3在内的特定类型的材料,提供了非常坚固和无针孔的膜,其表现出几乎零的内应力。 此外,由于它们的极强的强度,这些材料允许制造极薄的窗户。 另外,由于它们的原子数和密度低,它们在低光束电压(15至30kV)下具有优异的电子穿透特性,因此大多数传统的CRT偏转方案可用于引导光束。 此外,即使非常薄并且容易承受较大的压力差,这些膜也具有显着的弹性和化学惰性。
    • 19. 发明授权
    • Hearing aid microactuator
    • 助听器微型致动器
    • US08876689B2
    • 2014-11-04
    • US13437896
    • 2012-04-02
    • S. George LesinskiArmand P. Neukermans
    • S. George LesinskiArmand P. Neukermans
    • H04R25/00A61N1/05A61B17/16A61N1/36
    • A61B17/1679A61N1/0541A61N1/36036
    • A fenestration piercing the otic capsule bone of the cochlea receives a therapeutic appliance, such as a microactuator, plug, micropump for drug or therapeutic agent delivery, electrode, and the like. Several different ways of achieving a ‘water tight’ seal between the otic capsule bone and the therapeutic appliance are provided. The therapeutic appliance may be implanted with or without a sheath or sleeve lining the wall of the fenestration formed using specialized surgical burrs. The burrs permit safely fenestrating the otic capsule bone adjacent to the scala tympani of the cochlea without damaging the basilar membrane or organ of corti. This approach may also be adopted for safely fenestrating other areas of the inner ear such as the scala vestibuli, bony labyrinth of semicircular canals, or walls of the vestibule, or the oval or round windows thereof.
    • 刺穿耳蜗的耳廓胶囊骨的开窗接收治疗器具,例如用于药物或治疗剂递送的微型致动器,塞子,微型泵,电极等。 提供了在耳廓胶囊骨和治疗器具之间实现“防水”密封的几种不同的方式。 治疗器具可以植入有或不具有衬套在使用专门的手术毛刺形成的开窗壁的护套或套管。 毛刺允许安全地开启邻近耳蜗鼓膜的耳廓胶囊骨,而不损伤基底膜或皮层的器官。 这种方法也可以用于安全地开窗内耳的其他区域,例如scala vestibuli,半圆形运河的骨迷宫或前庭的墙壁,或其椭圆形或圆形的窗户。