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11. 发明授权

US07071118B2 Method and apparatus for fabricating a conformal thin film on a substrate 失效
标题翻译：在基板上制造保形薄膜的方法和装置
公开(公告)号：US07071118B2
公开(公告)日：2006-07-04
申请号：US10706637
申请日：2003-11-12
申请人： Jacques C. S. Kools , Randhir Bubber , Ming Mao , Thomas Andrew Schneider , Jinsong Wang
发明人： Jacques C. S. Kools , Randhir Bubber , Ming Mao , Thomas Andrew Schneider , Jinsong Wang
IPC分类号： H01L21/31
CPC分类号： C23C16/45544 , C23C16/45565 , C23C16/45591
摘要： A method and apparatus for fabricating a conformal thin film on a substrate are disclosed. The method includes introducing a gas from a gas inlet into an expansion volume associated with an atomic layer deposition (ALD) system. The gas is flowed through a diffuser plate adjacent to the expansion volume and a reaction chamber. The diffuser plate includes a protrusion located opposite the gas inlet and the protrusion reduces turbulence in the expansion volume.
摘要翻译：公开了一种用于在基板上制造保形薄膜的方法和装置。该方法包括将气体从气体入口引入与原子层沉积（ALD）系统相关联的膨胀体积中。气体通过与膨胀容积相邻的扩散板和反应室流动。扩散板包括与气体入口相对的突出部，并且突起减少了膨胀体积中的湍流。

12. 发明授权

US09431040B1 Magnetic recording transducer 有权
标题翻译：磁记录传感器
公开(公告)号：US09431040B1
公开(公告)日：2016-08-30
申请号：US13535828
申请日：2012-06-28
申请人： Guanxiong Li , Wei Zhang , Ming Mao
发明人： Guanxiong Li , Wei Zhang , Ming Mao
IPC分类号： G11B5/39
CPC分类号： G11B5/398 , G01R33/098 , G11B5/3163 , G11B5/3932 , H01L43/12 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： A magnetic recording transducer comprises a magnetoresistive sensor having a left side, a right side opposite to the left side, a left junction angle at the left side, a right junction angle at the right side, and a track width. The right junction angle and the left junction angle are characterized by a junction angle difference of not more than six degrees. The track width is less than one hundred nanometers. The magnetic recording transducer further comprises a left hard bias structure residing adjacent to the left side of the magnetoresistive sensor, and a right hard bias structure residing adjacent to the right side of the magnetoresistive sensor.
摘要翻译：磁记录传感器包括磁阻传感器，其具有左侧，与左侧相对的右侧，左侧的左结合角，右侧的右结合角和轨道宽度。右结合角和左结合角的特征在于不超过六度的结合角差。轨道宽度小于一百纳米。磁记录传感器还包括邻近磁阻传感器左侧的左硬偏置结构和与磁阻传感器的右侧相邻的右硬偏置结构。

13. 发明授权

US08611054B1 Antiferromagnetically-coupled soft bias magnetoresistive read head, and fabrication method therefore 有权
标题翻译：反铁磁耦合软偏置磁阻读头，因此制造方法
公开(公告)号：US08611054B1
公开(公告)日：2013-12-17
申请号：US13444723
申请日：2012-04-11
申请人： Changhe Shang , Daniele Mauri , Kuok San Ho , Anup G. Roy , Ming Mao
发明人： Changhe Shang , Daniele Mauri , Kuok San Ho , Anup G. Roy , Ming Mao
IPC分类号： G11B5/39
CPC分类号： G11B5/3932 , G01R33/093 , G11B5/3909 , G11B2005/3996 , H01F10/3218 , H01F10/3254
摘要： A magnetic read transducer is described with a magnetoresistive sensor that has a free layer, and an antiferromagnetically-coupled (AFC) soft bias layer for magnetically biasing the free layer. The free layer has a first edge in a track width direction along an air-bearing surface (ABS). At least a portion of the AFC soft bias layer is conformal to at least a portion of a second edge of the free layer, and situated to form a magnetic moment at an angle with respect to a center line of the free layer. The center line of the free layer extends in the same direction as the free layer first edge that is in the track width direction along the ABS.
摘要翻译：用具有自由层的磁阻传感器和用于磁偏置自由层的反铁磁耦合（AFC）软偏置层来描述磁读取传感器。自由层具有沿空气轴承表面（ABS）的轨道宽度方向上的第一边缘。 AFC柔性偏置层的至少一部分与自由层的第二边缘的至少一部分共形，并且位于相对于自由层的中心线形成一个角度的磁矩。自由层的中心线沿与ABS沿轨道宽度方向的自由层第一边缘相同的方向延伸。

14. 发明授权

US08315019B1 Method and system for providing an improved magnetoresistive structure utilizing an oxidation buffer layer 有权
标题翻译：提供利用氧化缓冲层的改进的磁阻结构的方法和系统
公开(公告)号：US08315019B1
公开(公告)日：2012-11-20
申请号：US12414880
申请日：2009-03-31
申请人： Ming Mao , Wei Zhang , Mahendra Pakala
发明人： Ming Mao , Wei Zhang , Mahendra Pakala
IPC分类号： G11B5/127
CPC分类号： G11B5/3932 , G01R33/098 , G11B5/3909 , H01F10/325 , H01F10/3254 , Y10T428/1164 , Y10T428/1171
摘要： A method and system for providing a magnetic transducer is described. The method and system include providing a magnetoresistive structure having a plurality of sides. At least one oxidation buffer layer covers at least the plurality of sides. The method and system also include providing at least one oxide layer after the oxidation buffer layer is provided. The oxide layer(s) reside between the sides and the oxidation buffer layer(s).
摘要翻译：描述了一种用于提供磁换能器的方法和系统。该方法和系统包括提供具有多个侧面的磁阻结构。至少一个氧化缓冲层至少覆盖多个侧面。该方法和系统还包括在提供氧化缓冲层之后提供至少一个氧化物层。氧化物层位于两侧和氧化缓冲层之间。

15. 发明授权

US08233248B1 Method and system for providing a magnetic recording transducer using a line hard mask 有权
标题翻译：使用线硬掩模提供磁记录传感器的方法和系统
公开(公告)号：US08233248B1
公开(公告)日：2012-07-31
申请号：US12560669
申请日：2009-09-16
申请人： Guanxiong Li , Wei Zhang , Ming Mao
发明人： Guanxiong Li , Wei Zhang , Ming Mao
IPC分类号： G11B5/39 , B44C1/22
CPC分类号： G11B5/398 , G01R33/098 , G11B5/3163 , G11B5/3932 , H01L43/12 , Y10T29/49041 , Y10T29/49046 , Y10T29/49052
摘要： A method and system for fabricating a magnetic transducer is described. The transducer has a device region, a field region, and a magnetoresistive stack. The method and system include providing a hard mask on the magnetoresistive stack. The hard mask is inorganic and includes a sensor portion and a line frame. The sensor portion covers a first portion of the magnetoresistive stack corresponding to a magnetoresistive structure. The line frame covers a second portion of the magnetoresistive stack in the device region. The method and system include defining the magnetoresistive structure in a track width direction using the hard mask and providing at least one hard bias material after the magnetoresistive structure is defined. A first portion of the hard bias material(s) is substantially adjacent to the magnetoresistive structure in the track width direction. The method and system also include removing a second portion of the hard bias material(s).
摘要翻译：描述了用于制造磁换能器的方法和系统。换能器具有器件区域，场区域和磁阻堆叠。该方法和系统包括在磁阻堆叠上提供硬掩模。硬掩模是无机的，并且包括传感器部分和线框架。传感器部分覆盖对应于磁阻结构的磁阻堆叠的第一部分。线框架覆盖器件区域中的磁阻堆叠的第二部分。该方法和系统包括使用硬掩模限定磁道宽度方向上的磁阻结构，并且在限定了磁阻结构之后提供至少一种硬偏置材料。硬偏压材料的第一部分在磁道宽度方向上基本上与磁阻结构相邻。该方法和系统还包括去除硬偏压材料的第二部分。

16. 发明授权

US06277505B1 Read sensor with improved thermal stability and manufacturing method therefor 失效
标题翻译：读取具有改善热稳定性的传感器及其制造方法
公开(公告)号：US06277505B1
公开(公告)日：2001-08-21
申请号：US09234953
申请日：1999-01-21
申请人： Zhupei Shi , Ming Mao , Qunwen Leng
发明人： Zhupei Shi , Ming Mao , Qunwen Leng
IPC分类号： B32B900
CPC分类号： B82Y25/00 , B82Y10/00 , G01R33/093 , G11B5/3903 , G11B2005/3996 , H01F10/3254 , H01F10/3268 , Y10S428/90 , Y10T428/1121
摘要： A structure which includes a ferromagnetic (FM) layer, a thin oxide layer, and an antiferromagnetic (AFM) layer is provided. The thin oxide layer, between 1 to 10 oxygen atoms in thickness, minimizes interlayer atomic diffusion between the FM layer and the antiferromagnetic layer. In a preferred embodiment, a spin valve sensor with improved thermal stability is provided by including the thin oxide layer between a FM layer and an AFM layer. The presence of the thin oxide layer also results in an improved spin valve sensor with an enhanced exchange pinning field.
摘要翻译：提供了包括铁磁（FM）层，薄氧化物层和反铁磁性（AFM）层的结构。厚度在1至10个氧原子之间的薄氧化物层使FM层和反铁磁层之间的层间原子扩散最小化。在优选实施例中，通过在FM层和AFM层之间包括薄氧化物层来提供具有改善的热稳定性的自旋阀传感器。薄氧化物层的存在还导致改进的自旋阀传感器具有增强的交换钉扎场。

17. 发明授权

US08630068B1 Method and system for providing a side shielded read transducer 有权
标题翻译：提供侧屏蔽读取传感器的方法和系统
公开(公告)号：US08630068B1
公开(公告)日：2014-01-14
申请号：US13296970
申请日：2011-11-15
申请人： Daniele Mauri , Chih-Ching Hu , Ming Mao , Kuok San Ho , Savas Gider
发明人： Daniele Mauri , Chih-Ching Hu , Ming Mao , Kuok San Ho , Savas Gider
IPC分类号： G11B5/39
CPC分类号： G11B5/3909 , B82Y10/00 , G11B5/3912 , G11B2005/3996
摘要： A method and system for providing a magnetic transducer having an air-bearing surface (ABS) is described. The magnetic read transducer includes a first shield, a magnetoresistive sensor, at least one soft magnetic side shield, and a second shield. The magnetoresistive sensor includes a sensor layer having at least one edge in the track width direction along the ABS. The at least one soft magnetic side shield is adjacent to the at least one edge of the sensor layer. The at least one soft magnetic side shield has a full film permeability of at least ten. The magnetoresistive sensor is between the first shield and the second shield and free of an in-stack hard bias layer.
摘要翻译：描述了一种用于提供具有空气轴承表面（ABS）的磁换能器的方法和系统。磁读取传感器包括第一屏蔽，磁阻传感器，至少一个软磁侧屏蔽和第二屏蔽。磁阻传感器包括具有沿ABS的轨道宽度方向上的至少一个边缘的传感器层。所述至少一个软磁侧屏蔽件邻近所述传感器层的所述至少一个边缘。所述至少一个软磁侧屏具有至少十个全透膜度。磁阻传感器位于第一屏蔽和第二屏蔽之间，并且没有堆叠内的硬偏置层。

18. 发明授权

US08607438B1 Method for fabricating a read sensor for a read transducer 失效
标题翻译：读取传感器的读取传感器的制造方法
公开(公告)号：US08607438B1
公开(公告)日：2013-12-17
申请号：US13309357
申请日：2011-12-01
申请人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
发明人： Wei Gao , Guanxiong Li , Ming Mao , Chih-Ching Hu , Guanghong Luo , Miao Wang , Zhihong Zhang , Anup G. Roy
IPC分类号： G11B5/127 , H04R31/00
CPC分类号： G11B5/3903 , G01R33/093 , G11B5/3163
摘要： A read sensor for a transducer is fabricated. The transducer has a field region and a sensor region corresponding to the sensor. A sensor stack is deposited. A hybrid mask including hard and field masks is provided. The hard mask includes a sensor portion covering the sensor region and a field portion covering the field region. The field mask covers the field portion of the hard mask. The field mask exposes the sensor portion of the hard mask and part of the sensor stack between the sensor and field regions. The sensor is defined from the sensor stack in a track width direction. Hard bias layer(s) are deposited. Part of the hard bias layer(s) resides on the field mask. Part of the hard bias layer(s) adjoining the sensor region is sealed. The field mask is lifted off. The transducer is planarized.
摘要翻译：制造用于换能器的读取传感器。传感器具有对应于传感器的场区域和传感器区域。传感器堆叠被沉积。提供了包括硬掩模和磁场掩模的混合掩模。硬掩模包括覆盖传感器区域的传感器部分和覆盖场区域的场部分。场掩模覆盖硬掩模的场部分。场掩模将传感器和场区域之间的硬掩模的传感器部分和传感器堆叠的一部分暴露。传感器从传感器堆叠在轨道宽度方向上定义。硬偏置层被沉积。硬偏置层的一部分位于场掩模上。邻近传感器区域的一部分硬偏压层被密封。场地面罩被提起。传感器平坦化。

19. 发明申请

US20070209926A1 Sputter Deposition System and Methods of Use 审中-公开
标题翻译：溅射沉积系统及其使用方法
公开(公告)号：US20070209926A1
公开(公告)日：2007-09-13
申请号：US11558769
申请日：2006-11-10
申请人： Chih-Ling Lee , Adrian Devasahayam , Ming Mao
发明人： Chih-Ling Lee , Adrian Devasahayam , Ming Mao
IPC分类号： C23C14/32 , C23C14/00
CPC分类号： C23C14/352 , C23C14/505 , C23C14/568 , C23C14/5833
摘要： The present invention relates a physical vapor deposition (PVD) system. e.g. a planetary system, for forming one or more layers of a coating material on a substrate and for treating, or modifying, the substrate surface, which can include the surface of the substrate or a deposited layer of coating material thereon. The PVD system includes a single vacuum (or process) chamber having an ion source and at least one PVD source of the coating material. The ion source, such as a linear ion source, is configured to emit a beam of energetic particles at a substrate for surface modification of the substrate surface, for example, to provide film densification, etching, cleaning, surface smoothing, and/or oxidation thereof. The PVD source(s) of the coating material deposits one or more layers of coating material(s) on the substrate. The uniformity of substrate surface modification and the thickness uniformity of the deposited layers can be maintained by velocity profiling of the rotating substrate within the vacuum chamber.
摘要翻译：本发明涉及物理气相沉积（PVD）系统。例如行星系统，用于在衬底上形成一层或多层涂层材料，并用于处理或改性衬底表面，衬底表面可包括衬底的表面或其上的涂层材料的沉积层。 PVD系统包括具有离子源和涂层材料的至少一个PVD源的单个真空（或过程）室。诸如线性离子源的离子源被配置为在衬底处发射高能粒子束，用于衬底表面的表面改性，例如以提供膜致密化，蚀刻，清洁，表面平滑化和/或氧化其中。涂层材料的PVD源在衬底上沉积一层或多层涂层材料。衬底表面改性的均匀性和沉积层的厚度均匀性可以通过旋转衬底在真空室内的速度分布来保持。

20. 发明申请

US20050045998A1 Amorphous soft magnetic shielding and keeper for MRAM devices 失效
标题翻译：用于MRAM器件的无定形软磁屏蔽和保持器
公开(公告)号：US20050045998A1
公开(公告)日：2005-03-03
申请号：US10943510
申请日：2004-09-15
申请人： Jacques Kools , Ming Mao , Thomas Schneider , Jinsong Wang , Michael Gutkin
发明人： Jacques Kools , Ming Mao , Thomas Schneider , Jinsong Wang , Michael Gutkin
IPC分类号： H01L21/00 , H01L23/552 , H01L27/22 , H01L43/08 , H01L43/12
CPC分类号： H01L27/222 , H01L43/08 , H01L43/12
摘要： An amorphous soft magnetic thin film material for forming shielding and keeper applications in MRAM devices. The amorphous soft magnetic material may be deposited using Physical Vapor Deposition (PVD) in the presence of a magnetic field, in order to form shielding layers and keepers in a multi-layer metallization process. The soft magnetic material may be an amorphous metallic alloy, such as CoZrX, where X may be Ta, Nb, Pd and/or Rh.
摘要翻译：用于在MRAM器件中形成屏蔽和保持器应用的无定形软磁薄膜材料。可以在存在磁场的情况下使用物理气相沉积（PVD）沉积非晶软磁材料，以便在多层金属化工艺中形成屏蔽层和保持器。软磁性材料可以是非晶金属合金，例如CoZrX，其中X可以是Ta，Nb，Pd和/或Rh。

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