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11. 发明授权

US09021880B2 Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer 有权
标题翻译：微加工压电三轴陀螺仪和层叠横向重叠传感器（槽）三轴加速度计
公开(公告)号：US09021880B2
公开(公告)日：2015-05-05
申请号：US12930229
申请日：2010-12-30
申请人： Philip Jason Stephanou , Cenk Acar , Ravindra Vaman Shenoy , David William Burns , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi
发明人： Philip Jason Stephanou , Cenk Acar , Ravindra Vaman Shenoy , David William Burns , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi
IPC分类号： G01P15/125 , G01P15/18 , G01C25/00 , G01C19/5712 , G01C19/5747 , G01P15/08
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的计算机程序，用于制造和使用x轴陀螺仪，y轴陀螺仪，z轴陀螺仪，双轴加速度计和三轴加速度计。结合这样的装置的制造工艺可以使六个惯性感测轴在单个衬底（例如单个玻璃衬底）上的单片集成。这样的设备可以被包括在诸如移动显示设备的移动设备中。

12. 发明授权

US08884725B2 In-plane resonator structures for evanescent-mode electromagnetic-wave cavity resonators 有权
标题翻译：用于ev逝模式电磁波谐振腔谐振器的平面内谐振器结构
公开(公告)号：US08884725B2
公开(公告)日：2014-11-11
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01P7/06 , H01P1/205
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

13. 发明授权

US08824706B2 Piezoelectric microphone fabricated on glass 有权
标题翻译：压电麦克风在玻璃上制作
公开(公告)号：US08824706B2
公开(公告)日：2014-09-02
申请号：US13221676
申请日：2011-08-30
申请人： Philip Jason Stephanou , David William Burns
发明人： Philip Jason Stephanou , David William Burns
IPC分类号： H04R25/00 , C03C17/36 , H04R1/04 , C03C27/08 , C03C27/10 , H04R1/06 , H04R17/02 , H04R19/04 , H04R1/08 , H04R19/00
CPC分类号： C03C17/3639 , C03C27/08 , C03C27/10 , H04R1/04 , H04R1/06 , H04R1/086 , H04R17/025 , H04R19/005 , H04R19/04 , H04R2499/11 , H04R2499/15
摘要： This disclosure provides systems, methods and apparatus for glass-encapsulated microphones. In one aspect, a glass-encapsulated microphone may include a glass substrate, an electromechanical microphone device, an integrated circuit device, and a cover glass. The cover glass may be bonded to the glass substrate with an adhesive, such as epoxy, or a metal bond ring. The cover glass may have any of a number of configurations. In some configurations, the cover glass may define an aperture for the electromechanical microphone device at an edge of the glass-encapsulated microphone. In some configurations, the cover glass may define a cavity to accommodate the integrated circuit device that is separate from a cavity that accommodates the electromechanical microphone device.
摘要翻译：本公开提供了用于玻璃封装麦克风的系统，方法和装置。一方面，玻璃封装的麦克风可以包括玻璃基板，机电麦克风装置，集成电路装置和盖玻璃。覆盖玻璃可以用粘合剂如环氧树脂或金属结合环结合到玻璃基板上。盖玻璃可以具有多种构造中的任何一种。在一些配置中，盖玻璃可以在玻璃封装的麦克风的边缘处限定用于机电麦克风装置的孔。在一些配置中，盖玻璃可以限定空腔以容纳与容纳机电麦克风装置的空腔分开的集成电路装置。

14. 发明申请

US20140035935A1 PASSIVES VIA BAR 审中-公开
标题翻译：通过酒吧
公开(公告)号：US20140035935A1
公开(公告)日：2014-02-06
申请号：US13566925
申请日：2012-08-03
申请人： Ravindra V. Shenoy , Kwan-Yu Lai , Jon Bradley Lasiter , Jonghae Kim , Mario Francisco Velez , Chi Shun Lo , Donald William Kidwell , Philip Jason Stephanou , Justin Phelps Black , Evgeni Petrovich Gousev
发明人： Ravindra V. Shenoy , Kwan-Yu Lai , Jon Bradley Lasiter , Jonghae Kim , Mario Francisco Velez , Chi Shun Lo , Donald William Kidwell , Philip Jason Stephanou , Justin Phelps Black , Evgeni Petrovich Gousev
IPC分类号： H05K7/00 , H01F41/00 , G06T1/00 , H01L21/56 , H05K1/00 , H05K1/09 , H01R43/20 , H01L23/29
CPC分类号： H01L23/15 , H01L21/568 , H01L23/3128 , H01L23/49827 , H01L23/5389 , H01L24/19 , H01L24/96 , H01L2224/0401 , H01L2224/04105 , H01L2224/12105 , H01L2224/16227 , H01L2224/24195 , H01L2225/1023 , H01L2225/1058 , H01L2225/107 , H01L2924/12042 , H01L2924/12044 , H01L2924/1461 , H01L2924/15311 , H01L2924/15788 , H01L2924/181 , H01L2924/19041 , H01L2924/19105 , Y10T29/4902 , Y10T29/49117 , H01L2924/00 , H01L2924/00012
摘要： This disclosure provides systems, methods and apparatus for glass via bars that can be used in compact three-dimensional packages, including embedded wafer level packages. The glass via bars can provide high density electrical interconnections in a package. In some implementations, the glass via bars can include integrated passive components. Methods of fabricating glass via bars are provided. In some implementations, the methods can include patterning and etching photo-patternable glass substrates. Packaging methods employing glass via bars are also provided.
摘要翻译：本公开提供了可用于紧凑型三维封装（包括嵌入式晶片级封装）的玻璃通孔条的系统，方法和装置。玻璃通孔棒可以在封装中提供高密度电连接。在一些实施方案中，玻璃通孔棒可以包括集成的无源部件。提供制造玻璃通孔条的方法。在一些实施方案中，所述方法可以包括图案化和蚀刻可光图案化的玻璃基板。还提供了采用玻璃通孔条的包装方法。

15. 发明申请

US20130278998A1 IN-PLANE RESONATOR STRUCTURES FOR EVANESCENT-MODE ELECTROMAGNETIC-WAVE CAVITY RESONATORS 有权
标题翻译：用于EVANESCENT-MODE电磁波腔谐振器的平面内共振器结构
公开(公告)号：US20130278998A1
公开(公告)日：2013-10-24
申请号：US13451397
申请日：2012-04-19
申请人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
发明人： Philip Jason Stephanou , Sang-June Park , Ravindra V. Shenoy
IPC分类号： H01S3/086 , H01S3/08
CPC分类号： H01P1/2088 , H01P7/065
摘要： This disclosure provides implementations of electromechanical systems (EMS) resonator structures, devices, apparatus, systems, and related processes. In one aspect, a device includes an evanescent-mode electromagnetic-wave cavity resonator. In some implementations, the cavity resonator includes a lower cavity portion and an upper cavity portion that together form a volume. The cavity resonator also includes an in-plane lithographically-defined resonator structure having a portion that is located at least partially within the volume to support one or more evanescent electromagnetic wave modes. In some implementations, an upper surface of the resonator structure is connected with the upper cavity portion while a lower mating surface is connected with the lower cavity portion. A distal surface of the resonator structure is separated or electrically insulated from the closest surface to it by a gap distance, a resonant electromagnetic wave mode of the cavity resonator being dependent at least partially upon the gap distance.
摘要翻译：本公开提供了机电系统（EMS）谐振器结构，设备，装置，系统和相关过程的实现。在一个方面，一种器件包括ev逝模式电磁波谐振腔谐振器。在一些实施方案中，空腔谐振器包括一起形成体积的下部空腔部分和上部空腔部分。空腔谐振器还包括平面内光刻定义的谐振器结构，其具有至少部分位于体积内的部分，以支持一个或多个瞬逝电磁波模式。在一些实施方案中，谐振器结构的上表面与上空腔部分连接，而下配合表面与下腔体部分连接。谐振器结构的远端表面与距离其最近的表面分开或电绝缘间隙距离，空腔谐振器的谐振电磁波模式至少部分地取决于间隙距离。

16. 发明授权

US08516887B2 Micromachined piezoelectric z-axis gyroscope 有权
标题翻译：微加工压电z轴陀螺仪
公开(公告)号：US08516887B2
公开(公告)日：2013-08-27
申请号：US12930175
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/56
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a central anchor, a sense frame disposed around the central anchor, a plurality of sense beams configured for connecting the sense frame to the central anchor and a drive frame disposed around and coupled to the sense frame. The gyroscope may include pairs of drive beams disposed on opposing sides of the sense frame. The gyroscope may include a drive frame suspension for substantially restricting a drive motion of the drive frame to that of a substantially linear displacement along the first axis. The sense frame may be substantially decoupled from drive motions of the drive frame. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。这种陀螺仪可以包括中心锚固体，围绕中心锚固设置的感测框架，被配置用于将感测框架连接到中心锚固件的多个感测梁和设置在感测框架周围并耦合到感测框架的驱动框架。陀螺仪可以包括设置在感测框架的相对侧上的成对的驱动梁。陀螺仪可以包括驱动框架悬架，用于将驱动框架的驱动运动基本上限制为沿着第一轴线的基本上线性的位移。感测框架可以基本上与驱动框架的驱动运动分离。这样的设备可以被包括在诸如移动显示设备的移动设备中。

17. 发明授权

US08516886B2 Micromachined piezoelectric X-Axis gyroscope 有权
标题翻译：微加工压电X轴陀螺仪
公开(公告)号：US08516886B2
公开(公告)日：2013-08-27
申请号：US12930174
申请日：2010-12-30
申请人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
发明人： Cenk Acar , Ravindra Vaman Shenoy , Justin Phelps Black , Kurt Edward Petersen , Srinivasan Kodaganallur Ganapathi , Philip Jason Stephanou
IPC分类号： G01C19/56
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using gyroscopes. Such gyroscopes may include a sense frame, a proof mass disposed outside the sense frame, a pair of anchors and a plurality of drive beams. The plurality of drive beams may be disposed on opposing sides of the sense frame and between the pair of anchors. The drive beams may connect the sense frame to the proof mass. The drive beams may be configured to cause torsional oscillations of the proof mass substantially in a first plane of the drive beams. The sense frame may be substantially decoupled from the drive motions of the proof mass. Such devices may be included in a mobile device, such as a mobile display device.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用陀螺仪的计算机程序。这种陀螺仪可以包括检测框架，设置在感测框架外部的检测质量块，一对锚固件和多个驱动梁。多个驱动梁可以设置在感测框架的相对侧之间并且在一对锚固件之间。驱动梁可将感应框架连接到检测质量块。驱动梁可以被配置成基本上在驱动梁的第一平面中引起防弹块的扭转振荡。感测框架可以与证明质量块的驱动运动基本上分离。这样的设备可以被包括在诸如移动显示设备的移动设备中。

18. 发明申请

US20130181893A1 ELECTROSTATICALLY TRANSDUCED SENSORS COMPOSED OF PHOTOCHEMICALLY ETCHED GLASS 审中-公开
标题翻译：静电传感器组成的光电蚀刻玻璃
公开(公告)号：US20130181893A1
公开(公告)日：2013-07-18
申请号：US13449198
申请日：2012-04-17
申请人： Justin Phelps Black , Ravindra V. Shenoy , Jon Bradley Lasiter , Philip Jason Stephanou
发明人： Justin Phelps Black , Ravindra V. Shenoy , Jon Bradley Lasiter , Philip Jason Stephanou
IPC分类号： G06T1/00 , H05K3/00 , G06F3/01 , G01L1/10 , G06F3/038
CPC分类号： B81B3/0021 , B81B2201/033 , B81B2201/047 , G02B26/001 , G02B26/0841 , H02N1/008
摘要： This disclosure provides systems, methods and apparatus for glass electromechanical systems (EMS) electrostatic devices. In one aspect, a glass EMS electrostatic device includes sidewall electrodes. Structural components of a glass EMS electrostatic device such as stationary support structures, movable masses, coupling flexures, and sidewall electrode supports, can be formed from a single glass body. The glass body can be a photochemically etched. In some implementations, pairs of sidewall electrodes can be arranged in interdigitated comb or parallel plate configurations and can include plated metal layers and narrow capacitive gap spacing.
摘要翻译：本公开提供了用于玻璃机电系统（EMS）静电装置的系统，方法和装置。一方面，玻璃EMS静电装置包括侧壁电极。可以由单个玻璃体形成诸如固定支撑结构，可移动质量块，耦合弯曲部和侧壁电极支架的玻璃EMS静电装置的结构部件。玻璃体可以光化学蚀刻。在一些实施方式中，侧壁电极对可以以叉指梳状或平行板结构布置，并且可以包括电镀金属层和窄电容间隙。

19. 发明申请

US20130051587A1 PIEZOELECTRIC MICROPHONE FABRICATED ON GLASS 有权
标题翻译：玻璃上的压电麦克风
公开(公告)号：US20130051587A1
公开(公告)日：2013-02-28
申请号：US13221791
申请日：2011-08-30
申请人： Philip Jason STEPHANOU , David William BURNS
发明人： Philip Jason STEPHANOU , David William BURNS
IPC分类号： H04R17/02 , H01L41/22
CPC分类号： H04R17/02 , G01H11/08 , G01L1/16 , H01L41/04 , H04R1/222 , H04R7/24 , H04R19/04 , H04R23/02 , H04R31/00 , H04R2201/003 , H04R2499/11 , H04R2499/15 , Y10T29/42
摘要： This disclosure provides systems, methods and apparatus for sense elements in an electromechanical microphone device. In one aspect, a piezoelectric sense element may include a glass substrate, electrode layers, piezoelectric layers, and elastic layers. The elastic layers may serve to modify the neutral plane of the piezoelectric sense element. Including an elastic layer or layers to modify the neutral plane of the piezoelectric sense element may serve to configure the sense element such that the piezoelectric layer generates a voltage in response to a sound wave or may serve to increase the sensitivity of the sense element.
摘要翻译：本公开提供了用于机电麦克风装置中的感测元件的系统，方法和装置。一方面，压电感测元件可以包括玻璃基板，电极层，压电层和弹性层。弹性层可用于改变压电感测元件的中性平面。包括用于改变压电感测元件的中性平面的弹性层可以用于构造感测元件，使得压电层响应于声波产生电压或者可以用于增加感测元件的灵敏度。

20. 发明授权

US09032796B2 Stacked lateral overlap transducer (SLOT) based three-axis accelerometer 有权
标题翻译：基于叠加横向重叠传感器（SLOT）的三轴加速度计
公开(公告)号：US09032796B2
公开(公告)日：2015-05-19
申请号：US12930187
申请日：2010-12-30
申请人： Philip Jason Stephanou , David William Burns , Ravindra Vaman Shenoy
发明人： Philip Jason Stephanou , David William Burns , Ravindra Vaman Shenoy
IPC分类号： G01P15/125 , G01P15/18 , G01C25/00 , G01C19/5712 , G01C19/5747 , G01P15/08
CPC分类号： G01C19/5769 , G01C19/5712 , G01C19/5719 , G01C19/5747 , G01C25/00 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/082 , H01L41/25 , H01L41/311 , H01L41/312 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49155
摘要： This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using accelerometers. Some such accelerometers include a substrate, a first plurality of electrodes, a second plurality of electrodes, a first anchor attached to the substrate, a frame and a proof mass. The substrate may extend substantially in a first plane. The proof mass may be attached to the frame, may extend substantially in a second plane and may be substantially constrained for motion along first and second axes. The frame may be attached to the first anchor, may extend substantially in a second plane and may be substantially constrained for motion along the second axis. A lateral movement of the proof mass in response to an applied lateral acceleration along the first or second axes may result in a change in capacitance at the first or second plurality of electrodes.
摘要翻译：本公开提供了系统，方法和装置，包括在计算机存储介质上编码的用于制造和使用加速度计的计算机程序。一些这样的加速度计包括基板，第一多个电极，第二多个电极，附接到基板的第一锚固件，框架和检验块。衬底可以基本上在第一平面中延伸。检测块可以附接到框架，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第一和第二轴线的运动。框架可以附接到第一锚固件，可以基本上在第二平面中延伸，并且可以基本上被约束用于沿着第二轴线的运动。响应于沿着第一或第二轴的施加的横向加速度，检测质量块的横向移动可能导致第一或第二多个电极处的电容变化。

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