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    • 11. 发明授权
    • Workpiece carrier device
    • 工件载体装置
    • US08783673B2
    • 2014-07-22
    • US14018118
    • 2013-09-04
    • Oerlikon Trading AG, Trubbach
    • Stefan EsserMartin Zaech
    • B23Q1/25B23Q1/64C23C14/50C23C16/458F16H21/14
    • B23Q1/64C23C14/505C23C16/458F16H21/14
    • A workpiece carrier has a base frame, a shaft surrounding a drive axis and a workpiece carrier and includes a rotary frame mounted on the base frame so as to be rotatable about the drive axis, workpiece holders mounted on the rotary frame so as to be rotatable about holding axes, a driving part with a holder mounted so as to be rotatable about the drive axis, a transmission part operationally connected to the rotatably mounted workpiece holders, and an intermediate gear attached to the rotatably mounted holder. The intermediate gear is connected to the shaft and to the transmission part in such a way that the transmission part engages with the driving part so as to be rotatable about an output point that is spaced apart from the drive axis by an eccentricity.
    • 工件托架具有基座框架,围绕驱动轴线的轴和工件托架,并且包括安装在基架上的旋转框架,以便绕驱动轴线旋转,安装在旋转框架上的工件保持架可旋转 关于保持轴,具有安装成能够围绕驱动轴线旋转的保持器的驱动部,与可旋转地安装的工件保持器可操作地连接的传动部,以及附接到可旋转地安装的保持器的中间齿轮。 中间齿轮以这样的方式连接到轴和传动部分,使得传动部分与驱动部分接合,以便能够围绕与驱动轴线间隔开的偏心的输出点旋转。
    • 20. 发明申请
    • LOW TEMPERATURE ARC ION PLATING COATING
    • 低温电弧镀层
    • US20150001064A1
    • 2015-01-01
    • US14367414
    • 2012-12-14
    • Oerlikon Trading AG, Trubbach
    • Siegfried KrassnitzerDenis KurapovMarkus Lechthaler
    • C23C14/34
    • Coating method for arc coating or arc ion plating coating of substrates in a vacuum chamber in which using an arc evaporator solid material that functions as cathode is evaporated, during arc evaporation the motion of the cathode spot on the solid material surface is accelerated using a magnetic field for avoiding ejection of a large amount of macro-particles or droplets from the solid material surface, negative charged particles resulted from the arc evaporation flow from the cathode to an anode, characterized by the motion of the negative charged particles from the cathode to the anode fundamentally doesn't cause an additional increase of the absolute value of the potential difference between cathode and anode allowing a lower increment of the substrate temperature during coating.
    • 在电弧蒸发期间,使用用作阴极的电弧蒸发器固体材料的真空室中的基板的电弧涂覆或电弧离子镀覆涂覆方法被蒸发,阴极点在固体材料表面上的运动使用磁 场,用于避免从固体材料表面喷射大量的大颗粒或液滴,由从阴极到阳极的电弧蒸发流产生的负带电粒子,其特征在于负电荷粒子从阴极到 阳极基本上不会导致阴极和阳极之间的电位差的绝对值的额外增加,从而允许涂层期间衬底温度的增加较小。