专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

11. 发明授权

US08141785B2 Optical delay module for lengthening the propagation path of a light beam and pulse multiplication or elongation module 有权
标题翻译：光延迟模块，用于延长光束的传播路径和脉冲倍增或延伸模块
公开(公告)号：US08141785B2
公开(公告)日：2012-03-27
申请号：US12341576
申请日：2008-12-22
申请人： Alois Herkommer , Holger Muenz
发明人： Alois Herkommer , Holger Muenz
IPC分类号： G02B26/00
CPC分类号： G03F7/70075 , G02B27/126 , G02B27/143 , G02B27/144 , G02B27/145 , G03F7/7055
摘要： The invention relates to an optical delay module for lengthening the propagation path of a light beam comprises a first spherical mirror and a second spherical mirror, the first spherical mirror and the second spherical mirror having equal radii of curvature, the first and the second mirror being arranged on a common axis of symmetry with concave sides of the first and second mirrors being situated opposite one another at a distance from one another which corresponds to the radii of curvature of the first and second mirrors. The module also includes a coupling-in area for coupling the light beam into a space between the first and second mirrors and a coupling-out area for coupling the light beam out of the space between the first and second mirrors. The propagation path of the light beam between the coupling-in area and the coupling-out area corresponding at least approximately to quadruple the mirror distance, at least one optical arrangement arranged between the first and second mirrors, the optical arrangement being arranged to transfer the light beam between the first and second mirrors in such a way that the propagation path of the light beam without masking out of beam parts between the coupling-in area and the coupling-out area corresponds approximately to 2N times the mirror distance, where N is an integer >2.
摘要翻译：本发明涉及一种用于延长光束传播路径的光学延迟模块，包括第一球面镜和第二球面镜，第一球面镜和第二球面镜具有相等的曲率半径，第一和第二镜是布置在共同的对称轴上，第一和第二反射镜的凹面彼此相对设置，彼此相距一定距离，对应于第一和第二反射镜的曲率半径。该模块还包括用于将光束耦合到第一和第二反射镜之间的空间的耦合入区域和用于将光束耦合到第一和第二反射镜之间的空间的耦合输出区域。在耦合入区域和耦合输出区域之间的光束的传播路径至少对应于反射镜距离的四倍，布置在第一和第二反射镜之间的至少一个光学布置，光学布置被布置成将在第一和第二反射镜之间的光束，使得光束的传播路径在耦合入射区域和耦合输出区域之间的光束部分之外不被掩蔽，对应于反射镜距离的2N倍，其中N是一个整数> 2。

12. 发明申请

US20060209310A1 Optical illumination system for creating a line beam 失效
公开(公告)号：US20060209310A1
公开(公告)日：2006-09-21
申请号：US11318127
申请日：2005-12-22
申请人： Holger Muenz , Alois Herkommer , Rafael Egger
发明人： Holger Muenz , Alois Herkommer , Rafael Egger
IPC分类号： G01B9/02
CPC分类号： G02B27/0927 , B23K26/0604 , B23K26/0608 , B23K26/066 , B23K26/067 , B23K26/0732 , B23K26/0738 , G02B27/0966
摘要： In one aspect, the disclosure features an optical system configured to create from a beam of light an intensity distribution on a surface, whereby the optical system comprises at least a first optical element which splits the incident beam into a plurality of beams some of which at least partially overlap in a first direction on said surface and whereby the optical system further comprises at least a second optical element which displaces at least one of said beams in a second direction on said surface.

13. 发明申请

US20110211180A1 OPTICAL COMPONENT HAVING AN IMPROVED TRANSIENT THERMAL BEHAVIOR AND METHOD FOR IMPROVING THE TRANSIENT THERMAL BEHAVIOR OF AN OPTICAL COMPONENT 审中-公开
标题翻译：光学元件具有用于提高光学部件的瞬态热行为的改善瞬态热行为及方法
公开(公告)号：US20110211180A1
公开(公告)日：2011-09-01
申请号：US13104467
申请日：2011-05-10
申请人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
发明人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
IPC分类号： G03B27/52 , G03B27/32
CPC分类号： B82Y10/00 , G03F7/70166 , G03F7/70175 , G03F7/70858 , G21K1/06 , G21K2201/065 , G21K2201/067
摘要： An optical component includes an optical element, a mount for the optical element, and a temperature control device configured to control a temperature of a part of the mount based on at least one parameter selected from the group consisting of a coefficient of expansion of a substrate of the optical element, and a coefficient of expansion of a material of the mount.
摘要翻译：一种光学部件，包括光学元件，安装于所述光学元件，以及被配置为基于从由基板的膨胀系数的组中选择的至少一个参数，以控制底座的一部分的温度的温度控制装置的光学元件，并且所述安装部的材料的膨胀系数的。

14. 发明授权

US07629572B2 Optical devices and related systems and methods 有权
标题翻译：光器件及相关系统及方法
公开(公告)号：US07629572B2
公开(公告)日：2009-12-08
申请号：US11418872
申请日：2006-05-05
申请人： Vitaliy Shklover , Holger Kierey , Holger Muenz , Michel Le Maire , Bernhard Weigl
发明人： Vitaliy Shklover , Holger Kierey , Holger Muenz , Michel Le Maire , Bernhard Weigl
IPC分类号： G01J1/32 , G02B13/08
CPC分类号： G02B27/0988 , G02B1/115 , G02B5/22 , G02B13/08 , G02B27/0966 , G03F7/70591 , G03F7/70958 , G03F7/70975
摘要： The disclosure relates to a light beam intensity non-uniformity correction device that includes an optical element having a light entrance face with an antireflective property. According to the invention the antireflective property is locally amended in order to enhance light beam intensity uniformity. The disclosure further relates to a method for amending intensity distribution of a light beam in an optical system having one or more optical elements, where the method includes: a) assembling the optical system with the one or more optical elements arranged in predetermined positions, b) measuring intensity distribution, c) calculating locally required increase or decrease in absorption and/or reflection of one of the optical elements to amend measured intensity distribution into a predetermined intensity distribution, d) removing the optical element from the optical system, e) locally amending absorption and/or reflection of the one of the optical elements according to the calculation, f) installing the optical element in the predetermined position in the optical system.
摘要翻译：本发明涉及一种光束强度不均匀性校正装置，其包括具有防反射性的光入射面的光学元件。根据本发明，为了增强光束强度的均匀性，局部地修改了防反射特性。本发明还涉及一种用于修正具有一个或多个光学元件的光学系统中的光束的强度分布的方法，其中所述方法包括：a）将光学系统与布置在预定位置的一个或多个光学元件组合，b ）测量强度分布，c）计算局部所需的光学元件之一的吸收和/或反射的增加或减少以将测量的强度分布修改为预定的强度分布，d）从光学系统中去除光学元件，e）局部地根据计算修正光学元件之一的吸收和/或反射，f）将光学元件安装在光学系统中的预定位置。

15. 发明授权

US07944615B2 Optical system and method for shaping a profile of a laser beam 有权
标题翻译：用于成形激光束轮廓的光学系统和方法
公开(公告)号：US07944615B2
公开(公告)日：2011-05-17
申请号：US12097937
申请日：2006-12-20
申请人： Vitaliy Shklover , Holger Muenz , Michel Le Maire , Christian Hoess
发明人： Vitaliy Shklover , Holger Muenz , Michel Le Maire , Christian Hoess
IPC分类号： G02B27/14
CPC分类号： G02B27/0927 , B23K26/032 , B23K26/064 , B23K26/0652 , G02B27/0972 , G02B27/0977
摘要： An optical system for shaping an incoming beam having a divergence with an angular distribution at least in a first direction comprises at least one angle selective optical element for clipping the angular distribution in the at least first direction. The approach according to the present invention bases on using an angle-selective device operated by the principle of total internal reflection to reduce divergence of the incoming beam, in contrast to a spatially-selective device as for example a field-stop or slit. The method according to the present invention has the advantage that no physical sharp edges have to be exposed at high energy densities. Thus, thermal impact and demands on the optical elements to withstand a high power laser beam are significantly reduced.
摘要翻译：用于使具有至少在第一方向上具有角度分布的发散的入射光束成形的光学系统包括用于限制至少第一方向上的角分布的至少一个角度选择光学元件。根据本发明的方法基于使用通过全内反射原理操作的角度选择装置，以减少入射光束的发散，与空间选择装置（例如场停止或狭缝）相反。根据本发明的方法的优点在于，不能以高的能量密度暴露出物理的锋利边缘。因此，热冲击和对承受高功率激光束的光学元件的要求显着降低。

16. 发明申请

US20100024865A1 CONTINUOUS COATING INSTALLATION, METHODS FOR PRODUCING CRYSTALLINE SOLAR CELLS, AND SOLAR CELL 审中-公开
标题翻译：连续涂层安装，生产结晶太阳能电池的方法和太阳能电池
公开(公告)号：US20100024865A1
公开(公告)日：2010-02-04
申请号：US12538998
申请日：2009-08-11
申请人： Arvind Shah , Horst Schade , Holger Muenz , Martin Voelcker , Michael Schall , Matthias Krantz
发明人： Arvind Shah , Horst Schade , Holger Muenz , Martin Voelcker , Michael Schall , Matthias Krantz
IPC分类号： H01L31/0376 , H01L21/20 , C23C14/34
CPC分类号： H01L31/1824 , C23C14/18 , C23C14/30 , C23C14/562 , C23C14/5813 , H01L31/076 , H01L31/1872 , H01L31/206 , Y02E10/545 , Y02E10/548 , Y02P70/521
摘要： A continuous coating installation is disclosed. The installation includes a vacuum chamber having a supply opening for supplying a substrate to be coated and a discharge opening for discharging the coated substrate. The installation also includes a physical vapour deposition device for coating a surface of the substrate, and a laser crystallization system for simultaneously illuminating at least one sub-partial area of a currently coated partial area of the surface of the substrate with at least one laser beam. The installation further includes a transport device for transporting the substrate in a feedthrough direction from the supply opening to the discharge opening and for continuously or discontinuously moving the substrate during the coating thereof in the feedthrough direction.
摘要翻译：公开了一种连续涂布装置。该装置包括具有用于供给待涂覆的基板的供给开口和用于排出被涂覆的基板的排出口的真空室。该装置还包括用于涂覆基板的表面的物理气相沉积装置，以及激光结晶系统，用于同时用至少一个激光束照射基板表面的当前涂覆的部分区域的至少一个子部分区域。该装置还包括一个输送装置，用于沿着馈通方向从供给口向排出口输送基板，并且用于在穿过该方向的涂布期间连续地或不连续地移动基板。

17. 发明授权

US07471455B2 Systems and methods for generating laser light shaped as a line beam 有权
标题翻译：用于产生形成为线束的激光的系统和方法
公开(公告)号：US07471455B2
公开(公告)日：2008-12-30
申请号：US11261948
申请日：2005-10-28
申请人： Palash P. Das , Albert P. Cefalo , David S. Knowles , Vitaliy Shklover , Holger Muenz
发明人： Palash P. Das , Albert P. Cefalo , David S. Knowles , Vitaliy Shklover , Holger Muenz
IPC分类号： G02B27/10
CPC分类号： G02B19/0009 , G02B7/004 , G02B19/0028 , G02B19/0052 , G02B27/095 , G02B27/0977 , G02B27/0988
摘要： Systems and methods are disclosed for shaping a laser beam for interaction with a film in which the laser beam travels along a beam path and defines a short-axis and a long-axis. In one aspect, the system may include a first short-axis element having an edge positioned at a distance, d1, along the beam path from the film and a second short-axis element having an edge positioned at a distance, d2, along the beam path from the film, with d2
摘要翻译：公开了用于成形激光束以与激光束沿着光束路径行进并且限定短轴和长轴的膜相互作用的系统和方法。在一个方面，该系统可以包括第一短轴元件，该第一短轴元件具有沿着从胶片的光束路径定位在距离d1处的边缘，以及第二短轴元件，其具有沿着距离的距离d2定位的边缘来自胶片的光束路径，d2

18. 发明申请

US20060093253A1 Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component 有权
公开(公告)号：US20060093253A1
公开(公告)日：2006-05-04
申请号：US11245288
申请日：2005-10-06
申请人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
发明人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
IPC分类号： G02F1/335
CPC分类号： B82Y10/00 , G03F7/70166 , G03F7/70175 , G03F7/70858 , G21K1/06 , G21K2201/065 , G21K2201/067
摘要： An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.

19. 发明申请

US20120154895A1 OPTICAL SYSTEM FOR GENERATING A LIGHT BEAM FOR TREATING A SUBSTRATE 审中-公开
标题翻译：用于产生用于处理基板的光束的光学系统
公开(公告)号：US20120154895A1
公开(公告)日：2012-06-21
申请号：US13352703
申请日：2012-01-18
申请人： Holger Muenz , Wolfgang Merkel , Damian Fiolka , Johannes Wangler
发明人： Holger Muenz , Wolfgang Merkel , Damian Fiolka , Johannes Wangler
IPC分类号： G02F1/11
CPC分类号： G02B19/0014 , B23K26/0006 , B23K26/0604 , B23K26/0622 , B23K26/0676 , B23K26/352 , B23K2101/40 , B23K2103/56 , G02B19/0052 , G02B19/0095 , G02B27/0927 , G02B27/0961 , G02B27/0972
摘要： An optical system for generating a light beam for treating a substrate in a substrate plane is disclosed. The light beam has a beam length in a first dimension perpendicular to the propagation direction of the light beam and a beam width in a second dimension perpendicular to the first dimension and also perpendicular to the light propagation direction.The optical system includes a mixing optical arrangement which divides the light beam in at least one of the first and second dimensions into a plurality of light paths incident in the substrate plane in a manner superimposed on one another. At least one coherence-influencing optical arrangement is present in the beam path of the light beam and acts on the light beam to at least reduce the degree of coherence of light for at least one light path distance of one light path from at least one other light path.
摘要翻译：公开了一种用于产生用于处理衬底平面中的衬底的光束的光学系统。光束具有垂直于光束的传播方向的第一维中的光束长度和垂直于第一维度并且也垂直于光传播方向的第二维度中的光束宽度。光学系统包括混合光学装置，其将第一和第二维度中的至少一个中的光束以彼此叠加的方式入射到基板平面中的多个光路分离。至少一个相干影响的光学布置存在于光束的光束路径中并且作用在光束上以至少减少光的相干程度，用于至少一个光路与至少一个其它光路的光路距离光路。

20. 发明授权

US07965456B2 Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component 有权
标题翻译：具有改进的瞬态热性能的光学部件和用于改善光学部件的瞬态热性能的方法
公开(公告)号：US07965456B2
公开(公告)日：2011-06-21
申请号：US12241640
申请日：2008-09-30
申请人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
发明人： Wilhelm Egle , Wolfgang Hafner , Willi Anderl , Ulrich Bingel , Holger Muenz , Thomas Neidhardt
IPC分类号： G02B7/02
CPC分类号： B82Y10/00 , G03F7/70166 , G03F7/70175 , G03F7/70858 , G21K1/06 , G21K2201/065 , G21K2201/067
摘要： An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.
摘要翻译：光学部件包括至少一个在用光照射时加热的光学有效光学元件，以及至少一个用于至少一个光学元件的保持元件，用于将至少一个光学元件保持在载体结构中，其中至少一个光学元件以热传导方式连接到所述至少一个保持元件，并且其中所述至少一个保持元件至少部分地设置有用于从所述至少一个光学元件传递热量的主动冷却系统。附加地或替代地，提供了一种控制光学元件的至少一部分的温度的温度控制装置。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式