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    • 16. 发明公开
    • 구동집적회로의 가압착장치 및 그 방법
    • 驱动集成电路预绑定的装置和方法
    • KR1020100110501A
    • 2010-10-13
    • KR1020090028866
    • 2009-04-03
    • 삼성디스플레이 주식회사
    • 안수호이준희백상훈
    • G02F1/13G02F1/1345
    • G02F1/1303H01L21/681H01L21/68785
    • PURPOSE: A device and a method for pre-bonding a drive IC(Integrated Circuit) are provided to align a drive IC after checking a location of the drive IC, thereby preventing error about a state of the liquid crystal display panel. CONSTITUTION: A conveyor(11) transfers an LCD(Liquid Crystal Display) panel to a stage(10) in the first direction. A mount head(20) pre-bonds a drive IC of the liquid crystal display panel. A transfer unit(30) transfers the mount head. A camera unit(50) recognizes a location by photographing the drive IC and the LCD panel. The mount head moves between the photographing location and the pre-bonded position.
    • 目的:提供一种用于预先粘合驱动IC(集成电路)的装置和方法,用于在检查驱动IC的位置之后对准驱动IC,从而防止关于液晶显示面板的状态的错误。 构成:输送机(11)将LCD(液晶显示器)面板沿第一方向传送到台(10)。 安装头(20)预先粘合液晶显示面板的驱动IC。 传送单元(30)传送安装头。 相机单元(50)通过拍摄驱动IC和LCD面板识别位置。 安装头在拍摄位置和预先粘合位置之间移动。
    • 17. 发明公开
    • 박막증착장치 및 이를 이용한 박막증착방법
    • 用于沉积薄膜的方法和使用该薄膜沉积薄膜的方法
    • KR1020080111964A
    • 2008-12-24
    • KR1020070060575
    • 2007-06-20
    • 삼성디스플레이 주식회사성균관대학교산학협력단
    • 황태형염근영정창현이준희
    • H05B33/10
    • C23C16/509C23C16/029C23C16/30C23C16/401C23C28/00H01J37/32091H01L51/5256
    • An apparatus for depositing thin film capable of preventing delamination of protective film and method thereof are provided to reduce moisture permeability by improving light transmission. An apparatus(100) for depositing thin film forms a protective film having a structure in which an inorganic film and an organic film are laminated by turns on a substrate(10), and comprises a reaction chamber(110), a radio frequency electrode(120), a supporting substrate(130), a power supply unit, a first reaction gas supply unit(151), a second reaction gas supply unit(152), and an inert gas supply unit(153). The radio frequency electrode is installed inside the reaction chamber, and receives a radio frequency power. The supporting substrate is installed inside the reaction chamber, supports the substrate, and receives a bias voltage. The power supply unit supplies a radio frequency voltage and the bias voltage to the radio frequency electrode and the substrate. The first reaction gas supply unit supplies a first reaction gas inside the reaction chamber while forming the inorganic film on the substrate. The second reaction gas supply unit supplies a second reaction gas inside the reaction chamber while forming the inorganic film and the organic film on the substrate. The inert gas supply unit supplies an inert gas inside the reaction chamber while forming the inorganic film and the organic film on the substrate.
    • 提供一种用于沉积能够防止保护膜分层的薄膜的设备及其方法,以通过改善透光性来降低透湿性。 一种用于沉积薄膜的设备(100)形成了一种保护膜,该保护膜具有将基底(10)上的无机膜和有机膜层叠的结构,并且包括反应室(110),射频电极 120),支撑基板(130),电源单元,第一反应气体供应单元(151),第二反应气体供应单元(152)和惰性气体供应单元(153)。 射频电极安装在反应室内,并接收射频电力。 支撑基板安装在反应室内,支撑基板,并接收偏置电压。 电源单元向射频电极和基板提供射频电压和偏置电压。 第一反应气体供给单元在反应室内供给第一反应气体,同时在基板上形成无机膜。 第二反应气体供给单元在反应室内供给第二反应气体,同时在基板上形成无机膜和有机膜。 惰性气体供给单元在反应室内供给惰性气体,同时在基板上形成无机膜和有机膜。