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    • 14. 发明申请
    • Apparatus for processing surface of substrate
    • 用于处理衬底表面的设备
    • US20050284362A1
    • 2005-12-29
    • US11157522
    • 2005-06-21
    • Tae-Gyu KimTae-Sang Park
    • Tae-Gyu KimTae-Sang Park
    • B05C11/02B05C13/00H01L21/00H01L21/687
    • H01L21/68735H01L21/6715
    • A substrate surface processing apparatus is provided. In the substrate surface processing apparatus, a spin chuck holds a substrate thereon by suction, spins the substrate, and moves up and down the substrate. An upper bowl and a lower bowl surround the spin chuck for receiving a processing solution by which the surface of the substrate is processed. An air outlet is positioned under the lower bowl for exhausting air from the upper and lower bowls. A flow separation protrusion is formed within the upper bowl. It separates an air flow around the substrate into an upward air flow and a downward air flow and exhausts the downward air flow through the air outlet.
    • 提供了一种基板表面处理装置。 在基板表面处理装置中,旋转卡盘通过抽吸将基板保持在其上,旋转基板,并且在基板上上下移动。 上碗和下碗围绕旋转卡盘,用于接收处理溶液,通过该处理溶液处理基材的表面。 空气出口位于下碗下面,用于从上碗和下碗排出空气。 在上碗中形成流动分离突起。 它将基板周围的空气流分离成向上的空气流和向下的空气流,并排出通过出气口的向下空气流。
    • 20. 发明申请
    • Rotatable Battery Pack
    • 可旋转电池组
    • US20100143771A1
    • 2010-06-10
    • US12615406
    • 2009-11-10
    • Ji-young JEONGMeen-seon PaikTae-sang ParkTae-won Song
    • Ji-young JEONGMeen-seon PaikTae-sang ParkTae-won Song
    • H01M10/50
    • H01M10/6562H01M2/105H01M10/613H01M10/625H01M10/651H01M10/6561H01M10/6566
    • A rotatable battery pack having a first electrode plate and a second electrode plate disposed in parallel to each other and allowing a plurality of battery cells to be disposed between the first electrode plate and the second electrode plate; a casing enclosing the first electrode plate and the second electrode plate and having both ends opened so as to allow cooling air to flow in order to cool the plurality of battery cells; a first terminal protruding from a center of the first electrode plate to an outside of the casing; a second terminal protruding from a center of the second electrode plate to the outside of the casing in a direction opposite that of the first electrode; and a driving motor driving the first electrode plate to rotate the plurality of battery cells, wherein the first terminal and the second terminal are formed on a rotation axis of the first electrode plate.
    • 一种可旋转电池组,具有彼此平行设置的第一电极板和第二电极板,并且允许多个电池单元设置在第一电极板和第二电极板之间; 壳体,其包围第一电极板和第二电极板,并且其两端打开以允许冷却空气流动以便冷却多个电池单元; 从所述第一电极板的中心突出到所述壳体的外部的第一端子; 第二端子,从与所述第一电极的方向相反的方向从所述第二电极板的中心突出到所述壳体的外部; 以及驱动电动机驱动所述第一电极板以使所述多个电池单元旋转,其中所述第一端子和所述第二端子形成在所述第一电极板的旋转轴线上。