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11. 发明授权

US5258823A Alignment system 失效
标题翻译：校准系统
公开(公告)号：US5258823A
公开(公告)日：1993-11-02
申请号：US720004
申请日：1991-06-24
申请人： Takahiro Akamatsu
发明人： Takahiro Akamatsu
IPC分类号： G01B11/00 , G01B11/24 , G01B11/245 , G03F7/20 , G05D3/00 , H01L21/68 , G01B11/14
CPC分类号： G03F7/7075 , H01L21/681
摘要： An alignment system incudes a sensor device including a pair of a light emitting element and a light receiving element, for detecting an edge of a substrate without contact thereto; a driving device for supporting the substrate and for moving the substrate; and a control device for controlling the driving device so as to position the substrate, wherein the control device controls the driving device so that the sensor device produces an output of a level which is within a predetermined tolerance range with respect to a set level, and wherein the control device is operable to renew the set level at a predetermined timing on the basis of (i) a first output of the sensor device corresponding to an output of the sensor device as produced in a first state in which light from the light emitting element of the sensor device is received by the light receiving element of the sensor device without being blocked and (ii) a second output of the sensor device corresponding to an output of the sensor device as produced in a second state in which the light reception of the light receiving element is completely blocked.
摘要翻译：对准系统包括包括一对发光元件和光接收元件的传感器装置，用于检测基板的边缘而不与其接触; 用于支撑基板并移动基板的驱动装置; 以及用于控制所述驱动装置以便定位所述基板的控制装置，其中所述控制装置控制所述驱动装置，使得所述传感器装置产生相对于设定电平在预定容限范围内的电平的输出，以及其中所述控制装置可操作以在预定定时基于（i）所述传感器装置的第一输出对应于所述传感器装置的输出在第一状态下产生的第一状态来更新所述设定电平，其中来自所述发光传感器装置的元件被传感器装置的光接收元件接收而不被阻挡，并且（ii）传感器装置的第二输出对应于传感器装置的输出，如在第二状态下产生的，其中光接收光接收元件被完全阻挡。

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