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    • 15. 发明申请
    • Display device and fabrication method thereof
    • 显示装置及其制造方法
    • US20070108448A1
    • 2007-05-17
    • US11590882
    • 2006-11-01
    • Takuo KaitohTakahiro KamoToshihiko Itoga
    • Takuo KaitohTakahiro KamoToshihiko Itoga
    • H01L29/10
    • H01L27/1285G02F1/13454
    • The present invention provides a display device which forms thin film transistor circuits differing in characteristics from each other on a substrate in mixture and a fabrication method of the display device. On a glass substrate having a background layer which is formed by stacking an SiN film and an SiO2 film, a precursor film which is constituted of an a-Si layer or a fine particle crystalline p-Si layer is formed and the implantation is applied to the precursor film. Here, an acceleration voltage and a dose quantity are adjusted such that a proper quantity of dopant is dosed in the inside of the precursor film. When the precursor film is melted by laser radiation, the dopant dosed in the precursor film is activated and taken into the precursor.
    • 本发明提供一种显示装置,其在混合物的基板上形成彼此不同的薄膜晶体管电路和显示装置的制造方法。 在具有通过层叠SiN膜和SiO 2膜形成的背景层的玻璃基板上,由a-Si层或细颗粒结晶p-Si层构成的前体膜 并且将植入物施加到前体膜。 这里,调整加速电压和剂量,使得在前体膜的内部配入适量的掺杂剂。 当前体膜通过激光辐射熔化时,投入到前体膜中的掺杂剂被激活并被吸收到前体中。
    • 20. 发明申请
    • MANUFACTURING METHOD OF DISPLAY DEVICE
    • 显示装置的制造方法
    • US20080227274A1
    • 2008-09-18
    • US12043159
    • 2008-03-06
    • Mikio HONGOAkio YazakiTakahiro Kamo
    • Mikio HONGOAkio YazakiTakahiro Kamo
    • H01L21/268
    • H01L21/268H01L21/02675H01L27/1285
    • In crystallization of a silicon film by annealing using a linear-shaped laser beam having a width of the short axis of the beam is ununiform, the profile (intensity distribution) of the laser beam is evaluated and the results are fed back to a condition of oscillating the laser beam or an optical condition for projecting the laser beam onto the silicon film, whereby a display device comprising a high-quality crystalline silicon film is manufactured. The energy distribution of the linear-shaped laser beam is determined by a detector type CCD camera which is moved stepwise in the directions in which its long axis and short axis extend, respectively, and a value obtained by dividing an accumulated intensity E in the long axis direction obtained by accumulating the detected signal in the direction parallel to the short axis by the square root of the width W of the short axis of the above linear-shaped laser beam in each position of the long axis: E/√{square root over ( )}(W), is determined in all the positions of a cross section of the linear-shaped laser beam to evaluate the above intensity distribution.
    • 在通过使用具有波束的短轴宽度的线形激光束进行退火的硅膜的结晶化不均匀的情况下,评价激光束的轮廓(强度分布),并将结果反馈到 振荡激光束或将激光束投射到硅膜上的光学条件,由此制造包括高质量结晶硅膜的显示装置。 线状激光束的能量分布由分别在其长轴和短轴延伸的方向上逐步移动的检测器型CCD照相机确定,并且通过将长时间的累积强度E除以获得的值 将上述线状激光的短轴的宽度W的平方根在长轴的各位置上沿着与短轴平行的方向累积检测信号而得到的轴方向:E /√{平方根 在线形激光束的横截面的所有位置中确定((W))以评估上述强度分布。