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11. 发明申请

WO2009009780A2 METHOD AND APPARATUS FOR PROVIDING FLAT PANEL DISPLAY ENVIRONMENTAL ISOLATION 审中-公开
标题翻译：用于提供平板显示器环境隔离的方法和设备
公开(公告)号：WO2009009780A2
公开(公告)日：2009-01-15
申请号：PCT/US2008/069898
申请日：2008-07-12
申请人： ASYST TECHNOLOGIES, INC. , GOULD, Richard, H. , BONORA, Anthony, C. , KROLAK, Michael
发明人： GOULD, Richard, H. , BONORA, Anthony, C. , KROLAK, Michael
IPC分类号： B65D85/86
CPC分类号： H01L21/67363 , H01L21/67369 , H01L21/67383 , H01L21/67389 , H01L21/67766 , H01L21/67778
摘要： A container for supporting substrates for processing is provided. The container includes a base, a top, and side panels connecting the base and the top. A support structure is disposed in the container. The support structure is configured to support the substrates within the container. The support structure has rows of multiple tensile members extending across a width of the container. Each row of the multiple tensile members is configured to support a substrate, wherein one of the side panels includes a moveable flexible membrane enabling access into the container. A support structure for the flexible membrane includes a synchronization mechanism for synchronizing movement of the flexible membrane with a door of a receiving module of a processing tool or a door of the processing tool.
摘要翻译：提供了用于支撑用于处理的基板的容器。容器包括底座，顶部和连接底座和顶部的侧板。支撑结构设置在容器中。支撑结构被构造成支撑容器内的基板。支撑结构具有横跨容器的宽度延伸的多排拉伸构件。多个拉伸构件的每排被配置为支撑基板，其中侧板中的一个包括能够进入容器的可移动柔性膜。用于柔性膜的支撑结构包括同步机构，用于使柔性膜与处理工具或处理工具的门的接收模块的门的运动同步。

12. 发明申请

WO2008008739A3 VARIABLE LOT SIZE LOAD PORT 审中-公开
公开(公告)号：WO2008008739A3
公开(公告)日：2008-01-17
申请号：PCT/US2007/073088
申请日：2007-07-09
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： B65B21/02
摘要： A variable lot size load port assembly (600) is described having a tool interface, a port door (626), a latch key (632), an advance plate (612), and an elevator (610). The tool interface extends generally in a vertical dimension and has an aperture (604). The port door has a closed position wherein the port door (626) at least partially occludes the aperture. The latch key (632) extends from the port door (626) and is configured to mate with a latch key receptacle of a door (42) of a front opening unified pod (FOUP) (40). The advance plate (612) is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator (610) raises and lowers the advance plate (612) to bring the latch key receptacle of the door (42) of the FOUP into alignment with the latch key (632) of the port door (626).

13. 发明申请

WO2009135066A2 END EFFECTOR TO SUBSTRATE OFFSET DETECTION AND CORRECTION 审中-公开
标题翻译：终止效应以抵消偏移检测和校正
公开(公告)号：WO2009135066A2
公开(公告)日：2009-11-05
申请号：PCT/US2009/042415
申请日：2009-04-30
申请人： ASYST TECHNOLOGIES, INC. , MARTIN, Raymond, S. , BONORA, Anthony, C. , KROLAK, Michael
发明人： MARTIN, Raymond, S. , BONORA, Anthony, C. , KROLAK, Michael
IPC分类号： H01L21/677 , H01L21/673 , H01L21/68
CPC分类号： H01L21/67772 , H01L21/67265 , H01L21/68707
摘要： A port door providing an interface into a processing tool is provided. The port door includes first and second arms pivotably mounted on a top edge of the port door. The first and second arms are configured to extend from a plane of the port door towards a carrier containing substrates for the processing tool. The first arm has an emitter transmitting a beam that is split into a plurality of sub-beams within the first arm. The second arm has a plurality of sensors receiving corresponding sub-beams, wherein one of sub-beams provides information as to a position of an end effector relative to a gap between the substrates in the carrier.
摘要翻译：提供了一种提供加工工具的接口的端口门。端口门包括可枢转地安装在端口门的顶部边缘上的第一和第二臂。第一和第二臂构造成从端口门的平面延伸到包含用于处理工具的基底的载体。第一臂具有发射器的发射器，该射束分裂成第一臂内的多个子光束。第二臂具有多个传感器，其接收对应的子光束，其中一个子光束提供关于端部执行器相对于载体中的基板之间的间隙的位置的信息。

14. 发明申请

WO2009002888A3 METHOD AND APPARATUS FOR WAFER MARKING 审中-公开
标题翻译：用于晶片标记的方法和设备
公开(公告)号：WO2009002888A3
公开(公告)日：2008-12-31
申请号：PCT/US2008/067810
申请日：2008-06-21
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , MARTIN, Raymond, S. , KROLAK, Michael
发明人： BONORA, Anthony, C. , MARTIN, Raymond, S. , KROLAK, Michael
IPC分类号： H01L21/68 , H01L21/67 , H01L21/02
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译：提供半导体衬底。衬底包括第一表面和相对的第二表面，其中第一表面在第一表面的质心区域中包括标记。该标记指示半导体衬底的第一表面上的中心点的位置或衬底特有的标识数据。还提供了一种系统，运输和标记方法以及用于读取基材标记的装置。

15. 发明申请

WO2008085233A1 LOADER AND BUFFER FOR REDUCED LOT SIZE 审中-公开
标题翻译：减少大小的装载和缓冲器
公开(公告)号：WO2008085233A1
公开(公告)日：2008-07-17
申请号：PCT/US2007/024201
申请日：2007-11-19
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , HINE, Roger, G. , ROGERS, Theodore, W.
发明人： BONORA, Anthony, C. , HINE, Roger, G. , ROGERS, Theodore, W.
IPC分类号： H01L21/677
CPC分类号： B65G1/0407 , B65G37/02 , B65G2201/0297
摘要： A system comprising a load port and a transfer module. In one embodiment, the load port includes a plate having a first opening and a second opening, a first workpiece access port, a second workpiece access port and at least one storage location. The storage location(s) may be located either beneath the second workpiece access port or above the first workpiece access port. The transfer mosule, which is located adjacent the load port, includes a load arm for moving the workpiece containers between the first workpiece access port, the second workpiece access port, any of the storage shelves and a material transport system.
摘要翻译：一种包括负载端口和转移模块的系统。在一个实施例中，负载端口包括具有第一开口和第二开口的板，第一工件接入端口，第二工件接入端口和至少一个存储位置。存储位置可以位于第二工件访问端口下方或第一工件访问端口的上方。位于负载端口附近的转移清除器包括用于在第一工件接入端口，第二工件接入端口，任何存储搁板和材料输送系统之间移动工件容器的负载臂。

16. 发明申请

WO2008064121A2 VARIABLE PITCH STORAGE SHELVES 审中-公开
标题翻译：可变储物仓
公开(公告)号：WO2008064121A2
公开(公告)日：2008-05-29
申请号：PCT/US2007/084976
申请日：2007-11-16
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C.
发明人： BONORA, Anthony, C.
IPC分类号： B65H1/00
CPC分类号： B65G1/02
摘要： The present invention generally comprises a container storage system for efficiently storing large capacity and small capacity containers or FOUPs. In one embodiment, each storage shelf within the stocker comprises a pair of spaced apart supports. A large capacity container or a small capacity container may be seated on any of these supports. The storage locations are arranged within the stocker to minimize the amount of empty space between the locations and seated containers. In one embodiment, the vertical pitch between supports of adjacent storage locations is less than the height of a large capacity FOUP container shell. Thus, when a FOUP is seated in a storage location, its container shell extends between the supports of the storage location located directly above.
摘要翻译：本发明通常包括用于有效地存储大容量和小容量容器或FOUP的容器储存系统。在一个实施例中，储盘架内的每个储物架包括一对间隔开的支撑件。大容量容器或小容量容器可以安装在任何这些支撑件上。存储位置被布置在储料器内以最小化位置和安置的容器之间的空闲空间的量。在一个实施例中，相邻存储位置的支撑件之间的垂直间距小于大容量FOUP容器壳体的高度。因此，当FOUP位于存储位置时，其容器壳体在位于直接位于上方的存储位置的支撑件之间延伸。

17. 发明申请

WO2008008834A2 METHOD AND APPARATUS FOR VERTICAL WAFER TRANSPORT, BUFFER AND STORAGE 审中-公开
标题翻译：垂直波浪运输，缓冲和储存的方法和装置
公开(公告)号：WO2008008834A2
公开(公告)日：2008-01-17
申请号：PCT/US2007/073256
申请日：2007-07-11
申请人： ASYST TECHNOLOGIES, INC. , KROLAK, Michael , HINE, Roger, G. , BONORA, Anthony, C.
发明人： KROLAK, Michael , HINE, Roger, G. , BONORA, Anthony, C.
IPC分类号： B65G1/00 , B65G65/02 , B65G65/32 , B65G65/38
CPC分类号： H01L21/67379 , H01L21/67017 , H01L21/67386 , H01L21/67769 , H01L21/67772 , H01L21/68707
摘要： A substrate support and transport system for substrates to be processed is provided. The system includes a container supporting a plurality of substrates in a substantially vertical orientation, where the container has an access door surrounded by a flange defined on a top surface. The system includes a conveying system supporting a bottom surface of the container opposing the top surface. The conveying system is configured to enable removal of the container from the conveying system to a processing tool while the plurality of substrates is in the substantially vertical orientation. The system further includes a receiving module for a processing tool configured to accept the container from the conveying system. The receiving module is configured to move the container in a two dimensional plane defined within the receiving module. A container holding the substrates in a substantially vertical orientation and a method for transporting and storing substrates is provided.
摘要翻译：提供了一种用于待处理衬底的衬底支撑和输送系统。该系统包括支撑基本垂直取向的多个基板的容器，其中容器具有由限定在顶表面上的凸缘包围的通道门。该系统包括支撑与顶表面相对的容器的底表面的输送系统。输送系统被构造成使得容器从输送系统移除到处理工具，同时多个基板处于基本垂直的方向。该系统还包括用于处理工具的接收模块，该接收模块被配置为从输送系统接收容器。接收模块被配置为在容纳模块内定义的二维平面内移动容器。提供了将基板保持为大致垂直取向的容器以及用于输送和存储基板的方法。

18. 发明申请

WO2007038096A3 DISCONTINUOUS CONVEYOR SYSTEM 审中-公开
公开(公告)号：WO2007038096A3
公开(公告)日：2007-04-05
申请号：PCT/US2006/036521
申请日：2006-09-19
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , ROGERS, Ted
发明人： BONORA, Anthony, C. , ROGERS, Ted
IPC分类号： H01L21/677
摘要： The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.

19. 发明申请

WO2006091593A2 DIRECT TOOL LOADING 审中-公开
标题翻译：直接工具装载
公开(公告)号：WO2006091593A2
公开(公告)日：2006-08-31
申请号：PCT/US2006/006103
申请日：2006-02-17
申请人： ASYST TECHNOLOGIES, INC. , BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
发明人： BONORA, Anthony, C. , KROLAK, Michael , HINE, Roger, G.
IPC分类号： H01L21/00
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.
摘要翻译：本发明包括一个集装箱运输和装载系统。该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

20. 发明申请

WO2009052434A3 METHOD AND APPARATUS FOR WAFER SUPPORT 审中-公开
公开(公告)号：WO2009052434A3
公开(公告)日：2009-04-23
申请号：PCT/US2008/080376
申请日：2008-10-17
申请人： ASYST TECHNOLOGIES INC. , BONORA, Anthony, C.
发明人： BONORA, Anthony, C.
IPC分类号： H01L21/673 , H01L21/677 , H01L21/683 , H01L21/687
摘要： An end effector having a first arm and a second arm extending from an end effector support body is provided. The first arm and the second arm each have support extensions for supporting a peripheral region of a substrate on opposing sides of a diameter of the substrate. The height of support contacts on opposing sides of the diameter is different relative to a horizontal datum plane. In one embodiment, the end effector includes additional arms extending from the end effector support body. A system for supporting a substrate is provided also.

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